JetEfem.cs 43 KB

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  1. using System;
  2. using System.Diagnostics;
  3. using System.Collections.Generic;
  4. using System.Linq;
  5. using System.Threading.Tasks;
  6. using System.Collections;
  7. using MECF.Framework.Common.CommonData;
  8. using MECF.Framework.Common.Equipment;
  9. using MECF.Framework.Common.SubstrateTrackings;
  10. using Aitex.Sorter.Common;
  11. using Aitex.Core.Common;
  12. using Aitex.Core.RT.SCCore;
  13. using Aitex.Core.RT.Log;
  14. using Aitex.Core.Util;
  15. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
  16. using System.Collections.Concurrent;
  17. using CyberX8_Core;
  18. using CyberX8_RT.Devices.YASKAWA;
  19. using CyberX8_RT.Devices;
  20. using CyberX8_RT.Modules;
  21. using CyberX8_RT;
  22. namespace CyberX8_RT.Devices.EFEM
  23. {
  24. public class JetEfem : EfemBase
  25. {
  26. private RState _status;
  27. private bool _IsHomed;
  28. private string _waferPresence;
  29. private bool _bIsUnloadClamp;
  30. private RobotMoveInfo _robotMoveInfo = new RobotMoveInfo();
  31. private readonly Loadport[] _LPMs = new Loadport[3];
  32. private readonly SignalTower _signalT = new SignalTower();
  33. private readonly AsyncSocket _socket;
  34. private EfemMessage _currentMsg;
  35. private EfemMessage _backroundMsg;
  36. private EfemMessage _revMsg;
  37. private bool _LiftIsUp = false;
  38. private bool _LiftIsDown = false;
  39. private R_TRIG _busyTrig = new R_TRIG();
  40. private Stopwatch _busyWatch = new Stopwatch();
  41. public override RState Status
  42. {
  43. get
  44. {
  45. _busyTrig.CLK = _status == RState.Running;
  46. if (_busyTrig.Q)
  47. {
  48. _busyWatch.Restart();
  49. }
  50. else if (_busyTrig.M)
  51. {
  52. if (_busyWatch.ElapsedMilliseconds > 30000)
  53. {
  54. _busyWatch.Stop();
  55. _status = RState.Timeout;
  56. }
  57. }
  58. return _status;
  59. }
  60. }
  61. public override bool IsHomed { get { return _IsHomed; } }
  62. public override RobotMoveInfo TMRobotMoveInfo { get { return _robotMoveInfo; } }
  63. public override ILoadport this[ModuleName mod]
  64. {
  65. get
  66. {
  67. if (!ModuleHelper.IsLoadPort(mod))
  68. throw new ApplicationException($"{mod} is NOT Loadport");
  69. return _LPMs[mod - ModuleName.LP1];
  70. }
  71. }
  72. public override bool LiftIsUp { get { return _LiftIsUp; } }
  73. public override bool LiftIsDown { get { return _LiftIsDown; } }
  74. private BlockingCollection<RobotAnimationData> blockingCollection = new BlockingCollection<RobotAnimationData>();
  75. public JetEfem()
  76. {
  77. _socket = new AsyncSocket("");
  78. _socket.Connect(SC.GetStringValue($"EFEM.IPAddress"));
  79. _socket.OnDataChanged += OnReceiveMessage;
  80. _socket.OnErrorHappened += OnErrorHappen;
  81. _status = RState.Init;
  82. _IsHomed = false;
  83. _busyTrig.RST = true;
  84. _LPMs[0] = new Loadport(ModuleName.LP1, this);
  85. _LPMs[1] = new Loadport(ModuleName.LP2, this);
  86. _LPMs[2] = new Loadport(ModuleName.LP3, this);
  87. CarrierManager.Instance.SubscribeLocation(ModuleName.LP1.ToString(), 1);
  88. CarrierManager.Instance.SubscribeLocation(ModuleName.LP2.ToString(), 1);
  89. CarrierManager.Instance.SubscribeLocation(ModuleName.LP3.ToString(), 1);
  90. WaferManager.Instance.SubscribeLocation(ModuleName.EfemRobot, 2);
  91. WaferManager.Instance.SubscribeLocation(ModuleName.Aligner1, 1);
  92. // _subscribeLoc(ModuleName.EfemRobot, 2);
  93. SubscribeLocation(ModuleName.Aligner1, 1);
  94. SubscribeLocation(ModuleName.LP1, SC.GetValue<int>("EFEM.LoadPort.SlotNumber"));
  95. SubscribeLocation(ModuleName.LP2, SC.GetValue<int>("EFEM.LoadPort.SlotNumber"));
  96. SubscribeLocation(ModuleName.LP3, SC.GetValue<int>("EFEM.LoadPort.SlotNumber"));
  97. Task.Run(() =>
  98. {
  99. foreach (var data in blockingCollection.GetConsumingEnumerable())
  100. {
  101. _robotMoveInfo.Action = data.Action;
  102. _robotMoveInfo.ArmTarget = data.Hand == Hand.Blade1 ? RobotArm.ArmA : (data.Hand == Hand.Both ? RobotArm.Both : RobotArm.ArmB);
  103. _robotMoveInfo.BladeTarget = $"{_robotMoveInfo.ArmTarget}.{data.Target}";
  104. System.Threading.Thread.Sleep(600);
  105. }
  106. });
  107. }
