CyberX8/CyberX8_RT/Schedulers/SchedulerSequenceManager.cs

using MECF.Framework.Common.RecipeCenter;
using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading.Tasks;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.Schedulers;
using Aitex.Core.Common;
using MECF.Framework.Common.WaferHolder;
using MECF.Framework.Common.CommonData;
using System.Windows;
using Aitex.Core.RT.IOCore;
using Aitex.Core.RT.Log;
using Aitex.Core.Util;
using MECF.Framework.Common.Routine;
using CyberX8_RT.Modules;
using Aitex.Core.RT.Fsm;
using CyberX8_RT.Modules.PUF;
using CyberX8_RT.Modules.Dummy;
using MECF.Framework.Common.SubstrateTrackings;
using MECF.Framework.Common.ToolLayout;
using CyberX8_RT.Modules.Metal;
using CyberX8_RT.Modules.Rinse;
using MECF.Framework.RT.Core.Equipments;
using MECF.Framework.Common.ProcessCell;
using SecsGem.Core.ItemModel;
using CyberX8_RT.Modules.Transporter;
using CyberX8_Core;
using Aitex.Core.RT.SCCore;
using CyberX8_RT.Modules.Dryer;
using CyberX8_RT.Modules.Prewet;
using CyberX8_RT.Modules.SRD;
using CyberX8_RT.Modules.Reservoir;
using CyberX8_RT.Schedulers.Puf;
using CyberX8_RT.Modules.Loader;
using CyberX8_RT.Schedulers.Transporter;
using CyberX8_RT.Schedulers.Loader;
using CyberX8_RT.Devices.EFEM;

namespace CyberX8_RT.Schedulers
{
    public class SchedulerSequenceManager : Singleton<SchedulerSequenceManager>   
    {
        #region 常量 
        private const string ENGINEERING = "Engineering";
        private const string PRODUCTION = "Production";
        private const string TRNPA = "TRNPA";
        private const string TRNPB = "TRNPB";
        #endregion
        /// <summary>
        /// 解析Wafer所有调度工序
        /// </summary>
        /// <param name="sequenceRecipe"></param>
        /// <returns></returns>
        public List<SchedulerSequence> AnalyWaferAllSchedulerSequence(WaferInfo waferInfo,ModuleName pufModule,string side,WaferHolderInfo waferHolderInfo,SequenceRecipe sequenceRecipe)
        {            
            waferInfo.LoaderSide = side;
            List<SchedulerSequence> schedulerSequences = new List<SchedulerSequence>();
            int index = 0;
            MoveItem moveItem = new MoveItem((ModuleName)waferInfo.OriginStation, waferInfo.OriginSlot, ModuleName.Aligner1, 0, Aitex.Sorter.Common.Hand.Blade1);
            SchedulerSequence efemRobotSequence = CreateEfemRobotSequence(moveItem,null,sequenceRecipe.SubstrateSize,ref index);
            schedulerSequences.Add(efemRobotSequence);
            SchedulerSequence alignerSequence=CreateAlignerSequence(sequenceRecipe.AlignmentAngle,sequenceRecipe.SubstrateSize,ref index);
            schedulerSequences.Add(alignerSequence);
            //从Aligner至Puf B面
            MoveItem moveItem2 = new MoveItem(ModuleName.Aligner1, 0, pufModule, 1, Aitex.Sorter.Common.Hand.Blade1);
            SchedulerSequence secondEfemRobotSequence = CreateEfemRobotSequence(moveItem2,null,sequenceRecipe.SubstrateSize, ref index);
            schedulerSequences.Add(secondEfemRobotSequence);
            SchedulerSequence pufSequence=CreatePufSequence(pufModule,sequenceRecipe,side,true,ref index);
            schedulerSequences.Add(pufSequence);
            ////Loader
            //SchedulerSequence loaderSequence = CreateLoaderSequence(ref index);
            //schedulerSequences.Add(loaderSequence);

            ////wafer holder装载后的recipe工序
            //List<SchedulerSequence> waferHolderAfterLoadedAllSequences = WaferHolderAfterLoadedAllSchedulerSequences(waferHolderInfo, sequenceRecipe, ref index);
            //schedulerSequences.AddRange(waferHolderAfterLoadedAllSequences);
            ////buffer模块至Loader
            //ModuleName bufferModule = ConvertToBufferModule(waferHolderInfo.BufferId);
            //WaferHolderMoveItem bufferToLoaderItem = new WaferHolderMoveItem(bufferModule,ModuleType.Buffer , ModuleName.Loader1, ModuleType.Loader);
            //SchedulerSequence bufferToLoaderSequence = CreateLoaderTransporterSequence(bufferToLoaderItem, ref index);
            //schedulerSequences.Add(bufferToLoaderSequence);
            ////Loader
            //SchedulerSequence backLoaderSequence = CreateLoaderSequence(ref index);
            //schedulerSequences.Add(backLoaderSequence);
            //puf模块
            SchedulerSequence backPufSequence = CreatePufSequence(pufModule,sequenceRecipe,"",false, ref index);
            schedulerSequences.Add(backPufSequence);
            //若经过srd
            if(SequenceRecipeManager.Instance.IsContainedSrd(sequenceRecipe))
            {
                SrdRecipe srdRecipe=SequenceRecipeManager.Instance.GetSrdRecipeBySequenceRecipe(sequenceRecipe);
                if(srdRecipe!=null)
                {
                    MoveItem pufToSrdItem = new MoveItem();
                    pufToSrdItem.SourceModule = pufModule;
                    //A面
                    pufToSrdItem.SourceSlot = 0;
                    pufToSrdItem.DestinationType = ModuleType.SRD;
                    pufToSrdItem.SourceSlot = 0;
                    pufToSrdItem.DestinationModule = ModuleName.Unknown;
                    pufToSrdItem.RobotHand = Aitex.Sorter.Common.Hand.Blade1;
                    SchedulerSequence backEfemRobotSequence = CreateEfemRobotSequence(pufToSrdItem,null,sequenceRecipe.SubstrateSize, ref index);
                    schedulerSequences.Add(backEfemRobotSequence);

                    SchedulerSequence srdSequence = CreateSRDSequence(srdRecipe, ref index);
                    schedulerSequences.Add(srdSequence);
                    
