LoadPortModule.cs 22 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Fsm;
  3. using Aitex.Core.RT.OperationCenter;
  4. using Aitex.Core.RT.Routine;
  5. using Aitex.Core.Utilities;
  6. using Aitex.Sorter.Common;
  7. using MECF.Framework.Common.Equipment;
  8. using MECF.Framework.Common.Schedulers;
  9. using MECF.Framework.RT.ModuleLibrary.LPModules;
  10. using System;
  11. using Aitex.Core.RT.SCCore;
  12. using CyberX8_RT.Devices;
  13. using CyberX8_RT.Devices.EFEM;
  14. using CyberX8_Core;
  15. using Aitex.Core.Common;
  16. using Aitex.Core.Util;
  17. using Aitex.Core.RT.Log;
  18. namespace CyberX8_RT.Modules.LPs
  19. {
  20. /// <summary>
  21. /// LP entity
  22. /// </summary>
  23. sealed class LoadPortModule : LoadPortModuleBase
  24. {
  25. public event Action<string> OnEnterError;
  26. private enum STATE
  27. {
  28. Unknown,
  29. Idle, // 1
  30. Init,
  31. Error,
  32. Homing, // 2
  33. Mapping, // 4
  34. Loading,
  35. ReadingCarrierId,
  36. Unloading,
  37. Docking,
  38. Undocking,
  39. Clamping,
  40. Unclamping,
  41. WritingCarrierId,
  42. ReadingTagData,
  43. WritingTagData,
  44. CycleLoadUnloading
  45. }
  46. public enum MSG
  47. {
  48. Home, // 0
  49. Map, // 1
  50. ActionDone, // 2
  51. Abort, // 5
  52. Online, // 6
  53. Error, // 7
  54. Reset,
  55. EnterIdle,
  56. ReadCarrierId,
  57. WriteCarrierID,
  58. Load,
  59. Unload,
  60. Dock,
  61. Undock,
  62. Clamp,
  63. Unclamp,
  64. ToInit,
  65. ToIdle,
  66. ReadTagData,
  67. WriteTagData,
  68. CloseDoor,
  69. OpenDoor,
  70. CycleLoadUnload
  71. }
  72. public EfemBase JetEfem
  73. {
  74. get { return _efem; }
  75. }
  76. private readonly EfemBase _efem;
  77. private Loadport _lpDevice;
  78. public Loadport LPDevice
  79. {
  80. get
  81. {
  82. return _lpDevice;
  83. }
  84. }
  85. public override bool IsReady
  86. {
  87. get { return FsmState == (int)STATE.Idle && CheckAllMessageProcessed(); }
  88. }
  89. public override bool IsError
  90. {
  91. get { return FsmState == (int)STATE.Error; }
  92. }
  93. public override bool IsInit
  94. {
  95. get { return FsmState == (int)STATE.Init; }
  96. }
  97. public override bool IsIdle
  98. {
  99. get { return FsmState == (int)STATE.Idle; }
  100. }
  101. public bool IsBusy
  102. {
  103. get { return !IsInit && !IsError && !IsIdle; }
  104. }
  105. /// <summary>
  106. /// wafer尺寸
  107. /// </summary>
  108. public WaferSize WaferSize
  109. {
  110. get { return _lpDevice.WaferSize; }
  111. }
  112. public bool IsRobotIdle
  113. {
  114. get { return Singleton<RouteManager>.Instance.EFEM.RobotStatus == RState.End; }
  115. }
  116. private LoadPortHomeRoutine _home;
  117. private LoadPortMapRoutine _map;
  118. //private LoadPortCloseDoorRoutine _closeDoor;
  119. private LoadPortDockRoutine _dockRoutine;
  120. private LoadPortUnDockRoutine _undockRoutine;
  121. private LoadPortClampRoutine _clamp;
  122. private LoadPortReadCarrierIdRoutine _readCarrierId;
  123. private LoadPortWriteCarrierIdRoutine _writeCarrierId;
  124. private LoadPortReadTagDataRoutine _readTag;
  125. private LoadPortWriteTagDataRoutine _writeTag;
  126. private LoadPortUnclampRoutine _unclamp;
  127. //private LoadPortUndockRoutine _undock;
  128. private LoadPortLoadRoutine _load;
  129. private LoadPortUnloadRoutine _unload;
