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- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Aitex.Sorter.Common;
- using CyberX8_RT.Devices;
- using MECF.Framework.Common.Routine;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.SubstrateTrackings;
- using CyberX8_Core;
- using Aitex.Core.RT.Log;
- using Aitex.Core.Common;
- using Aitex.Core.Util;
- using MECF.Framework.Common.Schedulers;
- using System.Collections.Generic;
- using CyberX8_RT.Devices.EFEM;
- namespace CyberX8_RT.Modules.EFEM
- {
- class EfemHomeRoutine : ModuleRoutineBase, IRoutine
- {
- private enum HomeStep
- {
- ClearError,
- SetHomeSpeed,
- InitRobot,
- InitLP1,
- InitLP2,
- InitLP3,
- InitAligner,
- CheckWaferPresence,
- SetDummy1Size,
- MapDummy1,
- SetDummy2Size,
- MapDummy2,
- SetRobotSpeed,
- End,
- }
- private enum HomeModuleStep
- {
- SetHomeSpeed,
- Home,
- HomeAxes,
- SetRobotSpeed,
- End,
- }
- private int _homeTimeout = 30 * 1000;
- ModuleName _targetModule;
- EfemBase _efem;
- int _defaultSpeed = SC.GetValue<int>("EFEM.DefaultMoveSpeedInPercent");
- int _homeSpeed = SC.GetValue<int>("EFEM.DefaultHomeSpeedInPercent");
-
- bool _isLP1Unable = SC.GetValue<bool>("EFEM.IsLoadPort1Unable");
- bool _isLP2Unable = SC.GetValue<bool>("EFEM.IsLoadPort2Unable");
- bool _isLP3Unable = SC.GetValue<bool>("EFEM.IsLoadPort3Unable");
- private int _waferSize = SC.GetValue<int>("System.WaferSize");
- bool _isDummy1Install = ModuleHelper.IsInstalled(ModuleName.Dummy1);
- bool _isDummy2Install = ModuleHelper.IsInstalled(ModuleName.Dummy2);
- Hand _hand = Hand.Blade1;
-
- public EfemHomeRoutine(EfemBase efem) : base(ModuleName.EfemRobot)
- {
- _efem = efem;
- }
- public RState Start(params object[] objs)
- {
- if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, (int)_hand))
- {
- LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Efem robot arm{_hand} already has a wafer, cannot do the home action");
- return RState.Failed;
- }
- _isLP1Unable = SC.GetValue<bool>("EFEM.IsLoadPort1Unable");
- _isLP2Unable = SC.GetValue<bool>("EFEM.IsLoadPort2Unable");
- _isLP3Unable = SC.GetValue<bool>("EFEM.IsLoadPort3Unable");
-
- _defaultSpeed = SC.GetValue<int>("EFEM.DefaultMoveSpeedInPercent");
- _homeSpeed = SC.GetValue<int>("EFEM.DefaultHomeSpeedInPercent");
-
- _targetModule = (ModuleName)objs[0];
- _homeTimeout = SC.GetValue<int>($"EFEM.HomeTimeout") * 1000;
- return Runner.Start(Module, $"Home {_targetModule}");
- }
- public RState Monitor()
- {
- if(_targetModule == ModuleName.EFEM)
- {
- Runner.Run(HomeStep.ClearError, ClearError, IsStepComplete, _delay_5s)
- .Run(HomeStep.SetHomeSpeed, SetHomeSpeed, IsStepComplete, _delay_5s)
- .Run(HomeStep.InitRobot, () => { return HomeModule(ModuleName.EfemRobot); }, IsStepComplete, _homeTimeout)
- .RunIf(HomeStep.InitLP1, !_isLP1Unable, () => { return HomeModule(ModuleName.LP1); }, IsStepComplete, _homeTimeout)
- .RunIf(HomeStep.InitLP2, !_isLP2Unable, () => { return HomeModule(ModuleName.LP2); }, IsStepComplete, _homeTimeout)
- .RunIf(HomeStep.InitLP3, !_isLP3Unable, () => { return HomeModule(ModuleName.LP3); }, IsStepComplete, _homeTimeout)
- .Run(HomeStep.InitAligner, () => { return HomeModule(ModuleName.Aligner1); },IsStepComplete, _homeTimeout)
- .Run(HomeStep.CheckWaferPresence, CheckWaferPresence, VerifyWaferPresence, _delay_5s)
- .RunIf(HomeStep.SetDummy1Size, _isDummy1Install, () => { return SetWaferSize(ModuleName.Dummy1); }, CheckSetSizeDone, _delay_5s)
- .RunIf(HomeStep.MapDummy1, _isDummy1Install, () => { return Map(ModuleName.Dummy1); }, CheckMapDone, _homeTimeout)
- .RunIf(HomeStep.SetDummy2Size, _isDummy2Install, () => { return SetWaferSize(ModuleName.Dummy2); }, CheckSetSizeDone, _delay_5s)
- .RunIf(HomeStep.MapDummy2, _isDummy2Install, () => { return Map(ModuleName.Dummy2); }, CheckMapDone, _homeTimeout)
- .Run(HomeStep.SetRobotSpeed, SetRobotSpeed, IsStepComplete, _delay_5s)
- .End(HomeStep.End, NullFun, _delay_1ms);
- }
- else
- {
- Runner.Run(HomeModuleStep.SetHomeSpeed, SetHomeSpeed, IsStepComplete, _delay_5s)
- .Run(HomeModuleStep.Home, HomeModule, IsStepComplete, _homeTimeout)
- .Run(HomeModuleStep.HomeAxes, HomeModuleAxes, IsStepComplete, _homeTimeout)
