JetEfem.cs 43 KB

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  1. using System;
  2. using System.Diagnostics;
  3. using System.Collections.Generic;
  4. using System.Linq;
  5. using System.Threading.Tasks;
  6. using System.Collections;
  7. using MECF.Framework.Common.CommonData;
  8. using MECF.Framework.Common.Equipment;
  9. using MECF.Framework.Common.SubstrateTrackings;
  10. using Aitex.Sorter.Common;
  11. using Aitex.Core.Common;
  12. using Aitex.Core.RT.SCCore;
  13. using Aitex.Core.RT.Log;
  14. using Aitex.Core.Util;
  15. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
  16. using System.Collections.Concurrent;
  17. using CyberX8_Core;
  18. using CyberX8_RT.Devices.YASKAWA;
  19. using CyberX8_RT.Devices;
  20. using CyberX8_RT.Modules;
  21. using CyberX8_RT;
  22. namespace CyberX8_RT.Devices.EFEM
  23. {
  24. public class JetEfem : EfemBase
  25. {
  26. private RState _status;
  27. private bool _IsHomed;
  28. private string _waferPresence;
  29. private bool _bIsUnloadClamp;
  30. private RobotMoveInfo _robotMoveInfo = new RobotMoveInfo();
  31. private readonly Loadport[] _LPMs = new Loadport[3];
  32. private readonly SignalTower _signalT = new SignalTower();
  33. private readonly AsyncSocket _socket;
  34. private EfemMessage _currentMsg;
  35. private EfemMessage _backroundMsg;
  36. private EfemMessage _revMsg;
  37. private bool _LiftIsUp = false;
  38. private bool _LiftIsDown = false;
  39. private R_TRIG _busyTrig = new R_TRIG();
  40. private Stopwatch _busyWatch = new Stopwatch();
  41. public override RState Status
  42. {
  43. get
  44. {
  45. _busyTrig.CLK = _status == RState.Running;
  46. if (_busyTrig.Q)
  47. {
  48. _busyWatch.Restart();
  49. }
  50. else if (_busyTrig.M)
  51. {
  52. if (_busyWatch.ElapsedMilliseconds > 30000)
  53. {
  54. _busyWatch.Stop();
  55. _status = RState.Timeout;
  56. }
  57. }
  58. return _status;
  59. }
  60. }
  61. public override bool IsHomed { get { return _IsHomed; } }
  62. public override RobotMoveInfo TMRobotMoveInfo { get { return _robotMoveInfo; } }
  63. public override ILoadport this[ModuleName mod]
  64. {
  65. get
  66. {
  67. if (!ModuleHelper.IsLoadPort(mod))
  68. throw new ApplicationException($"{mod} is NOT Loadport");
  69. return _LPMs[mod - ModuleName.LP1];
  70. }
  71. }
  72. public override bool LiftIsUp { get { return _LiftIsUp; } }
  73. public override bool LiftIsDown { get { return _LiftIsDown; } }
  74. private BlockingCollection<RobotAnimationData> blockingCollection = new BlockingCollection<RobotAnimationData>();
  75. public JetEfem()
  76. {
  77. _socket = new AsyncSocket("");
  78. _socket.Connect(SC.GetStringValue($"EFEM.IPAddress"));
  79. _socket.OnDataChanged += OnReceiveMessage;
  80. _socket.OnErrorHappened += OnErrorHappen;
  81. _status = RState.Init;
  82. _IsHomed = false;
  83. _busyTrig.RST = true;
  84. _LPMs[0] = new Loadport(ModuleName.LP1, this);
  85. _LPMs[1] = new Loadport(ModuleName.LP2, this);
  86. _LPMs[2] = new Loadport(ModuleName.LP3, this);
  87. CarrierManager.Instance.SubscribeLocation(ModuleName.LP1.ToString(), 1);
  88. CarrierManager.Instance.SubscribeLocation(ModuleName.LP2.ToString(), 1);
  89. CarrierManager.Instance.SubscribeLocation(ModuleName.LP3.ToString(), 1);
  90. WaferManager.Instance.SubscribeLocation(ModuleName.EfemRobot, 2);
  91. WaferManager.Instance.SubscribeLocation(ModuleName.Aligner1, 1);
  92. // _subscribeLoc(ModuleName.EfemRobot, 2);
  93. SubscribeLocation(ModuleName.Aligner1, 1);
  94. SubscribeLocation(ModuleName.LP1, SC.GetValue<int>("EFEM.LoadPort.SlotNumber"));
  95. SubscribeLocation(ModuleName.LP2, SC.GetValue<int>("EFEM.LoadPort.SlotNumber"));
  96. SubscribeLocation(ModuleName.LP3, SC.GetValue<int>("EFEM.LoadPort.SlotNumber"));
  97. Task.Run(() =>
  98. {
  99. foreach (var data in blockingCollection.GetConsumingEnumerable())
  100. {
  101. _robotMoveInfo.Action = data.Action;
  102. _robotMoveInfo.ArmTarget = data.Hand == Hand.Blade1 ? RobotArm.ArmA : (data.Hand == Hand.Both ? RobotArm.Both : RobotArm.ArmB);
  103. _robotMoveInfo.BladeTarget = $"{_robotMoveInfo.ArmTarget}.{data.Target}";
  104. System.Threading.Thread.Sleep(600);
  105. }
