MetalEntity.cs 61 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Fsm;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using Aitex.Core.Utilities;
  6. using MECF.Framework.Common.Equipment;
  7. using MECF.Framework.Common.WaferHolder;
  8. using System;
  9. using MECF.Framework.Common.ToolLayout;
  10. using MECF.Framework.Common.Persistent.Reservoirs;
  11. using Aitex.Core.RT.OperationCenter;
  12. using MECF.Framework.Common.RecipeCenter;
  13. using Aitex.Core.RT.RecipeCenter;
  14. using MECF.Framework.Common.SubstrateTrackings;
  15. using Aitex.Core.RT.Device;
  16. using MECF.Framework.Common.Routine;
  17. using MECF.Framework.Common.ProcessCell;
  18. using Aitex.Core.RT.SCCore;
  19. using MECF.Framework.Common.Alarm;
  20. using CyberX8_Core;
  21. using CyberX8_RT.Devices.Metal;
  22. using CyberX8_RT.Devices.Reservoir;
  23. using CyberX8_RT.Modules.Metal;
  24. using CyberX8_RT.Modules.Reservoir;
  25. using CyberX8_RT.Modules;
  26. using CyberX8_RT.Modules.EFEM;
  27. using static Mono.Security.X509.X520;
  28. namespace CyberX8_RT.Modules.Metal
  29. {
  30. public class MetalEntity : Entity, IEntity, IModuleEntity
  31. {
  32. #region 常量
  33. private const string STRATUS = "Stratus";
  34. private const string AUTO = "Auto";
  35. private const string MANUAL = "Manual";
  36. private const string DISABLED = "Disabled";
  37. private const string ENGINEERING = "Engineering";
  38. private const string PRODUCTION = "Production";
  39. #endregion
  40. #region 内部变量
  41. /// <summary>
  42. /// 已经完成的Cycle次数
  43. /// </summary>
  44. private int _achievedCycle = 0;
  45. /// <summary>
  46. /// Metal项
  47. /// </summary>
  48. private MetalItem _metalItem;
  49. /// <summary>
  50. /// 持久化对象
  51. /// </summary>
  52. private MetalPersistentValue _persistentValue;
  53. /// <summary>
  54. /// c&m Initialize routine
  55. /// </summary>
  56. private CompactEmbranceInitializeRoutine _compactEmbranceInitializeRoutine;
  57. /// <summary>
  58. /// C&M Runrecipe routine
  59. /// </summary>
  60. private CompactEmbranceRunRecipeRoutine _compactEmbranceRunRecipeRoutine;
  61. /// <summary>
  62. /// S&H Initialize Routine
  63. /// </summary>
  64. private StandardHotInitializeRoutine _standardHotInitializeRoutine;
  65. /// <summary>
  66. /// S&H RunRecipe Routine
  67. /// </summary>
  68. private StandardHotRunRecipeRoutine _standardHotRunRecipeRoutine;
  69. /// <summary>
  70. /// Current short test routine
  71. /// </summary>
  72. private CurrentShortTestRoutine _currentShortTestRoutine;
  73. /// <summary>
  74. /// 当前Recipe
  75. /// </summary>
  76. private DepRecipe _currentRecipe = null;
  77. /// <summary>
  78. /// recipe时间
  79. /// </summary>
  80. private int _recipeTime;
  81. /// <summary>
  82. /// 循环次数
  83. /// </summary>
  84. private int _cycle = 0;
  85. /// <summary>
  86. /// 运行Recipe面
  87. /// </summary>
  88. private string _recipeSide = "";
  89. /// <summary>
  90. /// 当前RunRecipe Routine
  91. /// </summary>
  92. private RoutineBase _currentRunRecipeRoutine;
  93. /// <summary>
  94. /// Runrecipe已经运行的时间
  95. /// </summary>
  96. private int _runrecipeElapsedTime = 0;
  97. /// <summary>
  98. /// run recipe start time
  99. /// </summary>
  100. private DateTime _runRecipeStartTime;
  101. /// <summary>
  102. /// run recipe complete time
  103. /// </summary>
  104. private DateTime _runRecipeCompleteTime;
  105. /// <summary>
  106. /// 所在reservoir
  107. /// </summary>
  108. private StandardHotReservoirDevice _reservoirDevice;
  109. /// <summary>
  110. /// 所在reservoir名字
  111. /// </summary>
  112. private string _reservoirName;
  113. /// <summary>
  114. /// 当前完成recipe次数
  115. /// </summary>
  116. private int _currentCycleTimes;
  117. #endregion
  118. #region 属性
  119. /// <summary>
  120. /// 模块名称
  121. /// </summary>
  122. public ModuleName Module { get; private set; }
  123. /// <summary>
  124. /// 初始化状态
  125. /// </summary>
  126. public bool IsInit { get { return fsm.State == (int)MetalState.Init; } }
  127. /// <summary>
  128. /// 空闲状态
  129. /// </summary>
  130. public bool IsIdle { get { return fsm.State == (int)MetalState.Idle; } }
  131. /// <summary>
  132. /// 是否发生错误
  133. /// </summary>
  134. public bool IsError { get { return fsm.State == (int)MetalState.Error; } }
  135. /// <summary>
  136. /// 是否正在作业
  137. /// </summary>
  138. public bool IsBusy { get { return fsm.State > (int)MetalState.Idle; } }
  139. /// <summary>
  140. /// 是否初始化完成
  141. /// </summary>
  142. public bool IsInitialized { get { return fsm.State >= (int)MetalState.Initialized; } }
  143. /// <summary>
  144. /// 是否禁用
  145. /// </summary>
  146. public bool IsDisable { get { return _persistentValue == null || _persistentValue.OperatingMode == DISABLED; } }
  147. /// <summary>
  148. /// 自动模式
  149. /// </summary>
  150. public bool IsAuto { get { return _persistentValue != null && _persistentValue.OperatingMode == AUTO; } }
  151. /// <summary>
  152. /// 自动模式
  153. /// </summary>
  154. public bool IsManual { get { return _persistentValue != null && _persistentValue.OperatingMode == MANUAL; } }
  155. /// <summary>
  156. /// 是否为工程模式
  157. /// </summary>
  158. public bool IsEngineering { get { return _persistentValue != null && _persistentValue.RecipeOperatingMode == ENGINEERING; } }
  159. /// <summary>
  160. /// 是否为产品模式
  161. /// </summary>
  162. public bool IsProduction { get { return _persistentValue != null && _persistentValue.RecipeOperatingMode == PRODUCTION; } }
