Gloabals.cs 4.6 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Text;
  5. using System.Runtime.Serialization;
  6. using System.Xml;
  7. using System.Xml.Serialization;
  8. using System.Xml.Schema;
  9. using Aitex.Core.Util;
  10. namespace Aitex.Platform
  11. {
  12. /// <summary>
  13. /// Defines sequencer running mode.
  14. /// </summary>
  15. [Serializable]
  16. [DataContract]
  17. public enum SystemMode
  18. {
  19. /// <summary>
  20. /// In Auto mode, operators cannot manually create, delete, and move susceptors; instead,
  21. /// operators can only run sequences.
  22. /// </summary>
  23. [EnumMember]
  24. Auto = 0,
  25. /// <summary>
  26. /// In Manual mode, operators can manually create, delete, and move susceptors, but cannot
  27. /// run sequences.
  28. /// </summary>
  29. [EnumMember]
  30. Manual,
  31. /// <summary>
  32. /// In AtmCycle mode, the sequencer moves susceptor from chamber to chamber without checking
  33. /// any interlocks: chambers can be at atmosphere condition, and can be online or offline.
  34. /// It moves susceptor from Loadlock to the buffer first, and the moves it to the first reactor,
  35. /// and then moves the susceptor from that reactor to the next one one by one. After all reactors
  36. /// are traversed, it moves susceptor to the cooldown. And finally moves the susceptor from
  37. /// cooldown to the loadlock. At this point, the cycle is completed.
  38. /// </summary>
  39. [EnumMember]
  40. Cycle
  41. }
  42. /// <summary>
  43. /// Tower light status define
  44. /// </summary>
  45. [Serializable]
  46. [DataContract]
  47. public enum TowerLight
  48. {
  49. /// <summary>
  50. /// Light red
  51. /// </summary>
  52. [EnumMember]
  53. Red,
  54. /// <summary>
  55. /// Light blue
  56. /// </summary>
  57. [EnumMember]
  58. Blue,
  59. /// <summary>
  60. /// Light green
  61. /// </summary>
  62. [EnumMember]
  63. Green,
  64. /// <summary>
  65. //
  66. /// </summary>
  67. [EnumMember]
  68. Buzzer,
  69. /// <summary>
  70. //
  71. /// </summary>
  72. [EnumMember]
  73. Max,
  74. }
  75. /// <summary>
  76. /// Tower light status define
  77. /// </summary>
  78. [Serializable]
  79. [DataContract]
  80. public enum TowerLightStatus
  81. {
  82. /// <summary>
  83. /// Light steady off
  84. /// </summary>
  85. [EnumMember]
  86. Off,
  87. /// <summary>
  88. /// Light steady on
  89. /// </summary>
  90. [EnumMember]
  91. On,
  92. /// <summary>
  93. /// Light blinking
  94. /// </summary>
  95. [EnumMember]
  96. Blinking,
  97. /// <summary>
  98. /// Unknow state
  99. /// </summary>
  100. [EnumMember]
  101. Unknow,
  102. }
  103. [Serializable]
  104. [DataContract]
  105. public enum PressureCtrlMode
  106. {
  107. [EnumMember]
  108. TVPressureCtrl = 1,
  109. [EnumMember]
  110. TVPositionCtrl = 2,
  111. }
  112. [Serializable]
  113. [DataContract]
  114. public enum RfMode
  115. {
  116. [EnumMember]
  117. ContinuousWaveMode = 1,
  118. [EnumMember]
  119. PulsingMode = 2,
  120. }
  121. [Serializable]
  122. [DataContract]
  123. public enum CarrierDataType
  124. {
  125. [EnumMember]
  126. NONE,
  127. [EnumMember]
  128. Created,
  129. [EnumMember]
  130. Deleted,
  131. [EnumMember]
  132. SusceptorMove,
  133. [EnumMember]
  134. ProcessStart,
  135. [EnumMember]
  136. ProcessNormalEnd,
  137. [EnumMember]
  138. ProcessErrStop,
  139. [EnumMember]
  140. ProcessManualAbort,
  141. [EnumMember]
  142. RecipeStepStart,
  143. [EnumMember]
  144. RecipeStepNormalEnd,
  145. [EnumMember]
  146. RecipeStepPaused,
  147. [EnumMember]
  148. RecipeStepResume,
  149. [EnumMember]
  150. RecipeStepJump,
  151. [EnumMember]
  152. RecipeUpdated,
  153. [EnumMember]
  154. PreProcessStart,
  155. [EnumMember]
  156. PreProcessStep,
  157. [EnumMember]
  158. PreProcessNormalEnd,
  159. [EnumMember]
  160. PreProcessErrorEnd,
  161. [EnumMember]
  162. PostProcessStart,
  163. [EnumMember]
  164. PostProcessStep,
  165. [EnumMember]
  166. PostProcessNormalEnd,
  167. [EnumMember]
  168. PostProcessErrorEnd,
  169. [EnumMember]
  170. MoUsedWeight,
  171. }
  172. [Serializable]
  173. [DataContract]
  174. public enum EndByCondition
  175. {
  176. [EnumMember]
  177. EndByRfTime,
  178. [EnumMember]
  179. EndByStepTime,
  180. [EnumMember]
  181. EndByHeatUp,
  182. }
  183. }