PufVacuum.cs 21 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.RT.OperationCenter;
  5. using Aitex.Core.RT.SCCore;
  6. using MECF.Framework.Common.Beckhoff.ModuleIO;
  7. using MECF.Framework.Common.Equipment;
  8. using MECF.Framework.Common.TwinCat;
  9. using CyberX8_Core;
  10. using System;
  11. using System.Collections.Generic;
  12. using Aitex.Core.Util;
  13. using MECF.Framework.Common.IOCore;
  14. namespace CyberX8_RT.Devices.PUF
  15. {
  16. public class PufVacuum : BaseDevice, IDevice
  17. {
  18. #region 常量
  19. private const string CHUCK = "Chuck";
  20. private const string SIDEA_CHUCK_OUT = "SideAChuckOut";
  21. private const string SIDEA_CHUCK_IN = "SideAChuckIn";
  22. private const string SIDEB_CHUCK_OUT = "SideBChuckOut";
  23. private const string SIDEB_CHUCK_IN = "SideBChuckIn";
  24. private const string CHUCKA_VAC = "ChuckAVac";
  25. private const string CHUCKB_VAC = "ChuckBVac";
  26. private const string CHUCKA_RELEASE = "ChuckARelease";
  27. private const string CHUCKB_RELEASE = "ChuckBRelease";
  28. private const string CHUCKA_VACUUM_STATUS = "ChuckAVacuumStatus";
  29. private const string CHUCKB_VACUUM_STATUS = "ChuckBVacuumStaus";
  30. private const string CHUCKA = "ChuckA";
  31. private const string CHUCKB = "ChuckB";
  32. private const string VACUUM_LEAK = "VacuumLeak";
  33. #endregion
  34. #region 内部变量
  35. private bool _chuck = false;
  36. private bool _sideAChuckOut = false;
  37. private bool _sideAChuckIn = false;
  38. private bool _sideBChuckOut=false;
  39. private bool _sideBChuckIn = false;
  40. private bool _chuckAWaferPresent;
  41. private bool _chuckBWaferPresent;
  42. private bool _chuckAReleased;
  43. private bool _chuckBReleased;
  44. private double _chuckAValue;
  45. private double _chuckBValue;
  46. private double _chuckVacuumCloseLimit;
  47. private double _chuckVacuumOpenLimit;
  48. private double _chuckVacuumWaferAbsent;
  49. private double _chuckVacuumWaferPresent;
  50. private string _chuckAVacuumStatus = "";
  51. private string _chuckBVacuumStatus = "";
  52. private DateTime _leakADateTime = DateTime.Now;
  53. private R_TRIG _leakATrig = new R_TRIG();
  54. private DateTime _leakBDateTime = DateTime.Now;
  55. private R_TRIG _leakBTrig = new R_TRIG();
  56. /// <summary>
  57. /// 变量是否初始化字典
  58. /// </summary>
  59. private Dictionary<string, bool> _variableInitializeDic = new Dictionary<string, bool>();
  60. /// <summary>
  61. /// 首次加载数据成功
  62. /// </summary>
  63. private bool _firstLoad = false;
  64. #endregion
  65. #region 属性
  66. /// <summary>
  67. /// ChuckA Wafer Present状态
  68. /// </summary>
  69. public bool ChuckAWaferPresent
  70. {
  71. get { return _chuckAWaferPresent; }
  72. set { _chuckAWaferPresent = value; }
  73. }
  74. /// <summary>
  75. /// ChuckB Wafer Present
  76. /// </summary>
  77. public bool ChuckBWaferPresent
  78. {
  79. get { return _chuckBWaferPresent; }
  80. set { _chuckBWaferPresent = value; }
  81. }
  82. /// <summary>
  83. /// Side A Vacuum状态
  84. /// </summary>
  85. public string ChuckAVacuumStatus
  86. {
  87. get { return _chuckAVacuumStatus; }
  88. }
  89. /// <summary>
  90. /// Side B Vacuum状态
  91. /// </summary>
  92. public string ChuckBVacuumStatus
  93. {
  94. get { return _chuckBVacuumStatus; }
  95. }
  96. /// <summary>
  97. /// Side B 是否关闭真空
  98. /// </summary>
  99. public bool ISChuckBReleased
  100. {
  101. get { return _chuckBReleased; }
  102. }
  103. /// <summary>
  104. /// Side A是否关闭真空
  105. /// </summary>
  106. public bool IsChuckAReleased
  107. {
  108. get { return _chuckAReleased; }
  109. }
  110. /// <summary>