  163. /// <summary>
  164. /// WaferHolder信息
  165. /// </summary>
  166. public WaferHolderInfo WaferHolderInfo { get { return WaferHolderManager.Instance.GetWaferHolder(Module.ToString()); } }
  167. /// <summary>
  168. /// 已完成的RunRecipeCycle次数
  169. /// </summary>
  170. public int AchievedCycle { get { return _achievedCycle; } }
  171. /// <summary>
  172. /// 当前状态机状态
  173. /// </summary>
  174. public int State { get { return fsm.State; } }
  175. /// <summary>
  176. /// 当前Metal设置的WaferSize
  177. /// </summary>
  178. public int MetalWaferSize { get { return _persistentValue.MetalWaferSize; } }
  179. /// <summary>
  180. /// recipe时长
  181. /// </summary>
  182. public int RecipeTime { get { return _recipeTime; } }
  183. /// <summary>
  184. /// 剩余时间
  185. /// </summary>
  186. public override int TimeToReady
  187. {
  188. get
  189. {
  190. if (IsIdle)
  191. {
  192. return 0;
  193. }
  194. switch (fsm.State)
  195. {
  196. case (int)MetalState.RunReciping:
  197. return Math.Max(_recipeTime - fsm.ElapsedTime / 1000, 0);
  198. default:
  199. return 0;
  200. }
  201. }
  202. }
  203. /// <summary>
  204. /// 用量
  205. /// </summary>
  206. public MetalUsage MetalUsage { get { return MetalUsageManager.Instance.GetMetalUsage(Module.ToString()); } }
  207. #endregion
  208. /// <summary>
  209. /// 构造函数
  210. /// </summary>
  211. /// <param name="moduleName"></param>
  212. public MetalEntity(ModuleName moduleName)
  213. {
  214. this.Module = moduleName;
  215. WaferManager.Instance.SubscribeLocation(Module, 2);
  216. InitialFsm();
  217. }
  218. /// <summary>
  219. /// 初始化
  220. /// </summary>
  221. /// <returns></returns>
  222. protected override bool Init()
  223. {
  224. InitializeDATA();
  225. InitializeParameter();
  226. InitializeRoutine();
  227. InitializeOperation();
  228. return true;
  229. }
  230. /// <summary>
  231. /// 初始化参数
  232. /// </summary>
  233. private void InitializeParameter()
  234. {
  235. _persistentValue = MetalPersistentManager.Instance.GetMetalPersistentValue(Module.ToString());
  236. if (_persistentValue == null)
  237. {
  238. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), "Persistent Value Object is not exist");
  239. }
  240. _metalItem = MetalItemManager.Instance.GetMetalItem(Module.ToString());
  241. _reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  242. _reservoirDevice = DEVICE.GetDevice<StandardHotReservoirDevice>($"{_reservoirName}");
  243. }
  244. /// <summary>
  245. /// 初始化Routine
  246. /// </summary>
  247. private void InitializeRoutine()
  248. {
  249. _compactEmbranceInitializeRoutine = new CompactEmbranceInitializeRoutine(Module.ToString());
  250. _standardHotInitializeRoutine = new StandardHotInitializeRoutine(Module.ToString());
  251. _compactEmbranceRunRecipeRoutine = new CompactEmbranceRunRecipeRoutine(Module.ToString());
  252. _standardHotRunRecipeRoutine = new StandardHotRunRecipeRoutine(Module.ToString());
  253. _currentShortTestRoutine = new CurrentShortTestRoutine(Module.ToString());
  254. }
  255. /// <summary>
  256. /// 初始化操作
  257. /// </summary>
  258. private void InitializeOperation()
  259. {
  260. OP.Subscribe($"{Module}.InitializeAll", (cmd, args) => { return CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Initialize); });
  261. OP.Subscribe($"{Module}.CycleManualProcessRecipe", (cmd, args) =>
  262. {
  263. DepRecipe recipe = RecipeFileManager.Instance.LoadGenericityRecipe<DepRecipe>(args[0].ToString());
  264. if (recipe == null)
  265. {
  266. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{args[0]} recipe is null");
  267. return false;
  268. }
  269. object[] objects = new object[args.Length];
  270. objects[0] = recipe;
  271. for (int i = 1; i < args.Length; i++)
  272. {
  273. objects[i] = args[i];
  274. }
  275. return CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.RunRecipe, objects);
  276. });
  277. OP.Subscribe($"{Module}.CurrentShortTest", (cmd, args) => { return CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.CurrentShortTest); });
  278. OP.Subscribe($"{Module}.UpdateMetalUsage", UpdateMetalUsageAction);
  279. OP.Subscribe($"{Module}.Abort", (cmd, args) => { return CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Abort); });
  280. }
  281. /// <summary>
  282. /// EnterInit
  283. /// </summary>
  284. public void EnterInit()
  285. {
  286. if ((MetalState)fsm.State != MetalState.Idle) return;
  287. else
  288. {
  289. CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Init);
  290. }
  291. }
  292. /// 初始化状态机
  293. /// </summary>
  294. private void InitialFsm()
  295. {
  296. fsm = new StateMachine<MetalEntity>(Module.ToString(), (int)MetalState.Init, 20);
  297. fsm.EnableRepeatedMsg(true);
  298. AnyStateTransition(MetalMsg.Error, EnterError, MetalState.Error);
  299. //Initialize
  300. AnyStateTransition(MetalMsg.Initialize, InitializeAll, MetalState.Initializing);
  301. Transition(MetalState.Initializing, FSM_MSG.TIMER, InitializeAllMonitor, MetalState.Initialized);
  302. //直接进入Idle
  303. Transition(MetalState.Initialized, FSM_MSG.TIMER, NullFunc, MetalState.Idle);
  304. //RunRecipe
  305. Transition(MetalState.Idle, MetalMsg.RunRecipe, RunRecipe, MetalState.RunReciping);
  306. Transition(MetalState.WaitForRunRecipe, MetalMsg.RunRecipe, RunRecipe, MetalState.RunReciping);
  307. Transition(MetalState.RunReciping, FSM_MSG.TIMER, RunRecipeMonitor, MetalState.Idle);
