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- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using MECF.Framework.Common.Persistent.Reservoirs;
- using MECF.Framework.Common.RecipeCenter;
- using MECF.Framework.Common.Routine;
- using CyberX8_Core;
- using CyberX8_RT.Devices.Facilities;
- using CyberX8_RT.Devices.Metal;
- using CyberX8_RT.Devices.PowerSupplier;
- using CyberX8_RT.Devices.Reservoir;
- using CyberX8_RT.Devices.Temperature;
- using System;
- using System.Collections.Generic;
- namespace CyberX8_RT.Modules.Reservoir
- {
- public class StandardHotReservoirInitializeRoutine : RoutineBase, IRoutine
- {
- private enum InitializeStep
- {
- AutoDiReplen,
- CellPump,
- WaitCellPump,
- CheckHedFlow,
- ManualCellByPass,
- AutoCellManual,
- AutoEnableCMM,
- AutoEnableCMMWait,
- AutoCMMFlowDelay,
- AutoCMMFlowCheck,
- AutoPHDetect,
- AutoCellAutoFlow,
- AutoCellAutoFlowDelay,
- AutoCellAutoFlowCheck,
- AutoCellAutoEnableHED,
- AutoCellAutoEnableHEDDelay,
- AutoCellAutoEnableHEDCheck,
- AutoCellAutoCheckPowerSupplier,
- AutoCellAutoLinmotReset,
- AutoCellAutoLinmotResetCheck,
- CellWSUnclamp,
- End
- }
- #region 常量
- private const string AUTO = "Auto";
- private const string MANUAL = "Manual";
- private const int ENABLE = 5;
- #endregion
- #region 内部变量
- List<StandardHotMetalDevice> _metalDevices = new List<StandardHotMetalDevice>();
- private double _hedFlowLowLimit;
- private StandardHotReservoirDevice _reservoirDevice;
- private ResRecipe _recipe;
- private CellPowerSupplier _cellPowerSupplier;
- private TemperatureController _temperatureController;
- private int _autoHedDelay = 0;
- /// <summary>
- /// CMM Check Flow延时
- /// </summary>
- private int _cmmFlowCheckDelay = 6;
- /// <summary>
- /// CMM Flow High Fault
- /// </summary>
- private double _cmmFlowHighFault;
- /// <summary>
- /// CMM Flow High Warning
- /// </summary>
- private double _cmmFlowHighWarning;
- /// <summary>
- /// CMM Flow High Warning
- /// </summary>
- private double _cmmFlowLowFault;
- /// <summary>
- /// CMM Flow High Warning
- /// </summary>
- private double _cmmFlowLowWarning;
- /// <summary>
- /// Reservoir Persistent
- /// </summary>
- private ReservoirsPersistentValue _persistentValue;
- #endregion
- /// <summary>
- /// 构造函数
- /// </summary>
- /// <param name="module"></param>
- public StandardHotReservoirInitializeRoutine(string module) : base(module)
- {
- }
- /// <summary>
- /// 中止
- /// </summary>
- public void Abort()
- {
- Runner.Stop("Manual Abort");
- }
- /// <summary>
- /// 监控
- /// </summary>
- /// <returns></returns>
- public RState Monitor()
- {
- //Cell Pump
- Runner.RunIf(InitializeStep.AutoDiReplen, _recipe.DIReplenEnable, CheckFacilitiesDiReplenStatus, _delay_1ms)
- .Run(InitializeStep.CellPump, CellsPumpOn, _delay_1ms)
- .WaitWithStopCondition(InitializeStep.WaitCellPump, CheckPumpOnEndStatus, CheckPumpOnStopStatus)
- .Run(InitializeStep.CheckHedFlow, CheckHedFlow, _delay_1ms)
- //Manual cell Bypass同时disable HED
- .RunIf(InitializeStep.ManualCellByPass, _reservoirDevice.OperationMode == MANUAL, CellsByPassEnableHed, _delay_1ms)