  111. /// Chuck
  112. /// </summary>
  113. public bool Chuck
  114. {
  115. get { return _chuck; }
  116. }
  117. public bool SideAChuckOut
  118. {
  119. get { return _sideAChuckOut; }
  120. }
  121. public bool SideAChuckIn
  122. {
  123. get { return _sideAChuckIn; }
  124. }
  125. public bool SideBChuckOut
  126. {
  127. get { return _sideBChuckOut; }
  128. }
  129. public bool SideBChuckIn
  130. {
  131. get { return _sideBChuckIn;}
  132. }
  133. /// <summary>
  134. /// 所有io变量是否初始化
  135. /// </summary>
  136. public bool IOInitialized { get { return AllIoVariableInitialized(); } }
  137. #endregion
  138. #region 事件
  139. public event EventHandler<string> OnVacuumLeak;
  140. public event EventHandler<string> OnVacuumResume;
  141. #endregion
  142. /// <summary>
  143. /// 构造函数
  144. /// </summary>
  145. /// <param name="moduleName"></param>
  146. public PufVacuum(string moduleName):base(moduleName,"Vacuum","Vacuum","Vacuum")
  147. {
  148. LoadConfigParameter();
  149. }
  150. /// <summary>
  151. /// 加载配置参数
  152. /// </summary>
  153. private void LoadConfigParameter()
  154. {
  155. _chuckVacuumCloseLimit = SC.GetValue<double>($"{Module}.ChuckVacuumCloseLimit");
  156. _chuckVacuumOpenLimit = SC.GetValue<double>($"{Module}.ChuckVacuumOpenLimit");
  157. _chuckVacuumWaferAbsent = SC.GetValue<double>($"{Module}.ChuckVacuumWaferAbsent");
  158. _chuckVacuumWaferPresent = SC.GetValue<double>($"{Module}.ChuckVacuumWaferPresent");
  159. }
  160. /// <summary>
  161. /// 初始化
  162. /// </summary>
  163. /// <returns></returns>
  164. public bool Initialize()
  165. {
  166. SubscribeData();
  167. InitializeOperation();
  168. SubscribeValueAction();
  169. return true;
  170. }
  171. /// <summary>
  172. /// 初始化操作
  173. /// </summary>
  174. private void InitializeOperation()
  175. {
  176. OP.Subscribe($"{Module}.{PufMotionVaccumOpertaion.VacuumAOn}", VaccumAOnOperation);
  177. OP.Subscribe($"{Module}.{PufMotionVaccumOpertaion.VacuumBOn}", VaccumBOnOperation);
  178. OP.Subscribe($"{Module}.ChuckOn", (cmd,args) => { return ChuckOn(); });
  179. OP.Subscribe($"{Module}.ChuckOff", (cmd, args) => { return ChuckOff(); });
  180. }
  181. /// <summary>
  182. /// 订阅变量数值发生变化
  183. /// </summary>
  184. private void SubscribeValueAction()
  185. {
  186. BeckhoffIoSubscribeUpdateVariable(CHUCKA_VAC);
  187. BeckhoffIoSubscribeUpdateVariable(CHUCKB_VAC);
  188. BeckhoffIoSubscribeUpdateVariable(CHUCKA_RELEASE);
  189. BeckhoffIoSubscribeUpdateVariable(CHUCKB_RELEASE);
  190. BeckhoffIoSubscribeUpdateVariable(CHUCK);
  191. BeckhoffIoSubscribeUpdateVariable(SIDEA_CHUCK_IN);
  192. BeckhoffIoSubscribeUpdateVariable(SIDEA_CHUCK_OUT);
  193. BeckhoffIoSubscribeUpdateVariable(SIDEB_CHUCK_IN);
  194. BeckhoffIoSubscribeUpdateVariable(SIDEB_CHUCK_OUT);
  195. }
  196. /// <summary>
  197. /// 订阅IO变量
  198. /// </summary>
  199. /// <param name="variable"></param>
  200. private void BeckhoffIoSubscribeUpdateVariable(string variable)
  201. {
  202. _variableInitializeDic[variable] = false;
  203. IOModuleManager.Instance.SubscribeModuleVariable($"{Module}", variable, UpdateVariableValue);
  204. }
  205. /// <summary>
  206. /// 是否所有IO变量初始化完成
  207. /// </summary>
  208. /// <returns></returns>
  209. private bool AllIoVariableInitialized()
  210. {
  211. foreach (string item in _variableInitializeDic.Keys)
  212. {
  213. if (!_variableInitializeDic[item])
  214. {
  215. LOG.WriteLog(eEvent.ERR_DRYER, Module, $"{item} is not initialized");
  216. return false;
  217. }
  218. }
  219. return true;
  220. }
  221. /// <summary>
  222. /// 订阅数据
  223. /// </summary>