  108. private void SubscribeLocation(ModuleName module,int waferCount)
  109. {
  110. if (ModuleHelper.IsInstalled(module))
  111. {
  112. WaferManager.Instance.SubscribeLocation(module, waferCount);
  113. }
  114. }
  115. public override void Monitor()
  116. {
  117. }
  118. public override void Terminate()
  119. {
  120. }
  121. public override bool SetRobotSpeed(ModuleName mod, int speed)
  122. {
  123. return false;
  124. }
  125. public override bool SetWaferSize(ModuleName mod, int size)
  126. {
  127. return false;
  128. }
  129. public override bool RobotPowerOn(ModuleName mod, bool status)
  130. { return false; }
  131. public override bool Vacuum(ModuleName mod, bool state)
  132. {
  133. return false;
  134. }
  135. public override void Reset()
  136. {
  137. _status = RState.End;
  138. }
  139. public override void SetOnline(bool online)
  140. {
  141. }
  142. public override void SetOnline(ModuleName mod, bool online)
  143. {
  144. }
  145. public override void SetBusy(ModuleName mod, bool online)
  146. {
  147. _status = RState.Running;
  148. }
  149. public override bool HomeAll()
  150. {
  151. if (_status == RState.Running)
  152. _backroundMsg = _currentMsg;
  153. _currentMsg = new EfemMessage
  154. {
  155. Module = ModuleName.EFEM,
  156. Operation = EfemOperation.Home,
  157. Head = EfemMessage.MsgHead.MOV,
  158. Parameters = new List<string> { Constant.ModuleString[ModuleName.EFEM] }
  159. };
  160. _status = RState.Running;
  161. string data = _currentMsg.ToString();
  162. SetRobotMovingInfo(RobotAction.Homing, Hand.Both, ModuleName.EFEM);
  163. return _socket.Write(data);
  164. }
  165. public override bool Home(ModuleName mod)
  166. {
  167. if (_status == RState.Running)
  168. _backroundMsg = _currentMsg;
  169. if (ModuleHelper.IsLoadPort(mod))
  170. {
  171. _currentMsg = new EfemMessage
  172. {
  173. Module = mod,
  174. Operation = EfemOperation.Home,
  175. Head = EfemMessage.MsgHead.MOV,
  176. Parameters = new List<string> { Constant.ModuleString[mod] }
  177. };
  178. _status = RState.Running;
  179. return _socket.Write(_currentMsg.ToString());
  180. }
  181. else
  182. {
  183. _currentMsg = new EfemMessage
  184. {
  185. Module = mod,
  186. Operation = EfemOperation.Home,
  187. Head = EfemMessage.MsgHead.MOV,
  188. Parameters = new List<string> { Constant.ModuleString[mod] }
  189. };
  190. _status = RState.Running;
  191. return _socket.Write(_currentMsg.ToString());
  192. }
  193. }
  194. public override bool OriginalSearch(ModuleName mod)
  195. {
  196. if (!CheckEfemStatus())
  197. return false;
  198. _currentMsg = new EfemMessage
  199. {
  200. Module = ModuleName.EFEM,
  201. Operation = EfemOperation.Orgsh,
  202. Head = EfemMessage.MsgHead.MOV,
  203. Parameters = new List<string>
  204. {
  205. Constant.ModuleString[mod]
  206. }
  207. };
  208. _status = RState.Running;
  209. return _socket.Write(_currentMsg.ToString());
  210. }
  211. public override bool CheckWaferPresence()
  212. {
  213. if (!CheckEfemStatus())
  214. return false;
  215. _currentMsg = new EfemMessage
  216. {
  217. Module = ModuleName.EFEM,
  218. Operation = EfemOperation.StateTrack,
  219. Head = EfemMessage.MsgHead.GET,
  220. Parameters = new List<string> { "TRACK" }
  221. };
  222. _waferPresence = string.Empty;
  223. _status = RState.Running;
  224. return _socket.Write(_currentMsg.ToString());
  225. }
  226. public override string GetWaferPresence()
  227. {
  228. return _waferPresence;
  229. }
  230. public override bool Halt()
  231. {
  232. if (_status == RState.Running)
  233. _backroundMsg = _currentMsg;
  234. _currentMsg = new EfemMessage
  235. {
  236. Module = ModuleName.EFEM,
  237. Operation = EfemOperation.EmsStop,
  238. Head = EfemMessage.MsgHead.MOV,
  239. };
  240. _status = RState.Running;
  241. return _socket.Write(_currentMsg.ToString());
  242. }
  243. public override bool ClearError()
  244. {
  245. _currentMsg = new EfemMessage
  246. {
  247. Module = ModuleName.EFEM,
  248. Operation = EfemOperation.ClearError,
  249. Head = EfemMessage.MsgHead.SET,
  250. Parameters = new List<string> { "CLEAR" }
  251. };
  252. _status = RState.Running;
  253. return _socket.Write(_currentMsg.ToString());