- //Auto 所有metal 处于Manual, cell Bypass,Enable HED,设置温度
- .RunIf(InitializeStep.AutoCellManual, CheckAutoAndAllMetalManual(), AutoCellManualByPassEnableHed, CheckCellManualByPassAndTemperature, _delay_2s)
- //Auto 同时recipe enable cmm,并检测CMM Flow
- .RunIf(InitializeStep.AutoEnableCMM, CheckAutoEnableCMM(), AutoEnableCMM, _delay_1ms)
- .WaitWithStopConditionIf(InitializeStep.AutoEnableCMMWait, CheckAutoEnableCMM(), () => { return _cellPowerSupplier.Status == RState.End; }
- , () => { return _cellPowerSupplier.Status == RState.Failed; }, _delay_5s)
- .DelayIf(InitializeStep.AutoCMMFlowDelay, CheckAutoEnableCMM(), _cmmFlowCheckDelay * 1000)
- .RunIf(InitializeStep.AutoCMMFlowCheck, CheckAutoEnableCMM(), CheckCMMTargetFlow, _delay_1ms)
- //Auto 启动PH检测
- .RunIf(InitializeStep.AutoPHDetect,_reservoirDevice.OperationMode==AUTO,StartAutoPHDetect,_delay_1ms)
- //Auto Cell Flow
- .Run(InitializeStep.AutoCellAutoFlow,AllMetalSwitchFlow,_delay_1ms)
- .Delay(InitializeStep.AutoCellAutoFlowDelay, 500)
- .Run(InitializeStep.AutoCellAutoFlowCheck, AllMetalCheckFlow,_delay_1ms)
- //Auto HED
- .Run(InitializeStep.AutoCellAutoEnableHED, AutoHedOn, _delay_1ms)
- .Delay(InitializeStep.AutoCellAutoEnableHEDDelay,_autoHedDelay)
- .Run(InitializeStep.AutoCellAutoEnableHEDCheck, AutoHedSuccess, _delay_1ms)
- //检验PowerSupplier通信
- .Run(InitializeStep.AutoCellAutoCheckPowerSupplier, AutoMetalsPowerSupplierCommuncationStatus, _delay_1ms)
- //Cell Linmot Reset
- .RunIf(InitializeStep.AutoCellAutoLinmotReset,_reservoirDevice.OperationMode==AUTO,AutoMetalResetLinmot,_delay_1ms)
- .WaitWithStopCondition(InitializeStep.AutoCellAutoLinmotResetCheck, CheckAutoMetalResetStatus, CheckAutoMetalResetStopStatus)
- //Cell Unclamp
- .Run(InitializeStep.CellWSUnclamp,MetalsWHUnclampOn,_delay_1ms)
- .End(InitializeStep.End, NullFun, _delay_1ms);
- return Runner.Status;
- }
- /// <summary>
- /// 检验总Di有没有开
- /// </summary>
- /// <returns></returns>
- private bool CheckFacilitiesDiReplenStatus()
- {
- SystemFacilities systemFacilities = DEVICE.GetDevice<SystemFacilities>("System.Facilities");
- if (systemFacilities != null)
- {
- bool result = systemFacilities.DIReplenEnable;
- if (!result)
- {
- LOG.WriteLog(eEvent.ERR_RESERVOIR, Module, "Facilities DiReplen is disable");
- }
- return result;
- }
- return false;
- }
- /// <summary>
- /// Metals Pump On
- /// </summary>
- /// <returns></returns>
- private bool CellsPumpOn()
- {
- for (int i = 0; i < _metalDevices.Count; i++)
- {
- StandardHotMetalDevice hotMetalDevice = _metalDevices[i];
- hotMetalDevice.PumpOnOperation("", null);
- }
- return true;
- }
- /// <summary>
- /// Cell ByPass
- /// </summary>
- /// <returns></returns>
- private bool CellsByPassEnableHed()
- {
- for (int i = 0; i < _metalDevices.Count; i++)
- {
- StandardHotMetalDevice hotMetalDevice = _metalDevices[i];
- hotMetalDevice.SwitchToBypass("", null);
- }
- _temperatureController.EnableOperation("", null);
- return true;
- }
- /// <summary>
- /// 检验metal Pump
- /// </summary>
- /// <returns></returns>
