| .. |
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Buffer
|
8c811f7802
update double wafers scheduler
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3 周之前 |
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Dryer
|
6497945cbe
Revise jobcreate and lottrack bugs;
|
2 周之前 |
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Dummy
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f7533a737b
Initialize
|
2 月之前 |
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EFEM
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20ef460721
revise metal init wafersize check，revise efem pick/place srd routine
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1 周之前 |
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LPs
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c695867e44
update loadport status
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2 周之前 |
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Loader
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da62bf186b
update WaferHolderInfo DATA
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3 周之前 |
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Metal
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7d2a38becb
revise reservoir pump bug
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1 周之前 |
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PUF
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4648c5a74f
update efem crossed/double wafer
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4 周之前 |
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Prewet
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ea1b590024
Modify Prewet RunRecipeRoutine and KeepWetRoutine; Revise SRD Bugs;
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2 周之前 |
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Reservoir
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a631c1fcf0
add reservoir Initialize error log
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1 周之前 |
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Rinse
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6497945cbe
Revise jobcreate and lottrack bugs;
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2 周之前 |
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SRD
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85c399073c
Modify SRDInitializeHome, SRDHome, SRDProcessError; Optimize TC simulator;
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1 周之前 |
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Transporter
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4e761b030f
update async scheduler
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3 周之前 |
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Autotransfer_LP_FA.cs
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f7533a737b
Initialize
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2 月之前 |
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DVIDName.cs
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f7533a737b
Initialize
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2 月之前 |
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EntityTaskBase.cs
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f7533a737b
Initialize
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2 月之前 |
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FaModuleNotifier.cs
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f7533a737b
Initialize
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2 月之前 |
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FaRemoteManager.cs
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371876b350
add robot map routine
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2 月之前 |
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ManualTransfer.cs
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f7533a737b
Initialize
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2 月之前 |
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ModuleHomeAllRoutine.cs
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7849fa3cd1
update scheduler
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1 月之前 |
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ReservoirMetalHomeRoutine.cs
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f7533a737b
Initialize
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2 月之前 |
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ResourceMonitor.cs
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f7533a737b
Initialize
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2 月之前 |
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RouteManager.cs
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898fe7af38
update SchedulerLoader
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2 周之前 |
chenzk
7d2a38becb
revise reservoir pump bug