  254. }
  255. public override bool CloseBuzzer()
  256. {
  257. return false;
  258. }
  259. public override bool PickExtend(ModuleName chamber, int slot, Hand hand)
  260. {
  261. if (!CheckEfemStatus())
  262. return false;
  263. _currentMsg = new EfemMessage
  264. {
  265. Operation = EfemOperation.Extend,
  266. Head = EfemMessage.MsgHead.MOV,
  267. Parameters = new List<string>
  268. {
  269. chamber.ToHWString(),
  270. ExtendPos.GB.ToString(),
  271. Constant.ArmString[hand],
  272. }
  273. };
  274. SetRobotMovingInfo(RobotAction.Extending, hand, chamber);
  275. _status = RState.Running;
  276. return _socket.Write(_currentMsg.ToString());
  277. }
  278. public override bool PickRetract(ModuleName chamber, int slot, Hand hand)
  279. {
  280. if (!CheckEfemStatus())
  281. return false;
  282. _currentMsg = new EfemMessage
  283. {
  284. Operation = EfemOperation.Extend,
  285. Head = EfemMessage.MsgHead.MOV,
  286. Parameters = new List<string>
  287. {
  288. chamber.ToHWString(),
  289. ExtendPos.G4.ToString(),
  290. Constant.ArmString[hand],
  291. }
  292. };
  293. _status = RState.Running;
  294. SetRobotMovingInfo(RobotAction.Retracting, hand, chamber);
  295. return _socket.Write(_currentMsg.ToString());
  296. }
  297. public override bool PlaceExtend(ModuleName chamber, int slot, Hand hand)
  298. {
  299. if (!CheckEfemStatus())
  300. return false;
  301. _currentMsg = new EfemMessage
  302. {
  303. Operation = EfemOperation.Extend,
  304. Head = EfemMessage.MsgHead.MOV,
  305. Parameters = new List<string>
  306. {
  307. chamber.ToHWString(),
  308. ExtendPos.PB.ToString(),
  309. Constant.ArmString[hand],
  310. }
  311. };
  312. _status = RState.Running;
  313. SetRobotMovingInfo(RobotAction.Extending, hand, chamber);
  314. return _socket.Write(_currentMsg.ToString());
  315. }
  316. public override bool PlaceRetract(ModuleName chamber, int slot, Hand hand)
  317. {
  318. if (!CheckEfemStatus())
  319. return false;
  320. _currentMsg = new EfemMessage
  321. {
  322. Operation = EfemOperation.Extend,
  323. Head = EfemMessage.MsgHead.MOV,
  324. Parameters = new List<string>
  325. {
  326. chamber.ToHWString(),
  327. ExtendPos.P4.ToString(),
  328. Constant.ArmString[hand],
  329. }
  330. };
  331. _status = RState.Running;
  332. SetRobotMovingInfo(RobotAction.Retracting, hand, chamber);
  333. return _socket.Write(_currentMsg.ToString());
  334. }
  335. public override bool Pick(ModuleName station, int slot, Hand hand)
  336. {
  337. if (!CheckEfemStatus())
  338. return false;
  339. Position SrcPos = new Position { Module = station, Slot = (byte)slot };
  340. _currentMsg = new EfemMessage
  341. {
  342. Operation = EfemOperation.Pick,
  343. Head = EfemMessage.MsgHead.MOV,
  344. Parameters = new List<string>
  345. {
  346. SrcPos.ToHWString(),
  347. Constant.ArmString[hand],
  348. //WaferSize.WS12.ToString()
  349. }
  350. };
  351. _status = RState.Running;
  352. SetRobotMovingInfo(RobotAction.Picking, hand, station);
  353. return _socket.Write(_currentMsg.ToString());
  354. }
  355. public override bool Place(ModuleName station, int slot, Hand hand)
  356. {
  357. if (!CheckEfemStatus())
  358. return false;
  359. Position DestPos = new Position { Module = station, Slot = (byte)slot };
  360. _currentMsg = new EfemMessage
  361. {
  362. Operation = EfemOperation.Place,
  363. Head = EfemMessage.MsgHead.MOV,
  364. Parameters = new List<string>
  365. {
  366. DestPos.ToHWString(),
  367. Constant.ArmString[hand],
  368. //WaferSize.WS12.ToString()
  369. }
  370. };
  371. _status = RState.Running;
  372. SetRobotMovingInfo(RobotAction.Placing, hand, station);
  373. return _socket.Write(_currentMsg.ToString());
  374. }
  375. public override bool Goto(ModuleName station, Hand hand, string updown = "UP")
  376. {
  377. if (!CheckEfemStatus())
  378. return false;
  379. Position DestPos = new Position { Module = station, Slot = (byte)0 };
  380. _currentMsg = new EfemMessage
  381. {
  382. Operation = EfemOperation.Goto,
  383. Head = EfemMessage.MsgHead.MOV,
  384. Parameters = new List<string>
  385. {
  386. DestPos.ToHWString(),
  387. Constant.ArmString[hand],
  388. WaferSize.WS12.ToString()
  389. }