- private bool CheckPumpOnEndStatus()
- {
- int totalCount = 0;
- for (int i = 0; i < _metalDevices.Count; i++)
- {
- StandardHotMetalDevice hotMetalDevice = _metalDevices[i];
- if (hotMetalDevice.Status == RState.End)
- {
- totalCount++;
- }
- }
- if (totalCount >= _metalDevices.Count)
- {
- return true;
- }
- else
- {
- return false;
- }
- }
- /// <summary>
- /// 检验metal Pump停止状态
- /// </summary>
- /// <returns></returns>
- private bool CheckPumpOnStopStatus()
- {
- for (int i = 0; i < _metalDevices.Count; i++)
- {
- StandardHotMetalDevice hotMetalDevice = _metalDevices[i];
- if (hotMetalDevice.Status == RState.Failed)
- {
- PumpOffMetals();
- return true;
- }
- }
- return false;
- }
- /// <summary>
- /// Pump Off All Metals
- /// </summary>
- private void PumpOffMetals()
- {
- for (int i = 0; i < _metalDevices.Count; i++)
- {
- StandardHotMetalDevice hotMetalDevice = _metalDevices[i];
- hotMetalDevice.PumpOff();
- }
- }
- /// <summary>
- /// 检验HED Flow
- /// </summary>
- /// <returns></returns>
- private bool CheckHedFlow()
- {
- double hedFlow = _reservoirDevice.ReservoirData.HedFlow;
- bool result = hedFlow > _hedFlowLowLimit;
- if (!result)
- {
- LOG.WriteLog(eEvent.ERR_RESERVOIR, Module, $"HED Flow {hedFlow} is less than {_hedFlowLowLimit}");
- PumpOffMetals();
- }
- return result;
- }
- /// <summary>
- /// 检验所有Metal处于Manual
- /// </summary>
- /// <returns></returns>
- private bool CheckAutoAndAllMetalManual()
- {
- if (_reservoirDevice.OperationMode != AUTO)
- {
- return false;
- }
- for (int i = 0; i < _metalDevices.Count; i++)
- {
- StandardHotMetalDevice hotMetalDevice = _metalDevices[i];
- if (hotMetalDevice.OperationMode != MANUAL)
- {
- return false;
- }
- }
- return true;
- }
- /// <summary>
- /// Auto 同时Metal均为Manual,Bypass metal,enable HED,设置温度
- /// </summary>
- /// <returns></returns>
- private bool AutoCellManualByPassEnableHed()
- {
- for (int i = 0; i < _metalDevices.Count; i++)
- {
- StandardHotMetalDevice hotMetalDevice = _metalDevices[i];
- hotMetalDevice.SwitchToBypass("", null);
- }
- _temperatureController.EnableOperation("", null);
- _temperatureController.SetTargetTemperatureOperation("", new object[] { _recipe.TemperatureSetPoint });
- return true;
- }
- /// <summary>
- /// 检验cell By Pass和温度
- /// </summary>
- /// <returns></returns>
- private bool CheckCellManualByPassAndTemperature()
- {
- for (int i = 0; i<_metalDevices.Count; i++)
- {
- StandardHotMetalDevice hotMetalDevice = _metalDevices[i];
- if(hotMetalDevice.MetalDeviceData.Circulation)
- {
- return false;
- }
- }
-
- if(_temperatureController.TemperatureData.ControlOperationModel==0)
- {
- return false;
- }
- if(Math.Abs(_recipe.TemperatureSetPoint-_temperatureController.TemperatureData.TargetTemperature)>=0.1*_recipe.TemperatureSetPoint)
- {
- return false;
- }
- return true;
- }
- /// <summary>
- /// 检验 Auto ,同时Enable CMM
- /// </summary>
- /// <returns></returns>
- private bool CheckAutoEnableCMM()
- {
- if(_reservoirDevice.OperationMode!=AUTO)
- {
- return false;
- }
- return _recipe.CMMEnable;
- }
