CyberX8/CyberX8_RT/Devices/EFEM/SunWayEfem.cs

using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading.Tasks;
using System.Collections;
using CyberX8_Core;
using CyberX8_RT.Modules;
using MECF.Framework.Common.CommonData;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.SubstrateTrackings;
using Aitex.Sorter.Common;
using Aitex.Core.Common;
using Aitex.Core.RT.SCCore;
using Aitex.Core.RT.Log;
using Aitex.Core.Util;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
using CyberX8_RT.Devices.YASKAWA;
using System.Collections.Concurrent;
using System.Diagnostics;
using System.Data.SqlTypes;
using System.Windows.Media.Media3D;
using System.ComponentModel;

namespace CyberX8_RT.Devices.EFEM
{
    public class SunWayEfem : EfemBase
    {
        #region 常量
        private const string NONE = "None";
        #endregion
        private RState _status;
        private bool _IsHomed;
        private bool _bIsUnloadClamp;
        private RobotMoveInfo _robotMoveInfo = new RobotMoveInfo();
        private readonly Loadport[] _LPMs = new Loadport[3];
        private readonly SignalTower _signalT = new SignalTower();
        private readonly AsyncSocket _socket;
        private EfemMessage _currentMsg;
        private EfemMessage _revMsg;
        private string _error;
        private bool _LiftIsUp = false;
        private bool _LiftIsDown = false;
        private R_TRIG _busyTrig = new R_TRIG();
        private Stopwatch _busyWatch = new Stopwatch();
        private bool _isComm;

        public override RState Status
        {
            get
            {
                _busyTrig.CLK = _status == RState.Running;
                if (_busyTrig.Q)
                {
                    _busyWatch.Restart();
                }
                else if (_busyTrig.M)
                {
                    int timeOut = 5000;
                    if(_currentMsg.Operation==EfemOperation.Home||_currentMsg.Operation==EfemOperation.Load||
                        _currentMsg.Operation==EfemOperation.Map)
                    {
                        timeOut = 30000;
                    }
                    if (_busyWatch.ElapsedMilliseconds > timeOut)
                    {
                        _busyWatch.Stop();
                        _status = RState.Timeout;
                    }
                }

                return _status;
            }
        }
        public override bool IsHomed { get { return _IsHomed; } }
        public override RobotMoveInfo TMRobotMoveInfo { get { return _robotMoveInfo; } }

        public override ILoadport this[ModuleName mod]
        {
            get
            {
                if (!ModuleHelper.IsLoadPort(mod))
                    throw new ApplicationException($"{mod} is NOT Loadport");

                return _LPMs[mod - ModuleName.LP1];
            }
        }

        public override bool LiftIsUp { get { return _LiftIsUp; } }
        public override bool LiftIsDown { get { return _LiftIsDown; } }

        private BlockingCollection<RobotAnimationData> blockingCollection = new BlockingCollection<RobotAnimationData>();

        private string _address = "";

        public SunWayEfem()
        {
            _socket = new AsyncSocket("","\r",DataType.Ascii,true);
            try
            {
                _address = SC.GetStringValue($"EFEM.IPAddress");
                _socket.Connect(_address);
                _socket.OnConnect += Socket_OnConnect;
                _socket.OnDataChanged += OnReceiveMessage;
                _socket.OnErrorHappened += OnErrorHappen;
            }
            catch(Exception ex)
            {
                LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, "EFEM", ex.Message);
            }

            _status = RState.Init;
            _IsHomed = false;
            _busyTrig.RST = true;
            _isComm = false;

            _LPMs[0] = new Loadport(ModuleName.LP1, this);
            _LPMs[1] = new Loadport(ModuleName.LP2, this);
            _LPMs[2] = new Loadport(ModuleName.LP3, this);


            CarrierManager.Instance.SubscribeLocation(ModuleName.LP1.ToString(), 1);
            CarrierManager.Instance.SubscribeLocation(ModuleName.LP2.ToString(), 1);
            CarrierManager.Instance.SubscribeLocation(ModuleName.LP3.ToString(), 1);

            WaferManager.Instance.SubscribeLocation(ModuleName.EfemRobot, 2);
            WaferManager.Instance.SubscribeLocation(ModuleName.Aligner1, 1);
            WaferManager.Instance.SubscribeLocation(ModuleName.LP1, SC.GetValue<int>("EFEM.LoadPort.SlotNumber"));
            WaferManager.Instance.SubscribeLocation(ModuleName.LP2, SC.GetValue<int>("EFEM.LoadPort.SlotNumber"));
            WaferManager.Instance.SubscribeLocation(ModuleName.LP3, SC.GetValue<int>("EFEM.LoadPort.SlotNumber"));
            Task.Run(() =>
            {
                foreach (var data in blockingCollection.GetConsumingEnumerable())
                {
                    _robotMoveInfo.Action = data.Action;
                    _robotMoveInfo.ArmTarget = data.Hand == Hand.Blade1 ? RobotArm.ArmA : (data.Hand == Hand.Both ? RobotArm.Both : RobotArm.ArmB);
                    _robotMoveInfo.BladeTarget = $"{_robotMoveInfo.ArmTarget}.{data.Target}";
                    System.Threading.Thread.Sleep(600);
                }
            });
        }

        private void Socket_OnConnect()
        {
            LOG.WriteBackgroundLog(eEvent.EV_EFEM_COMMON_INFO, Module.ToString(), $"connect {_address} success");
        }

        public override void Monitor()
        {
        }
        public override void Terminate()
        {

