MetalEntity.cs 74 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Fsm;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using Aitex.Core.Utilities;
  6. using MECF.Framework.Common.Equipment;
  7. using MECF.Framework.Common.WaferHolder;
  8. using System;
  9. using MECF.Framework.Common.ToolLayout;
  10. using MECF.Framework.Common.Persistent.Reservoirs;
  11. using Aitex.Core.RT.OperationCenter;
  12. using MECF.Framework.Common.RecipeCenter;
  13. using Aitex.Core.RT.RecipeCenter;
  14. using MECF.Framework.Common.SubstrateTrackings;
  15. using Aitex.Core.RT.Device;
  16. using MECF.Framework.Common.Routine;
  17. using MECF.Framework.Common.ProcessCell;
  18. using Aitex.Core.RT.SCCore;
  19. using MECF.Framework.Common.Alarm;
  20. using CyberX8_Core;
  21. using CyberX8_RT.Devices.Metal;
  22. using CyberX8_RT.Devices.Reservoir;
  23. using CyberX8_RT.Modules.Metal;
  24. using CyberX8_RT.Modules.Reservoir;
  25. using CyberX8_RT.Modules;
  26. using CyberX8_RT.Modules.EFEM;
  27. using static Mono.Security.X509.X520;
  28. using MECF.Framework.Common.DBCore;
  29. using Aitex.Core.Common;
  30. namespace CyberX8_RT.Modules.Metal
  31. {
  32. public class MetalEntity : Entity, IEntity, IModuleEntity
  33. {
  34. #region 常量
  35. private const string STRATUS = "Stratus";
  36. private const string AUTO = "Auto";
  37. private const string MANUAL = "Manual";
  38. private const string DISABLED = "Disabled";
  39. private const string ENGINEERING = "Engineering";
  40. private const string PRODUCTION = "Production";
  41. #endregion
  42. #region 内部变量
  43. /// <summary>
  44. /// 已经完成的Cycle次数
  45. /// </summary>
  46. private int _achievedCycle = 0;
  47. /// <summary>
  48. /// Metal项
  49. /// </summary>
  50. private MetalItem _metalItem;
  51. /// <summary>
  52. /// 持久化对象
  53. /// </summary>
  54. private MetalPersistentValue _persistentValue;
  55. /// <summary>
  56. /// c&m Initialize routine
  57. /// </summary>
  58. private CompactEmbranceInitializeRoutine _compactEmbranceInitializeRoutine;
  59. /// <summary>
  60. /// C&M Runrecipe routine
  61. /// </summary>
  62. private CompactEmbranceRunRecipeRoutine _compactEmbranceRunRecipeRoutine;
  63. /// <summary>
  64. /// S&H Initialize Routine
  65. /// </summary>
  66. private StandardHotInitializeRoutine _standardHotInitializeRoutine;
  67. /// <summary>
  68. /// S&H RunRecipe Routine
  69. /// </summary>
  70. private StandardHotRunRecipeRoutine _standardHotRunRecipeRoutine;
  71. /// <summary>
  72. /// Current short test routine
  73. /// </summary>
  74. private CurrentShortTestRoutine _currentShortTestRoutine;
  75. /// <summary>
  76. /// 当前Recipe
  77. /// </summary>
  78. private DepRecipe _currentRecipe = null;
  79. /// <summary>
  80. /// recipe时间
  81. /// </summary>
  82. private int _recipeTime;
  83. /// <summary>
  84. /// 循环次数
  85. /// </summary>
  86. private int _cycle = 0;
  87. /// <summary>
  88. /// 运行Recipe面
  89. /// </summary>
  90. private string _recipeSide = "";
  91. /// <summary>
  92. /// 当前RunRecipe Routine
  93. /// </summary>
  94. private RoutineBase _currentRunRecipeRoutine;
  95. /// <summary>
  96. /// Runrecipe已经运行的时间
  97. /// </summary>
  98. private int _runrecipeElapsedTime = 0;
  99. /// <summary>
  100. /// run recipe start time
  101. /// </summary>
  102. private DateTime _runRecipeStartTime;
  103. /// <summary>
  104. /// run recipe complete time
  105. /// </summary>
  106. private DateTime _runRecipeCompleteTime;
  107. /// <summary>
  108. /// 所在reservoir
  109. /// </summary>
  110. private StandardHotReservoirDevice _reservoirDevice;
  111. /// <summary>
  112. /// 所在reservoir名字
  113. /// </summary>
  114. private string _reservoirName;
  115. /// <summary>
  116. /// 当前完成recipe次数
  117. /// </summary>
  118. private int _currentCycleTimes;
  119. /// <summary>
  120. /// 当前recipe是否完成
  121. /// </summary>
  122. private bool _isCurrentReceipeComplete;
  123. /// <summary>
  124. /// 当前wafershuttle开始浸泡时间
  125. /// </summary>
  126. private DateTime _currentWaferShuttleStartSoakTime;
  127. /// <summary>
  128. /// Wafershuttle最大浸泡时间
  129. /// </summary>
  130. private int _waferShuttleSoakMaxTime;
  131. #endregion
  132. #region 属性
  133. /// <summary>
  134. /// 模块名称
  135. /// </summary>
  136. public ModuleName Module { get; private set; }
  137. /// <summary>
  138. /// 初始化状态
  139. /// </summary>
  140. public bool IsInit { get { return fsm.State == (int)MetalState.Init; } }
  141. /// <summary>
  142. /// 空闲状态
  143. /// </summary>
  144. public bool IsIdle { get { return fsm.State == (int)MetalState.Idle; } }
  145. /// <summary>
  146. /// 是否发生错误
  147. /// </summary>
  148. public bool IsError { get { return fsm.State == (int)MetalState.Error; } }
  149. /// <summary>
  150. /// 是否正在作业
  151. /// </summary>
  152. public bool IsBusy { get { return fsm.State > (int)MetalState.Idle; } }
  153. /// <summary>
  154. /// 是否初始化完成
  155. /// </summary>
  156. public bool IsInitialized { get { return fsm.State >= (int)MetalState.Initialized; } }
  157. /// <summary>
  158. /// 是否禁用
  159. /// </summary>
  160. public bool IsDisable { get { return _persistentValue == null || _persistentValue.OperatingMode == DISABLED; } }
  161. /// <summary>
  162. /// 自动模式
  163. /// </summary>
  164. public bool IsAuto { get { return _persistentValue != null && _persistentValue.OperatingMode == AUTO; } }
  165. /// <summary>
  166. /// 自动模式
  167. /// </summary>
  168. public bool IsManual { get { return _persistentValue != null && _persistentValue.OperatingMode == MANUAL; } }
  169. /// <summary>
  170. /// 是否为工程模式
  171. /// </summary>
  172. public bool IsEngineering { get { return _persistentValue != null && _persistentValue.RecipeOperatingMode == ENGINEERING; } }
  173. /// <summary>
  174. /// 是否为产品模式
  175. /// </summary>
  176. public bool IsProduction { get { return _persistentValue != null && _persistentValue.RecipeOperatingMode == PRODUCTION; } }
  177. /// <summary>
  178. /// WaferHolder信息
  179. /// </summary>
  180. public WaferHolderInfo WaferHolderInfo { get { return WaferHolderManager.Instance.GetWaferHolder(Module.ToString()); } }
  181. /// <summary>
  182. /// 已完成的RunRecipeCycle次数
  183. /// </summary>
  184. public int AchievedCycle { get { return _achievedCycle; } }
  185. /// <summary>
  186. /// 当前状态机状态
  187. /// </summary>
