MetalEntity.cs 72 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Fsm;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using Aitex.Core.Utilities;
  6. using MECF.Framework.Common.Equipment;
  7. using MECF.Framework.Common.WaferHolder;
  8. using System;
  9. using MECF.Framework.Common.ToolLayout;
  10. using MECF.Framework.Common.Persistent.Reservoirs;
  11. using Aitex.Core.RT.OperationCenter;
  12. using MECF.Framework.Common.RecipeCenter;
  13. using Aitex.Core.RT.RecipeCenter;
  14. using MECF.Framework.Common.SubstrateTrackings;
  15. using Aitex.Core.RT.Device;
  16. using MECF.Framework.Common.Routine;
  17. using MECF.Framework.Common.ProcessCell;
  18. using Aitex.Core.RT.SCCore;
  19. using MECF.Framework.Common.Alarm;
  20. using CyberX8_Core;
  21. using CyberX8_RT.Devices.Metal;
  22. using CyberX8_RT.Devices.Reservoir;
  23. using CyberX8_RT.Modules.Metal;
  24. using CyberX8_RT.Modules.Reservoir;
  25. using CyberX8_RT.Modules;
  26. using CyberX8_RT.Modules.EFEM;
  27. using static Mono.Security.X509.X520;
  28. namespace CyberX8_RT.Modules.Metal
  29. {
  30. public class MetalEntity : Entity, IEntity, IModuleEntity
  31. {
  32. #region 常量
  33. private const string STRATUS = "Stratus";
  34. private const string AUTO = "Auto";
  35. private const string MANUAL = "Manual";
  36. private const string DISABLED = "Disabled";
  37. private const string ENGINEERING = "Engineering";
  38. private const string PRODUCTION = "Production";
  39. #endregion
  40. #region 内部变量
  41. /// <summary>
  42. /// 已经完成的Cycle次数
  43. /// </summary>
  44. private int _achievedCycle = 0;
  45. /// <summary>
  46. /// Metal项
  47. /// </summary>
  48. private MetalItem _metalItem;
  49. /// <summary>
  50. /// 持久化对象
  51. /// </summary>
  52. private MetalPersistentValue _persistentValue;
  53. /// <summary>
  54. /// c&m Initialize routine
  55. /// </summary>
  56. private CompactEmbranceInitializeRoutine _compactEmbranceInitializeRoutine;
  57. /// <summary>
  58. /// C&M Runrecipe routine
  59. /// </summary>
  60. private CompactEmbranceRunRecipeRoutine _compactEmbranceRunRecipeRoutine;
  61. /// <summary>
  62. /// S&H Initialize Routine
  63. /// </summary>
  64. private StandardHotInitializeRoutine _standardHotInitializeRoutine;
  65. /// <summary>
  66. /// S&H RunRecipe Routine
  67. /// </summary>
  68. private StandardHotRunRecipeRoutine _standardHotRunRecipeRoutine;
  69. /// <summary>
  70. /// Current short test routine
  71. /// </summary>
  72. private CurrentShortTestRoutine _currentShortTestRoutine;
  73. /// <summary>
  74. /// 当前Recipe
  75. /// </summary>
  76. private DepRecipe _currentRecipe = null;
  77. /// <summary>
  78. /// recipe时间
  79. /// </summary>
  80. private int _recipeTime;
  81. /// <summary>
  82. /// 循环次数
  83. /// </summary>
  84. private int _cycle = 0;
  85. /// <summary>
  86. /// 运行Recipe面
  87. /// </summary>
  88. private string _recipeSide = "";
  89. /// <summary>
  90. /// 当前RunRecipe Routine
  91. /// </summary>
  92. private RoutineBase _currentRunRecipeRoutine;
  93. /// <summary>
  94. /// Runrecipe已经运行的时间
  95. /// </summary>
  96. private int _runrecipeElapsedTime = 0;
  97. /// <summary>
  98. /// run recipe start time
  99. /// </summary>
  100. private DateTime _runRecipeStartTime;
  101. /// <summary>
  102. /// run recipe complete time
  103. /// </summary>
  104. private DateTime _runRecipeCompleteTime;
  105. /// <summary>
  106. /// 所在reservoir
  107. /// </summary>
  108. private StandardHotReservoirDevice _reservoirDevice;
  109. /// <summary>
  110. /// 所在reservoir名字
  111. /// </summary>
  112. private string _reservoirName;
  113. /// <summary>
  114. /// 当前完成recipe次数
  115. /// </summary>
  116. private int _currentCycleTimes;
  117. #endregion
  118. #region 属性
  119. /// <summary>
  120. /// 模块名称
  121. /// </summary>
  122. public ModuleName Module { get; private set; }
  123. /// <summary>
  124. /// 初始化状态
  125. /// </summary>
  126. public bool IsInit { get { return fsm.State == (int)MetalState.Init; } }
  127. /// <summary>
  128. /// 空闲状态
  129. /// </summary>
  130. public bool IsIdle { get { return fsm.State == (int)MetalState.Idle; } }
  131. /// <summary>
  132. /// 是否发生错误
  133. /// </summary>
  134. public bool IsError { get { return fsm.State == (int)MetalState.Error; } }
  135. /// <summary>
  136. /// 是否正在作业
  137. /// </summary>
  138. public bool IsBusy { get { return fsm.State > (int)MetalState.Idle; } }
  139. /// <summary>
  140. /// 是否初始化完成
  141. /// </summary>
  142. public bool IsInitialized { get { return fsm.State >= (int)MetalState.Initialized; } }
  143. /// <summary>
  144. /// 是否禁用
  145. /// </summary>
  146. public bool IsDisable { get { return _persistentValue == null || _persistentValue.OperatingMode == DISABLED; } }
  147. /// <summary>
  148. /// 自动模式
  149. /// </summary>
  150. public bool IsAuto { get { return _persistentValue != null && _persistentValue.OperatingMode == AUTO; } }
  151. /// <summary>
  152. /// 自动模式
  153. /// </summary>
  154. public bool IsManual { get { return _persistentValue != null && _persistentValue.OperatingMode == MANUAL; } }
  155. /// <summary>
  156. /// 是否为工程模式
  157. /// </summary>
  158. public bool IsEngineering { get { return _persistentValue != null && _persistentValue.RecipeOperatingMode == ENGINEERING; } }
  159. /// <summary>
  160. /// 是否为产品模式
  161. /// </summary>
  162. public bool IsProduction { get { return _persistentValue != null && _persistentValue.RecipeOperatingMode == PRODUCTION; } }
  163. /// <summary>
  164. /// WaferHolder信息
  165. /// </summary>
  166. public WaferHolderInfo WaferHolderInfo { get { return WaferHolderManager.Instance.GetWaferHolder(Module.ToString()); } }
  167. /// <summary>
  168. /// 已完成的RunRecipeCycle次数
  169. /// </summary>
  170. public int AchievedCycle { get { return _achievedCycle; } }
  171. /// <summary>
  172. /// 当前状态机状态
  173. /// </summary>
  174. public int State { get { return fsm.State; } }
  175. /// <summary>
  176. /// 当前Metal设置的WaferSize
  177. /// </summary>
  178. public int MetalWaferSize { get { return _persistentValue.MetalWaferSize; } }