        }
        public override void Reset()
        {
            _status = RState.End;
        }
        public override void SetOnline(bool online)
        {

        }
        public override void SetOnline(ModuleName mod, bool online)
        {

        }

        public override void SetBusy(ModuleName mod, bool online)
        {
            _status = RState.Running;
        }

        public override bool HomeAll()
        {
            if (_status == RState.Running&&_currentMsg!=null)
            {
                LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"Current Msg {_currentMsg.Operation} is Running,cannot home All");
                return false;
            }
            //判断socket是否链接
            if (!_socket.IsConnected) 
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false ;
            }
            //判断机台是否准备就绪
            if (!_isComm)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_NOREADY, Module.ToString(), "No \"CommReady\" Message Received,Cannot Execute Action");
                return false;
            }

            _currentMsg = new EfemMessage
            {
                Module = ModuleName.EFEM,
                Operation = EfemOperation.Home,
                Head = EfemMessage.MsgHead.MOV,
                Parameters = new List<string> { SunWayMessageHandler.Instance.ModuleString[ModuleName.EFEM] }
            };

            _status = RState.Running;
            string data = _currentMsg.ToString();
            SetRobotMovingInfo(RobotAction.Homing, Hand.Both, ModuleName.EFEM);
            return _socket.Write(data);
        }

        public override bool Home(ModuleName mod)
        {
            if (_status == RState.Running && _currentMsg != null)
            {
                LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"Current Msg {_currentMsg.Operation} is Running,cannot home {mod}");
                return false;
            }
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            //判断机台是否准备就绪
            if (!_isComm)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_NOREADY, Module.ToString(), "No \"CommReady\" Message Received,Cannot Execute Action");
                return false;
            }

            _currentMsg = new EfemMessage
            {
                Module = mod,
                Operation = EfemOperation.Home,
                Head = EfemMessage.MsgHead.MOV,
                Parameters = new List<string> { SunWayMessageHandler.Instance.ModuleString[mod] }
            };
            if(mod == ModuleName.EfemRobot) SetRobotMovingInfo(RobotAction.Homing, Hand.Blade1, ModuleName.EfemRobot);
            _status = RState.Running;            
            return _socket.Write(_currentMsg.ToString());
        }

        public override bool OriginalSearch(ModuleName mod)
        {
            return true;
        }

        public override bool CheckWaferPresence()
        {
            if (!CheckEfemStatus())
                return false;

            _currentMsg = new EfemMessage
            {
                Module = ModuleName.EFEM,
                Operation = EfemOperation.StateTrack,
                Head = EfemMessage.MsgHead.GET,
                Parameters = new List<string> { "TRACK" }
            };

            _status = RState.Running;
            return _socket.Write(_currentMsg.ToString());
        }

        public override string GetWaferPresence()
        {
            return "";
        }

        public override bool Halt()
        {
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            _currentMsg = new EfemMessage
            {
                Module = ModuleName.EFEM,
                Operation = EfemOperation.Abort,
                Head = EfemMessage.MsgHead.MOV,
            };
            return _socket.Write(_currentMsg.ToString());
        }

        public override bool ClearError()
        {
            //判断机台是否准备就绪
            if (!_isComm)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_NOREADY, Module.ToString(), "No \"CommReady\" Message Received,Cannot Execute Action");
                return false;
            }
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            _currentMsg = new EfemMessage
            {
                Module = ModuleName.EFEM,
                Operation = EfemOperation.ClearError,
                Head = EfemMessage.MsgHead.SET,
                Parameters = new List<string> { "CLEAR" }
            };
            _status = RState.Running;
            return _socket.Write(_currentMsg.ToString());
        }

        public override bool CloseBuzzer()
        {
            //判断机台是否准备就绪
            if (!_isComm)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_NOREADY, Module.ToString(), "No \"CommReady\" Message Received,Cannot Execute Action");
                return false;
            }
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            _currentMsg = new EfemMessage
            {
                Module = ModuleName.EFEM,
                Operation = EfemOperation.Light,
                Head = EfemMessage.MsgHead.SET,
                Parameters = new List<string> { Constant.STOWER, LightType.BUZZER1.ToString(), "OFF" }
            };

            _status = RState.Running;
            return _socket.Write(_currentMsg.ToString());
        }

        public override bool PickExtend(ModuleName chamber, int slot, Hand hand)
        {
            LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support {EfemConstant.OperationString[EfemOperation.Extend]}");
            return false;
        }
        public override bool PickRetract(ModuleName chamber, int slot, Hand hand)
        {
            LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support {EfemConstant.OperationString[EfemOperation.Extend]}");
            return false;
        }
        public override bool PlaceExtend(ModuleName chamber, int slot, Hand hand)
        {
            LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support {EfemConstant.OperationString[EfemOperation.Extend]}");
            return false;
        }

        public override bool PlaceRetract(ModuleName chamber, int slot, Hand hand)
        {
            LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support {EfemConstant.OperationString[EfemOperation.Extend]}");
            return false;
        }