  130. private LoadPortCycleLoadUnloadRoutine _cycleLoadUnloadRoutine;
  131. //private bool _isInit;
  132. public LoadPortModule(ModuleName module, EfemBase efem) : base(SC.GetValue<int>("EFEM.LoadPort.SlotNumber"))
  133. {
  134. Name = module.ToString();
  135. Module = module.ToString();
  136. _efem = efem;
  137. InitFsmMap();
  138. _lpDevice = new Loadport(module,efem);
  139. OP.Subscribe($"{Module}.ReadCarrierId", (cmd, args) => { PostMsg(MSG.ReadCarrierId); return true; });
  140. OP.Subscribe($"{Module}.WriteCarrierID", (cmd, args) => { PostMsg(MSG.WriteCarrierID, args[0]); return true; });
  141. OP.Subscribe($"{Module}.ReadTagData", (cmd, args) => { PostMsg(MSG.ReadTagData); return true; });
  142. OP.Subscribe($"{Module}.WriteTagData", (cmd, args) => { PostMsg(MSG.WriteTagData, args[0]); return true; });
  143. OP.Subscribe($"{Module}.Load", (cmd, args) => { PostMsg(MSG.Load); return true; });
  144. OP.Subscribe($"{Module}.Unload", (cmd, args) => { PostMsg(MSG.Unload); return true; });
  145. OP.Subscribe($"{Module}.Clamp", (cmd, args) => { PostMsg(MSG.Clamp); return true; });
  146. OP.Subscribe($"{Module}.Unclamp", (cmd, args) => { PostMsg(MSG.Unclamp); return true; });
  147. OP.Subscribe($"{Module}.Dock", (cmd, args) => { PostMsg(MSG.Dock); return true; });
  148. OP.Subscribe($"{Module}.Undock", (cmd, args) => { PostMsg(MSG.Undock); return true; });
  149. OP.Subscribe($"{Module}.Map", (cmd, args) =>
  150. {
  151. if (!Singleton<RouteManager>.Instance.EFEM.IsHomed)
  152. {
  153. LOG.WriteLog(eEvent.WARN_EFEM_ROBOT, Module, $"Efem is not homed,cannot map");
  154. return true;
  155. }
  156. PostMsg(MSG.Map); return true;
  157. });
  158. OP.Subscribe($"{Module}.Home", (cmd, args) => { PostMsg(MSG.Home); return true; });
  159. OP.Subscribe($"{Module}.Abort", (cmd, args) => { PostMsg(MSG.Abort); return true; });
  160. OP.Subscribe($"{Module}.Online", (cmd, args) => { PostMsg(MSG.Online); return true; });
  161. OP.Subscribe($"{Name}.OpenDoor", (string cmd, object[] args) =>{return CheckToPostMessage((int)MSG.OpenDoor);});
  162. OP.Subscribe($"{Name}.CloseDoor", (string cmd, object[] args) =>{return CheckToPostMessage((int)MSG.CloseDoor);});
  163. OP.Subscribe($"{Module}.CycleLoadUnload", (string cmd, object[] args) => { return CheckToPostMessage((int)MSG.CycleLoadUnload,args); });
  164. DATA.Subscribe($"{Module}.Status", () => ((STATE)FsmState).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  165. DATA.Subscribe($"{Module}.FsmState", () => ((STATE)FsmState).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  166. DATA.Subscribe($"{Module}.FsmPrevState", () => ((STATE)FsmPreviousState).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  167. DATA.Subscribe($"{Module}.FsmLastMessage", GetFsmLastMessage, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  168. DATA.Subscribe($"{Module}.State", () => ((STATE)FsmState).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  169. DATA.Subscribe($"{Module}.IsError", ()=>IsError, SubscriptionAttribute.FLAG.SaveDB);
  170. DATA.Subscribe($"{Module}.IsIdle", () => IsIdle, SubscriptionAttribute.FLAG.SaveDB);
  171. DATA.Subscribe($"{Module}.IsBusy", () => IsBusy, SubscriptionAttribute.FLAG.SaveDB);
  172. InitRoutine();
  173. }
  174. private void InitRoutine()
  175. {
  176. _home = new LoadPortHomeRoutine(this);