  179. /// <summary>
  180. /// recipe时长
  181. /// </summary>
  182. public int RecipeTime { get { return _recipeTime; } }
  183. /// <summary>
  184. /// 剩余时间
  185. /// </summary>
  186. public override int TimeToReady
  187. {
  188. get
  189. {
  190. if (IsIdle)
  191. {
  192. return 0;
  193. }
  194. switch (fsm.State)
  195. {
  196. case (int)MetalState.RunReciping:
  197. return Math.Max(_recipeTime - fsm.ElapsedTime / 1000, 0);
  198. default:
  199. return 0;
  200. }
  201. }
  202. }
  203. /// <summary>
  204. /// 用量
  205. /// </summary>
  206. public MetalUsage MetalUsage { get { return MetalUsageManager.Instance.GetMetalUsage(Module.ToString()); } }
  207. #endregion
  208. /// <summary>
  209. /// 构造函数
  210. /// </summary>
  211. /// <param name="moduleName"></param>
  212. public MetalEntity(ModuleName moduleName)
  213. {
  214. this.Module = moduleName;
  215. WaferManager.Instance.SubscribeLocation(Module, 2);
  216. InitialFsm();
  217. }
  218. /// <summary>
  219. /// 初始化
  220. /// </summary>
  221. /// <returns></returns>
  222. protected override bool Init()
  223. {
  224. InitializeDATA();
  225. InitializeParameter();
  226. InitializeRoutine();
  227. InitializeOperation();
  228. return true;
  229. }
  230. /// <summary>
  231. /// 初始化参数
  232. /// </summary>
  233. private void InitializeParameter()
  234. {
  235. _persistentValue = MetalPersistentManager.Instance.GetMetalPersistentValue(Module.ToString());
  236. if (_persistentValue == null)
  237. {
  238. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), "Persistent Value Object is not exist");
  239. }
  240. _metalItem = MetalItemManager.Instance.GetMetalItem(Module.ToString());
  241. _reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  242. _reservoirDevice = DEVICE.GetDevice<StandardHotReservoirDevice>($"{_reservoirName}");
  243. }
  244. /// <summary>
  245. /// 初始化Routine
  246. /// </summary>
  247. private void InitializeRoutine()
  248. {
  249. _compactEmbranceInitializeRoutine = new CompactEmbranceInitializeRoutine(Module.ToString());
  250. _standardHotInitializeRoutine = new StandardHotInitializeRoutine(Module.ToString());
  251. _compactEmbranceRunRecipeRoutine = new CompactEmbranceRunRecipeRoutine(Module.ToString());
  252. _standardHotRunRecipeRoutine = new StandardHotRunRecipeRoutine(Module.ToString());
  253. _currentShortTestRoutine = new CurrentShortTestRoutine(Module.ToString());
  254. }
  255. /// <summary>
  256. /// 初始化操作
  257. /// </summary>
  258. private void InitializeOperation()
  259. {
  260. OP.Subscribe($"{Module}.InitializeAll", (cmd, args) => { return CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Initialize); });
  261. OP.Subscribe($"{Module}.CycleManualProcessRecipe", (cmd, args) =>
  262. {
  263. DepRecipe recipe = RecipeFileManager.Instance.LoadGenericityRecipe<DepRecipe>(args[0].ToString());
  264. if (recipe == null)
  265. {
  266. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{args[0]} recipe is null");
  267. return false;
  268. }
  269. object[] objects = new object[args.Length];
  270. objects[0] = recipe;
  271. for (int i = 1; i < args.Length; i++)
  272. {
  273. objects[i] = args[i];
  274. }
  275. return CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.RunRecipe, objects);
  276. });
  277. OP.Subscribe($"{Module}.CurrentShortTest", (cmd, args) => { return CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.CurrentShortTest); });
  278. OP.Subscribe($"{Module}.UpdateMetalUsage", UpdateMetalUsageAction);
  279. OP.Subscribe($"{Module}.Abort", (cmd, args) => { return CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Abort); });
  280. }
  281. /// <summary>
  282. /// EnterInit
  283. /// </summary>
  284. public void EnterInit()
  285. {
  286. if ((MetalState)fsm.State != MetalState.Idle) return;
  287. else
  288. {
  289. CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Init);
  290. }
  291. }
  292. /// 初始化状态机
  293. /// </summary>
  294. private void InitialFsm()
  295. {
  296. fsm = new StateMachine<MetalEntity>(Module.ToString(), (int)MetalState.Init, 20);
  297. fsm.EnableRepeatedMsg(true);
  298. AnyStateTransition(MetalMsg.Error, EnterError, MetalState.Error);
  299. //Initialize
  300. AnyStateTransition(MetalMsg.Initialize, InitializeAll, MetalState.Initializing);
  301. Transition(MetalState.Initializing, FSM_MSG.TIMER, InitializeAllMonitor, MetalState.Initialized);
  302. //直接进入Idle
  303. Transition(MetalState.Initialized, FSM_MSG.TIMER, NullFunc, MetalState.Idle);
  304. //RunRecipe
  305. Transition(MetalState.Idle, MetalMsg.RunRecipe, RunRecipe, MetalState.RunReciping);
  306. Transition(MetalState.WaitForRunRecipe, MetalMsg.RunRecipe, RunRecipe, MetalState.RunReciping);
  307. Transition(MetalState.RunReciping, FSM_MSG.TIMER, RunRecipeMonitor, MetalState.Idle);
  308. Transition(MetalState.RunReciping, MetalMsg.Abort, AbortRecipe, MetalState.Abort);
  309. //Current Short Test
  310. Transition(MetalState.Idle, MetalMsg.CurrentShortTest, CurrentShortTest, MetalState.CurrentShortTesting);
  311. Transition(MetalState.CurrentShortTesting, FSM_MSG.TIMER, CurrentShortTestMonitor, MetalState.WaitCloseFlow);
  312. Transition(MetalState.WaitCloseFlow, MetalMsg.CloseFlowValve, CloseFlowValve, MetalState.WaitOpenFlow);
  313. Transition(MetalState.WaitOpenFlow, MetalMsg.OpenFlowValve, OpenFlowValve, MetalState.WaitForRunRecipe);
  314. //Enter Init
  315. Transition(MetalState.Idle, MetalMsg.Init, NullFunc, MetalState.Init);
  316. EnumLoop<MetalState>.ForEach((item) => { fsm.MapState((int)item, item.ToString()); });
  317. EnumLoop<MetalMsg>.ForEach((item) => { fsm.MapMessage((int)item, item.ToString()); });
  318. }
  319. /// <summary>
  320. /// 初始化DATA
  321. /// </summary>
  322. private void InitializeDATA()
  323. {
  324. InitializeSVID();
