_ioDefineVenusSE_MF.xml 11 KB

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  1. <?xml version='1.0'?>
  2. <IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>
  3. <Dig_In>
  4. <DI_ITEM Index="0" Name="DI_TM_DI1" Device="" Addr="w0.00" Note="System CDA Pressure ok" />
  5. <DI_ITEM Index="1" Name="DI_TM_DI2" Device="" Addr="w0.01" Note="System N2 Pressure ok"/>
  6. <DI_ITEM Index="2" Name="DI_TM_DI3" Device="" Addr="w0.02" Note="VCE SLIT DOOR OPEN ENABLE" />
  7. <DI_ITEM Index="3" Name="DI_TM_DI5" Device="" Addr="w0.03" Note="PMA SLIT DOOR OPEN ENABLE" />
  8. <DI_ITEM Index="4" Name="DI_TM_DI7" Device="" Addr="w0.04" Note="PMB SLIT DOOR OPEN ENABLE" />
  9. <DI_ITEM Index="5" Name="DI_TM_DI9" Device="" Addr="w0.05" Note="PMC SLIT DOOR OPEN ENABLE" />
  10. <DI_ITEM Index="6" Name="DI_TM_DI4" Device="" Addr="w0.06" Note="TM RB EXTEND VCE ENABLE" />
  11. <DI_ITEM Index="7" Name="DI_TM_DI6" Device="" Addr="w0.07" Note="TM RB EXTEND PMA ENABLE" />
  12. <DI_ITEM Index="8" Name="DI_TM_DI8" Device="" Addr="w0.08" Note="TM RB EXTEND PMB ENABLE" />
  13. <DI_ITEM Index="9" Name="DI_TM_DI10" Device="" Addr="w0.09" Note="TM RB EXTEND PMC ENABLE" />
  14. <DI_ITEM Index="10" Name="DI_SYS_C1" Device="" Addr="w0.10" Note="AC RACK FAN OK" />
  15. <DI_ITEM Index="11" Name="DI_SYS_C2" Device="" Addr="w0.11" Note="AC RACK Smoke Detector out1" />
  16. <DI_ITEM Index="12" Name="DI_SYS_C3" Device="" Addr="w0.12" Note="AC RACK Smoke Detector out2" />
  17. <DI_ITEM Index="13" Name="DI_SYS_C4" Device="" Addr="w0.13" Note="Factory Smoke Detector Out" />
  18. <DI_ITEM Index="14" Name="DI_TSYS_C5" Device="" Addr="w0.14" Note="Abnormal exhaust gas treatment" />
  19. <DI_ITEM Index="15" Name="DI_TM_N2_1" Device="" Addr="w0.15" Note="TM N2气压表1" />
  20. <DI_ITEM Index="16" Name="DI_VCE_TM_OPS" Device="" Addr="w1.00" Note="VCE到TM门阀开信号" />
  21. <DI_ITEM Index="17" Name="DI_VCE_TM_CLS" Device="" Addr="w1.01" Note="VCE到TM门阀关信号" />
  22. <DI_ITEM Index="18" Name="DI_TM_PMA_OPS" Device="" Addr="w1.02" Note="TM到PMA门阀开信号" />
  23. <DI_ITEM Index="19" Name="DI_TM_PMA_CLS" Device="" Addr="w1.03" Note="TM到PMA门阀关信号" />
  24. <DI_ITEM Index="20" Name="DI_TM_PMB_OPS" Device="" Addr="w1.04" Note="TM到PMB门阀开信号" />
  25. <DI_ITEM Index="21" Name="DI_TM_PMB_CLS" Device="" Addr="w1.05" Note="TM到PMB门阀关信号" />
  26. <DI_ITEM Index="22" Name="DI_TM_N2_2" Device="" Addr="w1.06" Note="TM N2气压表2" />
  27. <DI_ITEM Index="23" Name="DI_TM_CDA" Device="" Addr="w1.07" Note="TM CDA气压表" />
  28. <DI_ITEM Index="24" Name="DI_TM_HE" Device="" Addr="w1.08" Note="TM He气压表" />
  29. <DI_ITEM Index="25" Name="DI_TM_LEAK" Device="" Addr="w1.09" Note="漏液检测器" />
  30. <DI_ITEM Index="26" Name="DI_VCE_V" Device="" Addr="w1.10" Note="VCE真空信号" />
  31. <DI_ITEM Index="27" Name="DI_TM_V" Device="" Addr="w1.11" Note="TM真空信号" />
  32. <DI_ITEM Index="28" Name="DI_VCE_RB_RET" Device="" Addr="w1.12" Note="ROBOT TO VCE RETRACT" />
  33. <DI_ITEM Index="29" Name="DI_PMA_RB_RET" Device="" Addr="w1.13" Note="ROBOT TO PMA RETRACT" />
  34. <DI_ITEM Index="30" Name="DI_PMB_RB_RET" Device="" Addr="w1.14" Note="ROBOT TO PMB RETRACT" />
  35. <DI_ITEM Index="31" Name="DI_PMC_RB_RET" Device="" Addr="w1.15" Note="ROBOT TO PMC RETRACT" />