        public override bool SetAlignWaferSize()
        {
            LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support aligner wafer size");
            return false;
        }
        public override bool SetAlignFlatType(int flatType)
        {
            LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support aligner flat type");
            return false;
        }
        public override bool SetAlignDistance()
        {
            LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support aligner distance");
            return false;
        }
        public override bool GotoMap(ModuleName mod, Hand hand,string extend="EX")
        {
            LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support GotoMap");
            return false;
        }

        public override bool RequestMapResult(ModuleName mod)
        {
            LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support RequestMapResult");
            return false;
        }
        public override bool Pick(ModuleName station, int slot, Hand hand)
        {
            //判断机台是否准备就绪
            if (!_isComm)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_NOREADY, Module.ToString(), "No \"CommReady\" Message Received,Cannot Execute Action");
                return false;
            }
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            //判断Loadport的门是否打开
            if (ModuleHelper.IsLoadPort(station) && !_LPMs[station - ModuleName.LP1].IsDoorOpened)
            {
                LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"{station}'s Door is Closed, Cannot Execute Pick Action");
                return false;
            }

            if (!CheckEfemStatus())
                return false;

            Position SrcPos = new Position { Module = station, Slot = (byte)slot };
            _currentMsg = new EfemMessage
            {
                Operation = EfemOperation.Pick,
                Head = EfemMessage.MsgHead.MOV,
                Parameters = new List<string>
                {
                    SunWayMessageHandler.Instance.ToHWString(SrcPos),
                    SunWayMessageHandler.Instance.ArmString[hand]
                }
            };

            _status = RState.Running;
            SetRobotMovingInfo(RobotAction.Picking, hand, station);
            return _socket.Write(_currentMsg.ToString());
        }

        public override bool Place(ModuleName station, int slot, Hand hand)
        {
            //判断机台是否准备就绪
            if (!_isComm)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_NOREADY, Module.ToString(), "No \"CommReady\" Message Received,Cannot Execute Action");
                return false;
            }
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            //判断Loadport的门是否打开
            if (ModuleHelper.IsLoadPort(station) && !_LPMs[station - ModuleName.LP1].IsDoorOpened)
            {
                LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"{station}'s Door is Closed, Cannot Execute Pick Action");
                return false;
            }

            if (!CheckEfemStatus())
                return false;

            Position DestPos = new Position { Module = station, Slot = (byte)slot };
            _currentMsg = new EfemMessage
            {
                Operation = EfemOperation.Place,
                Head = EfemMessage.MsgHead.MOV,
                Parameters = new List<string>
                {
                    SunWayMessageHandler.Instance.ToHWString(DestPos),
                    SunWayMessageHandler.Instance.ArmString[hand]
                }
            };

            _status = RState.Running;
            SetRobotMovingInfo(RobotAction.Placing, hand, station);
            return _socket.Write(_currentMsg.ToString());
        }


        public override bool Goto(ModuleName station, Hand hand, string updown = "UP")
        {
            if (!CheckEfemStatus())
                return false;
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            Position DestPos = new Position { Module = station, Slot = (byte)0 };
            _currentMsg = new EfemMessage
            {
                Operation = EfemOperation.Goto,
                Head = EfemMessage.MsgHead.MOV,
                Parameters = new List<string>
                {
                    SunWayMessageHandler.Instance.ToHWString(DestPos),
                    SunWayMessageHandler.Instance.ArmString[hand],
                    updown
                }
            };

            _status = RState.Running;
            return _socket.Write(_currentMsg.ToString());
        }

        public override bool Grip(Hand blade, bool isGrip)
        {
            LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support {EfemConstant.OperationString[EfemOperation.Grip]}");
            return false;
        }

        public override bool Map(ModuleName mod)
        {
            //判断机台是否准备就绪
            if (!_isComm)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_NOREADY, Module.ToString(), "No \"CommReady\" Message Received,Cannot Execute Action");
                return false;
            }
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            if (!CheckEfemStatus())
                return false;

            _currentMsg = new EfemMessage
            {
                Operation = EfemOperation.Map,
                Head = EfemMessage.MsgHead.MOV,
                Parameters = new List<string> { SunWayMessageHandler.Instance.ModuleString[mod] }
            };

            _status = RState.Running;
            return _socket.Write(_currentMsg.ToString());
        }

        public override bool Vacuum(ModuleName mod,bool VacuumState)
        {
            //判断机台是否准备就绪
            if (!_isComm)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_NOREADY, Module.ToString(), "No \"CommReady\" Message Received,Cannot Execute Action");
                return false;
            }
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            string strVacuum = VacuumState ? "ON" : "OFF";
            _currentMsg = new EfemMessage
            {
                Operation = EfemOperation.Vacuum,
                Head = EfemMessage.MsgHead.MOV,
                Parameters = new List<string> { SunWayMessageHandler.Instance.ModuleString[mod],strVacuum }
            };

            _status = RState.Running;
            return _socket.Write(_currentMsg.ToString());
        }

        public override bool GetWaferSize(ModuleName mod)
        {
            if (!CheckEfemStatus())
                return false;

            //判断机台是否准备就绪
            if (!_isComm)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_NOREADY, Module.ToString(), "No \"CommReady\" Message Received,Cannot Execute Action");
                return false;
            }
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            _currentMsg = new EfemMessage
            {
                Operation = EfemOperation.Size,
                Head = EfemMessage.MsgHead.GET,
                Parameters = new List<string> { SunWayMessageHandler.Instance.ModuleString[mod] }
            };