  188. public int State { get { return fsm.State; } }
  189. /// <summary>
  190. /// 当前Metal设置的WaferSize
  191. /// </summary>
  192. public int MetalWaferSize { get { return _persistentValue.MetalWaferSize; } }
  193. /// <summary>
  194. /// recipe时长
  195. /// </summary>
  196. public int RecipeTime { get { return _recipeTime; } }
  197. /// <summary>
  198. /// 剩余时间
  199. /// </summary>
  200. public override int TimeToReady
  201. {
  202. get
  203. {
  204. if (IsIdle)
  205. {
  206. return 0;
  207. }
  208. switch (fsm.State)
  209. {
  210. case (int)MetalState.RunReciping:
  211. return Math.Max(_recipeTime - fsm.ElapsedTime / 1000, 0);
  212. default:
  213. return 0;
  214. }
  215. }
  216. }
  217. /// <summary>
  218. /// 用量
  219. /// </summary>
  220. public MetalUsage MetalUsage { get { return MetalUsageManager.Instance.GetMetalUsage(Module.ToString()); } }
  221. #endregion
  222. /// <summary>
  223. /// 构造函数
  224. /// </summary>
  225. /// <param name="moduleName"></param>
  226. public MetalEntity(ModuleName moduleName)
  227. {
  228. this.Module = moduleName;
  229. WaferManager.Instance.SubscribeLocation(Module, 2);
  230. InitialFsm();
  231. }
  232. /// <summary>
  233. /// 初始化
  234. /// </summary>
  235. /// <returns></returns>
  236. protected override bool Init()
  237. {
  238. InitializeDATA();
  239. InitializeParameter();
  240. InitializeRoutine();
  241. InitializeOperation();
  242. return true;
  243. }
  244. /// <summary>
  245. /// 初始化参数
  246. /// </summary>
  247. private void InitializeParameter()
  248. {
  249. _persistentValue = MetalPersistentManager.Instance.GetMetalPersistentValue(Module.ToString());
  250. if (_persistentValue == null)
  251. {
  252. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), "Persistent Value Object is not exist");
  253. }
  254. _metalItem = MetalItemManager.Instance.GetMetalItem(Module.ToString());
  255. _reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  256. _reservoirDevice = DEVICE.GetDevice<StandardHotReservoirDevice>($"{_reservoirName}");
  257. _isCurrentReceipeComplete = false;
  258. _waferShuttleSoakMaxTime = SC.GetValue<int>($"Metal.WaferShuttleSoakMaxTime");
  259. }
  260. /// <summary>
  261. /// 初始化Routine
  262. /// </summary>
  263. private void InitializeRoutine()
  264. {
  265. _compactEmbranceInitializeRoutine = new CompactEmbranceInitializeRoutine(Module.ToString());
  266. _standardHotInitializeRoutine = new StandardHotInitializeRoutine(Module.ToString());
  267. _compactEmbranceRunRecipeRoutine = new CompactEmbranceRunRecipeRoutine(Module.ToString());
  268. _standardHotRunRecipeRoutine = new StandardHotRunRecipeRoutine(Module.ToString());
  269. _currentShortTestRoutine = new CurrentShortTestRoutine(Module.ToString());
  270. }
  271. /// <summary>
  272. /// 初始化操作
  273. /// </summary>
  274. private void InitializeOperation()
  275. {
  276. OP.Subscribe($"{Module}.InitializeAll", (cmd, args) => { return CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Initialize); });
  277. OP.Subscribe($"{Module}.CycleManualProcessRecipe", (cmd, args) =>
  278. {
  279. DepRecipe recipe = RecipeFileManager.Instance.LoadGenericityRecipe<DepRecipe>(args[0].ToString());
  280. if (recipe == null)
  281. {
  282. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{args[0]} recipe is null");
  283. return false;
  284. }
  285. object[] objects = new object[args.Length];
  286. objects[0] = recipe;
  287. for (int i = 1; i < args.Length; i++)
  288. {
  289. objects[i] = args[i];
  290. }
  291. return CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.RunRecipe, objects);
  292. });
  293. OP.Subscribe($"{Module}.CurrentShortTest", (cmd, args) => { return CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.CurrentShortTest); });
  294. OP.Subscribe($"{Module}.UpdateMetalUsage", UpdateMetalUsageAction);
  295. OP.Subscribe($"{Module}.Abort", (cmd, args) => { return CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Abort); });
  296. }
  297. /// <summary>
  298. /// EnterInit
  299. /// </summary>
  300. public void EnterInit()
  301. {
  302. if ((MetalState)fsm.State != MetalState.Idle) return;
  303. else
  304. {
  305. CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Init);
  306. }
  307. }
  308. /// 初始化状态机
  309. /// </summary>
  310. private void InitialFsm()
  311. {
  312. fsm = new StateMachine<MetalEntity>(Module.ToString(), (int)MetalState.Init, 20);
  313. fsm.EnableRepeatedMsg(true);
  314. AnyStateTransition(MetalMsg.Error, EnterError, MetalState.Error);
  315. //Initialize
  316. AnyStateTransition(MetalMsg.Initialize, InitializeAll, MetalState.Initializing);
  317. Transition(MetalState.Initializing, FSM_MSG.TIMER, InitializeAllMonitor, MetalState.Initialized);
  318. //直接进入Idle
  319. Transition(MetalState.Initialized, FSM_MSG.TIMER, NullFunc, MetalState.Idle);
  320. //RunRecipe
  321. Transition(MetalState.Idle, MetalMsg.RunRecipe, RunRecipe, MetalState.RunReciping);
  322. Transition(MetalState.WaitForRunRecipe, MetalMsg.RunRecipe, RunRecipe, MetalState.RunReciping);
  323. Transition(MetalState.RunReciping, FSM_MSG.TIMER, RunRecipeMonitor, MetalState.Idle);
  324. Transition(MetalState.Idle, FSM_MSG.TIMER, MetalCompleteSoakTimeMonitor, MetalState.Idle);
  325. Transition(MetalState.RunReciping, MetalMsg.Abort, AbortRecipe, MetalState.Abort);
  326. //Current Short Test
  327. Transition(MetalState.Idle, MetalMsg.CurrentShortTest, CurrentShortTest, MetalState.CurrentShortTesting);
  328. Transition(MetalState.CurrentShortTesting, FSM_MSG.TIMER, CurrentShortTestMonitor, MetalState.WaitCloseFlow);
  329. Transition(MetalState.WaitCloseFlow, MetalMsg.CloseFlowValve, CloseFlowValve, MetalState.WaitOpenFlow);
  330. Transition(MetalState.WaitOpenFlow, MetalMsg.OpenFlowValve, OpenFlowValve, MetalState.WaitForRunRecipe);
  331. //Enter Init
  332. Transition(MetalState.Idle, MetalMsg.Init, NullFunc, MetalState.Init);
  333. EnumLoop<MetalState>.ForEach((item) => { fsm.MapState((int)item, item.ToString()); });
  334. EnumLoop<MetalMsg>.ForEach((item) => { fsm.MapMessage((int)item, item.ToString()); });
  335. }
  336. /// <summary>
  337. /// 初始化DATA
  338. /// </summary>
  339. private void InitializeDATA()
  340. {
  341. InitializeSVID();
