| .. |
|
AXIS
|
886e1c8a62
Revise Transporter related bugs;
|
7 mesi fa |
|
BarcodeReader
|
f7533a737b
Initialize
|
9 mesi fa |
|
Dose
|
31c26804e6
add Festo Communication Protocol
|
8 mesi fa |
|
Dryer
|
31c26804e6
add Festo Communication Protocol
|
8 mesi fa |
|
EFEM
|
abb9a9350a
update scheduler puf parameter
|
7 mesi fa |
|
Facilities
|
31c26804e6
add Festo Communication Protocol
|
8 mesi fa |
|
LinMot
|
f7533a737b
Initialize
|
9 mesi fa |
|
Loader
|
8a43225b99
Modify PreTransferUnclamp Routine, TransPorter pickup and putdown Routine;
|
7 mesi fa |
|
Metal
|
31c26804e6
add Festo Communication Protocol
|
8 mesi fa |
|
PUF
|
0f6f0fbadc
update efem pick and place wafer size
|
7 mesi fa |
|
PowerSupplier
|
f7533a737b
Initialize
|
9 mesi fa |
|
Prewet
|
31c26804e6
add Festo Communication Protocol
|
8 mesi fa |
|
Reservoir
|
31c26804e6
add Festo Communication Protocol
|
8 mesi fa |
|
Resistivity
|
f7533a737b
Initialize
|
9 mesi fa |
|
Rinse
|
31c26804e6
add Festo Communication Protocol
|
8 mesi fa |
|
SRD
|
31c26804e6
add Festo Communication Protocol
|
8 mesi fa |
|
Safety
|
0f6f0fbadc
update efem pick and place wafer size
|
7 mesi fa |
|
SignalLight
|
e2d5bb5c5d
update galil controller inputs
|
7 mesi fa |
|
Temperature
|
31c26804e6
add Festo Communication Protocol
|
8 mesi fa |
|
TransPorter
|
2192df7ad3
Modify Transporter related routine and UI;
|
7 mesi fa |
|
DataDefine.cs
|
f7533a737b
Initialize
|
9 mesi fa |
|
DeviceManager.cs
|
00c6fabca5
update transporter
|
7 mesi fa |
|
FinsPlc.cs
|
f7533a737b
Initialize
|
9 mesi fa |
chenkui
abb9a9350a
update scheduler puf parameter