  308. Transition(MetalState.RunReciping, MetalMsg.Abort, AbortRecipe, MetalState.Abort);
  309. //Current Short Test
  310. Transition(MetalState.Idle, MetalMsg.CurrentShortTest, CurrentShortTest, MetalState.CurrentShortTesting);
  311. Transition(MetalState.CurrentShortTesting, FSM_MSG.TIMER, CurrentShortTestMonitor, MetalState.WaitCloseFlow);
  312. Transition(MetalState.WaitCloseFlow, MetalMsg.CloseFlowValve, CloseFlowValve, MetalState.WaitOpenFlow);
  313. Transition(MetalState.WaitOpenFlow, MetalMsg.OpenFlowValve, OpenFlowValve, MetalState.WaitForRunRecipe);
  314. //Enter Init
  315. Transition(MetalState.Idle, MetalMsg.Init, NullFunc, MetalState.Init);
  316. EnumLoop<MetalState>.ForEach((item) => { fsm.MapState((int)item, item.ToString()); });
  317. EnumLoop<MetalMsg>.ForEach((item) => { fsm.MapMessage((int)item, item.ToString()); });
  318. }
  319. /// <summary>
  320. /// 初始化DATA
  321. /// </summary>
  322. private void InitializeDATA()
  323. {
  324. InitializeSVID();
  325. DATA.Subscribe($"{Module}.FsmState", () => ((MetalState)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  326. DATA.Subscribe($"{Module}.WaferHolder", () => WaferHolderInfo, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  327. DATA.Subscribe($"{Module}.AchievedCycle", () => AchievedCycle, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  328. DATA.Subscribe($"{Module}.IsInit", () => IsInit, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  329. DATA.Subscribe($"{Module}.IsIdle", () => IsIdle, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  330. DATA.Subscribe($"{Module}.IsError", () => IsError, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  331. DATA.Subscribe($"{Module}.IsBusy", () => IsBusy, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  332. DATA.Subscribe($"{Module}.IsDisable", () => IsDisable, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  333. DATA.Subscribe($"{Module}.CurrentRecipe", () => _currentRecipe != null ? _currentRecipe.Ppid : "", SubscriptionAttribute.FLAG.IgnoreSaveDB);
  334. DATA.Subscribe($"{Module}.MetalUsage", () => MetalUsage, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  335. }
  336. /// <summary>
  337. /// 初始化SVID
  338. /// </summary>
  339. private void InitializeSVID()
  340. {
  341. DATA.Subscribe($"{Module}.State", () => ((MetalState)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  342. DATA.Subscribe($"{Module}.LotID", () => WaferHolderInfo?.LotId , SubscriptionAttribute.FLAG.IgnoreSaveDB);
  343. DATA.Subscribe($"{Module}.WSID", () => WaferHolderInfo?.Id, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  344. DATA.Subscribe($"{Module}.LSAID", () => WaferHolderInfo?.CrsAId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  345. DATA.Subscribe($"{Module}.LSBID", () => WaferHolderInfo?.CrsBId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  346. DATA.Subscribe($"{Module}.ModuleRecipe", () => _currentRecipe?.Ppid, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  347. DATA.Subscribe($"{Module}.SequenceRecipe", () =>WaferHolderInfo?.SequenceId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  348. DATA.Subscribe($"{Module}.WaferAID", () => WaferHolderInfo?.WaferAId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  349. DATA.Subscribe($"{Module}.WaferBID", () => WaferHolderInfo?.WaferBId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  350. DATA.Subscribe($"{Module}.TotalTime", () => _recipeTime, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  351. DATA.Subscribe($"{Module}.TimeRemain", () => _recipeTime != 0 && _currentRunRecipeRoutine != null ? (_recipeTime - Math.Round((double)_currentRunRecipeRoutine.ElapsedMilliseconds / 1000, 0)) : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  352. DATA.Subscribe($"{Module}.Task", () => WaferHolderInfo?.CurrentControlJobId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  353. DATA.Subscribe($"{Module}.OperatingMode", () => _persistentValue != null ? _persistentValue.OperatingMode : "None", SubscriptionAttribute.FLAG.IgnoreSaveDB);
  354. DATA.Subscribe($"{Module}.TotalUsage", () => MetalUsage != null ? MetalUsage.TotalUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  355. DATA.Subscribe($"{Module}.TotalUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  356. DATA.Subscribe($"{Module}.TotalUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  357. DATA.Subscribe($"{Module}.AnodeAUsage", () => MetalUsage != null ? MetalUsage.AnodeAUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  358. DATA.Subscribe($"{Module}.AnodeAUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  359. DATA.Subscribe($"{Module}.AnodeAUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  360. DATA.Subscribe($"{Module}.AnodeBUsage", () => MetalUsage != null ? MetalUsage.AnodeBUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  361. DATA.Subscribe($"{Module}.AnodeBUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  362. DATA.Subscribe($"{Module}.AnodeBUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  363. DATA.Subscribe($"{Module}.MembranceAUsage", () => MetalUsage != null ? MetalUsage.MembranceAUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  364. DATA.Subscribe($"{Module}.MembranceAUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  365. DATA.Subscribe($"{Module}.MembranceAUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  366. DATA.Subscribe($"{Module}.MembranceBUsage", () => MetalUsage != null ? MetalUsage.MembranceBUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  