EfemHomeRoutine.cs 9.6 KB

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  1. using Aitex.Core.RT.Routine;
  2. using Aitex.Core.RT.SCCore;
  3. using Aitex.Sorter.Common;
  4. using CyberX8_RT.Devices;
  5. using MECF.Framework.Common.Routine;
  6. using MECF.Framework.Common.Equipment;
  7. using MECF.Framework.Common.SubstrateTrackings;
  8. using CyberX8_Core;
  9. using Aitex.Core.RT.Log;
  10. using Aitex.Core.Common;
  11. using Aitex.Core.Util;
  12. using MECF.Framework.Common.Schedulers;
  13. using System.Collections.Generic;
  14. using CyberX8_RT.Devices.EFEM;
  15. using MECF.Framework.Common.Utilities;
  16. namespace CyberX8_RT.Modules.EFEM
  17. {
  18. class EfemHomeRoutine : ModuleRoutineBase, IRoutine
  19. {
  20. private enum HomeStep
  21. {
  22. PowerOn,
  23. SetHomeSpeed,
  24. CheckVacuum,
  25. InitAligner,
  26. HomeAll,
  27. CheckWaferPresence,
  28. DummyMap,
  29. CheckDummyMap,
  30. SetRobotSpeed,
  31. End,
  32. }
  33. private enum HomeModuleStep
  34. {
  35. SetHomeSpeed,
  36. Home,
  37. HomeAxes,
  38. SetRobotSpeed,
  39. End,
  40. }
  41. private int _homeTimeout = 30 * 1000;
  42. ModuleName _targetModule;
  43. EfemBase _efem;
  44. int _defaultSpeed = SC.GetValue<int>("EFEM.DefaultMoveSpeedInPercent");
  45. int _homeSpeed = SC.GetValue<int>("EFEM.DefaultHomeSpeedInPercent");
  46. bool _isLP1Unable = SC.GetValue<bool>("EFEM.IsLoadPort1Unable");
  47. bool _isLP2Unable = SC.GetValue<bool>("EFEM.IsLoadPort2Unable");
  48. bool _isLP3Unable = SC.GetValue<bool>("EFEM.IsLoadPort3Unable");
  49. double _chuckVacuumIsValid = SC.GetValue<double>("EFEM.ChuckVacuumIsValid");
  50. private Hand _hand = Hand.Blade1;
  51. private EfemMapDummyRoutine _mapDummyRoutine;
  52. public EfemHomeRoutine(EfemBase efem) : base(ModuleName.EfemRobot)
  53. {
  54. _efem = efem;
  55. _mapDummyRoutine = new EfemMapDummyRoutine(efem);
  56. }
  57. public RState Start(params object[] objs)
  58. {
  59. if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, (int)_hand))
  60. {
  61. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Efem robot arm{_hand} already has a wafer, cannot do the home action");
  62. return RState.Failed;
  63. }
  64. _isLP1Unable = SC.GetValue<bool>("EFEM.IsLoadPort1Unable");
  65. _isLP2Unable = SC.GetValue<bool>("EFEM.IsLoadPort2Unable");
  66. _isLP3Unable = SC.GetValue<bool>("EFEM.IsLoadPort3Unable");
  67. _defaultSpeed = SC.GetValue<int>("EFEM.DefaultMoveSpeedInPercent");
  68. _homeSpeed = SC.GetValue<int>("EFEM.DefaultHomeSpeedInPercent");
  69. _targetModule = (ModuleName)objs[0];
  70. _homeTimeout = SC.GetValue<int>($"EFEM.HomeTimeout") * 1000;
  71. _chuckVacuumIsValid = SC.GetValue<double>("EFEM.ChuckVacuumIsValid");
  72. return Runner.Start(Module, $"Home {_targetModule}");
  73. }
  74. public RState Monitor()
  75. {
  76. if(_targetModule == ModuleName.EFEM)
  77. {
  78. Runner.Run(HomeStep.PowerOn, PowerOn, IsStepComplete, _delay_5s)
  79. .Run(HomeStep.SetHomeSpeed, SetHomeSpeed, IsStepComplete, _delay_5s)
  80. .Run(HomeStep.CheckVacuum,CheckVacuumIsValid,_delay_1ms)
  81. .Run(HomeStep.InitAligner, HomeAligner, IsStepComplete, _homeTimeout)
  82. .Run(HomeStep.HomeAll, HomeAll, IsStepComplete, _homeTimeout)
  83. .Run(HomeStep.CheckWaferPresence, CheckWaferPresence, VerifyWaferPresence, _delay_5s)
  84. .Run(HomeStep.DummyMap, StartMapDummy,_delay_1ms)
  85. .WaitWithStopCondition(HomeStep.CheckDummyMap,()=>CommonFunction.CheckRoutineEndState(_mapDummyRoutine),
  86. ()=>CommonFunction.CheckRoutineStopState(_mapDummyRoutine))
  87. .Run(HomeStep.SetRobotSpeed, SetRobotSpeed, IsStepComplete, _delay_5s)
  88. .End(HomeStep.End, NullFun, _delay_1ms);
  89. }
  90. else
  91. {
  92. Runner.Run(HomeStep.PowerOn, PowerOn, IsStepComplete, _delay_5s)
  93. .Run(HomeModuleStep.SetHomeSpeed, SetHomeSpeed, IsStepComplete, _delay_5s)
  94. .Run(HomeModuleStep.Home, HomeModule, IsStepComplete, _homeTimeout)
  95. .Run(HomeModuleStep.SetRobotSpeed, SetRobotSpeed, IsStepComplete, _delay_5s)
  96. .End(HomeModuleStep.End, NullFun, _delay_50ms);
  97. }