  390. };
  391. _status = RState.Running;
  392. return _socket.Write(_currentMsg.ToString());
  393. }
  394. public override bool Grip(Hand blade, bool isGrip)
  395. {
  396. if (!CheckEfemStatus())
  397. return false;
  398. _currentMsg = new EfemMessage
  399. {
  400. Operation = EfemOperation.Grip,
  401. Head = EfemMessage.MsgHead.SET,
  402. Parameters = new List<string>
  403. {
  404. isGrip ? "ON":"OFF",
  405. Constant.ArmString[blade]
  406. }
  407. };
  408. _status = RState.Running;
  409. return _socket.Write(_currentMsg.ToString());
  410. }
  411. public override bool SetAlignWaferSize()
  412. {
  413. LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support aligner wafer size");
  414. return false;
  415. }
  416. public override bool SetAlignFlatType(int flatType)
  417. {
  418. LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support aligner flat type");
  419. return false;
  420. }
  421. public override bool SetAlignDistance()
  422. {
  423. LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support aligner distance");
  424. return false;
  425. }
  426. public override bool GotoMap(ModuleName mod, Hand hand, string extend = "EX")
  427. {
  428. LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support GotoMap");
  429. return false;
  430. }
  431. public override bool Pause()
  432. {
  433. LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support Pause");
  434. return false;
  435. }
  436. public override bool Resume()
  437. {
  438. LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support Resume");
  439. return false;
  440. }
  441. public override bool RequestMapResult(ModuleName mod)
  442. {
  443. LOG.WriteLog(eEvent.ERR_EFEM_COMMON_FAILED, Module.ToString(), $"System cannot support RequestMapResult");
  444. return false;
  445. }
  446. public override bool Map(ModuleName mod)
  447. {
  448. if (!CheckEfemStatus())
  449. return false;
  450. _currentMsg = new EfemMessage
  451. {
  452. Operation = EfemOperation.Map,
  453. Head = EfemMessage.MsgHead.MOV,
  454. Parameters = new List<string> { Constant.ModuleString[mod] }
  455. };
  456. _status = RState.Running;
  457. return _socket.Write(_currentMsg.ToString());
  458. }
  459. public override bool GetWaferSize(ModuleName mod)
  460. {
  461. return true;
  462. }
  463. public override bool SetPinUp(ModuleName mod)
  464. {
  465. if (!CheckEfemStatus())
  466. return false;
  467. _currentMsg = new EfemMessage
  468. {
  469. Operation = EfemOperation.Lift,
  470. Head = EfemMessage.MsgHead.MOV,
  471. Parameters = new List<string> { Constant.ModuleString[mod], "UP" }
  472. };
  473. _status = RState.Running;
  474. return _socket.Write(_currentMsg.ToString());
  475. }
  476. public override bool SetPinDown(ModuleName mod)
  477. {
  478. if (!CheckEfemStatus())
  479. return false;
  480. _currentMsg = new EfemMessage
  481. {
  482. Operation = EfemOperation.Lift,
  483. Head = EfemMessage.MsgHead.MOV,
  484. Parameters = new List<string> { Constant.ModuleString[mod], "DOWN" }
  485. };
  486. _status = RState.Running;
  487. return _socket.Write(_currentMsg.ToString());
  488. }
  489. public override bool SetAlignAngle(ModuleName mod, double angle)
  490. {
  491. _status = RState.End;
  492. return true;
  493. }
  494. public override bool Align(ModuleName mod, double angle, float delayTime, WaferSize size)
  495. {
  496. if (!CheckEfemStatus())
  497. return false;
  498. _currentMsg = new EfemMessage
  499. {
  500. Operation = EfemOperation.Align,
  501. Head = EfemMessage.MsgHead.MOV,
  502. Parameters = new List<string> { $"A{angle.ToString("000.00")}" }
  503. };
  504. _status = RState.Running;
  505. return _socket.Write(_currentMsg.ToString());
  506. }
  507. public override bool SetLamp(LightType light, LightStatus status)
  508. {
  509. if (Status == RState.Running)
  510. {
  511. LOG.Write(eEvent.ERR_EFEM_ROBOT, ModuleName.EFEM, "EFEM is busy, please wait a minute");
  512. return false;
  513. }
  514. _currentMsg = new EfemMessage
  515. {
  516. Module = ModuleName.EFEM,
  517. Operation = EfemOperation.Light,
  518. Head = EfemMessage.MsgHead.SET,
  519. Parameters = new List<string> { Constant.STOWER, light.ToString(), status.ToString() }