  177. //_closeDoor = new LoadPortCloseDoorRoutine(this);
  178. _clamp = new LoadPortClampRoutine(this);
  179. //_dock = new LoadPortDockRoutine(this);
  180. _map = new LoadPortMapRoutine(this,_efem);
  181. //_openDoor = new LoadPortOpenDoorRoutine(this);
  182. _readCarrierId = new LoadPortReadCarrierIdRoutine(this);
  183. _writeCarrierId = new LoadPortWriteCarrierIdRoutine(this);
  184. _readTag = new LoadPortReadTagDataRoutine(this);
  185. _writeTag = new LoadPortWriteTagDataRoutine(this);
  186. _unclamp = new LoadPortUnclampRoutine(this);
  187. //_undock = new LoadPortUndockRoutine(this);
  188. //_MapDT = new LoadPortGetMapInfoRoutine(this);
  189. _load = new LoadPortLoadRoutine(this);
  190. _unload = new LoadPortUnloadRoutine(this);
  191. _dockRoutine = new LoadPortDockRoutine(this);
  192. _undockRoutine = new LoadPortUnDockRoutine(this);
  193. _cycleLoadUnloadRoutine=new LoadPortCycleLoadUnloadRoutine(this);
  194. }
  195. private string GetFsmLastMessage()
  196. {
  197. int msg = FsmLastMessage;
  198. if (msg >= (int)MSG.Home && msg <= (int)MSG.Error)
  199. return ((MSG)msg).ToString();
  200. if (msg == (int)FSM_MSG.TIMER)
  201. return "Timer";
  202. return msg.ToString();
  203. }
  204. private void InitFsmMap()
  205. {
  206. EnableFsm(50, STATE.Idle);
  207. //online
  208. AnyStateTransition(MSG.Online, fnOnline, FSM_STATE.SAME);
  209. //Error
  210. AnyStateTransition(MSG.Error, FsmOnError, STATE.Error);
  211. Transition(STATE.Error, MSG.Reset, FsmReset, STATE.Idle);
  212. Transition(STATE.Idle, MSG.Reset, FsmReset, STATE.Idle);
  213. AnyStateTransition(MSG.EnterIdle, FsmEnterIdle, STATE.Idle);
  214. EnterExitTransition<STATE, FSM_MSG>(STATE.Error, FsmEnterError, FSM_MSG.NONE, FsmExitError);
  215. //Init
  216. Transition(STATE.Init, MSG.Home, FsmStartHome, STATE.Homing);
  217. Transition(STATE.Error, MSG.Home, FsmStartHome, STATE.Homing);
  218. Transition(STATE.Idle, MSG.Home, FsmStartHome, STATE.Homing);
  219. Transition(STATE.Homing, FSM_MSG.TIMER, FsmMonitorHomeTask, STATE.Idle);
  220. Transition(STATE.Homing, MSG.Error, null, STATE.Init);
  221. Transition(STATE.Homing, MSG.Abort, FsmAbortTask, STATE.Init);
  222. //load
  223. Transition(STATE.Idle, MSG.Load, FsmStartLoad, STATE.Loading);
  224. Transition(STATE.Loading, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
  225. Transition(STATE.Loading, MSG.Abort, FsmAbortTask, STATE.Idle);
  226. //unload
  227. Transition(STATE.Idle, MSG.Unload, FsmStartUnload, STATE.Unloading);
  228. Transition(STATE.Unloading, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
  229. Transition(STATE.Unloading, MSG.Abort, FsmAbortTask, STATE.Idle);
  230. //read carrier id
  231. Transition(STATE.Idle, MSG.ReadCarrierId, FsmStartReadCarrierId, STATE.ReadingCarrierId);
  232. Transition(STATE.ReadingCarrierId, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
  233. Transition(STATE.ReadingCarrierId, MSG.Abort, FsmAbortTask, STATE.Idle);
  234. //write carrier id
  235. Transition(STATE.Idle, MSG.WriteCarrierID, FsmStartWriteCarrierId, STATE.WritingCarrierId);
  236. Transition(STATE.WritingCarrierId, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
  237. Transition(STATE.WritingCarrierId, MSG.Abort, FsmAbortTask, STATE.Idle);
  238. //clamp
  239. Transition(STATE.Idle, MSG.Clamp, FsmStartClamp, STATE.Clamping);