  224. private void SubscribeData()
  225. {
  226. DATA.Subscribe($"{Module}.{CHUCK}", () => _chuck, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  227. DATA.Subscribe($"{Module}.{SIDEA_CHUCK_IN}", () => _sideAChuckIn, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  228. DATA.Subscribe($"{Module}.{SIDEA_CHUCK_OUT}", () => _sideAChuckOut, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  229. DATA.Subscribe($"{Module}.{SIDEB_CHUCK_IN}", () => _sideBChuckIn, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  230. DATA.Subscribe($"{Module}.{SIDEB_CHUCK_OUT}", () => _sideBChuckOut, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  231. DATA.Subscribe($"{Module}.{CHUCKA_RELEASE}", () => _chuckAReleased,SubscriptionAttribute.FLAG.IgnoreSaveDB);
  232. DATA.Subscribe($"{Module}.{CHUCKB_RELEASE}", () => _chuckBReleased, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  233. DATA.Subscribe($"{Module}.{CHUCKA_VAC}", () => _chuckAValue, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  234. DATA.Subscribe($"{Module}.{CHUCKB_VAC}", () => _chuckBValue, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  235. DATA.Subscribe($"{Module}.{CHUCKA_VACUUM_STATUS}", () => _chuckAVacuumStatus, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  236. DATA.Subscribe($"{Module}.{CHUCKB_VACUUM_STATUS}", () => _chuckBVacuumStatus, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  237. }
  238. /// 更新变量数值
  239. /// </summary>
  240. /// <param name="variable"></param>
  241. /// <param name="value"></param>
  242. private void UpdateVariableValue(string variable, object value)
  243. {
  244. if(!_firstLoad)
  245. {
  246. _firstLoad = true;
  247. VacuumAOn();
  248. VacuumBOn();
  249. }
  250. if (_variableInitializeDic.ContainsKey(variable) && !_variableInitializeDic[variable])
  251. {
  252. _variableInitializeDic[variable] = true;
  253. }
  254. if (variable == $"{CHUCKA_RELEASE}")
  255. {
  256. _chuckAReleased = (bool)value;
  257. var item = JudgeWaferPresent(_chuckAValue, _chuckAReleased, CHUCKA);
  258. _chuckAWaferPresent = item.Item1;
  259. _chuckAVacuumStatus = item.Item2;
  260. _leakATrig.CLK = item.Item2 == VACUUM_LEAK;
  261. if (_leakATrig.Q)
  262. {
  263. _leakADateTime = DateTime.Now;
  264. }
  265. }
  266. else if(variable==$"{CHUCKB_RELEASE}")
  267. {
  268. _chuckBReleased=(bool)value;
  269. var item = JudgeWaferPresent(_chuckBValue, _chuckBReleased, CHUCKB);
  270. _leakBTrig.CLK = item.Item2 == VACUUM_LEAK;
  271. if (_leakBTrig.Q)
  272. {
  273. _leakBDateTime = DateTime.Now;
  274. }
  275. _chuckBWaferPresent = item.Item1;
  276. _chuckBVacuumStatus = item.Item2;
  277. }
  278. else if(variable==$"{CHUCKA_VAC}")
  279. {
  280. _chuckAValue = (double)value;
  281. var item = JudgeWaferPresent(_chuckAValue, _chuckAReleased, CHUCKA);
  282. _leakATrig.CLK = item.Item2 == VACUUM_LEAK;
  283. if (_leakATrig.Q)
  284. {
  285. _leakADateTime = DateTime.Now;
  286. }
  287. _chuckAWaferPresent =item.Item1;
  288. _chuckAVacuumStatus=item.Item2;
  289. }
  290. else if(variable==$"{CHUCKB_VAC}")
  291. {
  292. _chuckBValue=(double)value;
  293. var item = JudgeWaferPresent(_chuckBValue, _chuckBReleased, CHUCKB);
  294. _leakBTrig.CLK = item.Item2 == VACUUM_LEAK;
  295. if (_leakBTrig.Q)
  296. {
  297. _leakBDateTime = DateTime.Now;
  298. }
  299. _chuckBWaferPresent = item.Item1;
  300. _chuckBVacuumStatus = item.Item2;
  301. }
  302. else
  303. {
  304. UpdateChuck(variable, (bool)value);
  305. }
  306. }
  307. /// <summary>
  308. /// 更新 chuck
  309. /// </summary>
  310. /// <param name="variable"></param>
  311. /// <param name="value"></param>