367. DATA.Subscribe($"{Module}.MembranceBUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  368. DATA.Subscribe($"{Module}.MembranceBUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  369. DATA.Subscribe($"{Module}.TotalWafers", () => MetalUsage != null ? MetalUsage.TotalWafers : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  370. DATA.Subscribe($"{Module}.TotalWafers.WarningLimit", () => SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  371. DATA.Subscribe($"{Module}.TotalWafers.FaultLimit", () => SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  372. DATA.Subscribe($"{Module}.AnodeAWafers", () => MetalUsage != null ? MetalUsage.AnodeAWafers : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  373. DATA.Subscribe($"{Module}.AnodeAWafers.WarningLimit", () => SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  374. DATA.Subscribe($"{Module}.AnodeAWafers.FaultLimit", () => SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  375. DATA.Subscribe($"{Module}.AnodeBWafers", () => MetalUsage != null ? MetalUsage.AnodeBWafers : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  376. DATA.Subscribe($"{Module}.AnodeBWafers.WarningLimit", () => SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  377. DATA.Subscribe($"{Module}.AnodeBWafers.FaultLimit", () => SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  378. }
  379. /// <summary>
  380. /// 进入错误状态
  381. /// </summary>
  382. /// <param name="args"></param>
  383. /// <returns></returns>
  384. private bool EnterError(object[] args)
  385. {
  386. if (State == (int)MetalState.RunReciping)
  387. {
  388. if (_metalItem.SubType == STRATUS)
  389. {
  390. _standardHotRunRecipeRoutine.Abort();
  391. }
  392. else
  393. {
  394. _compactEmbranceRunRecipeRoutine.Abort();
  395. }
  396. }
  397. return true;
  398. }
  399. /// <summary>
  400. /// UpdateMetalUsageAction
  401. /// </summary>
  402. /// <param name="cmd"></param>
  403. /// <param name="param"></param>
  404. /// <returns></returns>
  405. private bool UpdateMetalUsageAction(string cmd, object[] args)
  406. {
  407. if (args.Length > 2)
  408. {
  409. MetalUsageManager.Instance.UpdateMetalUsageByManualOperation(args[0].ToString(), args[1].ToString(), args[2].ToString());
  410. LOG.WriteLog(eEvent.INFO_METAL, Module.ToString(), $"New {args[1].ToString()} value {args[2].ToString()} was input");
  411. }
  412. return true;
  413. }
  414. #region Initialize All
  415. /// <summary>
  416. /// 初始化
  417. /// </summary>
  418. /// <param name="param"></param>
  419. /// <returns></returns>
  420. private bool InitializeAll(object[] param)
  421. {
  422. if (fsm.State == (int)MetalState.Initializing)
  423. {
  424. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), "state is Initializing,cannot do initialize");
  425. return false;
  426. }
  427. if (!CheckReservoirInitialized())
  428. {
  429. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), "Reservoir is not initialized");
  430. return false;
  431. }
  432. if ("Auto".Equals(_persistentValue.OperatingMode))
  433. {
  434. if (!CheckReservoirIsAuto())
  435. {
  436. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), "Reservoir is not in Auto OperationMode");
  437. return false;
  438. }
  439. }
  440. if (_metalItem.SubType == STRATUS)
  441. {
  442. return _standardHotInitializeRoutine.Start(_persistentValue) == RState.Running;
  443. }
  444. else
  445. {
  446. return _compactEmbranceInitializeRoutine.Start(_persistentValue) == RState.Running;
  447. }
  448. }
  449. /// <summary>
  450. /// 检验Reservoir是否Initialized
  451. /// </summary>
  452. /// <returns></returns>
  453. private bool CheckReservoirInitialized()
  454. {
  455. string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  456. ReservoirEntity reservoirEntity = Singleton<RouteManager>.Instance.GetModule<ReservoirEntity>(reservoir);
  457. if (reservoirEntity != null)
  458. {
  459. return reservoirEntity.IsInitialized;
  460. }
  461. return false;
  462. }
  463. /// <summary>
  464. /// 检验Reservoir是否Auto
  465. /// </summary>
  466. /// <returns></returns>
  467. private bool CheckReservoirIsAuto()
  468. {
  469. string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  470. ReservoirsPersistentValue reservoirsPersistentValue = ReservoirsPersistentManager.Instance.GetReservoirsPersistentValue(reservoir);
  471. if ("Auto".Equals(reservoirsPersistentValue.OperatingMode))
  472. {
  473. return true;
  474. }
  475. return false;
  476. }
  477. /// <summary>
  478. /// 初始化监控
  479. /// </summary>
  480. /// <param name="param"></param>
  481. /// <returns></returns>
  482. private bool InitializeAllMonitor(object[] param)
  483. {
  484. RState rsstate = RState.Running;
  485. if (_metalItem.SubType == STRATUS)
  486. {
  487. rsstate = _standardHotInitializeRoutine.Monitor();
  488. }
  489. else
  490. {
  491. rsstate = _compactEmbranceInitializeRoutine.Monitor();
  492. }
  493. if (rsstate == RState.End)
  494. {
  495. return true;
  496. }
  497. else if (rsstate == RState.Failed || rsstate == RState.Timeout)
  498. {
  499. PostMsg(MetalMsg.Error);
  500. return false;
  501. }
  502. return false;
  503. }
  504. #endregion
  505. #region RunRecipe
  506. /// <summary>
  507. /// Run Recipe
  508. /// </summary>
  509. /// <param name="param"></param>
  510. /// <returns></returns>
  511. private bool RunRecipe(object[] param)
  512. {
  513. MetalUsageMointor(); //Metal run recipe前检查PMCounter消耗