  240. Transition(STATE.Clamping, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
  241. Transition(STATE.Clamping, MSG.Abort, FsmAbortTask, STATE.Idle);
  242. //unclamp
  243. Transition(STATE.Idle, MSG.Unclamp, FsmStartUnclamp, STATE.Unclamping);
  244. Transition(STATE.Unclamping, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
  245. Transition(STATE.Unclamping, MSG.Abort, FsmAbortTask, STATE.Idle);
  246. //dock
  247. Transition(STATE.Idle, MSG.Dock, FsmStartDock, STATE.Docking);
  248. Transition(STATE.Docking, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
  249. Transition(STATE.Docking, MSG.Abort, FsmAbortTask, STATE.Idle);
  250. //undock
  251. Transition(STATE.Idle, MSG.Undock, FsmStartUndock, STATE.Undocking);
  252. Transition(STATE.Undocking, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
  253. Transition(STATE.Undocking, MSG.Abort, FsmAbortTask, STATE.Idle);
  254. //Map
  255. Transition(STATE.Idle, MSG.Map, FsmStartMap, STATE.Mapping);
  256. Transition(STATE.Mapping, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
  257. Transition(STATE.Mapping, MSG.Abort, FsmAbortTask, STATE.Idle);
  258. //read tag data
  259. Transition(STATE.Idle, MSG.ReadTagData, FsmStartReadTagData, STATE.ReadingTagData);
  260. Transition(STATE.ReadingTagData, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
  261. Transition(STATE.ReadingTagData, MSG.Abort, FsmAbortTask, STATE.Idle);
  262. //write tag data
  263. Transition(STATE.Idle, MSG.WriteTagData, FsmStartWriteTagData, STATE.WritingTagData);
  264. Transition(STATE.WritingTagData, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
  265. Transition(STATE.WritingTagData, MSG.Abort, FsmAbortTask, STATE.Idle);
  266. //Cycle Load
  267. Transition(STATE.Idle, MSG.CycleLoadUnload, CycleLoadUnload, STATE.CycleLoadUnloading);
  268. Transition(STATE.CycleLoadUnloading, FSM_MSG.TIMER, CycleLoadUnloadMonitor, STATE.Idle);
  269. Transition(STATE.CycleLoadUnloading, MSG.Abort, CycleLoadUnloadAbort, STATE.Idle);
  270. EnumLoop<STATE>.ForEach((item) =>
  271. {
  272. MapState((int)item, item.ToString());
  273. });
  274. EnumLoop<MSG>.ForEach((item) =>
  275. {
  276. MapMessage((int)item, item.ToString());
  277. });
  278. }
  279. private bool FsmAbortTask(object[] param)
  280. {
  281. AbortRoutine();
  282. LPDevice.Abort();
  283. return true;
  284. }
  285. private bool FsmEnterIdle(object[] param)
  286. {
  287. return true;
  288. }
  289. private bool FsmReset(object[] param)
  290. {
  291. //if (!_isInit)
  292. //{
  293. // PostMsg(MSG.ToInit);
  294. // return false;
  295. //}
  296. return true;
  297. }
  298. private bool FsmOnError(object[] param)
  299. {
  300. if (FsmState == (int)STATE.Error)
  301. {
  302. return false;
  303. }
  304. AbortRoutine();
  305. if (FsmState == (int)STATE.Init)
  306. return false;
  307. return true;
  308. }
  309. private bool FsmExitError(object[] param)
  310. {
  311. return true;
  312. }
  313. private bool FsmEnterError(object[] param)
  314. {
  315. if (OnEnterError != null)
  316. OnEnterError(Module);
  317. return true;
  318. }
  319. private bool FsmMonitorTask(object[] param)
  320. {
  321. RState ret = MonitorRoutine();
  322. if (ret == RState.Failed || ret == RState.Timeout)
  323. {
  324. PostMsg(MSG.Error);
  325. return false;
