.. |
LoaderCRSAxisInterLock.cs
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f7533a737b
Initialize
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hai 2 meses |
LoaderCommonDevice.cs
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31c26804e6
add Festo Communication Protocol
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hai 2 meses |
LoaderCommonWaferHolderSideClampRoutine.cs
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31c26804e6
add Festo Communication Protocol
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hai 2 meses |
LoaderDeviceTimer.cs
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e4fd0ff15a
update swing to shuttle
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hai 1 mes |
LoaderFlowTestRoutine.cs
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31c26804e6
add Festo Communication Protocol
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hai 2 meses |
LoaderInstallCRSRoutine.cs
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715c26c896
Revise LoaderInstallCRS and LoaderRotationAxisInterLock;
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hai 1 mes |
LoaderLeakFirstFlowTestRoutine.cs
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f7533a737b
Initialize
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hai 2 meses |
LoaderLoadRoutine.cs
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e4fd0ff15a
update swing to shuttle
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hai 1 mes |
LoaderLotTrackUtil.cs
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31c26804e6
add Festo Communication Protocol
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hai 2 meses |
LoaderPreTransferUnclampRoutine.cs
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f7533a737b
Initialize
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hai 2 meses |
LoaderReLeakFlowTestRoutine.cs
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f7533a737b
Initialize
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hai 2 meses |
LoaderRotationAxisInterLock.cs
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715c26c896
Revise LoaderInstallCRS and LoaderRotationAxisInterLock;
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hai 1 mes |
LoaderShuttleAxisInterLock.cs
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ca10919375
Modify LoaderRotationAxisInterLock and LoaderShuttleAxisInterLock; Add LoaderUnloadRoutine and LoaderInstallCRSRoutine;
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hai 1 mes |
LoaderSideBernoulliBladderRoutine.cs
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31c26804e6
add Festo Communication Protocol
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hai 2 meses |
LoaderSideBernoulliN2PressureRoutine.cs
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31c26804e6
add Festo Communication Protocol
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hai 2 meses |
LoaderSideCycleRoutine.cs
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f7533a737b
Initialize
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hai 2 meses |
LoaderSideDevice.cs
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31c26804e6
add Festo Communication Protocol
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hai 2 meses |
LoaderSideDoorLockRoutine.cs
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31c26804e6
add Festo Communication Protocol
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hai 2 meses |
LoaderSideTransBladderRoutine.cs
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31c26804e6
add Festo Communication Protocol
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hai 2 meses |
LoaderSideTransHighRoutine.cs
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31c26804e6
add Festo Communication Protocol
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hai 2 meses |
LoaderSideUnloadVacuumLevelCheckRoutine.cs
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f7533a737b
Initialize
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hai 2 meses |
LoaderSideVacuumAndLevelCheckRoutineRoutine.cs
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31c26804e6
add Festo Communication Protocol
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hai 2 meses |
LoaderSideVacuumLevelCheckRoutine.cs
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31c26804e6
add Festo Communication Protocol
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hai 2 meses |
LoaderSideVacuumRoutine.cs
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31c26804e6
add Festo Communication Protocol
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hai 2 meses |
LoaderSideWhBladderRoutine.cs
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31c26804e6
add Festo Communication Protocol
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hai 2 meses |
LoaderTiltAxisInterLock.cs
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6a00b51db7
add loader tilt interlock
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hai 1 mes |
LoaderUnloadRoutine.cs
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ca10919375
Modify LoaderRotationAxisInterLock and LoaderShuttleAxisInterLock; Add LoaderUnloadRoutine and LoaderInstallCRSRoutine;
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hai 1 mes |