TM.cs 2.6 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Text;
  5. using System.Threading.Tasks;
  6. using Aitex.Core.RT.DataCenter;
  7. using Aitex.Core.RT.Device;
  8. using MECF.Framework.Common.Equipment;
  9. using MECF.Framework.Common.SubstrateTrackings;
  10. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
  11. namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs
  12. {
  13. public class TM : BaseDevice, IDevice, ITM
  14. {
  15. public virtual double ChamberPressure { get; }
  16. public virtual double ForelinePressure { get; }
  17. public TM(string module ) : base(module, module, module, module)
  18. {
  19. }
  20. public virtual bool Initialize()
  21. {
  22. DATA.Subscribe($"{Name}.IsAtm", () => { return CheckAtm(); });
  23. DATA.Subscribe($"{Name}.IsVacuum", () => { return CheckVacuum(); });
  24. DATA.Subscribe($"{Name}.ChamberPressure", () => ChamberPressure);
  25. DATA.Subscribe($"{Name}.ForelinePressure", () => ForelinePressure);
  26. return true;
  27. }
  28. public virtual bool CheckAtm()
  29. {
  30. return false;
  31. }
  32. public virtual bool CheckVacuum()
  33. {
  34. return false;
  35. }
  36. public virtual bool CheckIsPumping()
  37. {
  38. return false;
  39. }
  40. public virtual bool SetFastVentValve(bool isOpen, out string reason)
  41. {
  42. reason = string.Empty;
  43. return true;
  44. }
  45. public virtual bool SetSlowVentValve(bool isOpen, out string reason)
  46. {
  47. reason = string.Empty;
  48. return true;
  49. }
  50. public virtual bool SetFastPumpValve(bool isOpen, out string reason)
  51. {
  52. reason = string.Empty;
  53. return true;
  54. }
  55. public virtual bool SetSlowPumpValve(bool isOpen, out string reason)
  56. {
  57. reason = string.Empty;
  58. return true;
  59. }
  60. public virtual bool SetSlitValve(ModuleName module, bool isOpen, out string reason)
  61. {
  62. reason = string.Empty;
  63. return true;
  64. }
  65. public virtual bool CheckSlitValveOpen(ModuleName module)
  66. {
  67. return true;
  68. }
  69. public virtual bool CheckSlitValveClose(ModuleName module)
  70. {
  71. return true;
  72. }
  73. public virtual void Monitor()
  74. {
  75. }
  76. public virtual void Terminate()
  77. {
  78. }
  79. public virtual void Reset()
  80. {
  81. }
  82. }
  83. }