  514. string reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  515. if (_metalItem.SubType == STRATUS)
  516. {
  517. StandardHotReservoirDevice resDevice = DEVICE.GetDevice<StandardHotReservoirDevice>(reservoirName);
  518. resDevice.ReservoirUsageMonitor();
  519. }
  520. DepRecipe recipe = param[0] as DepRecipe;
  521. _recipeSide = param[1].ToString();
  522. _cycle = (int)param[2];
  523. _runrecipeElapsedTime = 0;
  524. bool result = false;
  525. if (_metalItem.SubType == STRATUS)
  526. {
  527. _currentRunRecipeRoutine = _standardHotRunRecipeRoutine;
  528. result = _standardHotRunRecipeRoutine.Start(recipe, _recipeSide,_cycle) == RState.Running;
  529. }
  530. else
  531. {
  532. _currentRunRecipeRoutine = _compactEmbranceRunRecipeRoutine;
  533. result = _compactEmbranceRunRecipeRoutine.Start(recipe, _recipeSide, _cycle) == RState.Running;
  534. }
  535. if (result)
  536. {
  537. if (WaferHolderInfo != null)
  538. {
  539. WaferHolderInfo.MetalModuleName = Module;
  540. }
  541. _recipeTime = (recipe.CalculateRecipeTotalTime())*_cycle;
  542. _currentRecipe = recipe;
  543. if (WaferHolderInfo != null && WaferHolderInfo.SchedulerModules != null && WaferHolderInfo.SchedulerModules.Count != 0)
  544. {
  545. LOG.WriteLog(eEvent.INFO_METAL, Module.ToString(), $"{WaferHolderInfo?.Id} {string.Join(",", WaferHolderInfo.SchedulerModules)}");
  546. }
  547. _runRecipeStartTime = DateTime.Now;
  548. if (WaferHolderInfo != null && _currentRecipe != null)
  549. {
  550. FaModuleNotifier.Instance.NotifyWaferShuttleRecipeStart(WaferHolderInfo, _currentRecipe.Ppid);
  551. }
  552. }
  553. return result;
  554. }
  555. /// <summary>
  556. /// RunRecipe监控
  557. /// </summary>
  558. /// <param name="param"></param>
  559. /// <returns></returns>
  560. private bool RunRecipeMonitor(object[] param)
  561. {
  562. RState rsstate = RState.Running;
  563. if (_metalItem.SubType == STRATUS)
  564. {
  565. rsstate = _standardHotRunRecipeRoutine.Monitor();
  566. if (rsstate == RState.Running)
  567. {
  568. StandardHotMetalDevice _standardHotMetalDevice = DEVICE.GetDevice<StandardHotMetalDevice>(Module.ToString());
  569. if (_standardHotMetalDevice.MetalDeviceData.CellFlow <= 0)
  570. {
  571. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"reservoir metal cell flow is 0");
  572. rsstate = RState.Failed;
  573. }
  574. }
  575. _achievedCycle = _standardHotRunRecipeRoutine.GetCurrentCycle();
  576. }
  577. else
  578. {
  579. rsstate = _compactEmbranceRunRecipeRoutine.Monitor();
  580. if (rsstate == RState.Running)
  581. {
  582. CompactMembranMetalDevice _compactMembranMetalDevice = DEVICE.GetDevice<CompactMembranMetalDevice>(Module.ToString());
  583. if (_compactMembranMetalDevice.MetalDeviceData.CellFlow <= 0)
  584. {
  585. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"reservoir metal cell flow is 0");
  586. rsstate = RState.Failed;
  587. }
  588. if (_compactMembranMetalDevice.ANACellFlow.CounterValue <= 0) //检查hold flow
  589. {
  590. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"reservoir AnodeA flow is 0");
  591. rsstate = RState.Failed;
  592. }
  593. if (_compactMembranMetalDevice.ANBCellFlow.CounterValue <= 0)
  594. {
  595. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"reservoir AnodeB flow is 0");
  596. rsstate = RState.Failed;
  597. }
  598. }
  599. }
  600. if (Singleton<RouteManager>.Instance.IsAutoRunning && _runrecipeElapsedTime != TimeToReady)
  601. {
  602. _runrecipeElapsedTime = TimeToReady;
  603. LOG.WriteLog(eEvent.INFO_METAL, Module.ToString(), $"{WaferHolderInfo?.Id} {Module} RunRecipe TimeToReady {TimeToReady}s.");
  604. }
  605. if (rsstate == RState.End)
  606. {
  607. _recipeTime = 0;
  608. if (WaferHolderInfo != null)
  609. {
  610. double anodeAUsage = GetAnodeAUsage();
  611. double anodeBUsage = GetAnodeBUsage();
  612. MetalUsageManager.Instance.UpdateMetalUsage(Module.ToString(), _recipeSide, anodeAUsage, anodeBUsage);
  613. MetalUsageMointor(); //检查PMCounter消耗
  614. //CMM Usage
  615. string reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  616. if (_metalItem.SubType == STRATUS)
  617. {
  618. StandardHotReservoirDevice resDevice = DEVICE.GetDevice<StandardHotReservoirDevice>(reservoirName);
  619. resDevice.ReservoirUsageMonitor();
  620. resDevice.SetExportCMMUsage();
  621. }
  622. WaferHolderInfo.LastMetalRecipeCompleteTime = DateTime.Now;
  623. }
  624. _runrecipeElapsedTime = 0;
  625. //记录LotTrack
  626. _runRecipeCompleteTime = DateTime.Now;
  627. int timeLength = (int)(_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds;
  628. if (_metalItem.SubType == STRATUS)
  629. {
  630. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  631. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _standardHotRunRecipeRoutine.MetalLotTrackDatas,
  632. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  633. }
  634. else
  635. {
  636. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  637. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _compactEmbranceRunRecipeRoutine.MetalLotTrackDatas,
  638. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  639. }
  640. if (WaferHolderInfo != null && _currentRecipe != null)
  641. {
  642. FaModuleNotifier.Instance.NotifyWaferShuttleRecipeEnd(WaferHolderInfo, _currentRecipe.Ppid, timeLength);
  643. }
  644. return true;
  645. }
  646. else if (rsstate == RState.Failed || rsstate == RState.Timeout)
  647. {
  648. _recipeTime = 0;
  649. if (WaferHolderInfo != null)
