SRDLoaderRoutine.cs 12 KB

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  1. using Aitex.Core.RT.Device;
  2. using Aitex.Core.RT.Log;
  3. using Aitex.Core.RT.Routine;
  4. using CyberX8_Core;
  5. using CyberX8_RT.Devices.AXIS;
  6. using CyberX8_RT.Devices.Facilities;
  7. using CyberX8_RT.Devices.SRD;
  8. using MECF.Framework.Common.Equipment;
  9. using MECF.Framework.Common.Routine;
  10. using MECF.Framework.Common.SubstrateTrackings;
  11. using Aitex.Core.Common;
  12. namespace CyberX8_RT.Modules.SRD
  13. {
  14. public class SRDLoaderRoutine : RoutineBase, IRoutine
  15. {
  16. private enum SRDLoaderStep
  17. {
  18. LiftUpOff,
  19. FlippersIn,
  20. N2On,
  21. Delay,
  22. N2Off,
  23. ChuckVacuumOn,
  24. FlippersOut,
  25. End
  26. }
  27. #region 常量
  28. #endregion
  29. #region 内部变量
  30. /// <summary>
  31. /// Rotation Axis
  32. /// </summary>
  33. private JetAxisBase _rotationAxis;
  34. /// <summary>
  35. /// SRD Common
  36. /// </summary>
  37. private SrdCommonDevice _srdCommon;
  38. /// <summary>
  39. /// Total SRD
  40. /// </summary>
  41. private TotalSRDDevice _totalSRDDevice;
  42. /// <summary>
  43. /// System Facility
  44. /// </summary>
  45. private SystemFacilities _systemFacilities;
  46. /// <summary>
  47. /// 当前WaferSize
  48. /// </summary>
  49. private int _waferSize = 200;
  50. #endregion
  51. #region 属性
  52. #endregion
  53. /// <summary>
  54. /// 构造函数
  55. /// </summary>
  56. /// <param name="module"></param>
  57. public SRDLoaderRoutine(string module) : base(module)
  58. {
  59. }
  60. /// <summary>
  61. /// 中止
  62. /// </summary>
  63. public void Abort()
  64. {
  65. Runner.Stop("SRD Loader Abort");
  66. }
  67. /// <summary>
  68. /// 监控
  69. /// </summary>
  70. /// <returns></returns>
  71. public RState Monitor()
  72. {
  73. Runner.Run(SRDLoaderStep.LiftUpOff, LiftUpOff, CheckLiftUpOffEndStatus, CheckLiftUpOffStopStatus)
  74. .Run(SRDLoaderStep.FlippersIn, FlippersIn, CheckFlippersInEndStatus, CheckFlippersInStopStatus)
  75. .Run(SRDLoaderStep.N2On, N2On, _delay_1ms)
  76. .Delay(SRDLoaderStep.Delay, 500)
  77. .Run(SRDLoaderStep.N2Off, N2Off, _delay_1ms)
  78. .Run(SRDLoaderStep.ChuckVacuumOn, ChuckVacuumOn, CheckChuckVacuumOnEndStatus, CheckChuckVacuumOnStopStatus)
  79. .Run(SRDLoaderStep.FlippersOut, FlippersOut, CheckFlippersOutEndStatus, CheckFlippersOutStopStatus)
  80. .End(SRDLoaderStep.End, NullFun, _delay_1ms);
  81. return Runner.Status;
  82. }
  83. /// <summary>
  84. /// 启动
  85. /// </summary>
  86. /// <param name="objs"></param>
  87. /// <returns></returns>
  88. public RState Start(params object[] objs)
  89. {
  90. _srdCommon = DEVICE.GetDevice<SrdCommonDevice>($"{Module}.Common");
  91. _totalSRDDevice = DEVICE.GetDevice<TotalSRDDevice>("SRD");
  92. _rotationAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Rotation");
  93. _systemFacilities = DEVICE.GetDevice<SystemFacilities>("System.Facilities");
  94. if (!GetWaferSize())
  95. {
  96. NotifyError(eEvent.ERR_SRD, "Wafer Size is invalid", 0);
  97. return RState.Failed;
  98. }
  99. if (!CheckPreCondition())
  100. {
  101. return RState.Failed;
  102. }
  103. return Runner.Start(Module, "SRD Loader Start");
  104. }
  105. /// <summary>
  106. /// Check Pre Condition
  107. /// </summary>
  108. /// <returns></returns>
  109. private bool CheckPreCondition()
  110. {
  111. //Check Rotation Home
  112. //if (!_rotationAxis.IsHomed)
  113. //{
  114. // NotifyError(eEvent.ERR_SRD, "Rotation is not homed", 0);
  115. // return false;
  116. //}
  117. //Check LiftUp
  118. if (!_srdCommon.CommonData.LiftUp)