                    MoveItem srdToLoadPortItem = new MoveItem();
                    srdToLoadPortItem.SourceModule = ModuleName.Unknown;
                    srdToLoadPortItem.SourceType = ModuleType.SRD;
                    srdToLoadPortItem.SourceSlot = 0;
                    srdToLoadPortItem.DestinationType = ModuleType.LoadPort;
                    srdToLoadPortItem.DestinationModule = (ModuleName)waferInfo.OriginStation;
                    srdToLoadPortItem.DestinationSlot = waferInfo.OriginSlot;
                    srdToLoadPortItem.RobotHand = Aitex.Sorter.Common.Hand.Blade1;
                    SchedulerSequence srdToLoadPortSequence = CreateEfemRobotSequence(srdToLoadPortItem,null,sequenceRecipe.SubstrateSize, ref index);
                    schedulerSequences.Add(srdToLoadPortSequence);
                }
                else
                {
                    LOG.WriteLog(eEvent.ERR_SEQUENCE, "System", $"{sequenceRecipe.Ppid} srd recipe is invalid");
                    return new List<SchedulerSequence>();
                }
            }
            else
            {
                MoveItem pufToLoadPortItem=new MoveItem(pufModule,0,(ModuleName)waferInfo.OriginStation,
                    waferInfo.OriginSlot,Aitex.Sorter.Common.Hand.Blade1);
                SchedulerSequence pufToLoaderSequence=CreateEfemRobotSequence(pufToLoadPortItem,null,sequenceRecipe.SubstrateSize, ref index);
                schedulerSequences.Add(pufToLoaderSequence);
            }
            return schedulerSequences;
        }
        /// <summary>
        /// 解析WaferHolder的所有工序
        /// </summary>
        /// <param name="waferHolderInfo"></param>
        /// <param name="sequenceRecipe"></param>
        /// <returns></returns>
        public List<SchedulerSequence> AnalyWaferHolderAllSchedulerSequence(WaferHolderInfo waferHolderInfo, SequenceRecipe sequenceRecipe,int productWaferCount,int dummyWaferCount)
        {
            int totalWaferCount = productWaferCount + dummyWaferCount;
            int index = 0;
            List<SchedulerSequence> schedulerSequences = new List<SchedulerSequence>();
            //Buffer To Loader
            ModuleName currentLocationModuleName = (ModuleName)Enum.Parse(typeof(ModuleName), waferHolderInfo.CurrentLocation);
            TransporterAction transporterAction = GenerateTransporterTransferAction(currentLocationModuleName, ModuleType.Buffer, ModuleName.Loader1, ModuleType.Loader);
            string strTRNP = AnalyseLoadTransporterSide(sequenceRecipe, productWaferCount,dummyWaferCount);
            List<SchedulerSyncModuleMessage> synModules = GenerateLoaderTransporterSyncModuleMessage(strTRNP);
            SchedulerSequence bufferToLoaderSequence = CreateLoaderTransporterSequence(transporterAction,synModules,waferHolderInfo.WaferSize, ref index);
            schedulerSequences.Add(bufferToLoaderSequence);
            //尺寸不一致
            bool needFlip = CheckLoaderWaferSizeNotEqual() && totalWaferCount == 2;
            //Loader
            LoaderParameter parameter = new LoaderParameter();
            parameter.WaferCount= needFlip?1: totalWaferCount;
            parameter.LoadCompleteToTransporterSide = strTRNP;
            parameter.NeedWaitFlip = needFlip;
            SchedulerSequence loaderSequence = CreateLoaderSequence(parameter,sequenceRecipe.SubstrateSize, ref index);
            schedulerSequences.Add(loaderSequence);
            if (needFlip)
            {
                string reverse = GetReverseTransporterLocation(strTRNP);
                TransporterAction flipAction = GenerateTransporterFlipAction(reverse);
                SchedulerSequence flipSequence=CreateLoaderTransporterSequence(flipAction,null,sequenceRecipe.SubstrateSize, ref index);
                schedulerSequences.Add(flipSequence);
                //Loader
                LoaderParameter reverseParameter = new LoaderParameter();
                reverseParameter.WaferCount = 1;
                reverseParameter.LoadCompleteToTransporterSide = reverse;
                reverseParameter.NeedWaitFlip = false; 
                SchedulerSequence reverseLoadSequence = CreateLoaderSequence(reverseParameter,sequenceRecipe.SubstrateSize, ref index);
                schedulerSequences.Add(reverseLoadSequence);
            }
            //wafer holder装载后的recipe工序
            List<SchedulerSequence> waferHolderAfterLoadedAllSequences = WaferHolderAfterLoadedAllSchedulerSequences(waferHolderInfo, sequenceRecipe,ref index);
            schedulerSequences.AddRange(waferHolderAfterLoadedAllSequences);
            return schedulerSequences;
        }
        /// <summary>
        /// 解析LoaderTransporter放至Loader第一次确定TRNP的方向
        /// </summary>
        /// <param name="sequenceRecipe"></param>
        /// <param name="waferCount"></param>
        /// <returns></returns>
        private string AnalyseLoadTransporterSide(SequenceRecipe sequenceRecipe,int productWaferCount,int dummyWaferCount)
        {
            int sideAWaferSize = SC.GetValue<int>($"Loader1.SideAWaferSize");
            int sideBWaferSize = SC.GetValue<int>($"Loader1.SideBWaferSize");
            //单片，同时loader两边尺寸不一致
            if ((productWaferCount == 1||dummyWaferCount==1) && sideAWaferSize != sideBWaferSize)
            {
                //recipe使用B面工艺,但loader A面与recipe尺寸一致
                if (sequenceRecipe.LastSingleWaferToSideB && sequenceRecipe.SubstrateSize == sideAWaferSize)
                {
                    return "TRNPB";
                }
                //recipe使用A面工艺,但loader B面与recipe尺寸一致
                else if (!sequenceRecipe.LastSingleWaferToSideB && sequenceRecipe.SubstrateSize == sideBWaferSize)
                {
                    return "TRNPB";
                }
            }
            return "TRNPA";
        }

        private string GetReverseTransporterLocation(string strTrn)
        {
            return strTrn == TRNPA ? TRNPB : TRNPA;
        }
        /// <summary>
        /// 创建Transporter transfer指令
        /// </summary>
        /// <param name="source"></param>
        /// <param name="sourceType"></param>
        /// <param name="dest"></param>
        /// <param name="destType"></param>
        /// <returns></returns>
        private TransporterAction GenerateTransporterTransferAction(ModuleName source,ModuleType sourceType,ModuleName dest,ModuleType destType)
        {
            TransporterAction transporterAction = new TransporterAction();
            transporterAction.ActionMsg = TransporterMSG.Transfer;
            WaferHolderMoveItem waferHolderMoveItem = new WaferHolderMoveItem(source, sourceType, dest, destType);
            transporterAction.Parameter = waferHolderMoveItem;
            return transporterAction;
        }
        /// <summary>
        /// 创建Transporter pickup指令
        /// </summary>
        /// <param name="source"></param>
        /// <param name="sourceType"></param>
        /// <param name="dest"></param>
        /// <param name="destType"></param>
        /// <returns></returns>
        private TransporterAction GenerateTransporterFlipAction(string strTransporter)
        {
            TransporterAction transporterAction = new TransporterAction();
            transporterAction.ActionMsg = TransporterMSG.Flip;
            transporterAction.Parameter = strTransporter;
            return transporterAction;
        }
        /// <summary>
        /// 检验Loader两边waferSize不一致
        /// </summary>
        /// <returns></returns>
        private bool CheckLoaderWaferSizeNotEqual()
        {
            int sideAWaferSize = SC.GetValue<int>($"Loader1.SideAWaferSize");
            int sideBWaferSize = SC.GetValue<int>($"Loader1.SideBWaferSize");
            return sideAWaferSize != sideBWaferSize;
        }
        /// <summary>
        /// 创建LoaderTrasporter同步模块消息
        /// </summary>
        /// <param name="tranporter"></param>
        /// <returns></returns>
        private List<SchedulerSyncModuleMessage> GenerateLoaderTransporterSyncModuleMessage(string tranporter)
        {
            List<SchedulerSyncModuleMessage> synModules = new List<SchedulerSyncModuleMessage>();
            SchedulerSyncModuleMessage syncModuleMessage = new SchedulerSyncModuleMessage();
            syncModuleMessage.ModuleEntity = Singleton<RouteManager>.Instance.GetModule<IModuleEntity>(ModuleName.Loader1.ToString());
            syncModuleMessage.ModuleMsg = LoaderMSG.PrepareForPlace.ToString();
            syncModuleMessage.parameters = new object[] { tranporter };
            synModules.Add(syncModuleMessage);
            return synModules;
        }
        /// <summary>
        /// Dummy Wafer对应WaferHolder任务
        /// </summary>
        /// <param name="waferHolderInfo"></param>
        /// <returns></returns>
        public List<SchedulerSequence> AnalyseDummyWaferHolderAllSchedulerSequence(WaferHolderInfo waferHolderInfo,int productWaferCount,int dummyWaferCount)
        {
            int index = 0;
            List<SchedulerSequence> schedulerSequences = new List<SchedulerSequence>();
            string strTRNP = AnalyseLoadTransporterSide(waferHolderInfo.SequenceRecipe, productWaferCount,dummyWaferCount);
            //Buffer To Loader
            ModuleName currentLocationModuleName = (ModuleName)Enum.Parse(typeof(ModuleName), waferHolderInfo.CurrentLocation);
            ModuleName bufferModule = (ModuleName)Enum.Parse(typeof(ModuleName), waferHolderInfo.OriginalBuffer);
            List<SchedulerSyncModuleMessage> synModules = GenerateLoaderTransporterSyncModuleMessage(strTRNP);
            TransporterAction transporterAction = GenerateTransporterTransferAction(currentLocationModuleName, ModuleType.Buffer, ModuleName.Loader1, ModuleType.Loader);
            SchedulerSequence bufferToLoaderSequence = CreateLoaderTransporterSequence(transporterAction,synModules,waferHolderInfo.WaferSize, ref index);
            schedulerSequences.Add(bufferToLoaderSequence);