  325. DATA.Subscribe($"{Module}.FsmState", () => ((MetalState)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  326. DATA.Subscribe($"{Module}.WaferHolder", () => WaferHolderInfo, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  327. DATA.Subscribe($"{Module}.AchievedCycle", () => AchievedCycle, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  328. DATA.Subscribe($"{Module}.IsInit", () => IsInit, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  329. DATA.Subscribe($"{Module}.IsIdle", () => IsIdle, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  330. DATA.Subscribe($"{Module}.IsError", () => IsError, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  331. DATA.Subscribe($"{Module}.IsBusy", () => IsBusy, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  332. DATA.Subscribe($"{Module}.IsDisable", () => IsDisable, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  333. DATA.Subscribe($"{Module}.CurrentRecipe", () => _currentRecipe != null ? _currentRecipe.Ppid : "", SubscriptionAttribute.FLAG.IgnoreSaveDB);
  334. DATA.Subscribe($"{Module}.MetalUsage", () => MetalUsage, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  335. }
  336. /// <summary>
  337. /// 初始化SVID
  338. /// </summary>
  339. private void InitializeSVID()
  340. {
  341. DATA.Subscribe($"{Module}.State", () => ((MetalState)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  342. DATA.Subscribe($"{Module}.LotID", () => WaferHolderInfo?.LotId , SubscriptionAttribute.FLAG.IgnoreSaveDB);
  343. DATA.Subscribe($"{Module}.WSID", () => WaferHolderInfo?.Id, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  344. DATA.Subscribe($"{Module}.LSAID", () => WaferHolderInfo?.CrsAId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  345. DATA.Subscribe($"{Module}.LSBID", () => WaferHolderInfo?.CrsBId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  346. DATA.Subscribe($"{Module}.ModuleRecipe", () => _currentRecipe?.Ppid, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  347. DATA.Subscribe($"{Module}.SequenceRecipe", () =>WaferHolderInfo?.SequenceId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  348. DATA.Subscribe($"{Module}.WaferAID", () => WaferHolderInfo?.WaferAId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  349. DATA.Subscribe($"{Module}.WaferBID", () => WaferHolderInfo?.WaferBId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  350. DATA.Subscribe($"{Module}.TotalTime", () => _recipeTime, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  351. DATA.Subscribe($"{Module}.TimeRemain", () => _recipeTime != 0 && _currentRunRecipeRoutine != null ? (_recipeTime - Math.Round((double)_currentRunRecipeRoutine.ElapsedMilliseconds / 1000, 0)) : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  352. DATA.Subscribe($"{Module}.Task", () => WaferHolderInfo?.CurrentControlJobId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  353. DATA.Subscribe($"{Module}.OperatingMode", () => _persistentValue != null ? _persistentValue.OperatingMode : "None", SubscriptionAttribute.FLAG.IgnoreSaveDB);
  354. DATA.Subscribe($"{Module}.TotalUsage", () => MetalUsage != null ? MetalUsage.TotalUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  355. DATA.Subscribe($"{Module}.TotalUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  356. DATA.Subscribe($"{Module}.TotalUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  357. DATA.Subscribe($"{Module}.AnodeAUsage", () => MetalUsage != null ? MetalUsage.AnodeAUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  358. DATA.Subscribe($"{Module}.AnodeAUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  359. DATA.Subscribe($"{Module}.AnodeAUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  360. DATA.Subscribe($"{Module}.AnodeBUsage", () => MetalUsage != null ? MetalUsage.AnodeBUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  361. DATA.Subscribe($"{Module}.AnodeBUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  362. DATA.Subscribe($"{Module}.AnodeBUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  363. DATA.Subscribe($"{Module}.MembranceAUsage", () => MetalUsage != null ? MetalUsage.MembranceAUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  364. DATA.Subscribe($"{Module}.MembranceAUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  365. DATA.Subscribe($"{Module}.MembranceAUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  366. DATA.Subscribe($"{Module}.MembranceBUsage", () => MetalUsage != null ? MetalUsage.MembranceBUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  367. DATA.Subscribe($"{Module}.MembranceBUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  368. DATA.Subscribe($"{Module}.MembranceBUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  369. DATA.Subscribe($"{Module}.TotalWafers", () => MetalUsage != null ? MetalUsage.TotalWafers : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  370. DATA.Subscribe($"{Module}.TotalWafers.WarningLimit", () => SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  371. DATA.Subscribe($"{Module}.TotalWafers.FaultLimit", () => SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  372. DATA.Subscribe($"{Module}.AnodeAWafers", () => MetalUsage != null ? MetalUsage.AnodeAWafers : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  373. DATA.Subscribe($"{Module}.AnodeAWafers.WarningLimit", () => SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  374. DATA.Subscribe($"{Module}.AnodeAWafers.FaultLimit", () => SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  375. DATA.Subscribe($"{Module}.AnodeBWafers", () => MetalUsage != null ? MetalUsage.AnodeBWafers : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  376. DATA.Subscribe($"{Module}.AnodeBWafers.WarningLimit", () => SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  377. DATA.Subscribe($"{Module}.AnodeBWafers.FaultLimit", () => SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  378. }
  379. /// <summary>
  380. /// 进入错误状态
  381. /// </summary>
  382. /// <param name="args"></param>
  383. /// <returns></returns>
  384. private bool EnterError(object[] args)
  385. {
  386. if (State == (int)MetalState.RunReciping)
  387. {
  388. if (_metalItem.SubType == STRATUS)
  389. {
  390. _standardHotRunRecipeRoutine.Abort();
  391. }
  392. else
  393. {
  394. _compactEmbranceRunRecipeRoutine.Abort();
  395. }
  396. }
  397. return true;
  398. }
  399. /// <summary>
  400. /// UpdateMetalUsageAction