  119. {
  120. NotifyError(eEvent.ERR_SRD, "LiftUp is off", 0);
  121. return false;
  122. }
  123. //Check LiftUp Status
  124. if (!_srdCommon.CommonData.LiftUpStatus)
  125. {
  126. NotifyError(eEvent.ERR_SRD, "LiftUp sensor is off", 0);
  127. return false;
  128. }
  129. //Check Wafer Present
  130. if (!_srdCommon.CommonData.WaferPresent)
  131. {
  132. NotifyError(eEvent.ERR_SRD, "WaferPresent sensor is off", 0);
  133. return false;
  134. }
  135. //Check LoaderDI
  136. if (!_systemFacilities.LoaderDiEnable)
  137. {
  138. NotifyError(eEvent.ERR_SRD, "Load DI Is Disable", 0);
  139. return false;
  140. }
  141. //Check Flippers
  142. if (_srdCommon.CommonData.FlippersIn150 || _srdCommon.CommonData.FlippersIn200)
  143. {
  144. NotifyError(eEvent.ERR_SRD, "FlippersIn is on", 0);
  145. return false;
  146. }
  147. if (!_srdCommon.CommonData.Flipper1Out150Status || !_srdCommon.CommonData.Flipper2Out150Status || !_srdCommon.CommonData.Flipper3Out150Status
  148. || !_srdCommon.CommonData.Flipper1Out200Status || !_srdCommon.CommonData.Flipper2Out200Status || !_srdCommon.CommonData.Flipper3Out200Status)
  149. {
  150. NotifyError(eEvent.ERR_SRD, "Flippers are at In position", 0);
  151. return false;
  152. }
  153. return true;
  154. }
  155. /// <summary>
  156. /// Get current WaferSize
  157. /// </summary>
  158. /// <returns></returns>
  159. private bool GetWaferSize()
  160. {
  161. WaferInfo waferInfo = WaferManager.Instance.GetWafer(ModuleNameString.ToEnum(Module), 0);
  162. switch (waferInfo.Size)
  163. {
  164. case WaferSize.WS0:
  165. _waferSize = 200;
  166. break;
  167. case WaferSize.WS4:
  168. _waferSize = 100;
  169. break;
  170. case WaferSize.WS6:
  171. case WaferSize.WS150:
  172. case WaferSize.WS159:
  173. _waferSize = 150;
  174. break;
  175. case WaferSize.WS8:
  176. _waferSize = 200;
  177. break;
  178. default:
  179. return false;
  180. }
  181. return true;
  182. }
  183. /// <summary>
  184. /// LiftUpOff
  185. /// </summary>
  186. /// <param name="param"></param>
  187. /// <returns></returns>
  188. private bool LiftUpOff()
  189. {
  190. bool result = _srdCommon.LiftUpOffAction("", null);
  191. if (!result)
  192. {
  193. NotifyError(eEvent.ERR_SRD, "Lift Up Off Action is failed", 0);
  194. return result;
  195. }
  196. return true;
  197. }
  198. /// <summary>
  199. /// 检验LiftUpOff结束状态
  200. /// </summary>
  201. /// <param name="param"></param>
  202. /// <returns></returns>
  203. private bool CheckLiftUpOffEndStatus()
  204. {
  205. return _srdCommon.Status == RState.End && !_srdCommon.CommonData.LiftUpStatus;
  206. }
  207. /// <summary>
  208. /// 检验LiftUpOff结束状态
  209. /// </summary>
  210. /// <param name="param"></param>
  211. /// <returns></returns>
  212. private bool CheckLiftUpOffStopStatus()
  213. {
  214. if (_srdCommon.Status == RState.Failed || _srdCommon.Status == RState.Timeout)
  215. {
  216. NotifyError(eEvent.ERR_SRD, "Check LiftUpOff is failed", 0);
  217. return true;
  218. }
  219. return false;
  220. }
  221. /// <summary>
  222. /// Flippers In
  223. /// </summary>
  224. /// <param name="param"></param>
  225. /// <returns></returns>
  226. private bool FlippersIn()
  227. {
  228. bool result = false;
  229. object[] objects = new object[1];
  230. objects[0] = _waferSize;
  231. result = _srdCommon.FlipperInAction("", objects);
  232. if (!result)
  233. {
  234. NotifyError(eEvent.ERR_SRD, $"FlipperIn{_waferSize} Action is failed", 0);
  235. return result;
  236. }
  237. return true;
  238. }
  239. /// <summary>
  240. /// 检验FlippersIn结束状态
  241. /// </summary>