- /// <summary>
- /// 自动Enable CMM
- /// </summary>
- /// <returns></returns>
- private bool AutoEnableCMM()
- {
- return _cellPowerSupplier.SetCurrentAndOutput(_recipe.CMMCurrentSetPoint);
- }
- /// <summary>
- /// 检验目标Flow是否到达设定值
- /// </summary>
- /// <returns></returns>
- private bool CheckCMMTargetFlow()
- {
- double flow = _reservoirDevice.ReservoirData.Flow;
- if(flow < _cmmFlowLowFault)
- {
- LOG.WriteLog(eEvent.ERR_RESERVOIR, Module, $"{Module} CMM flow:{flow} is less than config item CMMFlowLowFault:{_cmmFlowLowFault}");
- if (_cellPowerSupplier.PowerSupplierData.Enabled) _cellPowerSupplier.DisableOperation("", null);
- return false;
- }
- else if (flow < _cmmFlowLowWarning)
- {
- LOG.WriteLog(eEvent.WARN_RESERVOIR, Module, $"{Module} CMM flow:{flow} is less than config item CMMFlowLowWarning:{_cmmFlowLowWarning}");
- }
- else if (flow > _cmmFlowHighFault)
- {
- LOG.WriteLog(eEvent.ERR_RESERVOIR, Module, $"{Module} CMM flow:{flow} is over config item CMMFlowHighFault:{_cmmFlowLowFault}");
- if(_cellPowerSupplier.PowerSupplierData.Enabled) _cellPowerSupplier.DisableOperation("", null);
- return false;
- }
- else if (flow > _cmmFlowHighWarning)
- {
- LOG.WriteLog(eEvent.WARN_RESERVOIR, Module, $"{Module} CMM flow:{flow} is over config item CMMFlowHighWarning:{_cmmFlowLowWarning}");
- }
- return true;
- }
- /// <summary>
- /// 启动自动检测
- /// </summary>
- /// <returns></returns>
- private bool StartAutoPHDetect()
- {
- return _reservoirDevice.StartDetectPHValve();
- }
- /// <summary>
- /// 检验所有Metal处于Manual
- /// </summary>
- /// <returns></returns>
- private bool CheckAutoAndAllMetalAuto()
- {
- if (_reservoirDevice.OperationMode != AUTO)
- {
- return false;
- }
- for (int i = 0; i < _metalDevices.Count; i++)
- {
- StandardHotMetalDevice hotMetalDevice = _metalDevices[i];
- if (hotMetalDevice.OperationMode != AUTO)
- {
- return false;
- }
- }
- return true;
- }
- /// <summary>
- /// 所有Metal切换Flow
- /// </summary>
- /// <returns></returns>
- private bool AllMetalSwitchFlow()
- {
- for (int i = 0; i < _metalDevices.Count; i++)
- {
- StandardHotMetalDevice hotMetalDevice = _metalDevices[i];
- if (hotMetalDevice != null && !hotMetalDevice.IsDisable&&hotMetalDevice.IsAuto)
- {
- bool result = hotMetalDevice.SwitchToFlow("", null);
- if (!result)
- {
- return false;
- }
- }
- }
- return true;
- }
- /// <summary>
- /// 检验所有Metal Flow检验
- /// </summary>
- /// <returns></returns>
- private bool AllMetalCheckFlow()
- {
- for (int i = 0; i < _metalDevices.Count; i++)
- {
- StandardHotMetalDevice hotMetalDevice = _metalDevices[i];
- if (hotMetalDevice != null && !hotMetalDevice.IsDisable && hotMetalDevice.IsAuto)
- {
- double cellFlow = hotMetalDevice.MetalDeviceData.CellFlow;
- if (cellFlow <= _recipe.CAFlowRateErrorLow)
- {
- LOG.WriteLog(eEvent.ERR_RESERVOIR, Module, $"cell {hotMetalDevice.Name} flow {cellFlow} is less than {_recipe.CAFlowRateErrorLow}");
- return false;
- }
- else if (cellFlow <= _recipe.CAFlowRateWarningLow)
- {
- LOG.WriteLog(eEvent.WARN_METAL, Module, $"cell {hotMetalDevice.Name} flow {cellFlow} is less than {_recipe.CAFlowRateWarningLow}");