  342. DATA.Subscribe($"{Module}.FsmState", () => ((MetalState)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  343. DATA.Subscribe($"{Module}.WaferHolder", () => WaferHolderInfo, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  344. DATA.Subscribe($"{Module}.AchievedCycle", () => AchievedCycle, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  345. DATA.Subscribe($"{Module}.IsInit", () => IsInit, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  346. DATA.Subscribe($"{Module}.IsIdle", () => IsIdle, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  347. DATA.Subscribe($"{Module}.IsError", () => IsError, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  348. DATA.Subscribe($"{Module}.IsBusy", () => IsBusy, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  349. DATA.Subscribe($"{Module}.IsDisable", () => IsDisable, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  350. DATA.Subscribe($"{Module}.CurrentRecipe", () => _currentRecipe != null ? _currentRecipe.Ppid : "", SubscriptionAttribute.FLAG.IgnoreSaveDB);
  351. DATA.Subscribe($"{Module}.MetalUsage", () => MetalUsage, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  352. DATA.Subscribe($"{Module}.SubordinateReservoirName", () => _reservoirName, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  353. }
  354. /// <summary>
  355. /// 初始化SVID
  356. /// </summary>
  357. private void InitializeSVID()
  358. {
  359. DATA.Subscribe($"{Module}.State", () => ((MetalState)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  360. DATA.Subscribe($"{Module}.LotID", () => WaferHolderInfo?.LotId , SubscriptionAttribute.FLAG.IgnoreSaveDB);
  361. DATA.Subscribe($"{Module}.WSID", () => WaferHolderInfo?.Id, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  362. DATA.Subscribe($"{Module}.LSAID", () => WaferHolderInfo?.CrsAId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  363. DATA.Subscribe($"{Module}.LSBID", () => WaferHolderInfo?.CrsBId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  364. DATA.Subscribe($"{Module}.ModuleRecipe", () => _currentRecipe?.Ppid, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  365. DATA.Subscribe($"{Module}.SequenceRecipe", () =>WaferHolderInfo?.SequenceId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  366. DATA.Subscribe($"{Module}.WaferAID", () => WaferHolderInfo?.WaferAId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  367. DATA.Subscribe($"{Module}.WaferBID", () => WaferHolderInfo?.WaferBId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  368. DATA.Subscribe($"{Module}.TotalTime", () => _recipeTime, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  369. DATA.Subscribe($"{Module}.TimeRemain", () => _recipeTime != 0 && _currentRunRecipeRoutine != null ? (_recipeTime - Math.Round((double)_currentRunRecipeRoutine.ElapsedMilliseconds / 1000, 0)) : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  370. DATA.Subscribe($"{Module}.Task", () => WaferHolderInfo?.CurrentControlJobId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  371. DATA.Subscribe($"{Module}.OperatingMode", () => _persistentValue != null ? _persistentValue.OperatingMode : "None", SubscriptionAttribute.FLAG.IgnoreSaveDB);
  372. DATA.Subscribe($"{Module}.TotalUsage", () => MetalUsage != null ? MetalUsage.TotalUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  373. DATA.Subscribe($"{Module}.TotalUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  374. DATA.Subscribe($"{Module}.TotalUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  375. DATA.Subscribe($"{Module}.AnodeAUsage", () => MetalUsage != null ? MetalUsage.AnodeAUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  376. DATA.Subscribe($"{Module}.AnodeAUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  377. DATA.Subscribe($"{Module}.AnodeAUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  378. DATA.Subscribe($"{Module}.AnodeBUsage", () => MetalUsage != null ? MetalUsage.AnodeBUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  379. DATA.Subscribe($"{Module}.AnodeBUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  380. DATA.Subscribe($"{Module}.AnodeBUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  381. DATA.Subscribe($"{Module}.MembranceAUsage", () => MetalUsage != null ? MetalUsage.MembranceAUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  382. DATA.Subscribe($"{Module}.MembranceAUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  383. DATA.Subscribe($"{Module}.MembranceAUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  384. DATA.Subscribe($"{Module}.MembranceBUsage", () => MetalUsage != null ? MetalUsage.MembranceBUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  385. DATA.Subscribe($"{Module}.MembranceBUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  386. DATA.Subscribe($"{Module}.MembranceBUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  387. DATA.Subscribe($"{Module}.TotalWafers", () => MetalUsage != null ? MetalUsage.TotalWafers : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  388. DATA.Subscribe($"{Module}.TotalWafers.WarningLimit", () => SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  389. DATA.Subscribe($"{Module}.TotalWafers.FaultLimit", () => SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  390. DATA.Subscribe($"{Module}.AnodeAWafers", () => MetalUsage != null ? MetalUsage.AnodeAWafers : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  391. DATA.Subscribe($"{Module}.AnodeAWafers.WarningLimit", () => SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  392. DATA.Subscribe($"{Module}.AnodeAWafers.FaultLimit", () => SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  393. DATA.Subscribe($"{Module}.AnodeBWafers", () => MetalUsage != null ? MetalUsage.AnodeBWafers : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  394. DATA.Subscribe($"{Module}.AnodeBWafers.WarningLimit", () => SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  395. DATA.Subscribe($"{Module}.AnodeBWafers.FaultLimit", () => SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  396. }
  397. /// Metal完成recipe后监控wafershuttle浸泡时间
  398. /// </summary>
  399. /// <param name="param"></param>
  400. /// <returns></returns>
  401. private bool MetalCompleteSoakTimeMonitor(object[] param)
  402. {
  403. if (WaferHolderInfo != null)
  404. {
  405. double sockSeconds = (DateTime.Now - _currentWaferShuttleStartSoakTime).TotalSeconds;
  406. if (_isCurrentReceipeComplete && sockSeconds > _waferShuttleSoakMaxTime * 60)
