EfemHomeRoutine.cs 11 KB

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  1. using Aitex.Core.RT.Routine;
  2. using Aitex.Core.RT.SCCore;
  3. using Aitex.Sorter.Common;
  4. using CyberX8_RT.Devices;
  5. using MECF.Framework.Common.Routine;
  6. using MECF.Framework.Common.Equipment;
  7. using MECF.Framework.Common.SubstrateTrackings;
  8. using CyberX8_Core;
  9. using Aitex.Core.RT.Log;
  10. using Aitex.Core.Common;
  11. using Aitex.Core.Util;
  12. using MECF.Framework.Common.Schedulers;
  13. using System.Collections.Generic;
  14. using CyberX8_RT.Devices.EFEM;
  15. namespace CyberX8_RT.Modules.EFEM
  16. {
  17. class EfemHomeRoutine : ModuleRoutineBase, IRoutine
  18. {
  19. private enum HomeStep
  20. {
  21. ClearError,
  22. SetHomeSpeed,
  23. InitRobot,
  24. InitLP1,
  25. InitLP2,
  26. InitLP3,
  27. InitAligner,
  28. CheckWaferPresence,
  29. SetDummy1Size,
  30. MapDummy1,
  31. SetDummy2Size,
  32. MapDummy2,
  33. SetRobotSpeed,
  34. End,
  35. }
  36. private enum HomeModuleStep
  37. {
  38. SetHomeSpeed,
  39. Home,
  40. HomeAxes,
  41. SetRobotSpeed,
  42. End,
  43. }
  44. private int _homeTimeout = 30 * 1000;
  45. ModuleName _targetModule;
  46. EfemBase _efem;
  47. int _defaultSpeed = SC.GetValue<int>("EFEM.DefaultMoveSpeedInPercent");
  48. int _homeSpeed = SC.GetValue<int>("EFEM.DefaultHomeSpeedInPercent");
  49. bool _isLP1Unable = SC.GetValue<bool>("EFEM.IsLoadPort1Unable");
  50. bool _isLP2Unable = SC.GetValue<bool>("EFEM.IsLoadPort2Unable");
  51. bool _isLP3Unable = SC.GetValue<bool>("EFEM.IsLoadPort3Unable");
  52. private int _waferSize = SC.GetValue<int>("System.WaferSize");
  53. bool _isDummy1Install = ModuleHelper.IsInstalled(ModuleName.Dummy1);
  54. bool _isDummy2Install = ModuleHelper.IsInstalled(ModuleName.Dummy2);
  55. Hand _hand = Hand.Blade1;
  56. public EfemHomeRoutine(EfemBase efem) : base(ModuleName.EfemRobot)
  57. {
  58. _efem = efem;
  59. }
  60. public RState Start(params object[] objs)
  61. {
  62. if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, (int)_hand))
  63. {
  64. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Efem robot arm{_hand} already has a wafer, cannot do the home action");
  65. return RState.Failed;
  66. }
  67. _isLP1Unable = SC.GetValue<bool>("EFEM.IsLoadPort1Unable");
  68. _isLP2Unable = SC.GetValue<bool>("EFEM.IsLoadPort2Unable");
  69. _isLP3Unable = SC.GetValue<bool>("EFEM.IsLoadPort3Unable");
  70. _defaultSpeed = SC.GetValue<int>("EFEM.DefaultMoveSpeedInPercent");
  71. _homeSpeed = SC.GetValue<int>("EFEM.DefaultHomeSpeedInPercent");
  72. _targetModule = (ModuleName)objs[0];
  73. _homeTimeout = SC.GetValue<int>($"EFEM.HomeTimeout") * 1000;
  74. return Runner.Start(Module, $"Home {_targetModule}");
  75. }
  76. public RState Monitor()
  77. {
  78. if(_targetModule == ModuleName.EFEM)
  79. {
  80. Runner.Run(HomeStep.ClearError, ClearError, IsStepComplete, _delay_5s)
  81. .Run(HomeStep.SetHomeSpeed, SetHomeSpeed, IsStepComplete, _delay_5s)
  82. .Run(HomeStep.InitRobot, () => { return HomeModule(ModuleName.EfemRobot); }, IsStepComplete, _homeTimeout)