  326. }
  327. return ret == RState.End;
  328. }
  329. private bool FsmStartHome(object[] param)
  330. {
  331. RState ret = StartRoutine(_home);
  332. if (ret == RState.Failed || ret == RState.End)
  333. return false;
  334. //_isInit = false;
  335. return ret == RState.Running;
  336. }
  337. private bool FsmMonitorHomeTask(object[] param)
  338. {
  339. RState ret = MonitorRoutine();
  340. if (ret == RState.Failed||ret==RState.Timeout)
  341. {
  342. LPDevice.OnError();
  343. PostMsg(MSG.Error);
  344. return false;
  345. }
  346. if (ret == RState.End)
  347. {
  348. //_isInit = true;
  349. return true;
  350. }
  351. return false;
  352. }
  353. private bool FsmStartUndock(object[] param)
  354. {
  355. RState ret = StartRoutine(_undockRoutine);
  356. if (ret == RState.Failed || ret == RState.End)
  357. return false;
  358. return ret == RState.Running;
  359. }
  360. private bool FsmStartDock(object[] param)
  361. {
  362. RState ret = StartRoutine(_dockRoutine);
  363. if (ret == RState.Failed || ret == RState.End)
  364. return false;
  365. return ret == RState.Running;
  366. }
  367. private bool FsmStartMap(object[] param)
  368. {
  369. RState ret = StartRoutine(_map);
  370. if (ret == RState.Failed || ret == RState.End)
  371. return false;
  372. return ret == RState.Running;
  373. }
  374. private bool FsmStartUnclamp(object[] param)
  375. {
  376. RState ret = StartRoutine(_unclamp);
  377. if (ret == RState.Failed || ret == RState.End)
  378. return false;
  379. return ret == RState.Running;
  380. }
  381. private bool FsmStartClamp(object[] param)
  382. {
  383. _clamp.IsUnloadClamp = false;
  384. RState ret = StartRoutine(_clamp);
  385. if (ret == RState.Failed || ret == RState.End)
  386. return false;
  387. return ret == RState.Running;
  388. }
  389. private bool FsmStartReadCarrierId(object[] param)
  390. {
  391. RState ret = StartRoutine(_readCarrierId);
  392. if (ret == RState.Failed || ret == RState.End)
  393. return false;
  394. return ret == RState.Running;
  395. }
  396. private bool FsmStartWriteCarrierId(object[] param)
  397. {
  398. _writeCarrierId.CarrierIdSetPoint = (string) param[0];
  399. RState ret = StartRoutine(_writeCarrierId);
  400. if (ret == RState.Failed || ret == RState.End)
  401. return false;
  402. return ret == RState.Running;
  403. }
  404. private bool FsmStartReadTagData(object[] param)
  405. {
  406. RState ret = StartRoutine(_readTag);
  407. if (ret == RState.Failed || ret == RState.End)
  408. return false;
  409. return ret == RState.Running;
  410. }
  411. private bool FsmStartWriteTagData(object[] param)
  412. {
  413. _writeTag.TagDataSetPoint = (string)param[0];
  414. RState ret = StartRoutine(_writeTag);
  415. if (ret == RState.Failed || ret == RState.End)
  416. return false;
  417. return ret == RState.Running;
  418. }
  419. private bool FsmStartUnload(object[] param)
  420. {
  421. RState ret = StartRoutine(_unload);
  422. if (ret == RState.Failed || ret == RState.End)
  423. return false;
  424. if(ret == RState.Running)
  425. {
  426. _lpDevice.UnloadStart();
  427. }
  428. return ret == RState.Running;
  429. }
  430. private bool FsmStartLoad(object[] param)
  431. {
  432. RState ret = StartRoutine(_load);
  433. if (ret == RState.Failed || ret == RState.End)