  401. /// </summary>
  402. /// <param name="cmd"></param>
  403. /// <param name="param"></param>
  404. /// <returns></returns>
  405. private bool UpdateMetalUsageAction(string cmd, object[] args)
  406. {
  407. if (args.Length > 2)
  408. {
  409. MetalUsageManager.Instance.UpdateMetalUsageByManualOperation(args[0].ToString(), args[1].ToString(), args[2].ToString());
  410. LOG.WriteLog(eEvent.INFO_METAL, Module.ToString(), $"New {args[1].ToString()} value {args[2].ToString()} was input");
  411. }
  412. return true;
  413. }
  414. #region Initialize All
  415. /// <summary>
  416. /// 初始化
  417. /// </summary>
  418. /// <param name="param"></param>
  419. /// <returns></returns>
  420. private bool InitializeAll(object[] param)
  421. {
  422. if (fsm.State == (int)MetalState.Initializing)
  423. {
  424. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), "state is Initializing,cannot do initialize");
  425. return false;
  426. }
  427. if (!CheckReservoirInitialized())
  428. {
  429. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), "Reservoir is not initialized");
  430. return false;
  431. }
  432. if (!MetalUsageMointor(Module.ToString()))
  433. {
  434. return false;
  435. }
  436. if ("Auto".Equals(_persistentValue.OperatingMode))
  437. {
  438. if (!CheckReservoirIsAuto())
  439. {
  440. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), "Reservoir is not in Auto OperationMode");
  441. return false;
  442. }
  443. }
  444. if (_metalItem.SubType == STRATUS)
  445. {
  446. return _standardHotInitializeRoutine.Start(_persistentValue) == RState.Running;
  447. }
  448. else
  449. {
  450. return _compactEmbranceInitializeRoutine.Start(_persistentValue) == RState.Running;
  451. }
  452. }
  453. /// <summary>
  454. /// 检验Reservoir是否Initialized
  455. /// </summary>
  456. /// <returns></returns>
  457. private bool CheckReservoirInitialized()
  458. {
  459. string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  460. ReservoirEntity reservoirEntity = Singleton<RouteManager>.Instance.GetModule<ReservoirEntity>(reservoir);
  461. if (reservoirEntity != null)
  462. {
  463. return reservoirEntity.IsInitialized;
  464. }
  465. return false;
  466. }
  467. /// <summary>
  468. /// 检验Reservoir是否Auto
  469. /// </summary>
  470. /// <returns></returns>
  471. private bool CheckReservoirIsAuto()
  472. {
  473. string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  474. ReservoirsPersistentValue reservoirsPersistentValue = ReservoirsPersistentManager.Instance.GetReservoirsPersistentValue(reservoir);
  475. if ("Auto".Equals(reservoirsPersistentValue.OperatingMode))
  476. {
  477. return true;
  478. }
  479. return false;
  480. }
  481. /// <summary>
  482. /// 初始化监控
  483. /// </summary>
  484. /// <param name="param"></param>
  485. /// <returns></returns>
  486. private bool InitializeAllMonitor(object[] param)
  487. {
  488. RState rsstate = RState.Running;
  489. if (_metalItem.SubType == STRATUS)
  490. {
  491. rsstate = _standardHotInitializeRoutine.Monitor();
  492. }
  493. else
  494. {
  495. rsstate = _compactEmbranceInitializeRoutine.Monitor();
  496. }
  497. if (rsstate == RState.End)
  498. {
  499. return true;
  500. }
  501. else if (rsstate == RState.Failed || rsstate == RState.Timeout)
  502. {
  503. PostMsg(MetalMsg.Error);
  504. return false;
  505. }
  506. return false;
  507. }
  508. #endregion
  509. #region RunRecipe
  510. /// <summary>
  511. /// Run Recipe
  512. /// </summary>
  513. /// <param name="param"></param>
  514. /// <returns></returns>
  515. private bool RunRecipe(object[] param)
  516. {
  517. MetalUsageMointor(); //Metal run recipe前检查PMCounter消耗
  518. string reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  519. if (_metalItem.SubType == STRATUS)
  520. {
  521. StandardHotReservoirDevice resDevice = DEVICE.GetDevice<StandardHotReservoirDevice>(reservoirName);
  522. resDevice.ReservoirUsageMonitor();
  523. }
  524. DepRecipe recipe = param[0] as DepRecipe;
  525. _recipeSide = param[1].ToString();
  526. _cycle = (int)param[2];
  527. _runrecipeElapsedTime = 0;
  528. bool result = false;
  529. if (_metalItem.SubType == STRATUS)
  530. {
  531. _currentRunRecipeRoutine = _standardHotRunRecipeRoutine;
  532. result = _standardHotRunRecipeRoutine.Start(recipe, _recipeSide,_cycle) == RState.Running;
  533. }
  534. else
  535. {
  536. _currentRunRecipeRoutine = _compactEmbranceRunRecipeRoutine;
  537. result = _compactEmbranceRunRecipeRoutine.Start(recipe, _recipeSide, _cycle) == RState.Running;
  538. }
  539. if (result)
  540. {
  541. if (WaferHolderInfo != null)
  542. {
  543. WaferHolderInfo.MetalModuleName = Module;
  544. }
  545. _recipeTime = (recipe.CalculateRecipeTotalTime())*_cycle;
  546. _currentRecipe = recipe;
  547. if (WaferHolderInfo != null && WaferHolderInfo.SchedulerModules != null && WaferHolderInfo.SchedulerModules.Count != 0)
  548. {
  549. LOG.WriteLog(eEvent.INFO_METAL, Module.ToString(), $"{WaferHolderInfo?.Id} {string.Join(",", WaferHolderInfo.SchedulerModules)}");
  550. }
  551. _runRecipeStartTime = DateTime.Now;
  552. if (WaferHolderInfo != null && _currentRecipe != null)
  553. {
  554. FaModuleNotifier.Instance.NotifyWaferShuttleRecipeStart(WaferHolderInfo, _currentRecipe.Ppid);
  555. }
  556. }
  557. return result;
  558. }
  559. /// <summary>
  560. /// RunRecipe监控
  561. /// </summary>
  562. /// <param name="param"></param>
  563. /// <returns></returns>
  564. private bool RunRecipeMonitor(object[] param)
  565. {
  566. RState rsstate = RState.Running;
  567. if (_metalItem.SubType == STRATUS)
  568. {
  569. rsstate = _standardHotRunRecipeRoutine.Monitor();
  570. if (rsstate == RState.Running)
  571. {
  572. StandardHotMetalDevice _standardHotMetalDevice = DEVICE.GetDevice<StandardHotMetalDevice>(Module.ToString());
  573. if (_standardHotMetalDevice.MetalDeviceData.CellFlow <= 0)
  574. {
  575. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"reservoir metal cell flow is 0");
  576. rsstate = RState.Failed;
  577. }
  578. }
  579. _achievedCycle = _standardHotRunRecipeRoutine.GetCurrentCycle();