            //尺寸不一致
            bool needFlip = CheckLoaderWaferSizeNotEqual() && dummyWaferCount == 2;
            //Loader
            LoaderParameter parameter = new LoaderParameter();
            parameter.WaferCount = needFlip ? 1 : dummyWaferCount; ;
            parameter.LoadCompleteToTransporterSide = strTRNP;
            parameter.NeedWaitFlip = needFlip;
            SchedulerSequence loaderSequence = CreateLoaderSequence(parameter,waferHolderInfo.WaferSize,ref index);
            schedulerSequences.Add(loaderSequence);
            if (needFlip)
            {
                string reverse = GetReverseTransporterLocation(strTRNP);
                TransporterAction flipAction = GenerateTransporterFlipAction(reverse);
                SchedulerSequence flipSequence = CreateLoaderTransporterSequence(flipAction, null,waferHolderInfo.WaferSize, ref index);
                schedulerSequences.Add(flipSequence);
                //Loader
                LoaderParameter reverseParameter = new LoaderParameter();
                reverseParameter.WaferCount = 1;
                reverseParameter.LoadCompleteToTransporterSide = reverse;
                reverseParameter.NeedWaitFlip = false;
                SchedulerSequence reverseLoadSequence = CreateLoaderSequence(reverseParameter,waferHolderInfo.WaferSize, ref index);
                schedulerSequences.Add(reverseLoadSequence);
            }
            //Loader To Buffer
            TransporterAction loaderMoveToBufferAction=GenerateTransporterTransferAction (ModuleName.Loader1, ModuleType.Loader,
                bufferModule, ModuleType.Buffer);
            SchedulerSequence loaderToBufferSequence = CreateLoaderTransporterSequence(loaderMoveToBufferAction,null,waferHolderInfo.WaferSize, ref index);
            schedulerSequences.Add(loaderToBufferSequence);
            return schedulerSequences;
        }
        /// <summary>
        /// 解析Dummy Wafer所有调度工序
        /// </summary>
        /// <param name="sequenceRecipe"></param>
        /// <returns></returns>
        public List<SchedulerSequence> AnalyDummyWaferAllSchedulerSequence(SequenceRecipe sequenceRecipe,WaferInfo waferInfo, ModuleName pufModule,string side)
        {
            waferInfo.LoaderSide = side;
            List<SchedulerSequence> schedulerSequences = new List<SchedulerSequence>();
            int index = 0;
            //DummyCassete至Aligner
            MoveItem moveItem = new MoveItem((ModuleName)waferInfo.Station, waferInfo.Slot, ModuleName.Aligner1, 0, Aitex.Sorter.Common.Hand.Blade1);
            SchedulerSequence secondEfemRobotSequence = CreateEfemRobotSequence(moveItem, null,sequenceRecipe.SubstrateSize, ref index);
            schedulerSequences.Add(secondEfemRobotSequence);
            //Aligner
            SchedulerSequence alignerSequence = null;
            if (sequenceRecipe == null)
            {
                alignerSequence= CreateAlignerSequence(0,sequenceRecipe.SubstrateSize, ref index);
            }
            else
            {
                alignerSequence=CreateAlignerSequence(sequenceRecipe.AlignmentAngle,sequenceRecipe.SubstrateSize, ref index);
            }
            schedulerSequences.Add(alignerSequence);
            //Aligner至Puf
            MoveItem alignerToPufMoveItem = new MoveItem(ModuleName.Aligner1, 0, pufModule, 1, Aitex.Sorter.Common.Hand.Blade1);
            SchedulerSequence alignerToPufEfemRobotSequence = CreateEfemRobotSequence(alignerToPufMoveItem, null,sequenceRecipe.SubstrateSize, ref index);
            schedulerSequences.Add(alignerToPufEfemRobotSequence);
            SchedulerSequence pufSequence = CreatePufSequence(pufModule,sequenceRecipe, side,true, ref index);
            schedulerSequences.Add(pufSequence);            
            return schedulerSequences;
        }

        /// <summary>
        /// Loader装载后Recipe工序
        /// </summary>
        /// <param name="waferHolderInfo"></param>
        /// <param name="sequenceRecipe"></param>
        /// <param name="index"></param>
        /// <returns></returns>
        private List<SchedulerSequence> WaferHolderAfterLoadedAllSchedulerSequences(WaferHolderInfo waferHolderInfo,SequenceRecipe sequenceRecipe,ref int index)
        {
            List<SchedulerSequence> schedulerSequences = new List<SchedulerSequence>();
            if(!Enum.TryParse(waferHolderInfo.OriginalBuffer,out ModuleName moduleName))
            {
                return schedulerSequences;
            }
            //Loader To Buffer
            TransporterAction loaderMoveToBufferAction = GenerateTransporterTransferAction(ModuleName.Loader1, ModuleType.Loader,
                moduleName, ModuleType.Buffer);
            SchedulerSequence loaderToBufferSequence = CreateLoaderTransporterSequence(loaderMoveToBufferAction,null,sequenceRecipe.SubstrateSize, ref index);
            schedulerSequences.Add(loaderToBufferSequence);
            //解析sequence recipe后续的工序
            var result = AnalyseSequenceRecipeScheduler(sequenceRecipe);
            //buffer to recipe第一个工序
            TransporterAction bufferToFirstAction = GenerateTransporterTransferAction(moduleName, ModuleType.Buffer, ModuleName.Unknown, result.firstModuleType);
            SchedulerSequence bufferSequence = CreateLoaderTransporterSequence(bufferToFirstAction,null,sequenceRecipe.SubstrateSize, ref index);
            schedulerSequences.Add(bufferSequence);
            //调整工序后面的索引
            foreach (SchedulerSequence item in result.sequences)
            {
                item.SequenceIndex = index;
                index++;
            }
            schedulerSequences.AddRange(result.sequences);
            //从recipe最后工序
            TransporterAction lastToBufferAction = GenerateTransporterTransferAction(ModuleName.Unknown, result.lastModuleType, moduleName, ModuleType.Buffer);
            SchedulerSequence lastToBufferSequence = CreateLoaderTransporterSequence(lastToBufferAction,null,sequenceRecipe.SubstrateSize, ref index);
            schedulerSequences.Add(lastToBufferSequence);
            return schedulerSequences;
        }