  520. };
  521. _status = RState.Running;
  522. return _socket.Write(_currentMsg.ToString());
  523. }
  524. public override bool Load(ModuleName mod)
  525. {
  526. if (!CheckEfemStatus())
  527. return false;
  528. _currentMsg = new EfemMessage
  529. {
  530. Module = mod,
  531. Operation = EfemOperation.Load,
  532. Head = EfemMessage.MsgHead.MOV,
  533. Parameters = new List<string> { Constant.ModuleString[mod] }
  534. };
  535. _status = RState.Running;
  536. return _socket.Write(_currentMsg.ToString());
  537. }
  538. public override bool Unload(ModuleName mod)
  539. {
  540. if (!CheckEfemStatus())
  541. return false;
  542. _currentMsg = new EfemMessage
  543. {
  544. Module = mod,
  545. Operation = EfemOperation.Unload,
  546. Head = EfemMessage.MsgHead.MOV,
  547. Parameters = new List<string> { Constant.ModuleString[mod] }
  548. };
  549. _status = RState.Running;
  550. return _socket.Write(_currentMsg.ToString());
  551. }
  552. public override bool ReadCarrierId(ModuleName mod)
  553. {
  554. if (!CheckEfemStatus())
  555. return false;
  556. _currentMsg = new EfemMessage
  557. {
  558. Module = mod,
  559. Operation = EfemOperation.CarrierId,
  560. Head = EfemMessage.MsgHead.GET,
  561. Parameters = new List<string> { Constant.ModuleString[mod] }
  562. };
  563. _status = RState.Running;
  564. return _socket.Write(_currentMsg.ToString());
  565. }
  566. public override bool WriteCarrierId(ModuleName mod, string id)
  567. {
  568. if (!CheckEfemStatus())
  569. return false;
  570. _currentMsg = new EfemMessage
  571. {
  572. Module = mod,
  573. Operation = EfemOperation.CarrierId,
  574. Head = EfemMessage.MsgHead.SET,
  575. Parameters = new List<string> { Constant.ModuleString[mod], id }
  576. };
  577. _status = RState.Running;
  578. return _socket.Write(_currentMsg.ToString());
  579. }
  580. public override bool ReadTagData(ModuleName mod)
  581. {
  582. if (!CheckEfemStatus())
  583. return false;
  584. _currentMsg = new EfemMessage
  585. {
  586. Module = mod,
  587. Operation = EfemOperation.CarrierId,
  588. Head = EfemMessage.MsgHead.GET,
  589. Parameters = new List<string> { Constant.ModuleString[mod] }
  590. };
  591. _status = RState.Running;
  592. return _socket.Write(_currentMsg.ToString());
  593. }
  594. public override bool WriteTagData(ModuleName mod, string tagData)
  595. {
  596. if (!CheckEfemStatus())
  597. return false;
  598. _currentMsg = new EfemMessage
  599. {
  600. Module = mod,
  601. Operation = EfemOperation.CarrierId,
  602. Head = EfemMessage.MsgHead.SET,
  603. Parameters = new List<string> { Constant.ModuleString[mod], tagData }
  604. };
  605. _status = RState.Running;
  606. return _socket.Write(_currentMsg.ToString());
  607. }
  608. public override bool Dock(ModuleName mod)
  609. {
  610. if (!CheckEfemStatus())
  611. return false;
  612. _currentMsg = new EfemMessage
  613. {
  614. Module = mod,
  615. Operation = EfemOperation.Dock,
  616. Head = EfemMessage.MsgHead.MOV,
  617. Parameters = new List<string> { Constant.ModuleString[mod] }
  618. };
  619. _status = RState.Running;
  620. return _socket.Write(_currentMsg.ToString());
  621. }
  622. public override bool Undock(ModuleName mod)
  623. {
  624. if (!CheckEfemStatus())
  625. return false;
  626. _currentMsg = new EfemMessage
  627. {
  628. Module = mod,
  629. Operation = EfemOperation.Undock,
  630. Head = EfemMessage.MsgHead.MOV,
  631. Parameters = new List<string> { Constant.ModuleString[mod] }
  632. };
  633. _status = RState.Running;
  634. return _socket.Write(_currentMsg.ToString());
  635. }
  636. public override bool Clamp(ModuleName mod, bool isUnloadClamp)
  637. {
  638. if (!CheckEfemStatus())
  639. return false;
  640. _currentMsg = new EfemMessage
  641. {
  642. Module = mod,
  643. Operation = EfemOperation.Clamp,
  644. Head = EfemMessage.MsgHead.MOV,
  645. Parameters = new List<string> { Constant.ModuleString[mod] }
  646. };
  647. _status = RState.Running;
  648. _bIsUnloadClamp = isUnloadClamp;
  649. return _socket.Write(_currentMsg.ToString());
  650. }
  651. public override bool Unclamp(ModuleName mod)
  652. {
  653. if (!CheckEfemStatus())
  654. return false;