  407. {
  408. if (!AlarmListManager.Instance.IsContainDataWarn(Module.ToString(), "MetalSockTime"))
  409. {
  410. AlarmListManager.Instance.AddWarn(Module.ToString(),
  411. $"MetalSockTime", $"Current waferShuttle:{WaferHolderInfo.Id} sock time is over waferShuttleSoakMaxTime:{_waferShuttleSoakMaxTime} minutes");
  412. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"Current waferShuttle:{WaferHolderInfo.Id} sock time is over waferShuttleSoakMaxTime:{_waferShuttleSoakMaxTime} minutes");
  413. }
  414. }
  415. }
  416. else
  417. {
  418. _isCurrentReceipeComplete = false; //wafershuttle拿走后重置当前recipe是否完成变量
  419. }
  420. return true;
  421. }
  422. /// <summary>
  423. /// 进入错误状态
  424. /// </summary>
  425. /// <param name="args"></param>
  426. /// <returns></returns>
  427. private bool EnterError(object[] args)
  428. {
  429. if (State == (int)MetalState.RunReciping)
  430. {
  431. if (_metalItem.SubType == STRATUS)
  432. {
  433. _standardHotRunRecipeRoutine.Abort();
  434. }
  435. else
  436. {
  437. _compactEmbranceRunRecipeRoutine.Abort();
  438. }
  439. }
  440. return true;
  441. }
  442. /// <summary>
  443. /// UpdateMetalUsageAction
  444. /// </summary>
  445. /// <param name="cmd"></param>
  446. /// <param name="param"></param>
  447. /// <returns></returns>
  448. private bool UpdateMetalUsageAction(string cmd, object[] args)
  449. {
  450. if (args.Length > 2)
  451. {
  452. MetalUsageManager.Instance.UpdateMetalUsageByManualOperation(args[0].ToString(), args[1].ToString(), args[2].ToString());
  453. LOG.WriteLog(eEvent.INFO_METAL, Module.ToString(), $"New {args[1].ToString()} value {args[2].ToString()} was input");
  454. }
  455. return true;
  456. }
  457. #region Initialize All
  458. /// <summary>
  459. /// 初始化
  460. /// </summary>
  461. /// <param name="param"></param>
  462. /// <returns></returns>
  463. private bool InitializeAll(object[] param)
  464. {
  465. if (fsm.State == (int)MetalState.Initializing)
  466. {
  467. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), "state is Initializing,cannot do initialize");
  468. return false;
  469. }
  470. if (!CheckReservoirInitialized())
  471. {
  472. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), "Reservoir is not initialized");
  473. return false;
  474. }
  475. if (!MetalUsageMointor(Module.ToString()))
  476. {
  477. return false;
  478. }
  479. if ("Auto".Equals(_persistentValue.OperatingMode))
  480. {
  481. if (!CheckReservoirIsAuto())
  482. {
  483. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), "Reservoir is not in Auto OperationMode");
  484. return false;
  485. }
  486. }
  487. if (_metalItem.SubType == STRATUS)
  488. {
  489. return _standardHotInitializeRoutine.Start(_persistentValue) == RState.Running;
  490. }
  491. else
  492. {
  493. return _compactEmbranceInitializeRoutine.Start(_persistentValue) == RState.Running;
  494. }
  495. }
  496. /// <summary>
  497. /// 检验Reservoir是否Initialized
  498. /// </summary>
  499. /// <returns></returns>
  500. private bool CheckReservoirInitialized()
  501. {
  502. string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  503. ReservoirEntity reservoirEntity = Singleton<RouteManager>.Instance.GetModule<ReservoirEntity>(reservoir);
  504. if (reservoirEntity != null)
  505. {
  506. return reservoirEntity.IsInitialized;
  507. }
  508. return false;
  509. }
  510. /// <summary>
  511. /// 检验Reservoir是否Auto
  512. /// </summary>
  513. /// <returns></returns>
  514. private bool CheckReservoirIsAuto()
  515. {
  516. string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  517. ReservoirsPersistentValue reservoirsPersistentValue = ReservoirsPersistentManager.Instance.GetReservoirsPersistentValue(reservoir);
  518. if ("Auto".Equals(reservoirsPersistentValue.OperatingMode))
  519. {
  520. return true;
  521. }
  522. return false;
  523. }
  524. /// <summary>
  525. /// 初始化监控
  526. /// </summary>
  527. /// <param name="param"></param>
  528. /// <returns></returns>
  529. private bool InitializeAllMonitor(object[] param)
  530. {
  531. RState rsstate = RState.Running;
  532. if (_metalItem.SubType == STRATUS)
  533. {
  534. rsstate = _standardHotInitializeRoutine.Monitor();
  535. }
  536. else
  537. {
  538. rsstate = _compactEmbranceInitializeRoutine.Monitor();
  539. }
  540. if (rsstate == RState.End)
  541. {
  542. return true;
  543. }
  544. else if (rsstate == RState.Failed || rsstate == RState.Timeout)
  545. {
  546. PostMsg(MetalMsg.Error);
  547. return false;
  548. }
  549. return false;
  550. }
  551. #endregion
  552. #region RunRecipe
  553. /// <summary>
  554. /// Run Recipe
  555. /// </summary>
  556. /// <param name="param"></param>
  557. /// <returns></returns>
  558. private bool RunRecipe(object[] param)
  559. {
  560. MetalUsageMointor(); //Metal run recipe前检查PMCounter消耗
  561. string reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  562. if (_metalItem.SubType == STRATUS)
  563. {
  564. StandardHotReservoirDevice resDevice = DEVICE.GetDevice<StandardHotReservoirDevice>(reservoirName);
  565. resDevice.ReservoirUsageMonitor();
  566. }
  567. DepRecipe recipe = param[0] as DepRecipe;
  568. _recipeSide = param[1].ToString();
  569. _cycle = (int)param[2];
  570. _runrecipeElapsedTime = 0;
  571. bool result = false;
  572. if (_metalItem.SubType == STRATUS)
  573. {
  574. _currentRunRecipeRoutine = _standardHotRunRecipeRoutine;
  575. result = _standardHotRunRecipeRoutine.Start(recipe, _recipeSide,_cycle) == RState.Running;
  576. }
  577. else
  578. {
  579. _currentRunRecipeRoutine = _compactEmbranceRunRecipeRoutine;
  580. result = _compactEmbranceRunRecipeRoutine.Start(recipe, _recipeSide, _cycle) == RState.Running;
  581. }
  582. if (result)
  583. {
  584. if (WaferHolderInfo != null)
  585. {
  586. WaferHolderInfo.MetalModuleName = Module;
  587. }
  588. _recipeTime = (recipe.CalculateRecipeTotalTime())*_cycle;
  589. _currentRecipe = recipe;
  590. if (WaferHolderInfo != null && WaferHolderInfo.SchedulerModules != null && WaferHolderInfo.SchedulerModules.Count != 0)
  591. {
  592. LOG.WriteLog(eEvent.INFO_METAL, Module.ToString(), $"{WaferHolderInfo?.Id} {string.Join(",", WaferHolderInfo.SchedulerModules)}");
  593. }
  594. _runRecipeStartTime = DateTime.Now;
  595. if (WaferHolderInfo != null && _currentRecipe != null)
  596. {