        /// <summary>
        /// 分析Sequence recipe对应的调度步骤
        /// </summary>
        /// <param name="sequenceRecipe"></param>
        /// <returns></returns>
        private (ModuleType firstModuleType,List<SchedulerSequence> sequences,ModuleType lastModuleType) AnalyseSequenceRecipeScheduler(SequenceRecipe sequenceRecipe)
        {
            ModuleType firstModuleType = default;
            ModuleType lastModuleType = default;
            List<SchedulerSequence> schedulerSequences= new List<SchedulerSequence>();
            List<SchedulerSequence> tmpLst = new List<SchedulerSequence>();
            var  processResult = AnalyseLastProcessRecipeIndex(sequenceRecipe.Recipes);
            bool isExistSrd = sequenceRecipe.Recipes.FindIndex(O=>O.ToLower().EndsWith("srd.rcp"))!=-1;
            int lastIndex = isExistSrd ? sequenceRecipe.Recipes.Count - 2 : sequenceRecipe.Recipes.Count - 1;
            for(int i=0;i<sequenceRecipe.Recipes.Count;i++)
            {                
                string item = sequenceRecipe.Recipes[i];
                if(item.ToLower().EndsWith("srd.rcp"))//跳过SRD
                {
                    continue;
                }
                SchedulerSequence schedulerSequence = new SchedulerSequence();
                schedulerSequence.ModuleName = ModuleName.Unknown;
                schedulerSequence.ModuleType=SequenceRecipeManager.Instance.GetModuleType(item);
                schedulerSequence.SequenceIndex=i;
                schedulerSequence.WaferSize = sequenceRecipe.SubstrateSize;
                MECF.Framework.Common.RecipeCenter.RecipeType recipeType =SequenceRecipeManager.Instance.GetRecipeType(item);
                schedulerSequence.Recipe = SequenceRecipeManager.Instance.LoadSequenceTypeRecipe(sequenceRecipe.SequenceType,item, recipeType);
                schedulerSequence.SequenceType = sequenceRecipe.SequenceType;
                schedulerSequence.State = RState.Init;
                schedulerSequence.MaterialType = MaterialType.WaferHolder;
                tmpLst.Add(schedulerSequence);
                if (i == 0)
                {
                    firstModuleType = schedulerSequence.ModuleType;
                }
                if(i==lastIndex)
                {
                    lastModuleType = schedulerSequence.ModuleType;
                }
                else
                {
                    string nextModule = sequenceRecipe.Recipes[i + 1];
                    schedulerSequence.NextModuleType= SequenceRecipeManager.Instance.GetModuleType(nextModule);
                    MECF.Framework.Common.RecipeCenter.RecipeType nextRecipeType = SequenceRecipeManager.Instance.GetRecipeType(nextModule); 
                    schedulerSequence.NextRecipe= SequenceRecipeManager.Instance.LoadSequenceTypeRecipe(sequenceRecipe.SequenceType,nextModule,nextRecipeType);
                }
                schedulerSequence.IsProcessSequece = true;
                if(i==processResult.lastIndex)
                {
                    schedulerSequence.IsLastProcessSequence = true;
                }
                
            }
            int index = 0;
            for(int i=0;i<tmpLst.Count;i++)
            {
                tmpLst[i].SequenceIndex = 0;
                schedulerSequences.Add(tmpLst[i]);
                index++;
                if(i<tmpLst.Count-1)
                {
                    TransporterAction transporterAction = new TransporterAction();
                    transporterAction.ActionMsg = TransporterMSG.Transfer;
                    WaferHolderMoveItem moveItem = new WaferHolderMoveItem(ModuleName.Unknown, tmpLst[i].ModuleType, ModuleName.Unknown, tmpLst[i + 1].ModuleType);
                    transporterAction.Parameter = moveItem;
                    SchedulerSequence schedulerSequence=CreateProcessTransporterSequence(transporterAction,sequenceRecipe.SubstrateSize,ref index);
                    schedulerSequences.Add(schedulerSequence);
                }
            }
            return (firstModuleType,schedulerSequences,lastModuleType);
        }
        /// <summary>
        /// 分析最后加工recipe索引
        /// </summary>
        /// <param name="recipes"></param>
        /// <returns></returns>
        private (int lastIndex,List<int> processIndexList) AnalyseLastProcessRecipeIndex(List<string> recipes)
        {
            int index = 0;
            List<int> lst = new List<int>();
            for(int i=0;i<recipes.Count; i++)
            {
                string item=recipes[i];
                if(item.ToLower().EndsWith("dep.rcp"))
                {
                    index = i;
                    if(lst.Contains(i))
                    {
                        lst.Add(i);
                    }
                }
            }
            if(lst.Count==0)
            {
                lst.Add(0);
            }
            return (index,lst);
        }