  106. });
  107. }
  108. private void SubscribeLocation(ModuleName module,int waferCount)
  109. {
  110. if (ModuleHelper.IsInstalled(module))
  111. {
  112. WaferManager.Instance.SubscribeLocation(module, waferCount);
  113. }
  114. }
  115. public override void Monitor()
  116. {
  117. }
  118. public override void Terminate()
  119. {
  120. }
  121. public override bool SetRobotSpeed(ModuleName mod, int speed)
  122. {
  123. return false;
  124. }
  125. public override bool SetWaferSize(ModuleName mod, int size)
  126. {
  127. return false;
  128. }
  129. public override bool RobotPowerOn(ModuleName mod, bool status)
  130. { return false; }
  131. public override bool Vacuum(ModuleName mod, bool state)
  132. {
  133. return false;
  134. }
  135. public override void Reset()
  136. {
  137. _status = RState.End;
  138. }
  139. public override void SetOnline(bool online)
  140. {
  141. }
  142. public override void SetOnline(ModuleName mod, bool online)
  143. {
  144. }
  145. public override void SetBusy(ModuleName mod, bool online)
  146. {
  147. _status = RState.Running;
  148. }
  149. public override bool HomeAll()
  150. {
  151. if (_status == RState.Running)
  152. _backroundMsg = _currentMsg;
  153. _currentMsg = new EfemMessage
  154. {
  155. Module = ModuleName.EFEM,
  156. Operation = EfemOperation.Home,
  157. Head = EfemMessage.MsgHead.MOV,
  158. Parameters = new List<string> { Constant.ModuleString[ModuleName.EFEM] }
  159. };
  160. _status = RState.Running;
  161. string data = _currentMsg.ToString();
  162. SetRobotMovingInfo(RobotAction.Homing, Hand.Both, ModuleName.EFEM);
  163. return _socket.Write(data);
  164. }
  165. public override bool Home(ModuleName mod)
  166. {
  167. if (_status == RState.Running)
  168. _backroundMsg = _currentMsg;
  169. if (ModuleHelper.IsLoadPort(mod))
  170. {
  171. _currentMsg = new EfemMessage
  172. {
  173. Module = mod,
  174. Operation = EfemOperation.Home,
  175. Head = EfemMessage.MsgHead.MOV,
  176. Parameters = new List<string> { Constant.ModuleString[mod] }
  177. };
  178. _status = RState.Running;
  179. return _socket.Write(_currentMsg.ToString());
  180. }
  181. else
  182. {
  183. _currentMsg = new EfemMessage
  184. {
  185. Module = mod,
  186. Operation = EfemOperation.Home,
  187. Head = EfemMessage.MsgHead.MOV,
  188. Parameters = new List<string> { Constant.ModuleString[mod] }
  189. };
  190. _status = RState.Running;
  191. return _socket.Write(_currentMsg.ToString());
  192. }
  193. }
  194. public override bool OriginalSearch(ModuleName mod)
  195. {
  196. if (!CheckEfemStatus())
  197. return false;
  198. _currentMsg = new EfemMessage
  199. {
  200. Module = ModuleName.EFEM,
  201. Operation = EfemOperation.Orgsh,
  202. Head = EfemMessage.MsgHead.MOV,
  203. Parameters = new List<string>
  204. {
  205. Constant.ModuleString[mod]
  206. }
  207. };
  208. _status = RState.Running;
  209. return _socket.Write(_currentMsg.ToString());
  210. }
  211. public override bool CheckWaferPresence()
  212. {
  213. if (!CheckEfemStatus())
  214. return false;
  215. _currentMsg = new EfemMessage
  216. {
  217. Module = ModuleName.EFEM,
  218. Operation = EfemOperation.StateTrack,
  219. Head = EfemMessage.MsgHead.GET,
  220. Parameters = new List<string> { "TRACK" }
  221. };
  222. _waferPresence = string.Empty;
  223. _status = RState.Running;
  224. return _socket.Write(_currentMsg.ToString());
  225. }
  226. public override string GetWaferPresence()
  227. {
  228. return _waferPresence;
  229. }
  230. public override bool Halt()
  231. {
  232. if (_status == RState.Running)
  233. _backroundMsg = _currentMsg;
  234. _currentMsg = new EfemMessage
  235. {
  236. Module = ModuleName.EFEM,
  237. Operation = EfemOperation.EmsStop,
  238. Head = EfemMessage.MsgHead.MOV,
  239. };
  240. _status = RState.Running;
  241. return _socket.Write(_currentMsg.ToString());
  242. }
  243. public override bool ClearError()
  244. {
  245. _currentMsg = new EfemMessage
  246. {
  247. Module = ModuleName.EFEM,
  248. Operation = EfemOperation.ClearError,
  249. Head = EfemMessage.MsgHead.SET,
  250. Parameters = new List<string> { "CLEAR" }
  251. };