  597. FaModuleNotifier.Instance.NotifyWaferShuttleRecipeStart(WaferHolderInfo, _currentRecipe.Ppid);
  598. }
  599. }
  600. return result;
  601. }
  602. /// <summary>
  603. /// RunRecipe监控
  604. /// </summary>
  605. /// <param name="param"></param>
  606. /// <returns></returns>
  607. private bool RunRecipeMonitor(object[] param)
  608. {
  609. RState rsstate = RState.Running;
  610. string reason = "";
  611. if (_metalItem.SubType == STRATUS)
  612. {
  613. rsstate = _standardHotRunRecipeRoutine.Monitor();
  614. reason = _standardHotRunRecipeRoutine.ErrorMsg;
  615. _achievedCycle = _standardHotRunRecipeRoutine.GetCurrentCycle();
  616. }
  617. else
  618. {
  619. rsstate = _compactEmbranceRunRecipeRoutine.Monitor();
  620. reason = _compactEmbranceRunRecipeRoutine.ErrorMsg;
  621. }
  622. if (Singleton<RouteManager>.Instance.IsAutoRunning && _runrecipeElapsedTime != TimeToReady)
  623. {
  624. _runrecipeElapsedTime = TimeToReady;
  625. LOG.WriteLog(eEvent.INFO_METAL, Module.ToString(), $"{WaferHolderInfo?.Id} {Module} RunRecipe TimeToReady {TimeToReady}s.");
  626. }
  627. if (rsstate == RState.End)
  628. {
  629. _recipeTime = 0;
  630. if (WaferHolderInfo != null)
  631. {
  632. double anodeAUsage = GetAnodeAUsage();
  633. double anodeBUsage = GetAnodeBUsage();
  634. MetalUsageManager.Instance.UpdateMetalUsage(Module.ToString(), _recipeSide, anodeAUsage, anodeBUsage);
  635. MetalUsageMointor(); //检查PMCounter消耗
  636. //CMM Usage
  637. string reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  638. if (_metalItem.SubType == STRATUS)
  639. {
  640. StandardHotReservoirDevice resDevice = DEVICE.GetDevice<StandardHotReservoirDevice>(reservoirName);
  641. resDevice.ReservoirUsageMonitor();
  642. resDevice.SetExportCMMUsage();
  643. }
  644. WaferHolderInfo.LastMetalRecipeCompleteTime = DateTime.Now;
  645. _isCurrentReceipeComplete = true;
  646. _currentWaferShuttleStartSoakTime = DateTime.Now;
  647. }
  648. _runrecipeElapsedTime = 0;
  649. //记录LotTrack
  650. _runRecipeCompleteTime = DateTime.Now;
  651. int timeLength = (int)(_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds;
  652. if (_metalItem.SubType == STRATUS)
  653. {
  654. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  655. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _standardHotRunRecipeRoutine.MetalLotTrackDatas,
  656. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  657. }
  658. else
  659. {
  660. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  661. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _compactEmbranceRunRecipeRoutine.MetalLotTrackDatas,
  662. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  663. }
  664. if (WaferHolderInfo != null && _currentRecipe != null)
  665. {
  666. FaModuleNotifier.Instance.NotifyWaferShuttleRecipeEnd(WaferHolderInfo, _currentRecipe.Ppid, timeLength);
  667. }
  668. return true;
  669. }
  670. else if (rsstate == RState.Failed || rsstate == RState.Timeout)
  671. {
  672. _recipeTime = 0;
  673. if (WaferHolderInfo != null)
  674. {
  675. double anodeAUsage = GetAnodeAUsage();
  676. double anodeBUsage = GetAnodeBUsage();
  677. MetalUsageManager.Instance.UpdateMetalUsage(Module.ToString(), _recipeSide, anodeAUsage, anodeBUsage);
  678. MetalUsageMointor(); //失败了也要检查PMCounter消耗
  679. //CMMUsage
  680. string reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  681. if (_metalItem.SubType == STRATUS)
  682. {
  683. StandardHotReservoirDevice resDevice = DEVICE.GetDevice<StandardHotReservoirDevice>(reservoirName);
  684. resDevice.ReservoirUsageMonitor();
  685. resDevice.SetExportCMMUsage();
  686. }
  687. }
  688. _runrecipeElapsedTime = 0;
  689. if (WaferHolderInfo != null && _currentRecipe != null)
  690. {
  691. WaferHolderInfo.LastMetalRecipeCompleteTime = DateTime.Now;
  692. }
  693. PostMsg(MetalMsg.Error);
  694. //记录LotTrack
  695. _runRecipeCompleteTime = DateTime.Now;
  696. if (_metalItem.SubType == STRATUS)
  697. {
  698. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  699. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _standardHotRunRecipeRoutine.MetalLotTrackDatas,
  700. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  701. }
  702. else
  703. {
  704. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  705. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _compactEmbranceRunRecipeRoutine.MetalLotTrackDatas,
  706. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  707. }
  708. if (WaferHolderInfo != null)
  709. {
  710. WaferHolderInfo.LastMetalRecipeCompleteTime = DateTime.Now;
  711. if (_currentRecipe != null)
  712. {
  713. FaModuleNotifier.Instance.NotifyWaferShuttleRecipeFailed(WaferHolderInfo, _currentRecipe.Ppid);
  714. }
  715. if (!string.IsNullOrEmpty(reason))
  716. {
  717. WriteErrorReason(reason);
  718. }
  719. }
  720. return false;
  721. }
  722. return false;
  723. }
  724. /// <summary>
  725. /// 写入错误原因
  726. /// </summary>
  727. /// <param name="reason"></param>
  728. public void WriteErrorReason(string reason)
  729. {
  730. if (WaferHolderInfo == null || string.IsNullOrEmpty(reason))
  731. {
  732. return;
  733. }
  734. WaferInfo waferAInfo = WaferManager.Instance.GetWaferByWaferId(WaferHolderInfo.WaferAId);
  735. if (waferAInfo != null && !waferAInfo.IsEmpty)
  736. {
  737. WaferDataRecorder.SetWaferReason(waferAInfo.InnerId.ToString(), reason);
  738. }
  739. WaferInfo waferBInfo = WaferManager.Instance.GetWaferByWaferId(WaferHolderInfo.WaferBId);
  740. if (waferBInfo != null && !waferBInfo.IsEmpty)
  741. {
  742. WaferDataRecorder.SetWaferReason(waferBInfo.InnerId.ToString(), reason);
  743. }
  744. }
  745. /// <summary>
  746. /// 监控 PM Counter Metal用量
  747. /// </summary>
  748. private void MetalUsageMointor()
  749. {
  750. MetalUsage metalUsage = MetalUsageManager.Instance.GetMetalUsage(Module.ToString());
  751. if (metalUsage != null)
  752. {
  753. //TotalAUsage
  754. if (metalUsage.TotalUsage > SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit") != 0)
  755. {
  756. if (metalUsage.TotalUsage > SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit"))
  757. {
  758. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit")}");
  759. PostMsg(MetalMsg.Error);
  760. AlarmListManager.Instance.AddDataError(Module.ToString(),
  761. $"{Module.ToString()}.metalUsage.TotalUsage",