  580. }
  581. else
  582. {
  583. rsstate = _compactEmbranceRunRecipeRoutine.Monitor();
  584. if (rsstate == RState.Running)
  585. {
  586. CompactMembranMetalDevice _compactMembranMetalDevice = DEVICE.GetDevice<CompactMembranMetalDevice>(Module.ToString());
  587. if (_compactMembranMetalDevice.MetalDeviceData.CellFlow <= 0)
  588. {
  589. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"reservoir metal cell flow is 0");
  590. rsstate = RState.Failed;
  591. }
  592. if (_compactMembranMetalDevice.ANACellFlow.CounterValue <= 0) //检查hold flow
  593. {
  594. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"reservoir AnodeA flow is 0");
  595. rsstate = RState.Failed;
  596. }
  597. if (_compactMembranMetalDevice.ANBCellFlow.CounterValue <= 0)
  598. {
  599. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"reservoir AnodeB flow is 0");
  600. rsstate = RState.Failed;
  601. }
  602. }
  603. }
  604. if (Singleton<RouteManager>.Instance.IsAutoRunning && _runrecipeElapsedTime != TimeToReady)
  605. {
  606. _runrecipeElapsedTime = TimeToReady;
  607. LOG.WriteLog(eEvent.INFO_METAL, Module.ToString(), $"{WaferHolderInfo?.Id} {Module} RunRecipe TimeToReady {TimeToReady}s.");
  608. }
  609. if (rsstate == RState.End)
  610. {
  611. _recipeTime = 0;
  612. if (WaferHolderInfo != null)
  613. {
  614. double anodeAUsage = GetAnodeAUsage();
  615. double anodeBUsage = GetAnodeBUsage();
  616. MetalUsageManager.Instance.UpdateMetalUsage(Module.ToString(), _recipeSide, anodeAUsage, anodeBUsage);
  617. MetalUsageMointor(); //检查PMCounter消耗
  618. //CMM Usage
  619. string reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  620. if (_metalItem.SubType == STRATUS)
  621. {
  622. StandardHotReservoirDevice resDevice = DEVICE.GetDevice<StandardHotReservoirDevice>(reservoirName);
  623. resDevice.ReservoirUsageMonitor();
  624. resDevice.SetExportCMMUsage();
  625. }
  626. WaferHolderInfo.LastMetalRecipeCompleteTime = DateTime.Now;
  627. }
  628. _runrecipeElapsedTime = 0;
  629. //记录LotTrack
  630. _runRecipeCompleteTime = DateTime.Now;
  631. int timeLength = (int)(_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds;
  632. if (_metalItem.SubType == STRATUS)
  633. {
  634. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  635. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _standardHotRunRecipeRoutine.MetalLotTrackDatas,
  636. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  637. }
  638. else
  639. {
  640. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  641. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _compactEmbranceRunRecipeRoutine.MetalLotTrackDatas,
  642. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  643. }
  644. if (WaferHolderInfo != null && _currentRecipe != null)
  645. {
  646. FaModuleNotifier.Instance.NotifyWaferShuttleRecipeEnd(WaferHolderInfo, _currentRecipe.Ppid, timeLength);
  647. }
  648. return true;
  649. }
  650. else if (rsstate == RState.Failed || rsstate == RState.Timeout)
  651. {
  652. _recipeTime = 0;
  653. if (WaferHolderInfo != null)
  654. {
  655. double anodeAUsage = GetAnodeAUsage();
  656. double anodeBUsage = GetAnodeBUsage();
  657. MetalUsageManager.Instance.UpdateMetalUsage(Module.ToString(), _recipeSide, anodeAUsage, anodeBUsage);
  658. MetalUsageMointor(); //失败了也要检查PMCounter消耗
  659. //CMMUsage
  660. string reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  661. if (_metalItem.SubType == STRATUS)
  662. {
  663. StandardHotReservoirDevice resDevice = DEVICE.GetDevice<StandardHotReservoirDevice>(reservoirName);
  664. resDevice.ReservoirUsageMonitor();
  665. resDevice.SetExportCMMUsage();
  666. }
  667. }
  668. _runrecipeElapsedTime = 0;
  669. if (WaferHolderInfo != null && _currentRecipe != null)
  670. {
  671. WaferHolderInfo.LastMetalRecipeCompleteTime = DateTime.Now;
  672. }
  673. PostMsg(MetalMsg.Error);
  674. //记录LotTrack
  675. _runRecipeCompleteTime = DateTime.Now;
  676. if (_metalItem.SubType == STRATUS)
  677. {
  678. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  679. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _standardHotRunRecipeRoutine.MetalLotTrackDatas,
  680. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  681. }
  682. else
  683. {
  684. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  685. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _compactEmbranceRunRecipeRoutine.MetalLotTrackDatas,
  686. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  687. }
  688. if (WaferHolderInfo != null && _currentRecipe != null)
  689. {
  690. FaModuleNotifier.Instance.NotifyWaferShuttleRecipeFailed(WaferHolderInfo, _currentRecipe.Ppid);
  691. }
  692. return false;
  693. }
  694. return false;
  695. }
  696. /// <summary>
  697. /// 监控 PM Counter Metal用量
  698. /// </summary>
  699. private void MetalUsageMointor()
  700. {
  701. MetalUsage metalUsage = MetalUsageManager.Instance.GetMetalUsage(Module.ToString());
  702. if (metalUsage != null)
  703. {
  704. //TotalAUsage
  705. if (metalUsage.TotalUsage > SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit") != 0)
  706. {
  707. if (metalUsage.TotalUsage > SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit"))
  708. {
  709. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit")}");
  710. PostMsg(MetalMsg.Error);
  711. AlarmListManager.Instance.AddDataError(Module.ToString(),
  712. $"{Module.ToString()}.metalUsage.TotalUsage",
  713. $"{Module.ToString()} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit")}");
  714. }
  715. else
  716. {
  717. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit")}");
  718. AlarmListManager.Instance.AddWarn(Module.ToString(),
  719. $"{Module.ToString()}.metalUsage.TotalUsage",
  720. $"{Module.ToString()} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit")}");
  721. }
  722. }
  723. //AnodeAUsage
  724. if (metalUsage.AnodeAUsage > SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit") != 0)
  725. {
  726. if (metalUsage.AnodeAUsage > SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit"))
  727. {