  252. _status = RState.Running;
  253. return _socket.Write(_currentMsg.ToString());
  254. }
  255. public override bool CloseBuzzer()
  256. {
  257. return false;
  258. }
  259. public override bool PickExtend(ModuleName chamber, int slot, Hand hand)
  260. {
  261. if (!CheckEfemStatus())
  262. return false;
  263. _currentMsg = new EfemMessage
  264. {
  265. Operation = EfemOperation.Extend,
  266. Head = EfemMessage.MsgHead.MOV,
  267. Parameters = new List<string>
  268. {
  269. chamber.ToHWString(),
  270. ExtendPos.GB.ToString(),
  271. Constant.ArmString[hand],
  272. }
  273. };
  274. SetRobotMovingInfo(RobotAction.Extending, hand, chamber);
  275. _status = RState.Running;
  276. return _socket.Write(_currentMsg.ToString());
  277. }
  278. public override bool PickRetract(ModuleName chamber, int slot, Hand hand)
  279. {
  280. if (!CheckEfemStatus())
  281. return false;
  282. _currentMsg = new EfemMessage
  283. {
  284. Operation = EfemOperation.Extend,
  285. Head = EfemMessage.MsgHead.MOV,
  286. Parameters = new List<string>
  287. {
  288. chamber.ToHWString(),
  289. ExtendPos.G4.ToString(),
  290. Constant.ArmString[hand],
  291. }
  292. };
  293. _status = RState.Running;
  294. SetRobotMovingInfo(RobotAction.Retracting, hand, chamber);
  295. return _socket.Write(_currentMsg.ToString());
  296. }
  297. public override bool PlaceExtend(ModuleName chamber, int slot, Hand hand)
  298. {
  299. if (!CheckEfemStatus())
  300. return false;
  301. _currentMsg = new EfemMessage
  302. {
  303. Operation = EfemOperation.Extend,
  304. Head = EfemMessage.MsgHead.MOV,
  305. Parameters = new List<string>
  306. {
  307. chamber.ToHWString(),
  308. ExtendPos.PB.ToString(),
  309. Constant.ArmString[hand],
  310. }
  311. };
  312. _status = RState.Running;
  313. SetRobotMovingInfo(RobotAction.Extending, hand, chamber);
  314. return _socket.Write(_currentMsg.ToString());
  315. }
  316. public override bool PlaceRetract(ModuleName chamber, int slot, Hand hand)
  317. {
  318. if (!CheckEfemStatus())
  319. return false;
  320. _currentMsg = new EfemMessage
  321. {
  322. Operation = EfemOperation.Extend,
  323. Head = EfemMessage.MsgHead.MOV,
  324. Parameters = new List<string>
  325. {
  326. chamber.ToHWString(),
  327. ExtendPos.P4.ToString(),
  328. Constant.ArmString[hand],
  329. }
  330. };
  331. _status = RState.Running;
  332. SetRobotMovingInfo(RobotAction.Retracting, hand, chamber);
  333. return _socket.Write(_currentMsg.ToString());
  334. }
  335. public override bool Pick(ModuleName station, int slot, Hand hand)
  336. {
  337. if (!CheckEfemStatus())
  338. return false;
  339. Position SrcPos = new Position { Module = station, Slot = (byte)slot };
  340. _currentMsg = new EfemMessage
  341. {
  342. Operation = EfemOperation.Pick,
  343. Head = EfemMessage.MsgHead.MOV,
  344. Parameters = new List<string>
  345. {
  346. SrcPos.ToHWString(),
  347. Constant.ArmString[hand],
  348. //WaferSize.WS12.ToString()
  349. }
  350. };
  351. _status = RState.Running;
  352. SetRobotMovingInfo(RobotAction.Picking, hand, station);
  353. return _socket.Write(_currentMsg.ToString());
  354. }
  355. public override bool Place(ModuleName station, int slot, Hand hand)
  356. {
  357. if (!CheckEfemStatus())
  358. return false;
  359. Position DestPos = new Position { Module = station, Slot = (byte)slot };
  360. _currentMsg = new EfemMessage
  361. {
  362. Operation = EfemOperation.Place,
  363. Head = EfemMessage.MsgHead.MOV,
  364. Parameters = new List<string>
  365. {
  366. DestPos.ToHWString(),
  367. Constant.ArmString[hand],
  368. //WaferSize.WS12.ToString()
  369. }
  370. };
  371. _status = RState.Running;
  372. SetRobotMovingInfo(RobotAction.Placing, hand, station);
  373. return _socket.Write(_currentMsg.ToString());
  374. }
  375. public override bool Goto(ModuleName station, Hand hand, string updown = "UP")
  376. {
  377. if (!CheckEfemStatus())
  378. return false;
  379. Position DestPos = new Position { Module = station, Slot = (byte)0 };
  380. _currentMsg = new EfemMessage
  381. {
  382. Operation = EfemOperation.Goto,
  383. Head = EfemMessage.MsgHead.MOV,
  384. Parameters = new List<string>