  650. {
  651. double anodeAUsage = GetAnodeAUsage();
  652. double anodeBUsage = GetAnodeBUsage();
  653. MetalUsageManager.Instance.UpdateMetalUsage(Module.ToString(), _recipeSide, anodeAUsage, anodeBUsage);
  654. MetalUsageMointor(); //失败了也要检查PMCounter消耗
  655. //CMMUsage
  656. string reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  657. if (_metalItem.SubType == STRATUS)
  658. {
  659. StandardHotReservoirDevice resDevice = DEVICE.GetDevice<StandardHotReservoirDevice>(reservoirName);
  660. resDevice.ReservoirUsageMonitor();
  661. resDevice.SetExportCMMUsage();
  662. }
  663. }
  664. _runrecipeElapsedTime = 0;
  665. if (WaferHolderInfo != null && _currentRecipe != null)
  666. {
  667. WaferHolderInfo.LastMetalRecipeCompleteTime = DateTime.Now;
  668. }
  669. PostMsg(MetalMsg.Error);
  670. //记录LotTrack
  671. _runRecipeCompleteTime = DateTime.Now;
  672. if (_metalItem.SubType == STRATUS)
  673. {
  674. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  675. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _standardHotRunRecipeRoutine.MetalLotTrackDatas,
  676. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  677. }
  678. else
  679. {
  680. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  681. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _compactEmbranceRunRecipeRoutine.MetalLotTrackDatas,
  682. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  683. }
  684. if (WaferHolderInfo != null && _currentRecipe != null)
  685. {
  686. FaModuleNotifier.Instance.NotifyWaferShuttleRecipeFailed(WaferHolderInfo, _currentRecipe.Ppid);
  687. }
  688. return false;
  689. }
  690. return false;
  691. }
  692. /// <summary>
  693. /// 监控 PM Counter Metal用量
  694. /// </summary>
  695. private void MetalUsageMointor()
  696. {
  697. MetalUsage metalUsage = MetalUsageManager.Instance.GetMetalUsage(Module.ToString());
  698. if (metalUsage != null)
  699. {
  700. //TotalAUsage
  701. if (metalUsage.TotalUsage > SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit") != 0)
  702. {
  703. if (metalUsage.TotalUsage > SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit"))
  704. {
  705. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit")}");
  706. PostMsg(MetalMsg.Error);
  707. AlarmListManager.Instance.AddDataError(Module.ToString(),
  708. $"{Module.ToString()}.metalUsage.TotalUsage",
  709. $"{Module.ToString()} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit")}");
  710. }
  711. else
  712. {
  713. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit")}");
  714. AlarmListManager.Instance.AddWarn(Module.ToString(),
  715. $"{Module.ToString()}.metalUsage.TotalUsage",
  716. $"{Module.ToString()} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit")}");
  717. }
  718. }
  719. //AnodeAUsage
  720. if (metalUsage.AnodeAUsage > SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit") != 0)
  721. {
  722. if (metalUsage.AnodeAUsage > SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit"))
  723. {
  724. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit")}");
  725. PostMsg(MetalMsg.Error);
  726. AlarmListManager.Instance.AddDataError(Module.ToString(),
  727. $"{Module.ToString()}.metalUsage.AnodeAUsage",
  728. $"{Module.ToString()} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit")}");
  729. }
  730. else
  731. {
  732. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit")}");
  733. AlarmListManager.Instance.AddWarn(Module.ToString(),
  734. $"{Module.ToString()}.metalUsage.AnodeAUsage",
  735. $"{Module.ToString()} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit")}");
  736. }
  737. }
  738. //AnodeBUsage
  739. if (metalUsage.AnodeBUsage > SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit") != 0)
  740. {
  741. if (metalUsage.AnodeBUsage > SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit"))
  742. {
  743. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit")}");
  744. PostMsg(MetalMsg.Error);
  745. AlarmListManager.Instance.AddDataError(Module.ToString(),
  746. $"{Module.ToString()}.metalUsage.AnodeBUsage",
  747. $"{Module.ToString()} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit")}");
  748. }
  749. else
  750. {
  751. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit")}");
  752. AlarmListManager.Instance.AddWarn(Module.ToString(),
  753. $"{Module.ToString()}.metalUsage.AnodeBUsage",
  754. $"{Module.ToString()} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit")}");
  755. }
  756. }
  757. //MembraneAUsage
  758. if (metalUsage.MembranceAUsage > SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit") != 0)
  759. {
  760. if (metalUsage.MembranceAUsage > SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit"))
  761. {
  762. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit")}");
  763. PostMsg(MetalMsg.Error);
  764. AlarmListManager.Instance.AddDataError(Module.ToString(),
  765. $"{Module.ToString()}.metalUsage.MembraneAUsage",
  766. $"{Module.ToString()} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit")}");
  767. }
  768. else
  769. {
  770. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit")}");
  771. AlarmListManager.Instance.AddWarn(Module.ToString(),
  772. $"{Module.ToString()}.metalUsage.MembraneAUsage",
  773. $"{Module.ToString()} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit")}");
  774. }
  775. }
  776. //MembraneBUsage
  777. if (metalUsage.MembranceBUsage > SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit") != 0)