  655. _currentMsg = new EfemMessage
  656. {
  657. Module = mod,
  658. Operation = EfemOperation.Unclamp,
  659. Head = EfemMessage.MsgHead.MOV,
  660. Parameters = new List<string> { Constant.ModuleString[mod] }
  661. };
  662. _status = RState.Running;
  663. return _socket.Write(_currentMsg.ToString());
  664. }
  665. public override bool SetThickness(ModuleName mod, string thickness)
  666. {
  667. if (!CheckEfemStatus())
  668. return false;
  669. _currentMsg = new EfemMessage
  670. {
  671. Module = mod,
  672. Operation = EfemOperation.SetThickness,
  673. Head = EfemMessage.MsgHead.SET,
  674. Parameters = new List<string> { Constant.ModuleString[mod], thickness.ToUpper() }
  675. };
  676. _status = RState.Running;
  677. return _socket.Write(_currentMsg.ToString());
  678. }
  679. public override void SetRobotMovingInfo(RobotAction action, Hand hand, ModuleName target)
  680. {
  681. blockingCollection.Add(new RobotAnimationData(action, hand, target));
  682. }
  683. private void OnReceiveMessage(string RevMsg)
  684. {
  685. string[] msgs = RevMsg.Split('\r');
  686. foreach (var msg in msgs)
  687. {
  688. if (string.IsNullOrWhiteSpace(msg)) continue;
  689. EfemMessage rec_msg = JetMessageHandler.Instance.ToMessage(msg);
  690. switch (rec_msg.Head)
  691. {
  692. case EfemMessage.MsgHead.ACK:
  693. if (msg.Contains("ERROR"))
  694. {
  695. _revMsg = rec_msg;
  696. }
  697. break;
  698. case EfemMessage.MsgHead.INF:
  699. // 收到INF之后发送ACK确认
  700. string strACK = rec_msg.RawString.Replace("INF", "ACK");
  701. SendBack(strACK);
  702. EfemMessage ack_msg = strACK.ToMessage();
  703. ack_msg.Direct = MsgDirection.To;
  704. _revMsg = rec_msg;
  705. OnCommandUpdated(rec_msg);
  706. SetRobotMovingInfo(RobotAction.None, Hand.Both, ModuleName.EfemRobot);
  707. break;
  708. case EfemMessage.MsgHead.EVT:
  709. OnEventUpdated(new EfemEventArgs
  710. {
  711. EvtStr = rec_msg.ToParamString(),
  712. Module = rec_msg.Module,
  713. CommandType = rec_msg.Operation,
  714. DataList = rec_msg.Data
  715. });
  716. if (rec_msg.Operation == EfemOperation.Home)
  717. {
  718. SetRobotMovingInfo(RobotAction.Homing, Hand.Both, ModuleName.EFEM);
  719. }
  720. break;
  721. case EfemMessage.MsgHead.NAK:
  722. case EfemMessage.MsgHead.CAN:
  723. case EfemMessage.MsgHead.ABS:
  724. OnErrorOccurred(rec_msg);
  725. break;
  726. }
  727. }
  728. }
  729. private void OnErrorHappen(ErrorEventArgs args)
  730. {
  731. _status = RState.Failed;
  732. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
  733. }
  734. private void OnErrorOccurred(EfemMessage message)
  735. {
  736. string description = string.Empty;
  737. switch (message.Head)
  738. {
  739. case EfemMessage.MsgHead.NAK:
  740. description = Constant.FactorString[message.Factor];
  741. break;
  742. case EfemMessage.MsgHead.CAN:
  743. description = Constant.FactorString.ContainsKey(message.Factor) ? Constant.FactorString[message.Factor] : message.Factor;
  744. break;
  745. case EfemMessage.MsgHead.ABS:
  746. description = $"{message.Data[0]}, {message.Data[1]}";
  747. break;
  748. }
  749. _status = RState.Failed;
  750. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error,description);
  751. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, $"{description}, [{message.Data[0]}], [{message.Factor}]");
  752. }
  753. private void OnEventUpdated(EfemEventArgs eArg)
  754. {
  755. switch (eArg.CommandType)
  756. {
  757. case EfemOperation.SigStatus:
  758. // EVT:SIGSTAT/Parameter/DATA1/DATA2;
  759. string sParam = eArg.DataList[0]; // "SYSTEM" or "Pn"
  760. // DATA1 & DATA2
  761. int nData1 = Convert.ToInt32(eArg.DataList[1], 16);
  762. int nData2 = Convert.ToInt32(eArg.DataList[2], 16);
  763. BitArray baData1 = new BitArray(new int[] { nData1 });
  764. BitArray baData2 = new BitArray(new int[] { nData2 });
  765. if (0 == string.Compare(sParam, Constant.SYS, true))
  766. {
  767. // EVT:SIGSTAT/System/00000000/00000004;
  768. // DATA1
  769. // Post warning and alarm
  770. if (!baData1[0]) // Bit[0] ON=Normal, OFF=Abnormal
  771. {
  772. //EV.Notify(EFEMVacuumPressureError);
  773. string error = "EFEM System vacuum source pressure low";
  774. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, error);