  762. $"{Module.ToString()} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit")}");
  763. }
  764. else
  765. {
  766. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit")}");
  767. AlarmListManager.Instance.AddWarn(Module.ToString(),
  768. $"{Module.ToString()}.metalUsage.TotalUsage",
  769. $"{Module.ToString()} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit")}");
  770. }
  771. }
  772. //AnodeAUsage
  773. if (metalUsage.AnodeAUsage > SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit") != 0)
  774. {
  775. if (metalUsage.AnodeAUsage > SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit"))
  776. {
  777. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit")}");
  778. PostMsg(MetalMsg.Error);
  779. AlarmListManager.Instance.AddDataError(Module.ToString(),
  780. $"{Module.ToString()}.metalUsage.AnodeAUsage",
  781. $"{Module.ToString()} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit")}");
  782. }
  783. else
  784. {
  785. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit")}");
  786. AlarmListManager.Instance.AddWarn(Module.ToString(),
  787. $"{Module.ToString()}.metalUsage.AnodeAUsage",
  788. $"{Module.ToString()} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit")}");
  789. }
  790. }
  791. //AnodeBUsage
  792. if (metalUsage.AnodeBUsage > SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit") != 0)
  793. {
  794. if (metalUsage.AnodeBUsage > SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit"))
  795. {
  796. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit")}");
  797. PostMsg(MetalMsg.Error);
  798. AlarmListManager.Instance.AddDataError(Module.ToString(),
  799. $"{Module.ToString()}.metalUsage.AnodeBUsage",
  800. $"{Module.ToString()} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit")}");
  801. }
  802. else
  803. {
  804. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit")}");
  805. AlarmListManager.Instance.AddWarn(Module.ToString(),
  806. $"{Module.ToString()}.metalUsage.AnodeBUsage",
  807. $"{Module.ToString()} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit")}");
  808. }
  809. }
  810. //MembraneAUsage
  811. if (metalUsage.MembranceAUsage > SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit") != 0)
  812. {
  813. if (metalUsage.MembranceAUsage > SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit"))
  814. {
  815. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit")}");
  816. PostMsg(MetalMsg.Error);
  817. AlarmListManager.Instance.AddDataError(Module.ToString(),
  818. $"{Module.ToString()}.metalUsage.MembraneAUsage",
  819. $"{Module.ToString()} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit")}");
  820. }
  821. else
  822. {
  823. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit")}");
  824. AlarmListManager.Instance.AddWarn(Module.ToString(),
  825. $"{Module.ToString()}.metalUsage.MembraneAUsage",
  826. $"{Module.ToString()} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit")}");
  827. }
  828. }
  829. //MembraneBUsage
  830. if (metalUsage.MembranceBUsage > SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit") != 0)
  831. {
  832. if (metalUsage.MembranceBUsage > SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit"))
  833. {
  834. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit")}");
  835. PostMsg(MetalMsg.Error);
  836. AlarmListManager.Instance.AddDataError(Module.ToString(),
  837. $"{Module.ToString()}.metalUsage.MembraneBUsage",
  838. $"{Module.ToString()} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit")}");
  839. }
  840. else
  841. {
  842. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit")}");
  843. AlarmListManager.Instance.AddWarn(Module.ToString(),
  844. $"{Module.ToString()}.metalUsage.MembraneBUsage",
  845. $"{Module.ToString()} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit")}");
  846. }
  847. }
  848. //TotalWafer
  849. if (metalUsage.TotalWafers > SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit") && SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit") != 0)
  850. {
  851. if (metalUsage.TotalWafers > SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit"))
  852. {
  853. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit")}");
  854. PostMsg(MetalMsg.Error);
  855. AlarmListManager.Instance.AddDataError(Module.ToString(),
  856. $"{Module.ToString()}.metalUsage.TotalWafers",
  857. $"{Module.ToString()} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit")}");
  858. }
  859. else
  860. {
  861. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit")}");
  862. AlarmListManager.Instance.AddWarn(Module.ToString(),
  863. $"{Module.ToString()}.metalUsage.TotalWafers",
  864. $"{Module.ToString()} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit")}");
  865. }
  866. }
  867. //AnodeAWafer
  868. if (metalUsage.AnodeAWafers > SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit") != 0)
  869. {
  870. if (metalUsage.AnodeAWafers > SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit"))
  871. {
  872. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit")}");
  873. PostMsg(MetalMsg.Error);
  874. AlarmListManager.Instance.AddDataError(Module.ToString(),
  875. $"{Module.ToString()}.metalUsage.AnodeAWafers",
  876. $"{Module.ToString()} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit")}");
  877. }
  878. else
  879. {
  880. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit")}");
  881. AlarmListManager.Instance.AddWarn(Module.ToString(),
  882. $"{Module.ToString()}.metalUsage.AnodeAWafers",
  883. $"{Module.ToString()} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit")}");
  884. }
  885. }
  886. //AnodeBWafer
  887. if (metalUsage.AnodeBWafers > SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit") != 0)
  888. {
  889. if (metalUsage.AnodeBWafers > SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit"))
  890. {
  891. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit")}");
  892. PostMsg(MetalMsg.Error);
  893. AlarmListManager.Instance.AddDataError(Module.ToString(),
  894. $"{Module.ToString()}.metalUsage.AnodeBWafers",
  895. $"{Module.ToString()} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit")}");
  896. }
  897. else
  898. {
  899. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit")}");
  900. AlarmListManager.Instance.AddWarn(Module.ToString(),