- }
- }
- }
- return true;
- }
- /// <summary>
- /// 自动HED On
- /// </summary>
- /// <returns></returns>
- private bool AutoHedOn()
- {
- double hedFlow = _reservoirDevice.ReservoirData.HedFlow;
- bool result = hedFlow > _hedFlowLowLimit;
- if (!result)
- {
- LOG.WriteLog(eEvent.ERR_RESERVOIR, Module, $"HED Flow {hedFlow} is less than {_hedFlowLowLimit}");
- return false;
- }
- _autoHedDelay = _delay_2s;
- _temperatureController.EnableOperation("", null);
- _temperatureController.SetTargetTemperatureOperation("", new object[] { _recipe.TemperatureSetPoint });
- return true;
- }
- /// <summary>
- /// 检验Hed是否成功
- /// </summary>
- /// <returns></returns>
- private bool AutoHedSuccess()
- {
- if (_temperatureController.TemperatureData.ControlOperationModel == 0)
- {
- LOG.WriteLog(eEvent.ERR_RESERVOIR, Module, "Temperature control is disable");
- return false;
- }
- if (Math.Abs(_recipe.TemperatureSetPoint - _temperatureController.TemperatureData.TargetTemperature) >= 0.1 * _recipe.TemperatureSetPoint)
- {
- LOG.WriteLog(eEvent.ERR_RESERVOIR, Module, $"recipe temperature {_recipe.TemperatureSetPoint} is not match temperature target point {_temperatureController.TemperatureData.TargetTemperature}");
- return false;
- }
- return true;
- }
- /// <summary>
- /// 检验Metal A/B PowerSupplier通信状态
- /// </summary>
- /// <returns></returns>
- private bool AutoMetalsPowerSupplierCommuncationStatus()
- {
- for (int i = 0; i < _metalDevices.Count; i++)
- {
- StandardHotMetalDevice hotMetalDevice = _metalDevices[i];
- if (!hotMetalDevice.IsDisable && hotMetalDevice.IsAuto)
- {
- if (hotMetalDevice.SideAPowerSupplier == null)
- {
- LOG.WriteLog(eEvent.ERR_RESERVOIR, Module, "Side A PowerSupplier is null");
- return false;
- }
- if (hotMetalDevice.SideBPowerSupplier == null)
- {
- LOG.WriteLog(eEvent.ERR_RESERVOIR, Module, "Side B PowerSupplier is null");
- return false;
- }
- if (!hotMetalDevice.SideAPowerSupplier.IsConnected)
- {
- LOG.WriteLog(eEvent.ERR_RESERVOIR, Module, $"Side A PowerSupplier {hotMetalDevice.SideAPowerSupplier.Name} is not connected");
- return false;
- }
- if (!hotMetalDevice.SideBPowerSupplier.IsConnected)
- {
- LOG.WriteLog(eEvent.ERR_RESERVOIR, Module, $"Side B PowerSupplier {hotMetalDevice.SideBPowerSupplier.Name} is not connected");
- return false;
- }
- }
- }
- return true;
- }
- /// <summary>
- /// Auto Metal reset linmot
- /// </summary>
- /// <returns></returns>
- private bool AutoMetalResetLinmot()
- {
- for (int i = 0; i < _metalDevices.Count; i++)
- {
- StandardHotMetalDevice hotMetalDevice = _metalDevices[i];
- if(hotMetalDevice.OperationMode==AUTO)
- {
- bool result= hotMetalDevice.ResetLinmot();
- if(!result)
- {
- LOG.WriteLog(eEvent.ERR_RESERVOIR, Module, "Reset linmot error");
- return false;
- }
- }
- }
- return true;
- }
- /// <summary>
- /// Auto Metal reset linmot
- /// </summary>
- /// <returns></returns>
- private bool CheckAutoMetalResetStatus()
- {
- if(_reservoirDevice.OperationMode == MANUAL)
- {
- return true;
- }