- .Run(HomeModuleStep.SetRobotSpeed, SetRobotSpeed, IsStepComplete, _delay_5s)
- .End(HomeModuleStep.End, NullFun, _delay_50ms);
- }
- return Runner.Status;
- }
- public void Abort()
- {
- }
- private bool IsStepComplete()
- {
- if (_efem.Status == RState.End)
- {
- return true;
- }
- else if (_efem.Status == RState.Failed)
- {
- Runner.Stop($"Efem home failed: {_efem.Status}");
- return true;
- }
- else
- return false;
- }
- private bool CheckSetSizeDone()
- {
- if (_efem.Status == RState.End)
- {
- return true;
- }
- else if (_efem.Status != RState.Running)
- {
- LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, Module, $"Efem SetDummySize failed: {_efem.Status}");
- return true;
- }
- return false;
- }
- private bool CheckMapDone()
- {
- if (_efem.Status == RState.End)
- {
- return true;
- }
- else if (_efem.Status == RState.Failed)
- {
- LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, Module, $"Efem MapDummy failed: {_efem.Status}");
- return true;
- }
- return false;
- }
- private bool ClearError()
- {
- return _efem.ClearError();
- }
- private bool HomeAll()
- {
- return _efem.HomeAll();
- }
- private bool HomeModule()
- {
- return _efem.Home(_targetModule);
- }
- private bool Map(ModuleName mod)
- {
- return _efem.Map(mod);
- }
- private bool SetWaferSize(ModuleName mod)
- {
- return _efem.SetWaferSize(mod, _waferSize);
- }
- private bool HomeModule(ModuleName mod)
- {
- return _efem.Home(mod);
- }
- private bool GetWaferSize(ModuleName mod)
- {
- return _efem.GetWaferSize(mod);
- }
- private bool HomeAllAxes()
- {
- return _efem.OriginalSearch(ModuleName.EFEM);
- }
- private bool HomeModuleAxes()
- {
- return _efem.OriginalSearch(_targetModule);
- }
- private bool CheckWaferPresence()
- {
- return _efem.CheckWaferPresence();
- }
- private bool SetHomeSpeed()
- {
- return _efem.SetRobotSpeed(ModuleName.EfemRobot, _homeSpeed);
- }
- private bool SetRobotSpeed()
- {
- return _efem.SetRobotSpeed(ModuleName.EfemRobot, _defaultSpeed);
- }
- private bool VerifyWaferPresence()
- {
- if (_efem.Status == RState.End)
- {
- var waferPresence = _efem.GetWaferPresence();
- //000/111 upperArmWafer, lowerArmWafer, alignerWafer1,
- //if (waferPresence.Length != 3)
- //{
- // LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"EFEM Track wafer present return invalid value, Wafer Presence:{waferPresence}, should be 3 characters");
- // return false;
- //}
-
- //aligner2
- //if (waferPresence[3] == '1')
- //{
- // if (WaferManager.Instance.CheckNoWafer(ModuleName.Aligner2, 0))
- // {
- // WaferManager.Instance.CreateWafer(ModuleName.Aligner2, 0, WaferStatus.Normal);
- // }
- //}
- //else
- //{
- // if (WaferManager.Instance.CheckHasWafer(ModuleName.Aligner2, 0))
- // {
- // LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Aligner2} has wafer information, while EFEM return empty, manually delete if really no wafer");
- // }
- //}
- //cooling1
- //if (waferPresence[4] == '1')
- //{
- // if (WaferManager.Instance.CheckNoWafer(ModuleName.Cooling1, 0))
- // {
- // WaferManager.Instance.CreateWafer(ModuleName.Cooling1, 0, WaferStatus.Normal);
- // }
- //}
- //else
- //{
- // if (WaferManager.Instance.CheckHasWafer(ModuleName.Cooling1, 0))
- // {
- // LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Cooling1} has wafer information, while EFEM return empty, manually delete if really no wafer");
- // }
- //}
- //cooling2
- //if (waferPresence[5] == '1')
- //{
- // if (WaferManager.Instance.CheckNoWafer(ModuleName.Cooling2, 0))
- // {
- // WaferManager.Instance.CreateWafer(ModuleName.Cooling2, 0, WaferStatus.Normal);
- // }
- //}
- //else
- //{
- // if (WaferManager.Instance.CheckHasWafer(ModuleName.Cooling2, 0))
- // {
- // LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Cooling2} has wafer information, while EFEM return empty, manually delete if really no wafer");
- // }
- //}
- return true;
- }
- else if (_efem.Status == RState.Failed||_efem.Status==RState.Timeout)
- {
- LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Efem StateTrack failed: {_efem.Status}");
- return false;
- }
- else
- return false;
- }
- }
- }
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