            _status = RState.Running;
            return _socket.Write(_currentMsg.ToString());
        }

        public override bool SetWaferSize(ModuleName mod, int WaferSize)
        {
            if (!CheckEfemStatus())
                return false;

            //判断机台是否准备就绪
            if (!_isComm)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_NOREADY, Module.ToString(), "No \"CommReady\" Message Received,Cannot Execute Action");
                return false;
            }
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            _currentMsg = new EfemMessage
            {
                Operation = EfemOperation.Size,
                Head = EfemMessage.MsgHead.SET,
                Parameters = new List<string> { SunWayMessageHandler.Instance.ModuleString[mod], WaferSize.ToString() }
            };

            _status = RState.Running;
            return _socket.Write(_currentMsg.ToString());
        }

        public override bool SetPinUp(ModuleName mod)
        {
            LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support {EfemConstant.OperationString[EfemOperation.Lift]}");
            return false;
        }

        public override bool SetPinDown(ModuleName mod)
        {
            LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support {EfemConstant.OperationString[EfemOperation.Lift]}");
            return false;
        }

        public override bool SetAlignAngle(ModuleName mod, double angle)
        {
            if (!CheckEfemStatus())
                return false;

            //判断机台是否准备就绪
            if (!_isComm)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_NOREADY, Module.ToString(), "No \"CommReady\" Message Received,Cannot Execute Action");
                return false;
            }
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            _currentMsg = new EfemMessage
            {
                Operation = EfemOperation.Align,
                Head = EfemMessage.MsgHead.SET,
                Parameters = new List<string>
                {
                    SunWayMessageHandler.Instance.ModuleString[mod], 
                    angle.ToString("000.00")
                }
            };

            _status = RState.Running;
            return _socket.Write(_currentMsg.ToString());
        }

        public override bool SetRobotSpeed(ModuleName mod, int speed)
        {
            if (!CheckEfemStatus())
                return false;

            //判断机台是否准备就绪
            if (!_isComm)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_NOREADY, Module.ToString(), "No \"CommReady\" Message Received,Cannot Execute Action");
                return false;
            }
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            _currentMsg = new EfemMessage
            {
                Operation = EfemOperation.Speed,
                Head = EfemMessage.MsgHead.SET,
                Parameters = new List<string>
                {
                    SunWayMessageHandler.Instance.ModuleString[mod],
                    speed.ToString()
                }
            };
            _status = RState.Running;
            return _socket.Write(_currentMsg.ToString());
        }

        public override bool RobotPowerOn(ModuleName mod, bool Status)
        {
            //判断机台是否准备就绪
            if (!_isComm)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_NOREADY, Module.ToString(), "No \"CommReady\" Message Received,Cannot Execute Action");
                return false;
            }
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            if (!CheckEfemStatus())
                return false;
            string status = "ON";
            if (!Status)
            {
                status = "OFF";
            }
            _currentMsg = new EfemMessage
            {
                Operation = EfemOperation.PowerOn,
                Head = EfemMessage.MsgHead.MOV,
                Parameters = new List<string>
                {
                    SunWayMessageHandler.Instance.ModuleString[mod],
                    status
                }
            };
            _status = RState.Running;
            return _socket.Write(_currentMsg.ToString());
        }

        public override bool Align(ModuleName mod, double angle, float delayTime, WaferSize size)
        {
            //判断机台是否准备就绪
            if (!_isComm)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_NOREADY, Module.ToString(), "No \"CommReady\" Message Received,Cannot Execute Action");
                return false;
            }
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            if (!CheckEfemStatus())
                return false;

            _currentMsg = new EfemMessage
            {
                Operation = EfemOperation.Align,
                Head = EfemMessage.MsgHead.MOV,
                Parameters = new List<string>
                {
                    SunWayMessageHandler.Instance.ModuleString[mod]
                }
            };

            _status = RState.Running;
            return _socket.Write(_currentMsg.ToString());
        }

        public override bool SetLamp(LightType light, LightStatus status)
        {
            if (!_isComm)
            {
                return false;
            }
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                return false;
            }
            EfemMessage currentMsg = new EfemMessage
            {
                Module = ModuleName.EFEM,
                Operation = EfemOperation.Light,
                Head = EfemMessage.MsgHead.SET,
                Parameters = new List<string> { Constant.STOWER, light.ToString(), status.ToString() }
            };

            return _socket.Write(currentMsg.ToString());
        }

        public override bool Load(ModuleName mod)
        {
            //判断机台是否准备就绪
            if (!_isComm)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_NOREADY, Module.ToString(), "No \"CommReady\" Message Received,Cannot Execute Action");
                return false;
            }

            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }

            if (!CheckEfemStatus())
                return false;

            _currentMsg = new EfemMessage
            {
                Module = mod,
                Operation = EfemOperation.Load,
                Head = EfemMessage.MsgHead.MOV,
                Parameters = new List<string> { SunWayMessageHandler.Instance.ModuleString[mod] }
            };

            _status = RState.Running;
            return _socket.Write(_currentMsg.ToString());
        }

        public override bool Unload(ModuleName mod)
        {
            //判断机台是否准备就绪
            if (!_isComm)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_NOREADY, Module.ToString(), "No \"CommReady\" Message Received,Cannot Execute Action");
                return false;
            }
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            if (!CheckEfemStatus())
                return false;

