RtState.cs 5.7 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Text;
  5. using System.Threading.Tasks;
  6. namespace CyberX8_Core
  7. {
  8. public enum RtState
  9. {
  10. Init,
  11. Initializing,
  12. Idle,
  13. Manual,
  14. Transfer,
  15. AutoIdle,
  16. AutoRunning,
  17. AutoRunningPaused,
  18. AutoAborting,
  19. ReturningCassette,
  20. Cycle,
  21. PrepareCycle,
  22. PostCycle,
  23. SetSpeed,
  24. Error,
  25. Reset,
  26. Processing,
  27. PostProcess,
  28. PauseProcess,
  29. //Maintenance,
  30. //WaferMapping,
  31. //Cycling,
  32. TMCycle,
  33. SETMCycle,
  34. SERunning,
  35. ReturnWafer,
  36. SETransfer,
  37. SEReturnWafer
  38. }
  39. public enum EFEMSTATE
  40. {
  41. Unknown, // 0
  42. Homing, // 1
  43. Idle, // 2
  44. Error, // 3
  45. Picking, // 4
  46. Placing, // 5
  47. Aligning, // 6
  48. Mapping, // 7
  49. Init, // 8
  50. Orgshing, // 9
  51. Lifting, // 10
  52. InitingAL, // 11
  53. InitingRB, // 12
  54. Extending, // 13
  55. Retracting, // 14
  56. //SettingLamp, // 15
  57. Swapping,
  58. Gotoing,
  59. Gripping,
  60. Ungripping,
  61. Fliping,
  62. Initializing,
  63. Vacuuming,
  64. Retrying,
  65. ConfirmCompleting,
  66. ErrorPicking,
  67. ErrorPlacing,
  68. RobotCycleing
  69. }
  70. public enum PUFSTATE
  71. {
  72. Unknown, // 0
  73. Homing, // 1
  74. Idle, // 2
  75. Error,
  76. Init,
  77. SwitchOning,
  78. SwitchOffing,
  79. Calibrating,
  80. Picking,
  81. Placing,
  82. Positioning,
  83. GotoRobotPositionForPlace,
  84. GotoRobotPositionForPick,
  85. WaitForRobotPlacing,
  86. WaitForRobotPlace,
  87. WaitForSwaping,
  88. WaitForSwap,
  89. Swaping,
  90. AferSwapParkStation,
  91. WaitForRobotPicking,
  92. WaitForRobotPick,
  93. BackToPackStationing,
  94. Retrying,
  95. ConfirmCompleting,
  96. Fliping
  97. }
  98. public enum LOADERSTATE
  99. {
  100. Unknown, // 0
  101. Homing, // 1
  102. Idle, // 2
  103. Error,
  104. Init,
  105. Positioning,
  106. SwitchOning,
  107. SwitchOffing,
  108. Loading,
  109. Unloading,
  110. InstallCRSing,
  111. PrepreForPlacing,
  112. WaitForUnload,
  113. WaitForLoad,
  114. WaitForPick,
  115. Retrying,
  116. ConfirmCompleting
  117. }
  118. public enum TransporterState
  119. {
  120. Unknown,
  121. Init,
  122. Initialized,
  123. Homing,
  124. Idle,
  125. Error,
  126. ErrorGantryPositioning,
  127. GantryPositioning,
  128. Positioning,
  129. SwitchOning,
  130. SwitchOffing,
  131. PickUping,
  132. MovingTo,
  133. Placing,
  134. Parking,
  135. ElevatorUping,
  136. ElevatorLowing,
  137. Transfering,
  138. PickUpMoveToing,
  139. PickUpMoveToComplete,
  140. PickUpValidating,
  141. PickUpValidateComplete,
  142. ValidateMoveTo,
  143. ValidateMoveToComplete,
  144. GantrySafeMoving,
  145. Retrying,
  146. ConfirmCompleting
  147. }
  148. public enum SRDState
  149. {
  150. Unknown,
  151. Init,
  152. Initialized,
  153. Initializing,
  154. InitializeHoming,
  155. Homing,
  156. Idle,
  157. Error,
  158. SwitchOning,
  159. SwitchOffing,
  160. Positioning,
  161. Aborting,
  162. Abort,
  163. Rotating,
  164. Stopping,
  165. PresenceTesting,
  166. ProcessReciping,
  167. ProcessError,
  168. AWCCycling,
  169. AWCHoming,
  170. Retrying,
  171. ConfirmCompleting,
  172. Loading,
  173. Unloading
  174. }
  175. public enum PrewetState
  176. {
  177. Unknown,
  178. Error,
  179. Abort,
  180. Init,
  181. Initialized,
  182. Idle,
  183. Initializing,
  184. PrepareToTransfering,
  185. ReadyForPick,
  186. KeepWeting,
  187. Linmot_Scanning,
  188. ManualProcessing,
  189. CycleManualProcessing,
  190. RunReciping,
  191. Aborting,
  192. PreparingToPick,
  193. PreparingToPlace,
  194. WaitForPick,
  195. WaitForPlace,
  196. RunRecipeComplete,
  197. DelayKeepweting,
  198. DelayKeepwetComplete
  199. }
  200. public enum DryerState
  201. {
  202. Unknown,
  203. Disable,
  204. Abort,
  205. Error,
  206. Init,
  207. Initialized,
  208. Idle,
  209. Initializing,
  210. RunReciping,
  211. CycleManualProcessing,
  212. Retrying
  213. }
  214. public enum RinseState
  215. {
  216. Unknown,
  217. Disable,
  218. Error,
  219. Init,
  220. Initialized,
  221. Idle,
  222. Initializing,
  223. CycleManualProcessing,
  224. RunReciping,
  225. RunRecipeComplete,
  226. KeepWeting,
  227. KeepWetComplete,
  228. Retrying,
  229. Aborting,
  230. Abort,
  231. }
  232. public enum MetalState
  233. {
  234. Unknown,
  235. Disable,
  236. Error,
  237. Init,
  238. Initialized,
  239. Idle,
  240. Initializing,
  241. ShortTesting,
  242. RunReciping,
  243. CurrentShortTesting,
  244. WaitCloseFlow,
  245. WaitOpenFlow,
  246. WaitForRunRecipe,
  247. Abort
  248. }
  249. public enum DummyState
  250. {
  251. Unknown,
  252. Disable,
  253. Error,
  254. Init,
  255. Initializing,
  256. Initialized,
  257. Idle
  258. }
  259. public enum ReservoirState
  260. {
  261. Unknown,
  262. Disable,
  263. Error,
  264. Init,
  265. Initializing,
  266. Initialized,
  267. Idle,
  268. }
  269. }