  83. .RunIf(HomeStep.InitLP1, !_isLP1Unable, () => { return HomeModule(ModuleName.LP1); }, IsStepComplete, _homeTimeout)
  84. .RunIf(HomeStep.InitLP2, !_isLP2Unable, () => { return HomeModule(ModuleName.LP2); }, IsStepComplete, _homeTimeout)
  85. .RunIf(HomeStep.InitLP3, !_isLP3Unable, () => { return HomeModule(ModuleName.LP3); }, IsStepComplete, _homeTimeout)
  86. .Run(HomeStep.InitAligner, () => { return HomeModule(ModuleName.Aligner1); },IsStepComplete, _homeTimeout)
  87. .Run(HomeStep.CheckWaferPresence, CheckWaferPresence, VerifyWaferPresence, _delay_5s)
  88. .RunIf(HomeStep.SetDummy1Size, _isDummy1Install, () => { return SetWaferSize(ModuleName.Dummy1); }, CheckSetSizeDone, _delay_5s)
  89. .RunIf(HomeStep.MapDummy1, _isDummy1Install, () => { return Map(ModuleName.Dummy1); }, CheckMapDone, _homeTimeout)
  90. .RunIf(HomeStep.SetDummy2Size, _isDummy2Install, () => { return SetWaferSize(ModuleName.Dummy2); }, CheckSetSizeDone, _delay_5s)
  91. .RunIf(HomeStep.MapDummy2, _isDummy2Install, () => { return Map(ModuleName.Dummy2); }, CheckMapDone, _homeTimeout)
  92. .Run(HomeStep.SetRobotSpeed, SetRobotSpeed, IsStepComplete, _delay_5s)
  93. .End(HomeStep.End, NullFun, _delay_1ms);
  94. }
  95. else
  96. {
  97. Runner.Run(HomeModuleStep.SetHomeSpeed, SetHomeSpeed, IsStepComplete, _delay_5s)
  98. .Run(HomeModuleStep.Home, HomeModule, IsStepComplete, _homeTimeout)
  99. .Run(HomeModuleStep.HomeAxes, HomeModuleAxes, IsStepComplete, _homeTimeout)
  100. .Run(HomeModuleStep.SetRobotSpeed, SetRobotSpeed, IsStepComplete, _delay_5s)
  101. .End(HomeModuleStep.End, NullFun, _delay_50ms);
  102. }
  103. return Runner.Status;
  104. }
  105. public void Abort()
  106. {
  107. }
  108. private bool IsStepComplete()
  109. {
  110. if (_efem.Status == RState.End)
  111. {
  112. return true;
  113. }
  114. else if (_efem.Status == RState.Failed)
  115. {
  116. Runner.Stop($"Efem home failed: {_efem.Status}");
  117. return true;
  118. }
  119. else
  120. return false;
  121. }
  122. private bool CheckSetSizeDone()
  123. {
  124. if (_efem.Status == RState.End)
  125. {
  126. return true;
  127. }
  128. else if (_efem.Status != RState.Running)
  129. {
  130. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, Module, $"Efem SetDummySize failed: {_efem.Status}");
  131. return true;
  132. }
  133. return false;
  134. }
  135. private bool CheckMapDone()
  136. {
  137. if (_efem.Status == RState.End)
  138. {
  139. return true;
  140. }
  141. else if (_efem.Status == RState.Failed)
  142. {
  143. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, Module, $"Efem MapDummy failed: {_efem.Status}");
  144. return true;
  145. }
  146. return false;
  147. }
  148. private bool ClearError()
  149. {
  150. return _efem.ClearError();
  151. }
  152. private bool HomeAll()
  153. {
  154. return _efem.HomeAll();
  155. }
  156. private bool HomeModule()
  157. {
  158. return _efem.Home(_targetModule);
  159. }
  160. private bool Map(ModuleName mod)
  161. {
  162. return _efem.Map(mod);
  163. }
  164. private bool SetWaferSize(ModuleName mod)
  165. {
  166. return _efem.SetWaferSize(mod, _waferSize);
  167. }
  168. private bool HomeModule(ModuleName mod)