  385. {
  386. DestPos.ToHWString(),
  387. Constant.ArmString[hand],
  388. WaferSize.WS12.ToString()
  389. }
  390. };
  391. _status = RState.Running;
  392. return _socket.Write(_currentMsg.ToString());
  393. }
  394. public override bool Grip(Hand blade, bool isGrip)
  395. {
  396. if (!CheckEfemStatus())
  397. return false;
  398. _currentMsg = new EfemMessage
  399. {
  400. Operation = EfemOperation.Grip,
  401. Head = EfemMessage.MsgHead.SET,
  402. Parameters = new List<string>
  403. {
  404. isGrip ? "ON":"OFF",
  405. Constant.ArmString[blade]
  406. }
  407. };
  408. _status = RState.Running;
  409. return _socket.Write(_currentMsg.ToString());
  410. }
  411. public override bool SetAlignWaferSize()
  412. {
  413. LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support aligner wafer size");
  414. return false;
  415. }
  416. public override bool SetAlignFlatType(int flatType)
  417. {
  418. LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support aligner flat type");
  419. return false;
  420. }
  421. public override bool SetAlignDistance()
  422. {
  423. LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support aligner distance");
  424. return false;
  425. }
  426. public override bool GotoMap(ModuleName mod, Hand hand, string extend = "EX")
  427. {
  428. LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support GotoMap");
  429. return false;
  430. }
  431. public override bool RequestMapResult(ModuleName mod)
  432. {
  433. LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support RequestMapResult");
  434. return false;
  435. }
  436. public override bool Map(ModuleName mod)
  437. {
  438. if (!CheckEfemStatus())
  439. return false;
  440. _currentMsg = new EfemMessage
  441. {
  442. Operation = EfemOperation.Map,
  443. Head = EfemMessage.MsgHead.MOV,
  444. Parameters = new List<string> { Constant.ModuleString[mod] }
  445. };
  446. _status = RState.Running;
  447. return _socket.Write(_currentMsg.ToString());
  448. }
  449. public override bool GetWaferSize(ModuleName mod)
  450. {
  451. return true;
  452. }
  453. public override bool SetPinUp(ModuleName mod)
  454. {
  455. if (!CheckEfemStatus())
  456. return false;
  457. _currentMsg = new EfemMessage
  458. {
  459. Operation = EfemOperation.Lift,
  460. Head = EfemMessage.MsgHead.MOV,
  461. Parameters = new List<string> { Constant.ModuleString[mod], "UP" }
  462. };
  463. _status = RState.Running;
  464. return _socket.Write(_currentMsg.ToString());
  465. }
  466. public override bool SetPinDown(ModuleName mod)
  467. {
  468. if (!CheckEfemStatus())
  469. return false;
  470. _currentMsg = new EfemMessage
  471. {
  472. Operation = EfemOperation.Lift,
  473. Head = EfemMessage.MsgHead.MOV,
  474. Parameters = new List<string> { Constant.ModuleString[mod], "DOWN" }
  475. };
  476. _status = RState.Running;
  477. return _socket.Write(_currentMsg.ToString());
  478. }
  479. public override bool SetAlignAngle(ModuleName mod, double angle)
  480. {
  481. _status = RState.End;
  482. return true;
  483. }
  484. public override bool Align(ModuleName mod, double angle, float delayTime, WaferSize size)
  485. {
  486. if (!CheckEfemStatus())
  487. return false;
  488. _currentMsg = new EfemMessage
  489. {
  490. Operation = EfemOperation.Align,
  491. Head = EfemMessage.MsgHead.MOV,
  492. Parameters = new List<string> { $"A{angle.ToString("000.00")}" }
  493. };
  494. _status = RState.Running;
  495. return _socket.Write(_currentMsg.ToString());
  496. }
  497. public override bool SetLamp(LightType light, LightStatus status)
  498. {
  499. if (Status == RState.Running)
  500. {
  501. LOG.Write(eEvent.ERR_EFEM_ROBOT, ModuleName.EFEM, "EFEM is busy, please wait a minute");
  502. return false;
  503. }
  504. _currentMsg = new EfemMessage
  505. {
  506. Module = ModuleName.EFEM,
  507. Operation = EfemOperation.Light,
  508. Head = EfemMessage.MsgHead.SET,
  509. Parameters = new List<string> { Constant.STOWER, light.ToString(), status.ToString() }
  510. };
  511. _status = RState.Running;
  512. return _socket.Write(_currentMsg.ToString());
  513. }
  514. public override bool Load(ModuleName mod)