  728. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit")}");
  729. PostMsg(MetalMsg.Error);
  730. AlarmListManager.Instance.AddDataError(Module.ToString(),
  731. $"{Module.ToString()}.metalUsage.AnodeAUsage",
  732. $"{Module.ToString()} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit")}");
  733. }
  734. else
  735. {
  736. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit")}");
  737. AlarmListManager.Instance.AddWarn(Module.ToString(),
  738. $"{Module.ToString()}.metalUsage.AnodeAUsage",
  739. $"{Module.ToString()} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit")}");
  740. }
  741. }
  742. //AnodeBUsage
  743. if (metalUsage.AnodeBUsage > SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit") != 0)
  744. {
  745. if (metalUsage.AnodeBUsage > SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit"))
  746. {
  747. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit")}");
  748. PostMsg(MetalMsg.Error);
  749. AlarmListManager.Instance.AddDataError(Module.ToString(),
  750. $"{Module.ToString()}.metalUsage.AnodeBUsage",
  751. $"{Module.ToString()} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit")}");
  752. }
  753. else
  754. {
  755. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit")}");
  756. AlarmListManager.Instance.AddWarn(Module.ToString(),
  757. $"{Module.ToString()}.metalUsage.AnodeBUsage",
  758. $"{Module.ToString()} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit")}");
  759. }
  760. }
  761. //MembraneAUsage
  762. if (metalUsage.MembranceAUsage > SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit") != 0)
  763. {
  764. if (metalUsage.MembranceAUsage > SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit"))
  765. {
  766. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit")}");
  767. PostMsg(MetalMsg.Error);
  768. AlarmListManager.Instance.AddDataError(Module.ToString(),
  769. $"{Module.ToString()}.metalUsage.MembraneAUsage",
  770. $"{Module.ToString()} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit")}");
  771. }
  772. else
  773. {
  774. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit")}");
  775. AlarmListManager.Instance.AddWarn(Module.ToString(),
  776. $"{Module.ToString()}.metalUsage.MembraneAUsage",
  777. $"{Module.ToString()} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit")}");
  778. }
  779. }
  780. //MembraneBUsage
  781. if (metalUsage.MembranceBUsage > SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit") != 0)
  782. {
  783. if (metalUsage.MembranceBUsage > SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit"))
  784. {
  785. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit")}");
  786. PostMsg(MetalMsg.Error);
  787. AlarmListManager.Instance.AddDataError(Module.ToString(),
  788. $"{Module.ToString()}.metalUsage.MembraneBUsage",
  789. $"{Module.ToString()} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit")}");
  790. }
  791. else
  792. {
  793. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit")}");
  794. AlarmListManager.Instance.AddWarn(Module.ToString(),
  795. $"{Module.ToString()}.metalUsage.MembraneBUsage",
  796. $"{Module.ToString()} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit")}");
  797. }
  798. }
  799. //TotalWafer
  800. if (metalUsage.TotalWafers > SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit") && SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit") != 0)
  801. {
  802. if (metalUsage.TotalWafers > SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit"))
  803. {
  804. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit")}");
  805. PostMsg(MetalMsg.Error);
  806. AlarmListManager.Instance.AddDataError(Module.ToString(),
  807. $"{Module.ToString()}.metalUsage.TotalWafers",
  808. $"{Module.ToString()} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit")}");
  809. }
  810. else
  811. {
  812. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit")}");
  813. AlarmListManager.Instance.AddWarn(Module.ToString(),
  814. $"{Module.ToString()}.metalUsage.TotalWafers",
  815. $"{Module.ToString()} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit")}");
  816. }
  817. }
  818. //AnodeAWafer
  819. if (metalUsage.AnodeAWafers > SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit") != 0)
  820. {
  821. if (metalUsage.AnodeAWafers > SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit"))
  822. {
  823. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit")}");
  824. PostMsg(MetalMsg.Error);
  825. AlarmListManager.Instance.AddDataError(Module.ToString(),
  826. $"{Module.ToString()}.metalUsage.AnodeAWafers",
  827. $"{Module.ToString()} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit")}");
  828. }
  829. else
  830. {
  831. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit")}");
  832. AlarmListManager.Instance.AddWarn(Module.ToString(),
  833. $"{Module.ToString()}.metalUsage.AnodeAWafers",
  834. $"{Module.ToString()} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit")}");
  835. }
  836. }
  837. //AnodeBWafer
  838. if (metalUsage.AnodeBWafers > SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit") != 0)
  839. {
  840. if (metalUsage.AnodeBWafers > SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit"))
  841. {
  842. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit")}");
  843. PostMsg(MetalMsg.Error);
  844. AlarmListManager.Instance.AddDataError(Module.ToString(),
  845. $"{Module.ToString()}.metalUsage.AnodeBWafers",
  846. $"{Module.ToString()} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit")}");
  847. }
  848. else
  849. {
  850. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit")}");
  851. AlarmListManager.Instance.AddWarn(Module.ToString(),
  852. $"{Module.ToString()}.metalUsage.AnodeBWafers",
  853. $"{Module.ToString()} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit")}");
  854. }
  855. }
  856. //AnodeAbathUsage
  857. if (metalUsage.AnodeABathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit") != 0)
  858. {
  859. if (metalUsage.AnodeABathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit"))
  860. {