            _currentMsg = new EfemMessage
            {
                Module = mod,
                Operation = EfemOperation.Unload,
                Head = EfemMessage.MsgHead.MOV,
                Parameters = new List<string> { SunWayMessageHandler.Instance.ModuleString[mod] }
            };

            _status = RState.Running;
            return _socket.Write(_currentMsg.ToString());
        }

        public override bool ReadCarrierId(ModuleName mod)
        {
            //判断机台是否准备就绪
            if (!_isComm)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_NOREADY, Module.ToString(), "No \"CommReady\" Message Received,Cannot Execute Action");
                return false;
            }
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            if (!CheckEfemStatus())
                return false;

            _currentMsg = new EfemMessage
            {
                Module = mod,
                Operation = EfemOperation.CarrierId,
                Head = EfemMessage.MsgHead.GET,
                Parameters = new List<string> { SunWayMessageHandler.Instance.ModuleString[mod] }
            };

            _status = RState.Running;
            return _socket.Write(_currentMsg.ToString());
        }

        public override bool WriteCarrierId(ModuleName mod, string id)
        {
            if (!CheckEfemStatus())
                return false;

            //判断机台是否准备就绪
            if (!_isComm)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_NOREADY, Module.ToString(), "No \"CommReady\" Message Received,Cannot Execute Action");
                return false;
            }
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            _currentMsg = new EfemMessage
            {
                Module = mod,
                Operation = EfemOperation.CarrierId,
                Head = EfemMessage.MsgHead.SET,
                Parameters = new List<string> { SunWayMessageHandler.Instance.ModuleString[mod], id }
            };

            _status = RState.Running;
            return _socket.Write(_currentMsg.ToString());
        }
        public override bool ReadTagData(ModuleName mod)
        {
            return ReadCarrierId(mod);
        }
        public override bool WriteTagData(ModuleName mod, string tagData)
        {
            return WriteCarrierId(mod, tagData);
        }

        public override bool Dock(ModuleName mod)
        {
            //判断机台是否准备就绪
            if (!_isComm)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_NOREADY, Module.ToString(), "No \"CommReady\" Message Received,Cannot Execute Action");
                return false;
            }
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            if (!CheckEfemStatus())
                return false;

            _currentMsg = new EfemMessage
            {
                Module = mod,
                Operation = EfemOperation.Dock,
                Head = EfemMessage.MsgHead.MOV,
                Parameters = new List<string> { SunWayMessageHandler.Instance.ModuleString[mod] }
            };

            _status = RState.Running;
            return _socket.Write(_currentMsg.ToString());
        }

        public override bool Undock(ModuleName mod)
        {

            //判断机台是否准备就绪
            if (!_isComm)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_NOREADY, Module.ToString(), "No \"CommReady\" Message Received,Cannot Execute Action");
                return false;
            }
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            if (!CheckEfemStatus())
                return false;

            _currentMsg = new EfemMessage
            {
                Module = mod,
                Operation = EfemOperation.Undock,
                Head = EfemMessage.MsgHead.MOV,
                Parameters = new List<string> { SunWayMessageHandler.Instance.ModuleString[mod] }
            };

            _status = RState.Running;
            return _socket.Write(_currentMsg.ToString());
        }

        public override bool Clamp(ModuleName mod, bool isUnloadClamp)
        {
            //判断机台是否准备就绪
            if (!_isComm)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_NOREADY, Module.ToString(), "No \"CommReady\" Message Received,Cannot Execute Action");
                return false;
            }
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            if (!CheckEfemStatus())
                return false;

            _currentMsg = new EfemMessage
            {
                Module = mod,
                Operation = EfemOperation.Clamp,
                Head = EfemMessage.MsgHead.MOV,
                Parameters = new List<string> { SunWayMessageHandler.Instance.ModuleString[mod] }
            };

            _status = RState.Running;
            _bIsUnloadClamp = isUnloadClamp;
            return _socket.Write(_currentMsg.ToString());
        }
        public override bool Unclamp(ModuleName mod)
        {
            //判断机台是否准备就绪
            if (!_isComm)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_NOREADY, Module.ToString(), "No \"CommReady\" Message Received,Cannot Execute Action");
                return false;
            }
            //判断socket是否链接
            if (!_socket.IsConnected)
            {
                LOG.WriteLog(eEvent.ERROR_EFEM_COMMUNICATION, Module.ToString(), $"Socket is not Conntected");
                return false;
            }
            if (!CheckEfemStatus())
                return false;

            _currentMsg = new EfemMessage
            {
                Module = mod,
                Operation = EfemOperation.Unclamp,
                Head = EfemMessage.MsgHead.MOV,
                Parameters = new List<string> { SunWayMessageHandler.Instance.ModuleString[mod] }
            };

            _status = RState.Running;
            return _socket.Write(_currentMsg.ToString());
        }

        public override bool SetThickness(ModuleName mod, string thickness)
        {
            LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support {EfemConstant.OperationString[EfemOperation.SetThickness]}");
            return false;
        }
        public override void SetRobotMovingInfo(RobotAction action, Hand hand, ModuleName target)
        {
            blockingCollection.Add(new RobotAnimationData(action, hand, target));
        }

        private void OnReceiveMessage(string RevMsg)
        {
            LOG.WriteBackgroundLog(eEvent.EV_EFEM_COMMON_INFO, Module.ToString(), RevMsg.Replace("\r",""));
            if (!_isComm)
            {
                //检验是否收到CommReady信号
                if (RevMsg.IndexOf("COMM", StringComparison.OrdinalIgnoreCase) >= 0)
                {
                    _isComm = true;
                }
            }
            string[] msgs = RevMsg.Split('\r');
            foreach (var msg in msgs)
            {
                if (string.IsNullOrWhiteSpace(msg)) continue;
                EfemMessage rec_msg = SunWayMessageHandler.Instance.ToMessage(msg);

                switch (rec_msg.Head)
                {
                    case EfemMessage.MsgHead.ACK:
                        if (msg.Contains("ERROR"))
                        {
                            _revMsg = rec_msg;
                        }