  515. {
  516. if (!CheckEfemStatus())
  517. return false;
  518. _currentMsg = new EfemMessage
  519. {
  520. Module = mod,
  521. Operation = EfemOperation.Load,
  522. Head = EfemMessage.MsgHead.MOV,
  523. Parameters = new List<string> { Constant.ModuleString[mod] }
  524. };
  525. _status = RState.Running;
  526. return _socket.Write(_currentMsg.ToString());
  527. }
  528. public override bool Unload(ModuleName mod)
  529. {
  530. if (!CheckEfemStatus())
  531. return false;
  532. _currentMsg = new EfemMessage
  533. {
  534. Module = mod,
  535. Operation = EfemOperation.Unload,
  536. Head = EfemMessage.MsgHead.MOV,
  537. Parameters = new List<string> { Constant.ModuleString[mod] }
  538. };
  539. _status = RState.Running;
  540. return _socket.Write(_currentMsg.ToString());
  541. }
  542. public override bool ReadCarrierId(ModuleName mod)
  543. {
  544. if (!CheckEfemStatus())
  545. return false;
  546. _currentMsg = new EfemMessage
  547. {
  548. Module = mod,
  549. Operation = EfemOperation.CarrierId,
  550. Head = EfemMessage.MsgHead.GET,
  551. Parameters = new List<string> { Constant.ModuleString[mod] }
  552. };
  553. _status = RState.Running;
  554. return _socket.Write(_currentMsg.ToString());
  555. }
  556. public override bool WriteCarrierId(ModuleName mod, string id)
  557. {
  558. if (!CheckEfemStatus())
  559. return false;
  560. _currentMsg = new EfemMessage
  561. {
  562. Module = mod,
  563. Operation = EfemOperation.CarrierId,
  564. Head = EfemMessage.MsgHead.SET,
  565. Parameters = new List<string> { Constant.ModuleString[mod], id }
  566. };
  567. _status = RState.Running;
  568. return _socket.Write(_currentMsg.ToString());
  569. }
  570. public override bool ReadTagData(ModuleName mod)
  571. {
  572. if (!CheckEfemStatus())
  573. return false;
  574. _currentMsg = new EfemMessage
  575. {
  576. Module = mod,
  577. Operation = EfemOperation.CarrierId,
  578. Head = EfemMessage.MsgHead.GET,
  579. Parameters = new List<string> { Constant.ModuleString[mod] }
  580. };
  581. _status = RState.Running;
  582. return _socket.Write(_currentMsg.ToString());
  583. }
  584. public override bool WriteTagData(ModuleName mod, string tagData)
  585. {
  586. if (!CheckEfemStatus())
  587. return false;
  588. _currentMsg = new EfemMessage
  589. {
  590. Module = mod,
  591. Operation = EfemOperation.CarrierId,
  592. Head = EfemMessage.MsgHead.SET,
  593. Parameters = new List<string> { Constant.ModuleString[mod], tagData }
  594. };
  595. _status = RState.Running;
  596. return _socket.Write(_currentMsg.ToString());
  597. }
  598. public override bool Dock(ModuleName mod)
  599. {
  600. if (!CheckEfemStatus())
  601. return false;
  602. _currentMsg = new EfemMessage
  603. {
  604. Module = mod,
  605. Operation = EfemOperation.Dock,
  606. Head = EfemMessage.MsgHead.MOV,
  607. Parameters = new List<string> { Constant.ModuleString[mod] }
  608. };
  609. _status = RState.Running;
  610. return _socket.Write(_currentMsg.ToString());
  611. }
  612. public override bool Undock(ModuleName mod)
  613. {
  614. if (!CheckEfemStatus())
  615. return false;
  616. _currentMsg = new EfemMessage
  617. {
  618. Module = mod,
  619. Operation = EfemOperation.Undock,
  620. Head = EfemMessage.MsgHead.MOV,
  621. Parameters = new List<string> { Constant.ModuleString[mod] }
  622. };
  623. _status = RState.Running;
  624. return _socket.Write(_currentMsg.ToString());
  625. }
  626. public override bool Clamp(ModuleName mod, bool isUnloadClamp)
  627. {
  628. if (!CheckEfemStatus())
  629. return false;
  630. _currentMsg = new EfemMessage
  631. {
  632. Module = mod,
  633. Operation = EfemOperation.Clamp,
  634. Head = EfemMessage.MsgHead.MOV,
  635. Parameters = new List<string> { Constant.ModuleString[mod] }
  636. };
  637. _status = RState.Running;
  638. _bIsUnloadClamp = isUnloadClamp;
  639. return _socket.Write(_currentMsg.ToString());
  640. }
  641. public override bool Unclamp(ModuleName mod)
  642. {
  643. if (!CheckEfemStatus())
  644. return false;
  645. _currentMsg = new EfemMessage
  646. {
  647. Module = mod,
  648. Operation = EfemOperation.Unclamp,
