CyberX8/Framework/Common/CommonData/SRD/SRDLotTrackData.cs

using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading.Tasks;

namespace MECF.Framework.Common.CommonData.SRD
{
    public class SRDLotTrackData
    {
        public DateTime TimeStamp { get; set; }
        /// <summary>
        /// 状态机
        /// </summary>
        public string StateMachine { get; set; }
        /// <summary>
        /// 水压
        /// </summary>
        public double WaterPressure { get; set; }
        /// <summary>
        /// 水流
        /// </summary>
        public double WaterFlow { get; set; }
        /// <summary>
        /// Wafer Presence
        /// </summary>
        public string WaferPresence { get; set; }
        /// <summary>
        /// Rotation速度
        /// </summary>
        public double RotationSpeed { get; set; }
        /// <summary>
        /// Arm位置
        /// </summary>
        public double ArmPosition { get; set; }
        /// <summary>
        /// N2 Below On
        /// </summary>
        public bool N2BelowOn { get; set; }
        /// <summary>
        /// Water Above
        /// </summary>
        public bool WaterAbove { get; set; }
        /// <summary>
        /// Water Below
        /// </summary>
        public bool WaterBelow { get; set; }
        /// <summary>
        /// SpinTorque
        /// </summary>
        public double SpinTorque {get; set; }
        /// <summary>
        /// ArmTorque
        /// </summary>
        public double ArmTorque { get; set; }
        /// <summary>
        /// Loader DI Enable
        /// </summary>
        public bool LoaderDIEnable { get; set; }
        /// <summary>
        /// 风扇状态
        /// </summary>
        public bool ExhaustOn { get; set; }
        /// <summary>
        /// 真空状态
        /// </summary>
        public bool ChuckVacuumOn { get; set; }
        /// <summary>
        /// 真空压力
        /// </summary>
        public double ChuckVacuumPressure { get; set; }
        /// <summary>
        /// Water On
        /// </summary>
        public bool WaterOn { get; set; }
    }
}