  901. $"{Module.ToString()}.metalUsage.AnodeBWafers",
  902. $"{Module.ToString()} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit")}");
  903. }
  904. }
  905. //AnodeAbathUsage
  906. if (metalUsage.AnodeABathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit") != 0)
  907. {
  908. if (metalUsage.AnodeABathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit"))
  909. {
  910. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit")}");
  911. PostMsg(MetalMsg.Error);
  912. AlarmListManager.Instance.AddDataError(Module.ToString(),
  913. $"{Module.ToString()}.metalUsage.AnodeABathUsage",
  914. $"{Module.ToString()} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit")}");
  915. }
  916. else
  917. {
  918. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit")}");
  919. AlarmListManager.Instance.AddWarn(Module.ToString(),
  920. $"{Module.ToString()}.metalUsage.AnodeABathUsage",
  921. $"{Module.ToString()} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit")}");
  922. }
  923. }
  924. //AnodeBbathUsage
  925. if (metalUsage.AnodeBBathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit") != 0)
  926. {
  927. if (metalUsage.AnodeBBathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit"))
  928. {
  929. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit")}");
  930. PostMsg(MetalMsg.Error);
  931. AlarmListManager.Instance.AddDataError(Module.ToString(),
  932. $"{Module.ToString()}.metalUsage.AnodeBBathUsage",
  933. $"{Module.ToString()} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit")}");
  934. }
  935. else
  936. {
  937. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit")}");
  938. AlarmListManager.Instance.AddWarn(Module.ToString(),
  939. $"{Module.ToString()}.metalUsage.AnodeBBathUsage",
  940. $"{Module.ToString()} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit")}");
  941. }
  942. }
  943. }
  944. }
  945. /// <summary>
  946. /// 获取A面使用的电量
  947. /// </summary>
  948. /// <returns></returns>
  949. private double GetAnodeAUsage()
  950. {
  951. if (_metalItem.SubType == STRATUS)
  952. {
  953. return Math.Round(_standardHotRunRecipeRoutine.AnodeAUsage, 3);
  954. }
  955. else
  956. {
  957. return Math.Round(_compactEmbranceRunRecipeRoutine.AnodeAUsage, 3);
  958. }
  959. }
  960. /// <summary>
  961. /// 获取B面使用的电量
  962. /// </summary>
  963. /// <returns></returns>
  964. private double GetAnodeBUsage()
  965. {
  966. if (_metalItem.SubType == STRATUS)
  967. {
  968. return Math.Round(_standardHotRunRecipeRoutine.AnodeBUsage, 3);
  969. }
  970. else
  971. {
  972. return Math.Round(_compactEmbranceRunRecipeRoutine.AnodeBUsage, 3);
  973. }
  974. }
  975. /// <summary>
  976. /// Abort Recipe
  977. /// </summary>
  978. /// <param name="param"></param>
  979. /// <returns></returns>
  980. public bool AbortRecipe(object[] param)
  981. {
  982. _runRecipeCompleteTime = DateTime.Now;
  983. if (_metalItem.SubType == STRATUS)
  984. {
  985. _standardHotRunRecipeRoutine.Abort();
  986. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  987. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _standardHotRunRecipeRoutine.MetalLotTrackDatas,
  988. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  989. }
  990. else
  991. {
  992. _compactEmbranceRunRecipeRoutine.Abort();
  993. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  994. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _compactEmbranceRunRecipeRoutine.MetalLotTrackDatas,
  995. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  996. }
  997. return true;
  998. }
  999. #endregion
  1000. #region Current Short Test
  1001. /// <summary>
  1002. /// Current Short Test
  1003. /// </summary>
  1004. /// <param name="param"></param>
  1005. /// <returns></returns>
  1006. private bool CurrentShortTest(object[] param)
  1007. {
  1008. return _currentShortTestRoutine.Start() == RState.Running;
  1009. }
  1010. /// <summary>
  1011. /// Current Short test监控
  1012. /// </summary>
  1013. /// <param name="param"></param>
  1014. /// <returns></returns>
  1015. private bool CurrentShortTestMonitor(object[] param)
  1016. {
  1017. RState rsstate = _currentShortTestRoutine.Monitor();
  1018. if (rsstate == RState.End)
  1019. {
  1020. return true;
  1021. }
  1022. else if (rsstate == RState.Failed || rsstate == RState.Timeout)
  1023. {
  1024. PostMsg(MetalMsg.Error);
  1025. return false;
  1026. }
  1027. return false;
  1028. }
  1029. #endregion
  1030. #region Close Flow Valve
  1031. /// <summary>
  1032. /// 关闭Flow Valve
  1033. /// </summary>
  1034. /// <param name="param"></param>
  1035. /// <returns></returns>
  1036. private bool CloseFlowValve(object[] param)
  1037. {
  1038. if (_metalItem.SubType == STRATUS)
  1039. {
  1040. StandardHotMetalDevice device = DEVICE.GetDevice<StandardHotMetalDevice>(Module.ToString());
  1041. if (device != null)
  1042. {
  1043. return device.SwitchToBypass("", null);
  1044. }
  1045. return false;
  1046. }
  1047. else
  1048. {
  1049. CompactMembranMetalDevice device = DEVICE.GetDevice<CompactMembranMetalDevice>(Module.ToString());
  1050. if (device != null)
  1051. {
  1052. string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  1053. CompactMembranReservoirDevice reservoirDevice = DEVICE.GetDevice<CompactMembranReservoirDevice>(reservoir);
  1054. if (reservoirDevice != null)
  1055. {
  1056. bool result = reservoirDevice.CAByPassOn("", null);
  1057. if (result)
  1058. {
  1059. return device.CellFlowValveOff("", null);
  1060. }
  1061. }
  1062. }
  1063. return false;
  1064. }
  1065. }
  1066. #endregion
  1067. #region Open Flow Valve
  1068. /// <summary>
  1069. /// 打开Flow Valve
  1070. /// </summary>
  1071. /// <param name="param"></param>
  1072. /// <returns></returns>
  1073. private bool OpenFlowValve(object[] param)
  1074. {
  1075. if (_metalItem.SubType == STRATUS)
  1076. {
  1077. StandardHotMetalDevice device = DEVICE.GetDevice<StandardHotMetalDevice>(Module.ToString());
  1078. if (device != null)
  1079. {
  1080. bool result = device.SwitchToFlow("", null);
  1081. if (result)
  1082. {
  1083. return device.OpenPump("", null);
  1084. }
  1085. }
  1086. return false;
  1087. }
  1088. else
  1089. {
  1090. CompactMembranMetalDevice device = DEVICE.GetDevice<CompactMembranMetalDevice>(Module.ToString());