        /// <summary>
        /// 创建EFEM Robot步骤
        /// </summary>
        /// <param name="index"></param>
        /// <returns></returns>
        private SchedulerSequence CreateEfemRobotSequence(MoveItem moveItem,List<SchedulerSyncModuleMessage> synModules,int waferSize,ref int index)
        {
            SchedulerSequence sequence = new SchedulerSequence();
            sequence.SchedulerModule = SchedulerManager.Instance.GetScheduler(ModuleName.EfemRobot);
            sequence.SequenceIndex= index;
            sequence.ModuleName=ModuleName.EfemRobot;
            sequence.State = RState.Init;
            sequence.Recipe = null;
            sequence.ModuleType=ModuleType.EfemRobot;
            sequence.Parameters =moveItem;
            sequence.MaterialType = MaterialType.Wafer;
            sequence.SynchronousModuleMessages = synModules;
            sequence.WaferSize = waferSize;
            index++;
            return sequence;
        }
        /// <summary>
        /// 创建Aligner步骤 
        /// </summary>
        /// <param name="index"></param>
        /// <returns></returns>
        private SchedulerSequence CreateAlignerSequence(double angle,int waferSize,ref int index) 
        {
            SchedulerSequence sequence = new SchedulerSequence();
            sequence.SchedulerModule = SchedulerManager.Instance.GetScheduler(ModuleName.Aligner1);
            sequence.SequenceIndex = index;
            sequence.ModuleName = ModuleName.Aligner1;
            sequence.State = RState.Init;
            sequence.Recipe = null;
            sequence.ModuleType = ModuleType.Aligner;
            sequence.Parameters = angle;
            sequence.MaterialType = MaterialType.Wafer;
            sequence.WaferSize = waferSize;
            index++;
            return sequence;
        }
        /// <summary>
        /// 创建PUF步骤
        /// </summary>
        /// <param name="pufModuleName"></param>
        /// <param name="index"></param>
        /// <returns></returns>
        private SchedulerSequence CreatePufSequence(ModuleName pufModuleName,SequenceRecipe sequenceRecipe,string side,bool forward,ref int index)
        {
            SchedulerSequence sequence = new SchedulerSequence();
            sequence.SchedulerModule = SchedulerManager.Instance.GetScheduler(pufModuleName);
            sequence.SequenceIndex = index;
            sequence.ModuleName = pufModuleName;
            sequence.State = RState.Init;
            sequence.Recipe = sequenceRecipe;
            PufSchedulerParameter parameter = new PufSchedulerParameter()
            {
                IsForward = forward,
                Side = side,
            };
            sequence.Parameters = parameter;
            sequence.IsWaitNotify = !forward;
            sequence.ModuleType = ModuleType.PUF;
            sequence.MaterialType = MaterialType.Wafer;
            sequence.WaferSize = sequenceRecipe.SubstrateSize;
            index++;
            return sequence;
        }
        /// <summary>
        /// 创建Loader步骤
        /// </summary>
        /// <param name="index"></param>
        /// <returns></returns>
        private SchedulerSequence CreateLoaderSequence(LoaderParameter parameter,int waferSize,ref int index)
        {
            SchedulerSequence sequence = new SchedulerSequence();
            sequence.SchedulerModule = SchedulerManager.Instance.GetScheduler(ModuleName.Loader1);
            sequence.SequenceIndex = index;
            sequence.ModuleName = ModuleName.Loader1;
            sequence.State = RState.Init;
            sequence.Recipe = null;
            sequence.Parameters = parameter;
            sequence.ModuleType = ModuleType.Loader;
            sequence.MaterialType = MaterialType.WaferHolder;
            sequence.WaferSize = waferSize;
            index++;
            return sequence;
        }

        /// <summary>
        /// 创建Loader步骤
        /// </summary>
        /// <param name="index"></param>
        /// <returns></returns>
        private SchedulerSequence CreateSRDSequence(SrdRecipe recipe,ref int index)
        {
            SchedulerSequence sequence = new SchedulerSequence();
            sequence.SequenceIndex = index;
            sequence.State = RState.Init;
            sequence.Recipe = recipe;
            sequence.ModuleType = ModuleType.SRD;
            sequence.MaterialType = MaterialType.Wafer;
            index++;
            return sequence;
        }
        /// <summary>
        /// 创建LoaderTransporter步骤
        /// </summary>
        /// <param name="index"></param>
        /// <returns></returns>
        private SchedulerSequence CreateLoaderTransporterSequence(TransporterAction transporterAction, List<SchedulerSyncModuleMessage> synModules,int waferSize, ref int index)
        {
            SchedulerSequence sequence = new SchedulerSequence();
            sequence.ModuleType = ModuleType.Transporter;
            sequence.ModuleName = ModuleName.Transporter2;
            sequence.SequenceIndex = index;
            sequence.State = RState.Init;
            sequence.Recipe = null;
            sequence.SchedulerModule = SchedulerManager.Instance.GetScheduler(ModuleName.Transporter2);
            sequence.Parameters = transporterAction;
            sequence.MaterialType = MaterialType.WaferHolder;
            sequence.SynchronousModuleMessages = synModules;
            sequence.WaferSize = waferSize;
            index++;
            return sequence;
        }
        /// <summary>
        /// 创建LoaderTransporter步骤
        /// </summary>
        /// <param name="index"></param>
        /// <returns></returns>
        private SchedulerSequence CreateProcessTransporterSequence(TransporterAction transporterAction,int waferSize, ref int index)
        {
            SchedulerSequence sequence = new SchedulerSequence();
            sequence.ModuleType = ModuleType.Transporter;
            sequence.ModuleName = ModuleName.Transporter1;
            sequence.SequenceIndex = index;
            sequence.State = RState.Init;
            sequence.Recipe = null;
            sequence.SchedulerModule = SchedulerManager.Instance.GetScheduler(ModuleName.Transporter1);
            sequence.Parameters= transporterAction;
            sequence.MaterialType = MaterialType.WaferHolder;
            sequence.WaferSize = waferSize;
            index++;
            return sequence;
        }

        /// <summary>
        /// 获取可用Dummy slot
        /// </summary>
        /// <param name="moduleType"></param>
        /// <returns></returns>
        public (ModuleName moduleName, int slot) GetAvaibleDummySlots(WaferSize waferSize)
        {
            if (ModuleHelper.IsInstalled(ModuleName.Dummy1))
            {
                DummyEntity dummyEntity = Singleton<RouteManager>.Instance.GetModule<DummyEntity>(ModuleName.Dummy1.ToString());
                DummyDevice dummyDevice = Singleton<RouteManager>.Instance.EFEM.GetDummyDevice(0);
                if (dummyDevice != null && dummyDevice.HasCassette && dummyDevice.WaferSize == waferSize)
                {
                    for (int i = 0; i < dummyEntity.MaxSlotNumber; i++)
                    {
                        if (WaferManager.Instance.CheckNoWafer(ModuleName.Dummy1, i))
                        {
                            return (ModuleName.Dummy1, i);
                        }
                    }
                }
            }
            if (ModuleHelper.IsInstalled(ModuleName.Dummy2))
            {
                DummyEntity dummyEntity = Singleton<RouteManager>.Instance.GetModule<DummyEntity>(ModuleName.Dummy2.ToString());
                DummyDevice dummyDevice = Singleton<RouteManager>.Instance.EFEM.GetDummyDevice(1);
                if (dummyDevice != null && dummyDevice.HasCassette && dummyDevice.WaferSize == waferSize)
                {
                    for (int i = 0; i < dummyEntity.MaxSlotNumber; i++)
                    {
                        if (WaferManager.Instance.CheckNoWafer(ModuleName.Dummy2, i))
                        {
                            return (ModuleName.Dummy2, i);
                        }
                    }
                }
            }
            return (ModuleName.Unknown, -1);
        }