                        break;

                    case EfemMessage.MsgHead.INF:

                        // 收到INF之后发送ACK确认
                        string strACK = rec_msg.RawString.Replace("INF", "ACK");
                        SendBack(strACK);
                        LOG.WriteBackgroundLog(eEvent.EV_EFEM_COMMON_INFO, Module.ToString(), strACK);
                        
                        //提示当前机械臂速度设置情况
                        if (strACK.Contains("SPEED"))
                        {
                            string[] SpeedInf = rec_msg.RawString.Split('/');
                            LOG.Write(eEvent.INFO_PROCESS, ModuleName.Robot, $"Robot Speed is {SpeedInf[SpeedInf.Length-1]}");
                        }

                        //提示当前机械臂电源情况
                        if (strACK.Contains("SERVOS"))
                        {
                            string[] PowerInf = rec_msg.RawString.Split('/');
                            LOG.Write(eEvent.INFO_PROCESS, ModuleName.Robot, $"Robot Power is {PowerInf[PowerInf.Length - 1]}");
                        }


                        EfemMessage ack_msg = SunWayMessageHandler.Instance.ToMessage(strACK);
                        ack_msg.Direct = MsgDirection.To;
                        _revMsg = rec_msg;

                        OnCommandUpdated(rec_msg);
                        SetRobotMovingInfo(RobotAction.None, Hand.Both, ModuleName.EfemRobot);

                        break;

                    case EfemMessage.MsgHead.EVT:
                        OnEventUpdated(new EfemEventArgs
                        {
                            EvtStr = rec_msg.ToParamString(),
                            Module = rec_msg.Module,
                            CommandType = rec_msg.Operation,
                            DataList = rec_msg.Data
                        });
                        if (rec_msg.Operation == EfemOperation.Home)
                        {
                            SetRobotMovingInfo(RobotAction.Homing, Hand.Both, ModuleName.EFEM);
                        }
                        if (rec_msg.Operation == EfemOperation.Error)
                        {
                            OnErrorOccurred(rec_msg);
                        }
                        break;

                    case EfemMessage.MsgHead.NAK:
                    case EfemMessage.MsgHead.CAN:
                    case EfemMessage.MsgHead.ABS:
                        OnErrorOccurred(rec_msg);
                        break;
                }
            }
        }

        private void OnErrorHappen(ErrorEventArgs args)
        {
            _status = RState.Failed;
            if(_error!=args.Reason)
            {
                _error=args.Reason;
                LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, Module, $"{Module} {_error}");
            }
            Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
        }

        private void OnErrorOccurred(EfemMessage message)
        {
            string description = string.Empty;
            string str = "";
            switch (message.Head)
            {
                case EfemMessage.MsgHead.NAK:
                    description = Constant.SunWayFactorString.ContainsKey(message.Factor) ? Constant.SunWayFactorString[message.Factor]:message.Factor;
                    break;
                case EfemMessage.MsgHead.CAN:
                    description = Constant.SunWayFactorString.ContainsKey(message.Factor) ? Constant.SunWayFactorString[message.Factor] : message.Factor;
                    str = message.Data.Count != 0 ? message.Data[0] : "";
                    break;
                case EfemMessage.MsgHead.ABS:
                    description = message.Factor;
                    str = message.Data.Count != 0 ? String.Join(" ", message.Data.ToArray()):"";
                    break;
                case EfemMessage.MsgHead.EVT:
                    str= message.Data.Count != 0 ? String.Join(" ", message.Data.ToArray()) : "";
                    break;
            }

            _status = RState.Failed;
            Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error,description);
            if (message.Head == EfemMessage.MsgHead.NAK || message.Head == EfemMessage.MsgHead.CAN)
            {
                eEvent eEvent = GetFactorEventId(message.Factor);
                LOG.Write(eEvent, ModuleName.EFEM, $"{description}, [{str}]");
            }
            else
            {
                LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, $"{description}, [{str}]");
            }
        }
        /// <summary>
        /// 根据Factor获取相应的eEventId
        /// </summary>
        /// <param name="factor"></param>
        /// <returns></returns>
        private eEvent GetFactorEventId(string factor)
        {
            string str = $"ERR_EFEM_{factor}";
            if(Enum.TryParse(str,out eEvent result))
            {
                return result;
            }
            else
            {
                return eEvent.ERR_EFEM_COMMON_FAILED;
            }
        }

        private void OnEventUpdated(EfemEventArgs eArg)
        {

            switch (eArg.CommandType)
            {
                case EfemOperation.SigStatus:
                    // EVT:SIGSTAT/Parameter/DATA1/DATA2;
                    string sParam = eArg.DataList[0];          

                    // DATA1 & DATA2
                    int nData1 = Convert.ToInt32(eArg.DataList[1], 16);
                    int nData2 = Convert.ToInt32(eArg.DataList[2], 16);