  98. return Runner.Status;
  99. }
  100. private bool CheckVacuumIsValid()
  101. {
  102. EfemEntity efemEntity = Singleton<RouteManager>.Instance.EFEM;
  103. double vacuumValue = efemEntity.VacuumValue;
  104. bool result = vacuumValue < _chuckVacuumIsValid;
  105. if (!result)
  106. {
  107. LOG.WriteLog(eEvent.ERROR_EFEM_VAC, Module.ToString(), $"Vacumm {vacuumValue} is over {_chuckVacuumIsValid}");
  108. }
  109. return result;
  110. }
  111. private bool StartMapDummy()
  112. {
  113. return _mapDummyRoutine.Start() == RState.Running;
  114. }
  115. public void Abort()
  116. {
  117. }
  118. private bool IsStepComplete()
  119. {
  120. if (_efem.Status == RState.End)
  121. {
  122. return true;
  123. }
  124. else if (_efem.Status == RState.Failed)
  125. {
  126. Runner.Stop($"Efem home failed: {_efem.Status}");
  127. return true;
  128. }
  129. else
  130. return false;
  131. }
  132. private bool HomeAll()
  133. {
  134. return _efem.HomeAll();
  135. }
  136. private bool HomeAligner()
  137. {
  138. return _efem.Home(ModuleName.Aligner1);
  139. }
  140. private bool HomeModule()
  141. {
  142. return _efem.Home(_targetModule);
  143. }
  144. private bool CheckWaferPresence()
  145. {
  146. return _efem.CheckWaferPresence();
  147. }
  148. private bool PowerOn()
  149. {
  150. return _efem.RobotPowerOn(ModuleName.EfemRobot, true);
  151. }
  152. private bool SetHomeSpeed()
  153. {
  154. return _efem.SetRobotSpeed(ModuleName.EfemRobot, _homeSpeed);
  155. }
  156. private bool SetRobotSpeed()
  157. {
  158. return _efem.SetRobotSpeed(ModuleName.EfemRobot, _defaultSpeed);
  159. }
  160. private bool VerifyWaferPresence()
  161. {
  162. if (_efem.Status == RState.End)
  163. {
  164. var waferPresence = _efem.GetWaferPresence();
  165. //000/111 upperArmWafer, lowerArmWafer, alignerWafer1,
  166. //if (waferPresence.Length != 3)
  167. //{
  168. // LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"EFEM Track wafer present return invalid value, Wafer Presence:{waferPresence}, should be 3 characters");
  169. // return false;
  170. //}
  171. //aligner2
  172. //if (waferPresence[3] == '1')
  173. //{
  174. // if (WaferManager.Instance.CheckNoWafer(ModuleName.Aligner2, 0))
  175. // {
  176. // WaferManager.Instance.CreateWafer(ModuleName.Aligner2, 0, WaferStatus.Normal);
  177. // }
  178. //}
  179. //else
  180. //{
  181. // if (WaferManager.Instance.CheckHasWafer(ModuleName.Aligner2, 0))
  182. // {
  183. // LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Aligner2} has wafer information, while EFEM return empty, manually delete if really no wafer");
  184. // }
  185. //}
  186. //cooling1
  187. //if (waferPresence[4] == '1')
  188. //{
  189. // if (WaferManager.Instance.CheckNoWafer(ModuleName.Cooling1, 0))
  190. // {
  191. // WaferManager.Instance.CreateWafer(ModuleName.Cooling1, 0, WaferStatus.Normal);
  192. // }
  193. //}
  194. //else
  195. //{
  196. // if (WaferManager.Instance.CheckHasWafer(ModuleName.Cooling1, 0))
  197. // {
  198. // LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Cooling1} has wafer information, while EFEM return empty, manually delete if really no wafer");
  199. // }
  200. //}
  201. //cooling2
  202. //if (waferPresence[5] == '1')
  203. //{
  204. // if (WaferManager.Instance.CheckNoWafer(ModuleName.Cooling2, 0))
  205. // {
  206. // WaferManager.Instance.CreateWafer(ModuleName.Cooling2, 0, WaferStatus.Normal);
  207. // }
  208. //}
  209. //else
  210. //{
  211. // if (WaferManager.Instance.CheckHasWafer(ModuleName.Cooling2, 0))
  212. // {
  213. // LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Cooling2} has wafer information, while EFEM return empty, manually delete if really no wafer");
  214. // }
  215. //}
  216. return true;
  217. }
  218. else if (_efem.Status == RState.Failed||_efem.Status==RState.Timeout)
  219. {
  220. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Efem StateTrack failed: {_efem.Status}");
  221. return false;
  222. }
  223. else
  224. return false;
  225. }
  226. }
  227. }