  861. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit")}");
  862. PostMsg(MetalMsg.Error);
  863. AlarmListManager.Instance.AddDataError(Module.ToString(),
  864. $"{Module.ToString()}.metalUsage.AnodeABathUsage",
  865. $"{Module.ToString()} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit")}");
  866. }
  867. else
  868. {
  869. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit")}");
  870. AlarmListManager.Instance.AddWarn(Module.ToString(),
  871. $"{Module.ToString()}.metalUsage.AnodeABathUsage",
  872. $"{Module.ToString()} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit")}");
  873. }
  874. }
  875. //AnodeBbathUsage
  876. if (metalUsage.AnodeBBathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit") != 0)
  877. {
  878. if (metalUsage.AnodeBBathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit"))
  879. {
  880. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit")}");
  881. PostMsg(MetalMsg.Error);
  882. AlarmListManager.Instance.AddDataError(Module.ToString(),
  883. $"{Module.ToString()}.metalUsage.AnodeBBathUsage",
  884. $"{Module.ToString()} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit")}");
  885. }
  886. else
  887. {
  888. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit")}");
  889. AlarmListManager.Instance.AddWarn(Module.ToString(),
  890. $"{Module.ToString()}.metalUsage.AnodeBBathUsage",
  891. $"{Module.ToString()} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit")}");
  892. }
  893. }
  894. }
  895. }
  896. /// <summary>
  897. /// 获取A面使用的电量
  898. /// </summary>
  899. /// <returns></returns>
  900. private double GetAnodeAUsage()
  901. {
  902. if (_metalItem.SubType == STRATUS)
  903. {
  904. return Math.Round(_standardHotRunRecipeRoutine.AnodeAUsage, 3);
  905. }
  906. else
  907. {
  908. return Math.Round(_compactEmbranceRunRecipeRoutine.AnodeAUsage, 3);
  909. }
  910. }
  911. /// <summary>
  912. /// 获取B面使用的电量
  913. /// </summary>
  914. /// <returns></returns>
  915. private double GetAnodeBUsage()
  916. {
  917. if (_metalItem.SubType == STRATUS)
  918. {
  919. return Math.Round(_standardHotRunRecipeRoutine.AnodeBUsage, 3);
  920. }
  921. else
  922. {
  923. return Math.Round(_compactEmbranceRunRecipeRoutine.AnodeBUsage, 3);
  924. }
  925. }
  926. /// <summary>
  927. /// Abort Recipe
  928. /// </summary>
  929. /// <param name="param"></param>
  930. /// <returns></returns>
  931. public bool AbortRecipe(object[] param)
  932. {
  933. _runRecipeCompleteTime = DateTime.Now;
  934. if (_metalItem.SubType == STRATUS)
  935. {
  936. _standardHotRunRecipeRoutine.Abort();
  937. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  938. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _standardHotRunRecipeRoutine.MetalLotTrackDatas,
  939. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  940. }
  941. else
  942. {
  943. _compactEmbranceRunRecipeRoutine.Abort();
  944. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  945. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _compactEmbranceRunRecipeRoutine.MetalLotTrackDatas,
  946. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  947. }
  948. return true;
  949. }
  950. #endregion
  951. #region Current Short Test
  952. /// <summary>
  953. /// Current Short Test
  954. /// </summary>
  955. /// <param name="param"></param>
  956. /// <returns></returns>
  957. private bool CurrentShortTest(object[] param)
  958. {
  959. return _currentShortTestRoutine.Start() == RState.Running;
  960. }
  961. /// <summary>
  962. /// Current Short test监控
  963. /// </summary>
  964. /// <param name="param"></param>
  965. /// <returns></returns>
  966. private bool CurrentShortTestMonitor(object[] param)
  967. {
  968. RState rsstate = _currentShortTestRoutine.Monitor();
  969. if (rsstate == RState.End)
  970. {
  971. return true;
  972. }
  973. else if (rsstate == RState.Failed || rsstate == RState.Timeout)
  974. {
  975. PostMsg(MetalMsg.Error);
  976. return false;
  977. }
  978. return false;
  979. }
  980. #endregion
  981. #region Close Flow Valve
  982. /// <summary>
  983. /// 关闭Flow Valve
  984. /// </summary>
  985. /// <param name="param"></param>
  986. /// <returns></returns>
  987. private bool CloseFlowValve(object[] param)
  988. {
  989. if (_metalItem.SubType == STRATUS)
  990. {
  991. StandardHotMetalDevice device = DEVICE.GetDevice<StandardHotMetalDevice>(Module.ToString());
  992. if (device != null)
  993. {
  994. return device.SwitchToBypass("", null);
  995. }
  996. return false;
  997. }
  998. else
  999. {
  1000. CompactMembranMetalDevice device = DEVICE.GetDevice<CompactMembranMetalDevice>(Module.ToString());
  1001. if (device != null)
  1002. {
  1003. string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  1004. CompactMembranReservoirDevice reservoirDevice = DEVICE.GetDevice<CompactMembranReservoirDevice>(reservoir);
  1005. if (reservoirDevice != null)
  1006. {
  1007. bool result = reservoirDevice.CAByPassOn("", null);
  1008. if (result)
  1009. {
  1010. return device.CellFlowValveOff("", null);
  1011. }
  1012. }
  1013. }
  1014. return false;
  1015. }
  1016. }
  1017. #endregion
  1018. #region Open Flow Valve
  1019. /// <summary>
  1020. /// 打开Flow Valve
  1021. /// </summary>
  1022. /// <param name="param"></param>
  1023. /// <returns></returns>
  1024. private bool OpenFlowValve(object[] param)
  1025. {
  1026. if (_metalItem.SubType == STRATUS)
  1027. {
  1028. StandardHotMetalDevice device = DEVICE.GetDevice<StandardHotMetalDevice>(Module.ToString());
  1029. if (device != null)
  1030. {
  1031. bool result = device.SwitchToFlow("", null);
  1032. if (result)
  1033. {
  1034. return device.OpenPump("", null);
  1035. }
  1036. }
  1037. return false;
  1038. }
  1039. else
  1040. {
  1041. CompactMembranMetalDevice device = DEVICE.GetDevice<CompactMembranMetalDevice>(Module.ToString());
  1042. if (device != null)
  1043. {
  1044. string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  1045. CompactMembranReservoirDevice reservoirDevice = DEVICE.GetDevice<CompactMembranReservoirDevice>(reservoir);
  1046. if (reservoirDevice != null)