                    BitArray baData1 = new BitArray(new int[] { nData1 });
                    BitArray baData2 = new BitArray(new int[] { nData2 });

                    if (0 == string.Compare(sParam, Constant.SYS, true))
                    {
                        // EVT:SIGSTAT/System/00000000/00000004;
                        // DATA1

                        if (!baData1[0])   // Bit[0] ON=Normal, OFF=Abnormal
                        {
                            string error = "EFEM Door is OFF Alarm";
                            LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, error);
                            Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error,error);
                        }
                        if (!baData1[1])   // Bit[0] ON=Normal, OFF=Abnormal
                        {
                            string error = "EFEM Vacuum Detection is OFF Alarm";
                            LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, error);
                            Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error, error);
                        }
                        if (!baData1[2])   // Bit[2] ON=Normal, OFF=Abnormal
                        {
                            string error = "EFEM Air Detection is OFF Alarm";
                            LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, error);
                            Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error,error);
                        }
                        if (!baData1[3])   // Bit[3] ON=Normal, OFF=Abnormal
                        {
                            string error = "EFEM OnlineMode is OFF Alarm";
                            LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, error);
                            Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error,error);
                        }
                        if (baData1[4])   // Bit[4] ON=Abnormal, OFF=Normal
                        {
                            string error = "EFEM MaintenanceMode is ON Alarm";
                            LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, error);
                            Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error, error);
                        }
                        if (baData1[5])   // Bit[5] ON=Abnormal, OFF=Normal
                        {
                            string error = "EFEM System Wafer Stick-out1 Alarm";
                            LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, error);
                            Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error, error);
                        }
                        if (baData1[6])   // Bit[6] ON=Abnormal, OFF=Normal
                        {
                            string error = "EFEM System Wafer Stick-out2 Alarm";
                            LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, error);
                            Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error,error);
                        }
                        if (baData1[7])   // Bit[7] ON=Abnormal, OFF=Normal
                        {
                            string error = "EFEM Emergency Stop Signal Alarm";
                            LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM,error);
                            Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error,error);
                        }

                        // DATA2

                        _signalT.ChangeLightStatus(LightType.BUZZER1, baData2[0] ? LightStatus.ON : LightStatus.OFF);
                        _signalT.ChangeLightStatus(LightType.BLUE, baData2[1] ? LightStatus.ON : LightStatus.OFF);
                        _signalT.ChangeLightStatus(LightType.GREEN, baData2[2] ? LightStatus.ON : LightStatus.OFF);
                        _signalT.ChangeLightStatus(LightType.YELLOW, baData2[3] ? LightStatus.ON : LightStatus.OFF);
                        _signalT.ChangeLightStatus(LightType.RED, baData2[4] ? LightStatus.ON : LightStatus.OFF);

                        _signalT.ChangeLightStatus(LightType.BLUE, baData2[6] ? LightStatus.BLINK : LightStatus.OFF);
                        _signalT.ChangeLightStatus(LightType.GREEN, baData2[7] ? LightStatus.BLINK : LightStatus.OFF);
                        _signalT.ChangeLightStatus(LightType.YELLOW, baData2[8] ? LightStatus.BLINK : LightStatus.OFF);
                        _signalT.ChangeLightStatus(LightType.RED, baData2[9] ? LightStatus.BLINK : LightStatus.OFF);

                        //屏蔽LP光栅信号
                        

                        /* EFEM 程序中目前没有实现
                        _RobotErr.CLK = baData2[27]; // bit 27

                        bool bArmNotExtendLLA            = baData2[30]; // bit 30
                        bool bArmNotExtendLLB            = baData2[31]; // bit 31
                        */
                    } // system event
                    else
                    {
                        // placement & present
                        bool bPlacement = baData1[0]; // bit 0
                        bool bPresence = baData1[0]; // bit 1
                        bool bArrived = bPlacement && bPresence;

                        _LPMs[eArg.Module - ModuleName.LP1].UpdateWaferArrive(bArrived);
                        _LPMs[eArg.Module - ModuleName.LP1].IsClamped = baData1[1];
                        _LPMs[eArg.Module - ModuleName.LP1].IsDocked = baData1[2];
                        _LPMs[eArg.Module - ModuleName.LP1].IsDoorOpened = !baData1[5];
                        //_LPMs[eArg.Module - ModuleName.LP1].HandleEvent(eArg);
                    } // FOUP EVENT
                    break;
                case EfemOperation.GetWaferInfo:
                    //MADPT
                    //lp
                    if (ModuleHelper.IsLoadPort(eArg.Module))
                    {
                        _LPMs[eArg.Module - ModuleName.LP1].HandleEvent(eArg);
                    }
                    // BF
                    else
                    {
                        MapBufferHandleEvent(eArg);
                    }
                    //buffer
                    break;
                case EfemOperation.Align:
                    //ALIGN
                    MapBufferHandleEvent(eArg);
                    break;
                default:
                    break;
            }
        }

        public void MapBufferHandleEvent(EfemEventArgs eArg)
        {
            string sWaferInfo = eArg.DataList[0];
            for (byte index = 0; index < sWaferInfo.Length; index++)
            {
                int waferState = int.Parse(sWaferInfo.Substring(index, 1));
                //合理的映射到内部支持的叠片/交叉片
                if (waferState >= 7) waferState = 7;
                else if (waferState >= 2) waferState = 3;