- for (int i = 0; i < _metalDevices.Count; i++)
- {
- StandardHotMetalDevice hotMetalDevice = _metalDevices[i];
- if (hotMetalDevice.OperationMode == AUTO)
- {
- bool result = hotMetalDevice.CheckLinmotRoutineEnd();
- if (!result)
- {
- return false;
- }
- }
- }
- return true;
- }
- /// <summary>
- /// Auto Metal reset linmot
- /// </summary>
- /// <returns></returns>
- private bool CheckAutoMetalResetStopStatus()
- {
- if (_reservoirDevice.OperationMode == MANUAL)
- {
- return false;
- }
- for (int i = 0; i < _metalDevices.Count; i++)
- {
- StandardHotMetalDevice hotMetalDevice = _metalDevices[i];
- if (hotMetalDevice.OperationMode == AUTO)
- {
- bool result = hotMetalDevice.CheckLinmotRoutineError();
- if (result)
- {
- return true;
- }
- }
- }
- return false;
- }
- /// Metal WS Unclamp
- /// </summary>
- /// <returns></returns>
- private bool MetalsWHUnclampOn()
- {
- for (int i = 0; i < _metalDevices.Count; i++)
- {
- StandardHotMetalDevice hotMetalDevice = _metalDevices[i];
- bool result = hotMetalDevice.WaferHolderClampOff("", null);
- if (!result)
- {
- return false;
- }
- }
- return true;
- }
- /// <summary>
- /// 启动
- /// </summary>
- /// <param name="objs"></param>
- /// <returns></returns>
- public RState Start(params object[] objs)
- {
- List<MetalCellDevice> lstDevice = (List<MetalCellDevice>)objs[0];
- _metalDevices.Clear();
- for(int i=0;i<lstDevice.Count; i++)
- {
- _metalDevices.Add((StandardHotMetalDevice)lstDevice[i]);
- }
- _reservoirDevice = DEVICE.GetDevice<StandardHotReservoirDevice>(Module.ToString());
- _recipe=_reservoirDevice.Recipe;
- if (!(objs[1] is null))
- {
- _cellPowerSupplier = (CellPowerSupplier)objs[1];
- }
- _temperatureController=(TemperatureController)objs[2];
- _hedFlowLowLimit = SC.GetValue<double>($"Reservoir.{Module}.HEDFlowLowLimit");
- if (!CheckPreCondition())
- {
- return RState.Failed;
- }
- _cmmFlowHighFault = SC.GetValue<double>($"Reservoir.CMM.CMMFlowHighFault");
- _cmmFlowHighWarning = SC.GetValue<double>($"Reservoir.CMM.CMMFlowHighWarning");
- _cmmFlowLowFault = SC.GetValue<double>($"Reservoir.CMM.CMMFlowLowFault");
- _cmmFlowLowWarning = SC.GetValue<double>($"Reservoir.CMM.CMMFlowLowWarning");
- _cmmFlowCheckDelay = SC.GetValue<int>($"Reservoir.CMM.CMMFlowCheckDelaySeconds");
- if (_recipe.CMMEnable)
- {
- _persistentValue = ReservoirsPersistentManager.Instance.GetReservoirsPersistentValue(Module);
- }
- return Runner.Start(Module, "Start Initialize");
- }
- /// <summary>
- /// 检验前置条件
- /// </summary>
- /// <returns></returns>
- private bool CheckPreCondition()
- {
- if(_recipe==null)
- {
- LOG.WriteLog(eEvent.ERR_RESERVOIR, Module, "recipe is null");
- return false;
- }
- if(_recipe.CMMEnable&&!_cellPowerSupplier.IsConnected)
- {
- LOG.WriteLog(eEvent.ERR_RESERVOIR, Module, "PowerSupplier is not connected");
- return false;
- }
- if (!_temperatureController.IsConnected)
- {
- LOG.WriteLog(eEvent.ERR_RESERVOIR, Module, "Temperature is not connected");
- return false;
- }
- return true;
- }
- }
- }
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