        /// <summary>
        /// 根据模块类型获取可用模块
        /// </summary>
        /// <param name="moduleType"></param>
        /// <returns></returns>
        public ModuleName GetAvaibleModuleCell(string sequenceType,ModuleType moduleType, ModuleName moduleName = ModuleName.Unknown)
        {
            if (ModuleHelper.IsMetal(moduleName))
            {
                List<IModuleEntity> entities = Singleton<RouteManager>.Instance.GetModulesByModuleType(moduleType);
                return GetMetalAvaibleRinseModule(entities, moduleName);
            }
            else
            {
                List<IModuleEntity> entities = Singleton<RouteManager>.Instance.GetModulesByModuleType(moduleType);
                List<IModuleEntity> avaibles = new List<IModuleEntity>();
                foreach (var item in entities)
                {
                    bool result = CheckAvaibleModule(item,moduleType,sequenceType);
                    if (result)
                    {
                        avaibles.Add(item);
                    }
                }

                return GetMinTimeToReadyModule(avaibles,moduleType);
            }
        }
        /// <summary>
        /// 根据模块类型获取可用模块(不包含WH)
        /// </summary>
        /// <param name="moduleType"></param>
        /// <returns></returns>
        public ModuleName GetAvaibleEmptyModuleCell(ModuleType moduleType,string sequenceType, ModuleName moduleName = ModuleName.Unknown)
        {
            if (ModuleHelper.IsMetal(moduleName))
            {
                List<IModuleEntity> entities = Singleton<RouteManager>.Instance.GetModulesByModuleType(moduleType);
                return GetMetalAvaibleEmptyRinseModule(entities, moduleName);
            }
            else
            {
                List<IModuleEntity> entities = Singleton<RouteManager>.Instance.GetModulesByModuleType(moduleType);
                List<IModuleEntity> avaibles = new List<IModuleEntity>();
                foreach (var item in entities)
                {
                    bool result = CheckAvaibleModule(item,moduleType,sequenceType);
                    if (result&&!WaferHolderManager.Instance.HasWaferHolder(item.Module.ToString()))
                    {
                        avaibles.Add(item);
                    }
                }

                return avaibles.Count != 0 ? avaibles[0].Module : ModuleName.Unknown;
            }
        }
        /// <summary>
        /// 根据化学液计算时间获取可用MetalCell(参考其他Metal剩余时间)
        /// </summary>
        /// <param name="chemistry"></param>
        /// <returns></returns>
        public ModuleName CalculateAvaibleMetalCellByChemistry(string chemistry,string startRinse,string sequenceType,int waferSize,ref bool isExistEnableMetal)
        {
            if(!Enum.TryParse(startRinse,out ModuleName startRinseModule)||!ModuleHelper.IsRinse(startRinseModule))
            {
                startRinse = "";
            }
            isExistEnableMetal = false;
            List<MetalEntity> moduleEntities = GetAvaibleMetalList(chemistry,sequenceType,waferSize,true);
            List<IModuleEntity> avaibleMetalEntities = new List<IModuleEntity>();
            foreach (var item in moduleEntities)
            {
                if(CheckAvaibleModule(item,ModuleType.Metal,sequenceType))
                {
                    if (item.WaferHolderInfo == null)
                    {
                        if (CheckMetalModuleRinseAvaible(item, startRinse))
                        {
                            avaibleMetalEntities.Add(item);
                        }
                    }
                    isExistEnableMetal = true;
                }

            }
            if (avaibleMetalEntities.Count > 0)
            {
                return GetMinUsageMetal(avaibleMetalEntities);
            }
            return ModuleName.Unknown;
        }
        /// <summary>
        /// 根据化学液获取可用Metal
        /// </summary>
        /// <param name="chemistry"></param>
        /// <param name="sequenceType"></param>
        /// <returns></returns>
        public bool CalculateAvaibleMetalCellByChemistry(string chemistry,string sequenceType,int waferSize)
        {
            List<MetalEntity> moduleEntities = GetAvaibleMetalList(chemistry, sequenceType,waferSize,false);
            return moduleEntities.Count != 0;
        }
        /// <summary>
        /// 检验Metal模块Rinse可用性
        /// </summary>
        /// <param name="item"></param>
        /// <returns></returns>
        private bool CheckMetalModuleRinseAvaible(MetalEntity item,string startRinse)
        {
            List<LayoutCellItem> rinseItems = CellItemManager.Instance.GetRinseItemsByMetal(item.Module.ToString());
            List<string> sharedRinseItems = new List<string>();
            List<string> singleRinseItems = new List<string>();
            foreach (var cellItem in rinseItems)
            {
                RinseEntity rinseEntity = Singleton<RouteManager>.Instance.GetModule<RinseEntity>(cellItem.ModuleName);
                if (!CellItemManager.Instance.CheckRinseIsShared(cellItem.ModuleName))
                {
                    if (CheckAvaibleModule(rinseEntity, ModuleType.Rinse, "") && rinseEntity.WaferHolderInfo == null)
                    {
                        singleRinseItems.Add(cellItem.ModuleName);
                    }
                }
                else
                {
                    if (CheckAvaibleModule(rinseEntity,ModuleType.Rinse,"") && rinseEntity.WaferHolderInfo == null)
                    {
                        sharedRinseItems.Add(cellItem.ModuleName);
                    }
                    //增加自己
                    if (cellItem.ModuleName == startRinse && rinseEntity != null && (rinseEntity.IsIdle||rinseEntity.State==(int)RinseState.KeepWeting))
                    {
                        sharedRinseItems.Add(startRinse);
                    }
                }
            }
            //独立的Rinse集合
            if(singleRinseItems.Count!=0)
            {
                bool result = CheckSingleRinseItemsCanUsed(singleRinseItems, item.Module.ToString());
                if(result)
                {
                    return true;
                }
            }
            //仅剩下共享Rinse
            List<string> avaibleSharedList = new List<string>();
            if (sharedRinseItems.Count != 0)
            {
                foreach (string sharedRinse in sharedRinseItems)
                {
                    RinseEntity rinseEntity = Singleton<RouteManager>.Instance.GetModule<RinseEntity>(sharedRinse);
                    if (rinseEntity.IsBusy&&sharedRinse!=startRinse)
                    {
                        continue;
                    }
                    //检验共享Rinse是否可用
                    if (CheckShardRinseCanUse(sharedRinse, item.Module.ToString(),startRinse))
                    {
                        avaibleSharedList.Add(sharedRinse);
                    }
                }
            }
            if (avaibleSharedList.Count != 0)
            {
                var result = CalculateMetalReservoirAllBusyMetalCount(item.Module.ToString());
                if (result.success)
                {
                    bool transporterTransfering = CheckProcessTransporterTransfering(avaibleSharedList);
                    if(transporterTransfering)
                    {
                        return result.busyCount + 1 < avaibleSharedList.Count;
                    }
                    else
                    {
                        return result.busyCount < avaibleSharedList.Count+singleRinseItems.Count;
                    }
                }
            }
            return false;
        }
        /// <summary>
        /// 检验Process transporter正在Transfer WH移动至Rinse
        /// </summary>
        /// <returns></returns>
        private bool CheckProcessTransporterTransfering(List<string> rinseList)
        {
            TransporterEntity processTransporterEntity = Singleton<RouteManager>.Instance.GetModule<TransporterEntity>(ModuleName.Transporter1.ToString());
            if(processTransporterEntity!=null)
            {
                if (processTransporterEntity.IsBusy)
                {
                    string targetCell = processTransporterEntity.TargetCell;
                    if (rinseList.Contains(targetCell))
                    {
                        return true;
                    }
                }
            }
            return false;
        }
        /// <summary>
        /// 计算Metal所在Reservoir Busy Metal数量
        /// </summary>
        /// <param name="item"></param>
        /// <returns></returns>
        private (bool success,int busyCount) CalculateMetalReservoirAllBusyMetalCount(string metalName)
        {
            string reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(metalName);
            if (string.IsNullOrEmpty(reservoirName))
            {
                return (false,0);
            }
            List<string> metals = ReservoirItemManager.Instance.GetMetalsByReservoir(reservoirName);
            int count = 0;
            foreach (string item in metals)
            {
                if (metalName == item)
                {
                    continue;
                }
                MetalEntity metalEntity = Singleton<RouteManager>.Instance.GetModule<MetalEntity>(item);
                if (metalEntity.IsBusy || metalEntity.WaferHolderInfo != null)
                {
                    count++;
                }
            }
            return (true,count);
        }
        /// <summary>
        /// 检验独立Rinse是否可用
        /// </summary>
        /// <param name="singleRinseItems"></param>
        /// <param name="metalName"></param>
        /// <returns></returns>
        private bool CheckSingleRinseItemsCanUsed(List<string> singleRinseItems, string metalName)
        {
            var result = CalculateMetalReservoirAllBusyMetalCount(metalName);
            if(result.success)
            {
                bool transporterTransfering = CheckProcessTransporterTransfering(singleRinseItems);
                if (transporterTransfering)
                {
                    return result.busyCount + 1 < singleRinseItems.Count;
                }
                else
                {
                    return result.busyCount < singleRinseItems.Count;
                }
            }
            return false;
        }
        /// <summary>
        /// 检验共享Rinse是否可用
        /// </summary>
        /// <param name="sharedRinse"></param>
        /// <param name="metalName"></param>
        /// <returns></returns>
        private bool CheckShardRinseCanUse(string sharedRinse, string metalName,string startRinse)
        {
            string reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(metalName);
            List<string> shardReservoirs = CellItemManager.Instance.GetReservoirsBySharedRinse(sharedRinse);
            if (shardReservoirs == null || shardReservoirs.Count == 0)
            {
                return false;
            }