  649. Head = EfemMessage.MsgHead.MOV,
  650. Parameters = new List<string> { Constant.ModuleString[mod] }
  651. };
  652. _status = RState.Running;
  653. return _socket.Write(_currentMsg.ToString());
  654. }
  655. public override bool SetThickness(ModuleName mod, string thickness)
  656. {
  657. if (!CheckEfemStatus())
  658. return false;
  659. _currentMsg = new EfemMessage
  660. {
  661. Module = mod,
  662. Operation = EfemOperation.SetThickness,
  663. Head = EfemMessage.MsgHead.SET,
  664. Parameters = new List<string> { Constant.ModuleString[mod], thickness.ToUpper() }
  665. };
  666. _status = RState.Running;
  667. return _socket.Write(_currentMsg.ToString());
  668. }
  669. public override void SetRobotMovingInfo(RobotAction action, Hand hand, ModuleName target)
  670. {
  671. blockingCollection.Add(new RobotAnimationData(action, hand, target));
  672. }
  673. private void OnReceiveMessage(string RevMsg)
  674. {
  675. string[] msgs = RevMsg.Split('\r');
  676. foreach (var msg in msgs)
  677. {
  678. if (string.IsNullOrWhiteSpace(msg)) continue;
  679. EfemMessage rec_msg = JetMessageHandler.Instance.ToMessage(msg);
  680. switch (rec_msg.Head)
  681. {
  682. case EfemMessage.MsgHead.ACK:
  683. if (msg.Contains("ERROR"))
  684. {
  685. _revMsg = rec_msg;
  686. }
  687. break;
  688. case EfemMessage.MsgHead.INF:
  689. // 收到INF之后发送ACK确认
  690. string strACK = rec_msg.RawString.Replace("INF", "ACK");
  691. SendBack(strACK);
  692. EfemMessage ack_msg = strACK.ToMessage();
  693. ack_msg.Direct = MsgDirection.To;
  694. _revMsg = rec_msg;
  695. OnCommandUpdated(rec_msg);
  696. SetRobotMovingInfo(RobotAction.None, Hand.Both, ModuleName.EfemRobot);
  697. break;
  698. case EfemMessage.MsgHead.EVT:
  699. OnEventUpdated(new EfemEventArgs
  700. {
  701. EvtStr = rec_msg.ToParamString(),
  702. Module = rec_msg.Module,
  703. CommandType = rec_msg.Operation,
  704. DataList = rec_msg.Data
  705. });
  706. if (rec_msg.Operation == EfemOperation.Home)
  707. {
  708. SetRobotMovingInfo(RobotAction.Homing, Hand.Both, ModuleName.EFEM);
  709. }
  710. break;
  711. case EfemMessage.MsgHead.NAK:
  712. case EfemMessage.MsgHead.CAN:
  713. case EfemMessage.MsgHead.ABS:
  714. OnErrorOccurred(rec_msg);
  715. break;
  716. }
  717. }
  718. }
  719. private void OnErrorHappen(ErrorEventArgs args)
  720. {
  721. _status = RState.Failed;
  722. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
  723. }
  724. private void OnErrorOccurred(EfemMessage message)
  725. {
  726. string description = string.Empty;
  727. switch (message.Head)
  728. {
  729. case EfemMessage.MsgHead.NAK:
  730. description = Constant.FactorString[message.Factor];
  731. break;
  732. case EfemMessage.MsgHead.CAN:
  733. description = Constant.FactorString.ContainsKey(message.Factor) ? Constant.FactorString[message.Factor] : message.Factor;
  734. break;
  735. case EfemMessage.MsgHead.ABS:
  736. description = $"{message.Data[0]}, {message.Data[1]}";
  737. break;
  738. }
  739. _status = RState.Failed;
  740. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error,description);
  741. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, $"{description}, [{message.Data[0]}], [{message.Factor}]");
  742. }
  743. private void OnEventUpdated(EfemEventArgs eArg)
  744. {
  745. switch (eArg.CommandType)
  746. {
  747. case EfemOperation.SigStatus:
  748. // EVT:SIGSTAT/Parameter/DATA1/DATA2;
  749. string sParam = eArg.DataList[0]; // "SYSTEM" or "Pn"
  750. // DATA1 & DATA2
  751. int nData1 = Convert.ToInt32(eArg.DataList[1], 16);
  752. int nData2 = Convert.ToInt32(eArg.DataList[2], 16);
  753. BitArray baData1 = new BitArray(new int[] { nData1 });
  754. BitArray baData2 = new BitArray(new int[] { nData2 });
  755. if (0 == string.Compare(sParam, Constant.SYS, true))
  756. {
  757. // EVT:SIGSTAT/System/00000000/00000004;
  758. // DATA1
  759. // Post warning and alarm
  760. if (!baData1[0]) // Bit[0] ON=Normal, OFF=Abnormal
  761. {
  762. //EV.Notify(EFEMVacuumPressureError);
  763. string error = "EFEM System vacuum source pressure low";
  764. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, error);
  765. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error,error);