  775. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error,error);
  776. }
  777. if (!baData1[1]) // Bit[1] ON=Normal, OFF=Abnormal
  778. {
  779. //EV.Notify(EFEMIonizerAlarm);
  780. string error = "EFEM Ionizer compressed air error";
  781. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, error);
  782. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error,error);
  783. }
  784. if (!baData1[2]) // Bit[2] ON=Normal, OFF=Abnormal
  785. {
  786. //EV.Notify(EFEMCDAError);
  787. string error = "EFEM System compressed air pressure low";
  788. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, error);
  789. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error, error);
  790. }
  791. if (!baData1[4]) // Bit[4] ON=Normal, OFF=Abnormal
  792. {
  793. //EV.Notify(EFEMFlowGaugeSensorError);
  794. string error = "EFEM Flow gauge sensor error";
  795. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, error);
  796. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error,error);
  797. }
  798. if (!baData1[5]) // Bit[5] ON=Normal, OFF=Abnormal
  799. {
  800. //EV.Notify(EFEMLeakageAlarm);
  801. string error = "EFEM Leakage alarm";
  802. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, error);
  803. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error,error);
  804. }
  805. if (!baData1[10]) // Bit[10] ON=Normal, OFF=Abnormal
  806. {
  807. //EV.Notify(EFEMIonizerAlarm);
  808. string error = "EFEM Ionizer alarm";
  809. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, error);
  810. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error,error);
  811. }
  812. if (!baData1[11]) // Bit[11] ON=Normal, OFF=Abnormal
  813. {
  814. //EV.Notify(EFEMFFUAlarm);
  815. string error = "FFU alarm";
  816. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, error);
  817. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error,error);
  818. }
  819. if (!baData1[13]) // Bit[13] ON=RUN, OFF=Maintain
  820. {
  821. //EV.Notify(EFEMOffline);
  822. string error = "EFEM switch to Maintain mode, HomeAll to recover";
  823. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, error);
  824. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error, error);
  825. }
  826. // DATA2
  827. _signalT.ChangeLightStatus(LightType.RED, baData2[0] ? LightStatus.ON : baData2[5] ? LightStatus.BLINK : LightStatus.OFF);
  828. _signalT.ChangeLightStatus(LightType.GREEN, baData2[1] ? LightStatus.ON : baData2[6] ? LightStatus.BLINK : LightStatus.OFF);
  829. _signalT.ChangeLightStatus(LightType.YELLOW, baData2[2] ? LightStatus.ON : baData2[7] ? LightStatus.BLINK : LightStatus.OFF);
  830. _signalT.ChangeLightStatus(LightType.BLUE, baData2[3] ? LightStatus.ON : baData2[8] ? LightStatus.BLINK : LightStatus.OFF);
  831. _signalT.ChangeLightStatus(LightType.WHITE, baData2[4] ? LightStatus.ON : baData2[9] ? LightStatus.BLINK : LightStatus.OFF);
  832. _signalT.ChangeLightStatus(LightType.BUZZER1, baData2[10] ? LightStatus.ON : LightStatus.OFF);
  833. /* EFEM 程序中目前没有实现
  834. _RobotErr.CLK = baData2[27]; // bit 27
  835. bool bArmNotExtendLLA = baData2[30]; // bit 30
  836. bool bArmNotExtendLLB = baData2[31]; // bit 31
  837. */
  838. } // system event
  839. else
  840. {
  841. _LPMs[eArg.Module - ModuleName.LP1].HandleEvent(eArg);
  842. } // FOUP EVENT
  843. break;
  844. case EfemOperation.GetWaferInfo:
  845. _LPMs[eArg.Module - ModuleName.LP1].HandleEvent(eArg);
  846. break;
  847. default:
  848. break;
  849. }
  850. }
  851. private void OnCommandUpdated(EfemMessage message)
  852. {
  853. if (message.Operation != EfemOperation.Ready)
  854. {
  855. if (_currentMsg.Operation != message.Operation && (_backroundMsg == null || _backroundMsg.Operation != message.Operation))
  856. {
  857. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EfemRobot, $"OnCommandUpdated() unexpected return: {message.Operation}, expect: {_currentMsg.Operation}");
  858. return;
  859. }
  860. }
  861. switch (message.Operation)
  862. {
  863. case EfemOperation.ClearError:
  864. case EfemOperation.Align:
  865. case EfemOperation.Map:
  866. case EfemOperation.Pick:
  867. case EfemOperation.Place:
  868. case EfemOperation.Extend:
  869. case EfemOperation.Goto:
  870. case EfemOperation.Orgsh:
  871. case EfemOperation.EmsStop:
  872. case EfemOperation.Light:
  873. _status = RState.End;
  874. break;
  875. case EfemOperation.StateTrack:
  876. {
  877. _waferPresence = message.Data.Count >= 1 ? message.Data.First() : string.Empty;
  878. //upper arm
  879. if (_waferPresence[0] == '1')
  880. {
  881. if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 1))
  882. {
  883. WaferManager.Instance.CreateWafer(ModuleName.EfemRobot, 1, WaferStatus.Normal);
  884. }
  885. }
  886. else
  887. {
  888. if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 1))
  889. {
  890. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.EfemRobot} upper arm has wafer information, while EFEM return empty, manually delete if really no wafer");
  891. }
  892. }
  893. //lower arm
  894. if (_waferPresence[1] == '1')
  895. {
  896. if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 0))
  897. {
  898. WaferManager.Instance.CreateWafer(ModuleName.EfemRobot, 0, WaferStatus.Normal);
  899. }
  900. }
  901. else
  902. {
  903. if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 0))
  904. {
  905. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.EfemRobot} lower arm has wafer information, while EFEM return empty, manually delete if really no wafer");
  906. }
  907. }
  908. //aligner1
  909. if (_waferPresence[2] == '1')
  910. {
  911. if (WaferManager.Instance.CheckNoWafer(ModuleName.Aligner1, 0))
  912. {
  913. WaferManager.Instance.CreateWafer(ModuleName.Aligner1, 0, WaferStatus.Normal);
  914. }
  915. }
  916. else
  917. {
  918. if (WaferManager.Instance.CheckHasWafer(ModuleName.Aligner1, 0))
  919. {
  920. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Aligner1} has wafer information, while EFEM return empty, manually delete if really no wafer");
  921. }
  922. }
  923. _IsHomed = true;
  924. _status = RState.End;
  925. }
  926. break;
  927. case EfemOperation.Home:
  928. {
  929. if (_currentMsg.Module == ModuleName.EFEM)
  930. {
  931. _LPMs[0].OnHomed();
  932. _LPMs[1].OnHomed();
  933. _LPMs[2].OnHomed();
  934. }
  935. else if (ModuleHelper.IsLoadPort(_currentMsg.Module))
  936. {
  937. _LPMs[_currentMsg.Module - ModuleName.LP1].OnHomed();
  938. }
  939. _status = RState.End;
  940. }
  941. break;
  942. case EfemOperation.Load:
  943. {
  944. _LPMs[message.Module - ModuleName.LP1].OnLoaded();
  945. _status = RState.End;
  946. }
  947. break;
  948. case EfemOperation.Unload:
  949. {
  950. _LPMs[message.Module - ModuleName.LP1].OnUnloaded();
  951. _status = RState.End;
  952. }
  953. break;
  954. case EfemOperation.CarrierId:
  955. {
  956. if (message.Head == EfemMessage.MsgHead.GET)
  957. {
  958. _LPMs[message.Module - ModuleName.LP1].OnCarrierIDRead(message.Data.First());
  959. }
  960. else
  961. {
  962. _LPMs[message.Module - ModuleName.LP1].OnCarrierIDWrite(message.Data.First());
  963. }
  964. _status = RState.End;
  965. }
  966. break;
  967. case EfemOperation.Clamp:
  968. {
  969. _LPMs[message.Module - ModuleName.LP1].OnClamped(_bIsUnloadClamp);
  970. _status = RState.End;
  971. }
  972. break;
  973. case EfemOperation.Unclamp:
  974. {
  975. _LPMs[message.Module - ModuleName.LP1].OnUnclamped();
  976. _status = RState.End;
  977. }
  978. break;
  979. case EfemOperation.Grip:
  980. {
  981. if (_currentMsg.Parameters[1] == "ARM2")
  982. {
  983. GripStateBlade1 = _currentMsg.Parameters[0];
  984. }
  985. else
  986. {
  987. GripStateBlade2 = _currentMsg.Parameters[0];
  988. }
  989. _status = RState.End;
  990. }
  991. break;
  992. case EfemOperation.Ready:
  993. {
  994. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.CommReady);
  995. }
  996. break;
  997. case EfemOperation.Lift:
  998. {
  999. if (_currentMsg.Parameters[1] == "UP")
  1000. {
  1001. _LiftIsUp = true;
  1002. _LiftIsDown = false;
  1003. }
  1004. else if (_currentMsg.Parameters[1] == "DOWN")
  1005. {
  1006. _LiftIsUp = false;
  1007. _LiftIsDown = true;
  1008. }
  1009. _status = RState.End;
  1010. }
  1011. break;
  1012. }
  1013. }
  1014. void SendBack(string data)
  1015. {
  1016. _socket.Write(data + '\r');
  1017. }
  1018. }
  1019. }