            foreach (string reservoir in shardReservoirs)
            {
                if (reservoir==reservoirName)
                {
                    continue;
                }
                List<string> metals=ReservoirItemManager.Instance.GetMetalsByReservoir(reservoir);
                int metalCount = 0;
                int busyMetalCount = 0;
                foreach(string metal in metals)
                {
                    MetalEntity metalEntity = Singleton<RouteManager>.Instance.GetModule<MetalEntity>(metal);
                    if(metalEntity.IsAuto&&metalEntity.IsInitialized)
                    {
                        metalCount++;
                    }
                    if(metalEntity.IsBusy||metalEntity.WaferHolderInfo!=null)
                    {
                        busyMetalCount++;
                    }
                }
                List<string> reservoirRinseLst = CellItemManager.Instance.GetRinsesByReservoir(reservoir);
                int rinseCount = 0;
                int busyRinseCount = 0;
                foreach(string rinseItem in reservoirRinseLst)
                {
                    RinseEntity rinseEntity = Singleton<RouteManager>.Instance.GetModule<RinseEntity>(rinseItem);
                    if(rinseEntity.IsAuto&&rinseEntity.IsInitialized)
                    {
                        rinseCount++;
                    }
                    if (rinseItem == sharedRinse)
                    {
                        continue;
                    }
                    if (rinseItem == startRinse)
                    {
                        continue;
                    }
                    if(rinseEntity.IsBusy||rinseEntity.WaferHolderInfo!=null)
                    {
                        busyRinseCount++;
                    }
                }
                int resRinseCount=rinseCount- busyRinseCount;
                //计算剩余Rinse数量小于等于busy metal数量，则不可用
                if (resRinseCount <= busyMetalCount)
                {
                    return false;
                }
            }
            return true;
        }
        /// <summary>
        /// 检验模块是否可用(不包含WH)
        /// </summary>
        /// <param name="item"></param>
        /// <returns></returns>
        private bool CheckAvaibleEmptyModule(IModuleEntity item,ModuleType moduleType,string sequenceType)
        {
            if (!CheckAvaibleModule(item, moduleType, sequenceType))
            {
                return false;
            }
            if (!ModuleHelper.IsSRD(item.Module))
            {
                WaferHolderInfo waferHolderInfo = WaferHolderManager.Instance.GetWaferHolder(item.Module.ToString());
                if (waferHolderInfo == null)
                {
                    return true;
                }
            }
            else
            {
                if (!WaferManager.Instance.CheckHasWafer(item.Module, 0))
                {
                    return true;
                }
            }
            return false;
        }
        /// <summary>
        /// 检验模块是否可用
        /// </summary>
        /// <param name="item"></param>
        /// <returns></returns>
        public bool CheckAvaibleModule(IModuleEntity item,ModuleType moduleType,string sequenceType)
        {
            if (item.IsDisable)
            {
                return false;
            }
            if (!item.IsAuto)
            {
                return false;
            }
            if (item.IsError)
            {
                return false;
            }
            if (item.IsInit)
            {
                return false;
            }
            if (moduleType==ModuleType.Metal)
            {
                if(item.IsProduction && sequenceType == ENGINEERING)
                    return false;
                if (item.IsEngineering && sequenceType == PRODUCTION)
                    return false;
            }
            return true;
        }
        /// <summary>
        /// 获取剩余时间最小的模块
        /// </summary>
        /// <param name="avaibles"></param>
        /// <returns></returns>
        private ModuleName GetMinTimeToReadyModule(List<IModuleEntity> avaibles,ModuleType moduleType)
        {
            if (avaibles.Count == 1)
            {
                return avaibles[0].Module;
            }
            int timeToReady = int.MaxValue;
            IModuleEntity selectedModule = null;
            List<IModuleEntity> idleModuleEtities = new List<IModuleEntity>(); 
            foreach (var item in avaibles)
            {
                if (item.IsIdle)
                {
                    if(moduleType!=ModuleType.Metal)
                    {
                        return item.Module;
                    }
                    idleModuleEtities.Add(item);
                }
                if (item.TimeToReady < timeToReady&&idleModuleEtities.Count==0)
                {
                    timeToReady = item.TimeToReady;
                    selectedModule = item;
                }
            }
            if (idleModuleEtities.Count != 0)
            {
                return GetMinUsageMetal(idleModuleEtities);
            }
            if (selectedModule != null)
            {
                return selectedModule.Module;
            }
            return ModuleName.Unknown;
        }
        /// <summary>
        /// 获取电量最小的Metal
        /// </summary>
        /// <param name="idleModuleEntities"></param>
        /// <returns></returns>
        private ModuleName GetMinUsageMetal(List<IModuleEntity> idleModuleEntities)
        {
            double usage = double.MaxValue;
            ModuleName selectedModuleName = ModuleName.Unknown;
            foreach (var item in idleModuleEntities)
            {
                MetalEntity metalEntity= item as MetalEntity;
                if(metalEntity!=null)
                {
                    MetalUsage metalUsage = metalEntity.MetalUsage;
                    if (metalUsage == null)
                    {
                        return metalEntity.Module;
                    }
                    if (metalUsage.TotalUsage < usage)
                    {
                        usage= metalUsage.TotalUsage;
                        selectedModuleName = metalEntity.Module;
                    }
                }
            }
            return selectedModuleName;
        }
        /// <summary>
        /// 获取Metal可用的Rinse模块
        /// </summary>
        /// <param name="metalName"></param>
        /// <returns></returns>
        private ModuleName GetMetalAvaibleRinseModule(List<IModuleEntity> items, ModuleName metalName)
        {
            int metalId = CellItemManager.Instance.GetCellIdByModuleName(metalName.ToString());
            if (metalId == 0)
            {
                return ModuleName.Unknown;
            }
            List<LayoutCellItem> rinseItems = CellItemManager.Instance.GetRinseItemsByMetal(metalName.ToString());
            if (rinseItems.Count == 0)
            {
                return ModuleName.Unknown;
            }