  778. {
  779. if (metalUsage.MembranceBUsage > SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit"))
  780. {
  781. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit")}");
  782. PostMsg(MetalMsg.Error);
  783. AlarmListManager.Instance.AddDataError(Module.ToString(),
  784. $"{Module.ToString()}.metalUsage.MembraneBUsage",
  785. $"{Module.ToString()} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit")}");
  786. }
  787. else
  788. {
  789. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit")}");
  790. AlarmListManager.Instance.AddWarn(Module.ToString(),
  791. $"{Module.ToString()}.metalUsage.MembraneBUsage",
  792. $"{Module.ToString()} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit")}");
  793. }
  794. }
  795. //TotalWafer
  796. if (metalUsage.TotalWafers > SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit") && SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit") != 0)
  797. {
  798. if (metalUsage.TotalWafers > SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit"))
  799. {
  800. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit")}");
  801. PostMsg(MetalMsg.Error);
  802. AlarmListManager.Instance.AddDataError(Module.ToString(),
  803. $"{Module.ToString()}.metalUsage.TotalWafers",
  804. $"{Module.ToString()} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit")}");
  805. }
  806. else
  807. {
  808. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit")}");
  809. AlarmListManager.Instance.AddWarn(Module.ToString(),
  810. $"{Module.ToString()}.metalUsage.TotalWafers",
  811. $"{Module.ToString()} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit")}");
  812. }
  813. }
  814. //AnodeAWafer
  815. if (metalUsage.AnodeAWafers > SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit") != 0)
  816. {
  817. if (metalUsage.AnodeAWafers > SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit"))
  818. {
  819. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit")}");
  820. PostMsg(MetalMsg.Error);
  821. AlarmListManager.Instance.AddDataError(Module.ToString(),
  822. $"{Module.ToString()}.metalUsage.AnodeAWafers",
  823. $"{Module.ToString()} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit")}");
  824. }
  825. else
  826. {
  827. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit")}");
  828. AlarmListManager.Instance.AddWarn(Module.ToString(),
  829. $"{Module.ToString()}.metalUsage.AnodeAWafers",
  830. $"{Module.ToString()} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit")}");
  831. }
  832. }
  833. //AnodeBWafer
  834. if (metalUsage.AnodeBWafers > SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit") != 0)
  835. {
  836. if (metalUsage.AnodeBWafers > SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit"))
  837. {
  838. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit")}");
  839. PostMsg(MetalMsg.Error);
  840. AlarmListManager.Instance.AddDataError(Module.ToString(),
  841. $"{Module.ToString()}.metalUsage.AnodeBWafers",
  842. $"{Module.ToString()} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit")}");
  843. }
  844. else
  845. {
  846. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit")}");
  847. AlarmListManager.Instance.AddWarn(Module.ToString(),
  848. $"{Module.ToString()}.metalUsage.AnodeBWafers",
  849. $"{Module.ToString()} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit")}");
  850. }
  851. }
  852. //AnodeAbathUsage
  853. if (metalUsage.AnodeABathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit") != 0)
  854. {
  855. if (metalUsage.AnodeABathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit"))
  856. {
  857. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit")}");
  858. PostMsg(MetalMsg.Error);
  859. AlarmListManager.Instance.AddDataError(Module.ToString(),
  860. $"{Module.ToString()}.metalUsage.AnodeABathUsage",
  861. $"{Module.ToString()} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit")}");
  862. }
  863. else
  864. {
  865. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit")}");
  866. AlarmListManager.Instance.AddWarn(Module.ToString(),
  867. $"{Module.ToString()}.metalUsage.AnodeABathUsage",
  868. $"{Module.ToString()} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit")}");
  869. }
  870. }
  871. //AnodeBbathUsage
  872. if (metalUsage.AnodeBBathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit") != 0)
  873. {
  874. if (metalUsage.AnodeBBathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit"))
  875. {
  876. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit")}");
  877. PostMsg(MetalMsg.Error);
  878. AlarmListManager.Instance.AddDataError(Module.ToString(),
  879. $"{Module.ToString()}.metalUsage.AnodeBBathUsage",
  880. $"{Module.ToString()} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit")}");
  881. }
  882. else
  883. {
  884. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit")}");
  885. AlarmListManager.Instance.AddWarn(Module.ToString(),
  886. $"{Module.ToString()}.metalUsage.AnodeBBathUsage",
  887. $"{Module.ToString()} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit")}");
  888. }
  889. }
  890. }
  891. }
  892. /// <summary>
  893. /// 获取A面使用的电量
  894. /// </summary>
  895. /// <returns></returns>
  896. private double GetAnodeAUsage()
  897. {
  898. if (_metalItem.SubType == STRATUS)
  899. {
  900. return Math.Round(_standardHotRunRecipeRoutine.AnodeAUsage, 3);
  901. }
  902. else
  903. {
  904. return Math.Round(_compactEmbranceRunRecipeRoutine.AnodeAUsage, 3);