  434. return false;
  435. if (ret == RState.Running)
  436. {
  437. _lpDevice.LoadStart();
  438. }
  439. return ret == RState.Running;
  440. }
  441. private bool CycleLoadUnload(object[] param)
  442. {
  443. return _cycleLoadUnloadRoutine.Start(param) == RState.Running;
  444. }
  445. private bool CycleLoadUnloadMonitor(object[] param)
  446. {
  447. RState state = _cycleLoadUnloadRoutine.Monitor();
  448. if(state==RState.Failed||state==RState.Timeout)
  449. {
  450. PostMsg(MSG.Error);
  451. return false;
  452. }
  453. return state == RState.End;
  454. }
  455. private bool CycleLoadUnloadAbort(object[] param)
  456. {
  457. _cycleLoadUnloadRoutine.Abort();
  458. return true;
  459. }
  460. private bool fnOnline(object[] param)
  461. {
  462. bool online = (bool)param[0];
  463. //_efem.SetOnline(ModuleHelper.Converter(Module), online);
  464. return true;
  465. }
  466. public bool IsPrepareTransferReady(ModuleName module, EnumTransferType type, int slot)
  467. {
  468. if (type == EnumTransferType.Pick)
  469. {
  470. //需要补充:判断LP 放好了,而且已经map过。
  471. //return _efem[module].HasCassette && _efem[module].IsMapped && _efem[module].IsThicknessValid;
  472. }
  473. else if (type == EnumTransferType.Place)
  474. {
  475. //需要补充:判断LP 放好了,而且已经map过。
  476. //return _efem[module].HasCassette && _efem[module].IsMapped && _efem[module].IsThicknessValid;
  477. }
  478. return false;
  479. }
  480. internal bool CheckReadyRunNewJob(ModuleName module)
  481. {
  482. return _efem[module].HasCassette && _efem[module].IsMapped && _efem[module].IsThicknessValid;
  483. }
  484. internal bool CheckReadyTransfer(ModuleName module)
  485. {
  486. return _efem[module].HasCassette && _efem[module].IsMapped && _efem[module].IsThicknessValid;
  487. }
  488. public override bool Home(out string reason)
  489. {
  490. throw new NotImplementedException();
  491. }
  492. public override void NoteJobStart()
  493. {
  494. throw new NotImplementedException();
  495. }
  496. public override void NoteJobComplete()
  497. {
  498. throw new NotImplementedException();
  499. }
  500. public override bool PrepareTransfer(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType, out string reason)
  501. {
  502. throw new NotImplementedException();
  503. }
  504. public override bool TransferHandoff(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType, out string reason)
  505. {
  506. throw new NotImplementedException();
  507. }
  508. public override bool PostTransfer(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType, out string reason)
  509. {
  510. throw new NotImplementedException();
  511. }
  512. public override bool CheckReadyForTransfer(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType,
  513. out string reason)
  514. {
  515. throw new NotImplementedException();
  516. }
  517. public override void NoteTransferStart(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType)
  518. {
  519. throw new NotImplementedException();
  520. }
  521. public override void NoteTransferStop(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType)
  522. {
  523. throw new NotImplementedException();
  524. }
  525. public override bool CheckReadyForMap(ModuleName robot, Hand blade, out string reason)
  526. {
  527. throw new NotImplementedException();
  528. }
  529. }
  530. }