  1047. {
  1048. bool result = reservoirDevice.CAByPassOff("", null);
  1049. if (result)
  1050. {
  1051. return device.CellFlowValveOn("", null);
  1052. }
  1053. }
  1054. }
  1055. return false;
  1056. }
  1057. }
  1058. #endregion
  1059. public bool Check(int msg, out string reason, params object[] args)
  1060. {
  1061. reason = "";
  1062. return true;
  1063. }
  1064. public bool CheckAcked(int msg)
  1065. {
  1066. return true;
  1067. }
  1068. public int Invoke(string function, params object[] args)
  1069. {
  1070. switch (function)
  1071. {
  1072. case "HomeAll":
  1073. if (IsIdle)
  1074. {
  1075. return (int)FSM_MSG.NONE;
  1076. }
  1077. if (CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Initialize))
  1078. {
  1079. return (int)MetalMsg.Initialize;
  1080. }
  1081. else
  1082. {
  1083. return (int)FSM_MSG.NONE;
  1084. }
  1085. }
  1086. return (int)FSM_MSG.NONE;
  1087. }
  1088. /// <summary>
  1089. /// 监控 PM Counter Metal用量
  1090. /// </summary>
  1091. private bool MetalUsageMointor(string Module)
  1092. {
  1093. MetalUsage metalUsage = MetalUsageManager.Instance.GetMetalUsage(Module);
  1094. if (metalUsage != null)
  1095. {
  1096. //TotalAUsage
  1097. if (metalUsage.TotalUsage > SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit") != 0)
  1098. {
  1099. if (metalUsage.TotalUsage > SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit"))
  1100. {
  1101. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit")}");
  1102. return false;
  1103. }
  1104. else
  1105. {
  1106. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit")}");
  1107. }
  1108. }
  1109. //AnodeAUsage
  1110. if (metalUsage.AnodeAUsage > SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit") != 0)
  1111. {
  1112. if (metalUsage.AnodeAUsage > SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit"))
  1113. {
  1114. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit")}");
  1115. return false;
  1116. }
  1117. else
  1118. {
  1119. LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit")}");
  1120. }
  1121. }
  1122. //AnodeBUsage
  1123. if (metalUsage.AnodeBUsage > SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit") != 0)
  1124. {
  1125. if (metalUsage.AnodeBUsage > SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit"))
  1126. {
  1127. LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit")}");
  1128. return false;
  1129. }
  1130. else
  1131. {
  1132. LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit")}");
  1133. }
  1134. }
  1135. //MembraneAUsage
  1136. if (metalUsage.MembranceAUsage > SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit") != 0)
  1137. {
  1138. if (metalUsage.MembranceAUsage > SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit"))
  1139. {
  1140. LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit")}");
  1141. return false;
  1142. }
  1143. else
  1144. {
  1145. LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit")}");
  1146. }
  1147. }
  1148. //MembraneBUsage
  1149. if (metalUsage.MembranceBUsage > SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit") != 0)
  1150. {
  1151. if (metalUsage.MembranceBUsage > SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit"))
  1152. {
  1153. LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit")}");
  1154. }
  1155. else
  1156. {
  1157. LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit")}");
  1158. }
  1159. }
  1160. //TotalWafer
  1161. if (metalUsage.TotalWafers > SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit") && SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit") != 0)
  1162. {
  1163. if (metalUsage.TotalWafers > SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit"))
  1164. {
  1165. LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit")}");
  1166. return false;
  1167. }
  1168. else
  1169. {
  1170. LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit")}");
  1171. }
  1172. }
  1173. //AnodeAWafer
  1174. if (metalUsage.AnodeAWafers > SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit") != 0)
  1175. {
  1176. if (metalUsage.AnodeAWafers > SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit"))
  1177. {
  1178. LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit")}");
  1179. return false;
  1180. }
  1181. else
  1182. {
  1183. LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit")}");
  1184. }
  1185. }
  1186. //AnodeBWafer
  1187. if (metalUsage.AnodeBWafers > SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit") != 0)
  1188. {
  1189. if (metalUsage.AnodeBWafers > SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit"))
  1190. {
  1191. LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit")}");
  1192. return false;
  1193. }
  1194. else
  1195. {
  1196. LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit")}");
  1197. }
  1198. }
  1199. //AnodeAbathUsage
  1200. if (metalUsage.AnodeABathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit") != 0)
  1201. {
  1202. if (metalUsage.AnodeABathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit"))
  1203. {
  1204. LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit")}");
  1205. return false;
  1206. }
  1207. else
  1208. {
  1209. LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit")}");
  1210. }
  1211. }
  1212. //AnodeBbathUsage
  1213. if (metalUsage.AnodeBBathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit") != 0)
  1214. {
  1215. if (metalUsage.AnodeBBathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit"))
  1216. {
  1217. LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit")}");
  1218. return false;
  1219. }
  1220. else
  1221. {
  1222. LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit")}");
  1223. }
  1224. }
  1225. }
  1226. return true;
  1227. }
  1228. }
  1229. public enum MetalMsg
  1230. {
  1231. NONE,
  1232. Error,
  1233. ResumeError,
  1234. Initialize,
  1235. Manual,
  1236. Auto,
  1237. CurrentShortTest,
  1238. CloseFlowValve,
  1239. OpenFlowValve,
  1240. RunRecipe,
  1241. Abort,
  1242. Init
  1243. }
  1244. }