  766. }
  767. if (!baData1[1]) // Bit[1] ON=Normal, OFF=Abnormal
  768. {
  769. //EV.Notify(EFEMIonizerAlarm);
  770. string error = "EFEM Ionizer compressed air error";
  771. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, error);
  772. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error,error);
  773. }
  774. if (!baData1[2]) // Bit[2] ON=Normal, OFF=Abnormal
  775. {
  776. //EV.Notify(EFEMCDAError);
  777. string error = "EFEM System compressed air pressure low";
  778. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, error);
  779. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error, error);
  780. }
  781. if (!baData1[4]) // Bit[4] ON=Normal, OFF=Abnormal
  782. {
  783. //EV.Notify(EFEMFlowGaugeSensorError);
  784. string error = "EFEM Flow gauge sensor error";
  785. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, error);
  786. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error,error);
  787. }
  788. if (!baData1[5]) // Bit[5] ON=Normal, OFF=Abnormal
  789. {
  790. //EV.Notify(EFEMLeakageAlarm);
  791. string error = "EFEM Leakage alarm";
  792. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, error);
  793. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error,error);
  794. }
  795. if (!baData1[10]) // Bit[10] ON=Normal, OFF=Abnormal
  796. {
  797. //EV.Notify(EFEMIonizerAlarm);
  798. string error = "EFEM Ionizer alarm";
  799. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, error);
  800. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error,error);
  801. }
  802. if (!baData1[11]) // Bit[11] ON=Normal, OFF=Abnormal
  803. {
  804. //EV.Notify(EFEMFFUAlarm);
  805. string error = "FFU alarm";
  806. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, error);
  807. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error,error);
  808. }
  809. if (!baData1[13]) // Bit[13] ON=RUN, OFF=Maintain
  810. {
  811. //EV.Notify(EFEMOffline);
  812. string error = "EFEM switch to Maintain mode, HomeAll to recover";
  813. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, error);
  814. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error, error);
  815. }
  816. // DATA2
  817. _signalT.ChangeLightStatus(LightType.RED, baData2[0] ? LightStatus.ON : baData2[5] ? LightStatus.BLINK : LightStatus.OFF);
  818. _signalT.ChangeLightStatus(LightType.GREEN, baData2[1] ? LightStatus.ON : baData2[6] ? LightStatus.BLINK : LightStatus.OFF);
  819. _signalT.ChangeLightStatus(LightType.YELLOW, baData2[2] ? LightStatus.ON : baData2[7] ? LightStatus.BLINK : LightStatus.OFF);
  820. _signalT.ChangeLightStatus(LightType.BLUE, baData2[3] ? LightStatus.ON : baData2[8] ? LightStatus.BLINK : LightStatus.OFF);
  821. _signalT.ChangeLightStatus(LightType.WHITE, baData2[4] ? LightStatus.ON : baData2[9] ? LightStatus.BLINK : LightStatus.OFF);
  822. _signalT.ChangeLightStatus(LightType.BUZZER1, baData2[10] ? LightStatus.ON : LightStatus.OFF);
  823. /* EFEM 程序中目前没有实现
  824. _RobotErr.CLK = baData2[27]; // bit 27
  825. bool bArmNotExtendLLA = baData2[30]; // bit 30
  826. bool bArmNotExtendLLB = baData2[31]; // bit 31
  827. */
  828. } // system event
  829. else
  830. {
  831. _LPMs[eArg.Module - ModuleName.LP1].HandleEvent(eArg);
  832. } // FOUP EVENT
  833. break;
  834. case EfemOperation.GetWaferInfo:
  835. _LPMs[eArg.Module - ModuleName.LP1].HandleEvent(eArg);
  836. break;
  837. default:
  838. break;
  839. }
  840. }
  841. private void OnCommandUpdated(EfemMessage message)
  842. {
  843. if (message.Operation != EfemOperation.Ready)
  844. {
  845. if (_currentMsg.Operation != message.Operation && (_backroundMsg == null || _backroundMsg.Operation != message.Operation))
  846. {
  847. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EfemRobot, $"OnCommandUpdated() unexpected return: {message.Operation}, expect: {_currentMsg.Operation}");
  848. return;
  849. }
  850. }
  851. switch (message.Operation)
  852. {
  853. case EfemOperation.ClearError:
  854. case EfemOperation.Align:
  855. case EfemOperation.Map:
  856. case EfemOperation.Pick:
  857. case EfemOperation.Place:
  858. case EfemOperation.Extend:
  859. case EfemOperation.Goto:
  860. case EfemOperation.Orgsh:
  861. case EfemOperation.EmsStop:
  862. case EfemOperation.Light:
  863. _status = RState.End;
  864. break;
  865. case EfemOperation.StateTrack:
  866. {
  867. _waferPresence = message.Data.Count >= 1 ? message.Data.First() : string.Empty;
  868. //upper arm
  869. if (_waferPresence[0] == '1')
  870. {
  871. if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 1))
  872. {
  873. WaferManager.Instance.CreateWafer(ModuleName.EfemRobot, 1, WaferStatus.Normal);
  874. }
  875. }
  876. else
  877. {
  878. if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 1))
  879. {
  880. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.EfemRobot} upper arm has wafer information, while EFEM return empty, manually delete if really no wafer");
  881. }
  882. }
  883. //lower arm
  884. if (_waferPresence[1] == '1')
  885. {
  886. if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 0))
  887. {
  888. WaferManager.Instance.CreateWafer(ModuleName.EfemRobot, 0, WaferStatus.Normal);
  889. }
  890. }
  891. else
  892. {
  893. if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 0))
  894. {
  895. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.EfemRobot} lower arm has wafer information, while EFEM return empty, manually delete if really no wafer");
  896. }
  897. }
  898. //aligner1
  899. if (_waferPresence[2] == '1')
  900. {
  901. if (WaferManager.Instance.CheckNoWafer(ModuleName.Aligner1, 0))
  902. {
  903. WaferManager.Instance.CreateWafer(ModuleName.Aligner1, 0, WaferStatus.Normal);
  904. }
  905. }
  906. else
  907. {
  908. if (WaferManager.Instance.CheckHasWafer(ModuleName.Aligner1, 0))
  909. {
  910. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Aligner1} has wafer information, while EFEM return empty, manually delete if really no wafer");
  911. }
  912. }
  913. _IsHomed = true;
  914. _status = RState.End;
  915. }
  916. break;
  917. case EfemOperation.Home:
  918. {
  919. if (_currentMsg.Module == ModuleName.EFEM)
  920. {
  921. _LPMs[0].OnHomed();
  922. _LPMs[1].OnHomed();
  923. _LPMs[2].OnHomed();
  924. }
  925. else if (ModuleHelper.IsLoadPort(_currentMsg.Module))
  926. {
  927. _LPMs[_currentMsg.Module - ModuleName.LP1].OnHomed();
  928. }
  929. _status = RState.End;
  930. }
  931. break;
  932. case EfemOperation.Load:
  933. {
  934. _LPMs[message.Module - ModuleName.LP1].OnLoaded();
  935. _status = RState.End;
  936. }
  937. break;
  938. case EfemOperation.Unload:
  939. {
  940. _LPMs[message.Module - ModuleName.LP1].OnUnloaded();
  941. _status = RState.End;
  942. }
  943. break;
  944. case EfemOperation.CarrierId:
  945. {
  946. if (message.Head == EfemMessage.MsgHead.GET)
  947. {
  948. _LPMs[message.Module - ModuleName.LP1].OnCarrierIDRead(message.Data.First());
  949. }
  950. else
  951. {
  952. _LPMs[message.Module - ModuleName.LP1].OnCarrierIDWrite(message.Data.First());
  953. }
  954. _status = RState.End;
  955. }
  956. break;
  957. case EfemOperation.Clamp:
  958. {
  959. _LPMs[message.Module - ModuleName.LP1].OnClamped(_bIsUnloadClamp);
  960. _status = RState.End;
  961. }
  962. break;
  963. case EfemOperation.Unclamp:
  964. {
  965. _LPMs[message.Module - ModuleName.LP1].OnUnclamped();
  966. _status = RState.End;
  967. }
  968. break;
  969. case EfemOperation.Grip:
  970. {
  971. if (_currentMsg.Parameters[1] == "ARM2")
  972. {
  973. GripStateBlade1 = _currentMsg.Parameters[0];
  974. }
  975. else
  976. {
  977. GripStateBlade2 = _currentMsg.Parameters[0];
  978. }
  979. _status = RState.End;
  980. }
  981. break;
  982. case EfemOperation.Ready:
  983. {
  984. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.CommReady);
  985. }
  986. break;
  987. case EfemOperation.Lift:
  988. {
  989. if (_currentMsg.Parameters[1] == "UP")
  990. {
  991. _LiftIsUp = true;
  992. _LiftIsDown = false;
  993. }
  994. else if (_currentMsg.Parameters[1] == "DOWN")
  995. {
  996. _LiftIsUp = false;
  997. _LiftIsDown = true;
  998. }
  999. _status = RState.End;
  1000. }
  1001. break;
  1002. }
  1003. }
  1004. void SendBack(string data)
  1005. {
  1006. _socket.Write(data + '\r');
  1007. }
  1008. }
  1009. }