  1091. if (device != null)
  1092. {
  1093. string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  1094. CompactMembranReservoirDevice reservoirDevice = DEVICE.GetDevice<CompactMembranReservoirDevice>(reservoir);
  1095. if (reservoirDevice != null)
  1096. {
  1097. bool result = reservoirDevice.CAByPassOff("", null);
  1098. if (result)
  1099. {
  1100. return device.CellFlowValveOn("", null);
  1101. }
  1102. }
  1103. }
  1104. return false;
  1105. }
  1106. }
  1107. #endregion
  1108. public bool Check(int msg, out string reason, params object[] args)
  1109. {
  1110. reason = "";
  1111. return true;
  1112. }
  1113. public bool CheckAcked(int msg)
  1114. {
  1115. return true;
  1116. }
  1117. public int Invoke(string function, params object[] args)
  1118. {
  1119. switch (function)
  1120. {
  1121. case "HomeAll":
  1122. if (IsIdle)
  1123. {
  1124. return (int)FSM_MSG.NONE;
  1125. }
  1126. if (CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Initialize))
  1127. {
  1128. return (int)MetalMsg.Initialize;
  1129. }
  1130. else
  1131. {
  1132. return (int)FSM_MSG.NONE;
  1133. }
  1134. }
  1135. return (int)FSM_MSG.NONE;
  1136. }
  1137. /// <summary>
  1138. /// 监控 PM Counter Metal用量
  1139. /// </summary>
  1140. private bool MetalUsageMointor(string Module)
  1141. {
  1142. MetalUsage metalUsage = MetalUsageManager.Instance.GetMetalUsage(Module);
  1143. if (metalUsage != null)
  1144. {
  1145. //TotalAUsage
  1146. if (metalUsage.TotalUsage > SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit") != 0)
  1147. {
  1148. if (metalUsage.TotalUsage > SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit"))
  1149. {
  1150. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit")}");
  1151. return false;
  1152. }
  1153. else
  1154. {
  1155. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit")}");
  1156. }
  1157. }
  1158. //AnodeAUsage
  1159. if (metalUsage.AnodeAUsage > SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit") != 0)
  1160. {
  1161. if (metalUsage.AnodeAUsage > SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit"))
  1162. {
  1163. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit")}");
  1164. return false;
  1165. }
  1166. else
  1167. {
  1168. LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit")}");
  1169. }
  1170. }
  1171. //AnodeBUsage
  1172. if (metalUsage.AnodeBUsage > SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit") != 0)
  1173. {
  1174. if (metalUsage.AnodeBUsage > SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit"))
  1175. {
  1176. LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit")}");
  1177. return false;
  1178. }
  1179. else
  1180. {
  1181. LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit")}");
  1182. }
  1183. }
  1184. //MembraneAUsage
  1185. if (metalUsage.MembranceAUsage > SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit") != 0)
  1186. {
  1187. if (metalUsage.MembranceAUsage > SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit"))
  1188. {
  1189. LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit")}");
  1190. return false;
  1191. }
  1192. else
  1193. {
  1194. LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit")}");
  1195. }
  1196. }
  1197. //MembraneBUsage
  1198. if (metalUsage.MembranceBUsage > SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit") != 0)
  1199. {
  1200. if (metalUsage.MembranceBUsage > SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit"))
  1201. {
  1202. LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit")}");
  1203. }
  1204. else
  1205. {
  1206. LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit")}");
  1207. }
  1208. }
  1209. //TotalWafer
  1210. if (metalUsage.TotalWafers > SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit") && SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit") != 0)
  1211. {
  1212. if (metalUsage.TotalWafers > SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit"))
  1213. {
  1214. LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit")}");
  1215. return false;
  1216. }
  1217. else
  1218. {
  1219. LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit")}");
  1220. }
  1221. }
  1222. //AnodeAWafer
  1223. if (metalUsage.AnodeAWafers > SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit") != 0)
  1224. {
  1225. if (metalUsage.AnodeAWafers > SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit"))
  1226. {
  1227. LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit")}");
  1228. return false;
  1229. }
  1230. else
  1231. {
  1232. LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit")}");
  1233. }
  1234. }
  1235. //AnodeBWafer
  1236. if (metalUsage.AnodeBWafers > SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit") != 0)
  1237. {
  1238. if (metalUsage.AnodeBWafers > SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit"))
  1239. {
  1240. LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit")}");
  1241. return false;
  1242. }
  1243. else
  1244. {
  1245. LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit")}");
  1246. }
  1247. }
  1248. //AnodeAbathUsage
  1249. if (metalUsage.AnodeABathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit") != 0)
  1250. {
  1251. if (metalUsage.AnodeABathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit"))
  1252. {
  1253. LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit")}");
  1254. return false;
  1255. }
  1256. else
  1257. {
  1258. LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit")}");
  1259. }
  1260. }
  1261. //AnodeBbathUsage
  1262. if (metalUsage.AnodeBBathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit") != 0)
  1263. {
  1264. if (metalUsage.AnodeBBathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit"))
  1265. {
  1266. LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit")}");
  1267. return false;
  1268. }
  1269. else
  1270. {
  1271. LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit")}");
  1272. }
  1273. }
  1274. }
  1275. return true;
  1276. }
  1277. }
  1278. public enum MetalMsg
  1279. {
  1280. NONE,
  1281. Error,
  1282. ResumeError,
  1283. Initialize,
  1284. Manual,
  1285. Auto,
  1286. CurrentShortTest,
  1287. CloseFlowValve,
  1288. OpenFlowValve,
  1289. RunRecipe,
  1290. Abort,
  1291. Init
  1292. }
  1293. }