            List<IModuleEntity> avaibles = new List<IModuleEntity>();
            foreach (var item in items)
            {
                LayoutCellItem cellItem = rinseItems.Find(O => O.ModuleName == item.Module.ToString());
                if (cellItem != null)
                {
                    RinseEntity rinseEntity = (RinseEntity)item;
                    if (rinseEntity.IsInitialized && rinseEntity.IsAuto)
                    {
                        avaibles.Add(rinseEntity);
                    }
                }
            }
            int minInterval = int.MaxValue;
            IModuleEntity moduleEntity = null;
            foreach (var item in avaibles)
            {
                LayoutCellItem cellItem = rinseItems.Find(O => O.ModuleName == item.Module.ToString());
                if (cellItem != null)
                {
                    int abiasId = Math.Abs(metalId - cellItem.CellID);
                    if (abiasId < minInterval)
                    {
                        minInterval = abiasId;
                        moduleEntity = item;
                    }
                }
            }
            if (moduleEntity != null)
            {
                return moduleEntity.Module;
            }
            return ModuleName.Unknown;
        }
        /// <summary>
        /// 检验Metal可用的Rinse模块
        /// </summary>
        /// <param name="metalName"></param>
        /// <returns></returns>
        private ModuleName GetMetalAvaibleEmptyRinseModule(List<IModuleEntity> items, ModuleName metalName)
        {
            int metalId = CellItemManager.Instance.GetCellIdByModuleName(metalName.ToString());
            if (metalId == 0)
            {
                return ModuleName.Unknown;
            }
            List<LayoutCellItem> rinseItems = CellItemManager.Instance.GetRinseItemsByMetal(metalName.ToString());
            if (rinseItems.Count == 0)
            {
                return ModuleName.Unknown;
            }

            List<IModuleEntity> avaibles = new List<IModuleEntity>();
            List<ModuleName> sharedRinseList = new List<ModuleName>();
            foreach (var item in items)
            {
                LayoutCellItem cellItem = rinseItems.Find(O => O.ModuleName == item.Module.ToString());
                if (cellItem != null)
                {
                    RinseEntity rinseEntity = (RinseEntity)item;
                    if (rinseEntity.IsIdle && rinseEntity.IsAuto && rinseEntity.WaferHolderInfo == null)
                    {
                        avaibles.Add(rinseEntity);
                        if(CellItemManager.Instance.CheckRinseIsShared(rinseEntity.Module.ToString()))
                        {
                            sharedRinseList.Add(rinseEntity.Module);
                        }
                    }
                }
            }

            int minInterval = int.MaxValue;
            IModuleEntity moduleEntity = null;
            foreach (var item in avaibles)
            {
                if (sharedRinseList.Contains(item.Module))
                {
                    continue;
                }
                LayoutCellItem cellItem = rinseItems.Find(O => O.ModuleName == item.Module.ToString());
                if (cellItem != null)
                {
                    int abiasId = Math.Abs(metalId - cellItem.CellID);
                    if (abiasId < minInterval)
                    {
                        minInterval = abiasId;
                        moduleEntity = item;
                    }
                }
            }
            if (moduleEntity != null)
            {
                return moduleEntity.Module;
            }
            else if(sharedRinseList.Count!=0)
            {
                return sharedRinseList[0];
            }

            return ModuleName.Unknown;
        }
        /// <summary>
        /// 检验Metal cell recipe时间是否可用
        /// </summary>
        /// <param name="depRecipe"></param>
        /// <returns></returns>
        public bool CheckMetalCellRecipeTimeAvaible(IModuleEntity metalEntity,DepRecipe depRecipe)
        {
            List<IModuleEntity> metalEntities=Singleton<RouteManager>.Instance.GetModulesByModuleType(ModuleType.Metal);
            int maxTimeToReady = 0;
            foreach (MetalEntity item in metalEntities)
            {
                if (metalEntity.Module == item.Module)
                {
                    continue;
                }
                if(item.IsBusy)
                {
                    if(maxTimeToReady>item.TimeToReady)
                    {
                        maxTimeToReady = item.TimeToReady;
                    }
                }
            }
            int transferOffSecond = SC.GetValue<int>("Transporter.TransporterTransferOffSeconds");
            int recipeTotalTime = depRecipe.CalculateRecipeTotalTime();
            //增加了Transporter最大传输时间和最小传输时间的差值
            if (recipeTotalTime>=maxTimeToReady+transferOffSecond)
            {
                return true;
            }
            return false;
        }


        /// <summary>
        /// 根据化学液获取可用的metal集合
        /// </summary>
        /// <param name="chemistry"></param>
        /// <returns></returns>
        public List<MetalEntity> GetAvaibleMetalList(string chemistry, string sequenceType,int waferSize, bool isEmpty)
        {
            List<IModuleEntity> reservoirEntities = Singleton<RouteManager>.Instance.GetModulesByModuleType(ModuleType.Reservoir);
            List<string> avaibles = new List<string>();
            foreach (IModuleEntity item in reservoirEntities)
            {
                ReservoirEntity entity = item as ReservoirEntity;
                if (entity.Chemistry == chemistry && entity.IsAuto && entity.IsInitialized)
                {
                    avaibles.Add(entity.Module.ToString());
                }
            }

            List<MetalEntity> metals = new List<MetalEntity>();
            foreach (string item in avaibles)
            {
                ReservoirItem reservoirItem = ReservoirItemManager.Instance.GetReservoirItem(item);
                if (reservoirItem == null)
                {
                    continue;
                }
                foreach (MetalItem subItem in reservoirItem.MetalCells)
                {
                    MetalEntity entity = Singleton<RouteManager>.Instance.GetModule<MetalEntity>($"Metal{subItem.MetalID}");
                    if (!CheckAvaibleModule(entity, ModuleType.Metal, sequenceType))
                    {
                        continue;
                    }
                    if (entity.MetalWaferSize != waferSize)
                    {
                        continue;
                    }
                    if (!isEmpty || (isEmpty && entity.WaferHolderInfo == null))
                    {
                        metals.Add(entity);
                    }
                }
            }
            return metals;
        }
        /// <summary>
        /// 获取上一个Metal
        /// </summary>
        /// <param name="sequenceIndex"></param>
        /// <param name="sequences"></param>
        /// <returns></returns>
        public ModuleName GetPreMetalModuleName(int sequenceIndex,List<SchedulerSequence> sequences)
        {
            for(int i = sequenceIndex - 1; i >= 0; i--)
            {
                SchedulerSequence schedulerSequence= sequences[i];
                if (schedulerSequence.ModuleType == ModuleType.Metal && ModuleHelper.IsMetal(schedulerSequence.ModuleName))
                {
                    return schedulerSequence.ModuleName;
                }
            }
            return ModuleName.Unknown;
        }
    }


}