  312. private void UpdateChuck(string variable,bool value)
  313. {
  314. switch (variable)
  315. {
  316. case CHUCK:
  317. _chuck = value;
  318. LOG.WriteLog(eEvent.INFO_PUF, Module, $"Chuck value is {value}");
  319. break;
  320. case SIDEA_CHUCK_IN:
  321. _sideAChuckIn = value;
  322. LOG.WriteLog(eEvent.INFO_PUF, Module, $"SideA Chuck In value is {value}");
  323. break;
  324. case SIDEA_CHUCK_OUT:
  325. _sideAChuckOut = value;
  326. LOG.WriteLog(eEvent.INFO_PUF, Module, $"SideA Chuck Out value is {value}");
  327. break;
  328. case SIDEB_CHUCK_IN:
  329. _sideBChuckIn = value;
  330. LOG.WriteLog(eEvent.INFO_PUF, Module, $"SideB Chuck In value is {value}");
  331. break;
  332. case SIDEB_CHUCK_OUT:
  333. _sideBChuckOut = value;
  334. LOG.WriteLog(eEvent.INFO_PUF, Module, $"SideB Chuck Out value is {value}");
  335. break;
  336. }
  337. }
  338. /// <summary>
  339. /// 检验ChuckOut
  340. /// </summary>
  341. /// <returns></returns>
  342. public bool CheckChuckOut()
  343. {
  344. if (!_chuck)
  345. {
  346. return false;
  347. }
  348. if (!_sideAChuckOut)
  349. {
  350. return false;
  351. }
  352. if (!_sideBChuckOut)
  353. {
  354. return false;
  355. }
  356. if (_sideAChuckIn)
  357. {
  358. return false;
  359. }
  360. if (_sideBChuckIn)
  361. {
  362. return false;
  363. }
  364. return true;
  365. }
  366. /// <summary>
  367. /// 检验ChuckIn
  368. /// </summary>
  369. /// <returns></returns>
  370. public bool CheckChuckIn()
  371. {
  372. if (_chuck)
  373. {
  374. return false;
  375. }
  376. if (_sideAChuckOut)
  377. {
  378. return false;
  379. }
  380. if (_sideBChuckOut)
  381. {
  382. return false;
  383. }
  384. if (!_sideAChuckIn)
  385. {
  386. return false;
  387. }
  388. if (!_sideBChuckIn)
  389. {
  390. return false;
  391. }
  392. return true;
  393. }
  394. /// <summary>
  395. /// 判定Wafer Present
  396. /// </summary>
  397. /// <param name="chuckValue"></param>
  398. /// <param name="chuckRelease"></param>
  399. /// <returns></returns>
  400. private (bool,string) JudgeWaferPresent(double chuckValue,bool chuckRelease,string chuck)
  401. {
  402. LoadConfigParameter();
  403. if (!chuckRelease)
  404. {
  405. if(chuckValue < _chuckVacuumWaferPresent)
  406. {
  407. ResumeVacuum();
  408. return (true,"WaferPresent");
  409. }
  410. else if( chuckValue > _chuckVacuumWaferAbsent)
  411. {
  412. ResumeVacuum();
  413. return (false,"WaferAbsent");
  414. }
  415. else
  416. {
  417. return (false,"InvalidData");
  418. }
  419. }
  420. else
  421. {
  422. if(chuckValue<=_chuckVacuumCloseLimit)
  423. {
  424. return (false,"VacuumLeak");
  425. }
  426. else if(chuckValue<=_chuckVacuumOpenLimit)
  427. {
  428. ResumeVacuum();
  429. return (false, "VacuumOff");
  430. }
  431. else
  432. {
  433. ResumeVacuum();
  434. return (false, "");
  435. }
  436. }
  437. }
  438. /// <summary>
  439. /// 故障恢复
  440. /// </summary>
  441. private void ResumeVacuum()
  442. {
  443. if (OnVacuumResume != null)
  444. {
  445. OnVacuumResume(this, Module);
  446. }
  447. }
  448. /// <summary>
  449. /// VacuumAOn操作
  450. /// </summary>
  451. /// <param name="cmd"></param>
  452. /// <param name="args"></param>
  453. /// <returns></returns>
  454. private bool VaccumAOnOperation(string cmd, object[] args)
  455. {
  456. string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{CHUCKA_RELEASE}");
  457. if(!string.IsNullOrEmpty(ioName))
  458. {
  459. IOModuleManager.Instance.WriteIoValue(ioName, args[1]);
  460. }
  461. return true;
  462. }
  463. /// <summary>
  464. /// VacuumBOn操作
  465. /// </summary>