  242. /// <param name="param"></param>
  243. /// <returns></returns>
  244. private bool CheckFlippersInEndStatus()
  245. {
  246. return _srdCommon.Status == RState.End;
  247. }
  248. /// <summary>
  249. /// 检验FlippersIn结束状态
  250. /// </summary>
  251. /// <param name="param"></param>
  252. /// <returns></returns>
  253. private bool CheckFlippersInStopStatus()
  254. {
  255. if (_srdCommon.Status == RState.Failed || _srdCommon.Status == RState.Timeout)
  256. {
  257. NotifyError(eEvent.ERR_SRD, $"Check FlipperIn{_waferSize} Action is failed", 0);
  258. return true;
  259. }
  260. return false;
  261. }
  262. /// <summary>
  263. /// 打开 Wafer N2
  264. /// </summary>
  265. /// <returns></returns>
  266. private bool N2On()
  267. {
  268. bool result = _srdCommon.N2OnAction("", null);
  269. if (!result)
  270. {
  271. NotifyError(eEvent.ERR_SRD, $"N2 On Action is failed", 0);
  272. }
  273. return result;
  274. }
  275. /// <summary>
  276. /// 关闭 Wafer N2
  277. /// </summary>
  278. /// <returns></returns>
  279. private bool N2Off()
  280. {
  281. bool result = _srdCommon.N2OffAction("", null);
  282. if (!result)
  283. {
  284. NotifyError(eEvent.ERR_SRD, $"N2 Off Action is failed", 0);
  285. }
  286. return result;
  287. }
  288. /// <summary>
  289. /// ChuckVacuumOn
  290. /// </summary>
  291. /// <param name="param"></param>
  292. /// <returns></returns>
  293. private bool ChuckVacuumOn()
  294. {
  295. bool result = _srdCommon.ChuckVacuumOnAction("", null);
  296. if (!result)
  297. {
  298. NotifyError(eEvent.ERR_SRD, "ChuckVacuumOn Action is failed", 0);
  299. return result;
  300. }
  301. return true;
  302. }
  303. /// <summary>
  304. /// 检验ChuckVacuumOn结束状态
  305. /// </summary>
  306. /// <param name="param"></param>
  307. /// <returns></returns>
  308. private bool CheckChuckVacuumOnEndStatus()
  309. {
  310. return _srdCommon.Status == RState.End && _srdCommon.CommonData.ChuckVacuum;
  311. }
  312. /// <summary>
  313. /// 检验ChuckVacuumOn结束状态
  314. /// </summary>
  315. /// <param name="param"></param>
  316. /// <returns></returns>
  317. private bool CheckChuckVacuumOnStopStatus()
  318. {
  319. if (_srdCommon.Status == RState.Failed || _srdCommon.Status == RState.Timeout)
  320. {
  321. NotifyError(eEvent.ERR_SRD, "Check ChuckVacuumOn is failed", 0);
  322. return true;
  323. }
  324. return false;
  325. }
  326. /// <summary>
  327. /// Flippers In
  328. /// </summary>
  329. /// <param name="param"></param>
  330. /// <returns></returns>
  331. private bool FlippersOut()
  332. {
  333. bool result = false;
  334. object[] objects = new object[1];
  335. objects[0] = _waferSize;
  336. result = _srdCommon.FlipperOutAction("", objects);
  337. if (!result)
  338. {
  339. NotifyError(eEvent.ERR_SRD, $"FlipperOut{_waferSize} Action is failed", 0);
  340. return result;
  341. }
  342. return true;
  343. }
  344. /// <summary>
  345. /// 检验FlippersIn结束状态
  346. /// </summary>
  347. /// <param name="param"></param>
  348. /// <returns></returns>
  349. private bool CheckFlippersOutEndStatus()
  350. {
  351. return _srdCommon.Status == RState.End;
  352. }
  353. /// <summary>
  354. /// 检验FlippersIn结束状态
  355. /// </summary>
  356. /// <param name="param"></param>
  357. /// <returns></returns>
  358. private bool CheckFlippersOutStopStatus()
  359. {
  360. if (_srdCommon.Status == RState.Failed || _srdCommon.Status == RState.Timeout)
  361. {
  362. NotifyError(eEvent.ERR_SRD, $"Check FlipperOut{_waferSize} Action is failed", 0);
  363. return true;
  364. }
  365. return false;
  366. }
  367. }
  368. }