  169. {
  170. return _efem.Home(mod);
  171. }
  172. private bool GetWaferSize(ModuleName mod)
  173. {
  174. return _efem.GetWaferSize(mod);
  175. }
  176. private bool HomeAllAxes()
  177. {
  178. return _efem.OriginalSearch(ModuleName.EFEM);
  179. }
  180. private bool HomeModuleAxes()
  181. {
  182. return _efem.OriginalSearch(_targetModule);
  183. }
  184. private bool CheckWaferPresence()
  185. {
  186. return _efem.CheckWaferPresence();
  187. }
  188. private bool SetHomeSpeed()
  189. {
  190. return _efem.SetRobotSpeed(ModuleName.EfemRobot, _homeSpeed);
  191. }
  192. private bool SetRobotSpeed()
  193. {
  194. return _efem.SetRobotSpeed(ModuleName.EfemRobot, _defaultSpeed);
  195. }
  196. private bool VerifyWaferPresence()
  197. {
  198. if (_efem.Status == RState.End)
  199. {
  200. var waferPresence = _efem.GetWaferPresence();
  201. //000/111 upperArmWafer, lowerArmWafer, alignerWafer1,
  202. //if (waferPresence.Length != 3)
  203. //{
  204. // LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"EFEM Track wafer present return invalid value, Wafer Presence:{waferPresence}, should be 3 characters");
  205. // return false;
  206. //}
  207. //aligner2
  208. //if (waferPresence[3] == '1')
  209. //{
  210. // if (WaferManager.Instance.CheckNoWafer(ModuleName.Aligner2, 0))
  211. // {
  212. // WaferManager.Instance.CreateWafer(ModuleName.Aligner2, 0, WaferStatus.Normal);
  213. // }
  214. //}
  215. //else
  216. //{
  217. // if (WaferManager.Instance.CheckHasWafer(ModuleName.Aligner2, 0))
  218. // {
  219. // LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Aligner2} has wafer information, while EFEM return empty, manually delete if really no wafer");
  220. // }
  221. //}
  222. //cooling1
  223. //if (waferPresence[4] == '1')
  224. //{
  225. // if (WaferManager.Instance.CheckNoWafer(ModuleName.Cooling1, 0))
  226. // {
  227. // WaferManager.Instance.CreateWafer(ModuleName.Cooling1, 0, WaferStatus.Normal);
  228. // }
  229. //}
  230. //else
  231. //{
  232. // if (WaferManager.Instance.CheckHasWafer(ModuleName.Cooling1, 0))
  233. // {
  234. // LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Cooling1} has wafer information, while EFEM return empty, manually delete if really no wafer");
  235. // }
  236. //}
  237. //cooling2
  238. //if (waferPresence[5] == '1')
  239. //{
  240. // if (WaferManager.Instance.CheckNoWafer(ModuleName.Cooling2, 0))
  241. // {
  242. // WaferManager.Instance.CreateWafer(ModuleName.Cooling2, 0, WaferStatus.Normal);
  243. // }
  244. //}
  245. //else
  246. //{
  247. // if (WaferManager.Instance.CheckHasWafer(ModuleName.Cooling2, 0))
  248. // {
  249. // LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Cooling2} has wafer information, while EFEM return empty, manually delete if really no wafer");
  250. // }
  251. //}
  252. return true;
  253. }
  254. else if (_efem.Status == RState.Failed||_efem.Status==RState.Timeout)
  255. {
  256. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Efem StateTrack failed: {_efem.Status}");
  257. return false;
  258. }
  259. else
  260. return false;
  261. }
  262. }
  263. }