  466. /// <param name="cmd"></param>
  467. /// <param name="args"></param>
  468. /// <returns></returns>
  469. private bool VaccumBOnOperation(string cmd, object[] args)
  470. {
  471. string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{CHUCKB_RELEASE}");
  472. if (!string.IsNullOrEmpty(ioName))
  473. {
  474. return IOModuleManager.Instance.WriteIoValue(ioName, args[1]);
  475. }
  476. return true;
  477. }
  478. /// <summary>
  479. /// Chuck On
  480. /// </summary>
  481. /// <returns></returns>
  482. public bool ChuckOn()
  483. {
  484. string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{CHUCK}");
  485. if (!string.IsNullOrEmpty(ioName))
  486. {
  487. return IOModuleManager.Instance.WriteIoValue(ioName, true);
  488. }
  489. return false;
  490. }
  491. /// <summary>
  492. /// Chuck Off
  493. /// </summary>
  494. /// <returns></returns>
  495. public bool ChuckOff()
  496. {
  497. string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{CHUCK}");
  498. if (!string.IsNullOrEmpty(ioName))
  499. {
  500. return IOModuleManager.Instance.WriteIoValue(ioName, false);
  501. }
  502. return false;
  503. }
  504. /// <summary>
  505. /// VacuumA关闭
  506. /// </summary>
  507. public bool VacuumAOff()
  508. {
  509. string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{CHUCKA_RELEASE}");
  510. if (!string.IsNullOrEmpty(ioName))
  511. {
  512. return IOModuleManager.Instance.WriteIoValue(ioName, true);
  513. }
  514. return false;
  515. }
  516. /// <summary>
  517. /// VacuumB关闭
  518. /// </summary>
  519. public bool VacuumBOff()
  520. {
  521. string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{CHUCKB_RELEASE}");
  522. if (!string.IsNullOrEmpty(ioName))
  523. {
  524. return IOModuleManager.Instance.WriteIoValue(ioName, true);
  525. }
  526. return false;
  527. }
  528. /// <summary>
  529. /// VacuumA打开
  530. /// </summary>
  531. public bool VacuumAOn()
  532. {
  533. string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{CHUCKA_RELEASE}");
  534. if (!string.IsNullOrEmpty(ioName))
  535. {
  536. return IOModuleManager.Instance.WriteIoValue(ioName, false);
  537. }
  538. return false;
  539. }
  540. /// <summary>
  541. /// VacuumB打开
  542. /// </summary>
  543. public bool VacuumBOn()
  544. {
  545. string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{CHUCKB_RELEASE}");
  546. if (!string.IsNullOrEmpty(ioName))
  547. {
  548. return IOModuleManager.Instance.WriteIoValue(ioName, false);
  549. }
  550. return false;
  551. }
  552. /// <summary>
  553. /// 定时器
  554. /// </summary>
  555. public void OnTimer()
  556. {
  557. if (_leakATrig.CLK && DateTime.Now.Subtract(_leakADateTime).TotalSeconds >= 2&&_chuckAVacuumStatus!=VACUUM_LEAK)
  558. {
  559. _chuckAVacuumStatus = VACUUM_LEAK;
  560. LOG.WriteLog(eEvent.ERR_PUF, Module, $"ChuckA vacuum leak");
  561. if (OnVacuumLeak != null)
  562. {
  563. OnVacuumLeak(this, Module);
  564. }
  565. }
  566. if (_leakBTrig.CLK && DateTime.Now.Subtract(_leakBDateTime).TotalSeconds >= 2 && _chuckBVacuumStatus != VACUUM_LEAK)
  567. {
  568. _chuckBVacuumStatus = VACUUM_LEAK;
  569. LOG.WriteLog(eEvent.ERR_PUF, Module, $"ChuckB vacuum leak");
  570. if (OnVacuumLeak != null)
  571. {
  572. OnVacuumLeak(this, Module);
  573. }
  574. }
  575. }
  576. /// <summary>
  577. /// 监控
  578. /// </summary>
  579. public void Monitor()
  580. {
  581. }
  582. /// <summary>
  583. /// 重置
  584. /// </summary>
  585. public void Reset()
  586. {
  587. }
  588. /// <summary>
  589. /// 中止
  590. /// </summary>
  591. public void Terminate()
  592. {
  593. }
  594. }
  595. }