  905. }
  906. }
  907. /// <summary>
  908. /// 获取B面使用的电量
  909. /// </summary>
  910. /// <returns></returns>
  911. private double GetAnodeBUsage()
  912. {
  913. if (_metalItem.SubType == STRATUS)
  914. {
  915. return Math.Round(_standardHotRunRecipeRoutine.AnodeBUsage, 3);
  916. }
  917. else
  918. {
  919. return Math.Round(_compactEmbranceRunRecipeRoutine.AnodeBUsage, 3);
  920. }
  921. }
  922. /// <summary>
  923. /// Abort Recipe
  924. /// </summary>
  925. /// <param name="param"></param>
  926. /// <returns></returns>
  927. public bool AbortRecipe(object[] param)
  928. {
  929. _runRecipeCompleteTime = DateTime.Now;
  930. if (_metalItem.SubType == STRATUS)
  931. {
  932. _standardHotRunRecipeRoutine.Abort();
  933. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  934. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _standardHotRunRecipeRoutine.MetalLotTrackDatas,
  935. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  936. }
  937. else
  938. {
  939. _compactEmbranceRunRecipeRoutine.Abort();
  940. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  941. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _compactEmbranceRunRecipeRoutine.MetalLotTrackDatas,
  942. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  943. }
  944. return true;
  945. }
  946. #endregion
  947. #region Current Short Test
  948. /// <summary>
  949. /// Current Short Test
  950. /// </summary>
  951. /// <param name="param"></param>
  952. /// <returns></returns>
  953. private bool CurrentShortTest(object[] param)
  954. {
  955. return _currentShortTestRoutine.Start() == RState.Running;
  956. }
  957. /// <summary>
  958. /// Current Short test监控
  959. /// </summary>
  960. /// <param name="param"></param>
  961. /// <returns></returns>
  962. private bool CurrentShortTestMonitor(object[] param)
  963. {
  964. RState rsstate = _currentShortTestRoutine.Monitor();
  965. if (rsstate == RState.End)
  966. {
  967. return true;
  968. }
  969. else if (rsstate == RState.Failed || rsstate == RState.Timeout)
  970. {
  971. PostMsg(MetalMsg.Error);
  972. return false;
  973. }
  974. return false;
  975. }
  976. #endregion
  977. #region Close Flow Valve
  978. /// <summary>
  979. /// 关闭Flow Valve
  980. /// </summary>
  981. /// <param name="param"></param>
  982. /// <returns></returns>
  983. private bool CloseFlowValve(object[] param)
  984. {
  985. if (_metalItem.SubType == STRATUS)
  986. {
  987. StandardHotMetalDevice device = DEVICE.GetDevice<StandardHotMetalDevice>(Module.ToString());
  988. if (device != null)
  989. {
  990. return device.SwitchToBypass("", null);
  991. }
  992. return false;
  993. }
  994. else
  995. {
  996. CompactMembranMetalDevice device = DEVICE.GetDevice<CompactMembranMetalDevice>(Module.ToString());
  997. if (device != null)
  998. {
  999. string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  1000. CompactMembranReservoirDevice reservoirDevice = DEVICE.GetDevice<CompactMembranReservoirDevice>(reservoir);
  1001. if (reservoirDevice != null)
  1002. {
  1003. bool result = reservoirDevice.CAByPassOn("", null);
  1004. if (result)
  1005. {
  1006. return device.CellFlowValveOff("", null);
  1007. }
  1008. }
  1009. }
  1010. return false;
  1011. }
  1012. }
  1013. #endregion
  1014. #region Open Flow Valve
  1015. /// <summary>
  1016. /// 打开Flow Valve
  1017. /// </summary>
  1018. /// <param name="param"></param>
  1019. /// <returns></returns>
  1020. private bool OpenFlowValve(object[] param)
  1021. {
  1022. if (_metalItem.SubType == STRATUS)
  1023. {
  1024. StandardHotMetalDevice device = DEVICE.GetDevice<StandardHotMetalDevice>(Module.ToString());
  1025. if (device != null)
  1026. {
  1027. bool result = device.SwitchToFlow("", null);
  1028. if (result)
  1029. {
  1030. return device.OpenPump("", null);
  1031. }
  1032. }
  1033. return false;
  1034. }
  1035. else
  1036. {
  1037. CompactMembranMetalDevice device = DEVICE.GetDevice<CompactMembranMetalDevice>(Module.ToString());
  1038. if (device != null)
  1039. {
  1040. string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  1041. CompactMembranReservoirDevice reservoirDevice = DEVICE.GetDevice<CompactMembranReservoirDevice>(reservoir);
  1042. if (reservoirDevice != null)
  1043. {
  1044. bool result = reservoirDevice.CAByPassOff("", null);
  1045. if (result)
  1046. {
  1047. return device.CellFlowValveOn("", null);
  1048. }
  1049. }
  1050. }
  1051. return false;
  1052. }
  1053. }
  1054. #endregion
  1055. public bool Check(int msg, out string reason, params object[] args)
  1056. {
  1057. reason = "";
  1058. return true;
  1059. }
  1060. public bool CheckAcked(int msg)
  1061. {
  1062. return true;
  1063. }
  1064. public int Invoke(string function, params object[] args)
  1065. {
  1066. switch (function)
  1067. {
  1068. case "HomeAll":
  1069. if (IsIdle)
  1070. {
  1071. return (int)FSM_MSG.NONE;
  1072. }
  1073. if (CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Initialize))
  1074. {
  1075. return (int)MetalMsg.Initialize;
  1076. }
  1077. else
  1078. {
  1079. return (int)FSM_MSG.NONE;
  1080. }
  1081. }
  1082. return (int)FSM_MSG.NONE;
  1083. }
  1084. }
  1085. public enum MetalMsg
  1086. {
  1087. NONE,
  1088. Error,
  1089. ResumeError,
  1090. Initialize,
  1091. Manual,
  1092. Auto,
  1093. CurrentShortTest,
  1094. CloseFlowValve,
  1095. OpenFlowValve,
  1096. RunRecipe,
  1097. Abort,
  1098. Init
  1099. }
  1100. }