                WaferStatus st = (WaferStatus)waferState;
                if (st != WaferStatus.Empty)
                {
                    WaferManager.Instance.CreateWafer(eArg.Module, index, st);
                }
                else
                {
                    WaferManager.Instance.DeleteWafer(eArg.Module, index);
                }
            }
        }

        private void OnCommandUpdated(EfemMessage message)
        {
            try
            {
                switch (message.Operation)
                {
                    case EfemOperation.ClearError:
                    case EfemOperation.Align:
                    case EfemOperation.Pick:
                    case EfemOperation.Place:
                    case EfemOperation.Extend:
                    case EfemOperation.Goto:
                    case EfemOperation.Orgsh:
                    case EfemOperation.EmsStop:
                    case EfemOperation.Abort:
                    case EfemOperation.Speed:
                    case EfemOperation.Vacuum:
                    case EfemOperation.PowerOn:
                        _status = RState.End;
                        break;
                    case EfemOperation.Map:
                        if (ModuleHelper.IsLoadPort(message.Module))
                        {
                            _LPMs[message.Module - ModuleName.LP1].OnMaped();
                        }
                        _status = RState.End;
                        break;
                    case EfemOperation.StateTrack:
                        {
                            string str = message.Data.Count >= 1 ? message.Data.First() : string.Empty;
                            if (str.ToLower() == "track")
                            {
                                string strA = message.Data.Count > 1 ? message.Data[1].ToString() : string.Empty;
                                if (strA.ToLower() != NONE.ToLower())
                                {
                                    if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 0))
                                    {
                                        WaferManager.Instance.CreateWafer(ModuleName.EfemRobot, 0, WaferStatus.Normal);
                                    }
                                }
                                string strB = message.Data.Count > 2 ? message.Data[2].ToString() : string.Empty;
                                if (strB.ToLower() != NONE.ToLower())
                                {
                                    if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 1))
                                    {
                                        WaferManager.Instance.CreateWafer(ModuleName.EfemRobot, 1, WaferStatus.Normal);
                                    }
                                }

                            }
                            _status = RState.End;
                        }
                        break;
                    case EfemOperation.Home:
                        {
                            if (_currentMsg.Module == ModuleName.EFEM)
                            {
                                _LPMs[0].OnHomed();
                                _LPMs[1].OnHomed();
                                _LPMs[2].OnHomed();
                            }
                            else if (ModuleHelper.IsLoadPort(_currentMsg.Module))
                            {
                                _LPMs[_currentMsg.Module - ModuleName.LP1].OnHomed();
                            }

                            _status = RState.End;
                        }
                        break;
                    case EfemOperation.Load:
                        {
                            _LPMs[message.Module - ModuleName.LP1].OnLoaded();
                            _status = RState.End;
                        }
                        break;
                    case EfemOperation.Unload:
                        {
                            _LPMs[message.Module - ModuleName.LP1].OnUnloaded();
                            _status = RState.End;
                        }
                        break;
                    case EfemOperation.CarrierId:
                        {
                            if (message.Head == EfemMessage.MsgHead.GET)
                            {
                                _LPMs[message.Module - ModuleName.LP1].OnCarrierIDRead(message.Data.First());
                            }
                            else
                            {
                                _LPMs[message.Module - ModuleName.LP1].OnCarrierIDWrite(message.Data.First());
                            }

                            _status = RState.End;
                        }
                        break;
                    case EfemOperation.Clamp:
                        {
                            _LPMs[message.Module - ModuleName.LP1].OnClamped(_bIsUnloadClamp);
                            _status = RState.End;
                        }
                        break;
                    case EfemOperation.Unclamp:
                        {
                            _LPMs[message.Module - ModuleName.LP1].OnUnclamped();
                            _status = RState.End;
                        }
                        break;
                    case EfemOperation.Dock:
                        {
                            _LPMs[message.Module - ModuleName.LP1].OnDocked();
                            _status = RState.End;
                        }
                        break;
                    case EfemOperation.Undock:
                        {
                            _LPMs[message.Module - ModuleName.LP1].OnUndocked();
                            _status = RState.End;
                        }
                        break;
                    case EfemOperation.Ready:
                        {
                            Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.CommReady);
                        }
                        break;
                    case EfemOperation.Size:
                        {
                            if (message.Data.Count != 0)
                            {
                                if(ModuleHelper.IsLoadPort(message.Module))
                                {
                                    string waferSize = message.Data[0];
                                    if (waferSize == "200")
                                    {
                                        _LPMs[message.Module - ModuleName.LP1].UpdateWaferSize(WaferSize.WS8);
                                    }
                                    else if (waferSize == "300")
                                    {
                                        _LPMs[message.Module - ModuleName.LP1].UpdateWaferSize(WaferSize.WS12);
                                    }
                                    else
                                    {
                                        _LPMs[message.Module - ModuleName.LP1].UpdateWaferSize(WaferSize.WS0);
                                    }
                                }
                            }
                            _status = RState.End;
                        }
                        break;
                }
            }
            catch(Exception ex)
            {
                string error = $"OnCommandUpdated meets {ex.Message}";
                LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), error);
                _status = RState.Failed;
                Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error,error);
            }
        }

        async void SendBack(string data)
        {
            await Task.Run(() => _socket.Write(data + '\r'));
        }
    }
}