  36. <DI_ITEM Index="32" Name="DI_PMD_RB_RET" Device="" Addr="w2.00" Note="ROBOT TO PMD RETRACT" />
  37. <DI_ITEM Index="33" Name="DI_TM_PMC_OPS" Device="" Addr="w2.01" Note="TM到PMC门阀开信号" />
  38. <DI_ITEM Index="34" Name="DI_TM_PMC_CLS" Device="" Addr="w2.02" Note="TM到PMC门阀关信号" />
  39. <DI_ITEM Index="35" Name="DI_TM_PMD_OPS" Device="" Addr="w2.03" Note="TM到PMD门阀开信号" />
  40. <DI_ITEM Index="36" Name="DI_TM_PMD_CLS" Device="" Addr="w2.04" Note="TM到PMD门阀关信号" />
  41. </Dig_In>
  42. <Dig_Out>
  43. <DO_ITEM Index="0" Name="" Device="" Addr="" />
  44. <DO_ITEM Index="1" Name="" Device="" Addr="" />
  45. <DO_ITEM Index="2" Name="" Device="" Addr="" />
  46. <DO_ITEM Index="3" Name="" Device="" Addr="" />
  47. <DO_ITEM Index="4" Name="" Device="" Addr="" />
  48. <DO_ITEM Index="5" Name="" Device="" Addr="" />
  49. <DO_ITEM Index="6" Name="" Device="" Addr="" />
  50. <DO_ITEM Index="7" Name="" Device="" Addr="" />
  51. <DO_ITEM Index="8" Name="" Device="" Addr="" />
  52. <DO_ITEM Index="9" Name="" Device="" Addr="" />
  53. <DO_ITEM Index="10" Name="" Device="" Addr="" />
  54. <DO_ITEM Index="11" Name="DO_TM_PMD_OP" Device="" Addr="w199.14" Note="TM到PMD门阀开"/>
  55. <DO_ITEM Index="12" Name="DO_TM_PMD_CL" Device="" Addr="w199.15" Note="TM到PMD门阀关" />
  56. <DO_ITEM Index="13" Name="DO_VCE_TM_OP" Device="" Addr="w200.00" Note="VCE到TM门阀开" />
  57. <DO_ITEM Index="14" Name="DO_VCE_TM_CL" Device="" Addr="w200.01" Note="VCE到TM门阀关" />
  58. <DO_ITEM Index="15" Name="DO_TM_PMA_OP" Device="" Addr="w200.02" Note="TM到PMA门阀开"/>
  59. <DO_ITEM Index="16" Name="DO_TM_PMA_CL" Device="" Addr="w200.03" Note="TM到PMA门阀关"/>
  60. <DO_ITEM Index="17" Name="DO_TM_PMB_OP" Device="" Addr="w200.04" Note="TM到PMB门阀开"/>
  61. <DO_ITEM Index="18" Name="DO_TM_PMB_CL" Device="" Addr="w200.05" Note="TM到PMB门阀关"/>
  62. <DO_ITEM Index="19" Name="DO_TM_PMC_OP" Device="" Addr="w200.06" Note="TM到PMC门阀开"/>
  63. <DO_ITEM Index="20" Name="DO_TM_PMC_CL" Device="" Addr="w200.07" Note="TM到PMC门阀关"/>
  64. <DO_ITEM Index="21" Name="DO_TM_V_HS" Device="" Addr="w200.08" Note="TM腔快抽真空"/>
  65. <DO_ITEM Index="22" Name="DO_TM_V_LS" Device="" Addr="w200.09" Note="TM腔慢抽真空"/>
  66. <DO_ITEM Index="23" Name="DO_TM_B_HS" Device="" Addr="w200.10" Note="TM腔快破真空"/>
  67. <DO_ITEM Index="24" Name="DO_TM_B_LS" Device="" Addr="w200.11" Note="TM腔慢破真空"/>
  68. <DO_ITEM Index="25" Name="DO_VCE_V_HS" Device="" Addr="w200.12" Note="VCE腔快抽真空"/>
  69. <DO_ITEM Index="26" Name="DO_VCE_V_LS" Device="" Addr="w200.13" Note="VCE腔慢抽真空" />
  70. <DO_ITEM Index="27" Name="DO_VCE_B_HS" Device="" Addr="w200.14" Note="VCE腔快破真空"/>
  71. <DO_ITEM Index="28" Name="DO_VCE_B_LS" Device="" Addr="w200.15" Note="VCE腔慢破真空"/>
  72. <DO_ITEM Index="29" Name="DO_V_220V" Device="" Addr="w201.00" Note="220V线圈"/>
  73. <DO_ITEM Index="30" Name="DO_TM_C1" Device="" Addr="w201.01" Note="系统允许断电"/>
  74. <DO_ITEM Index="31" Name="DO_TM_C2" Device="" Addr="w201.02" Note="备用"/>
  75. <DO_ITEM Index="32" Name="" Device="" Addr="" />
  76. <DO_ITEM Index="33" Name="" Device="" Addr="" />
  77. <DO_ITEM Index="34" Name="" Device="" Addr="" />
  78. <DO_ITEM Index="35" Name="" Device="" Addr="" />
  79. <DO_ITEM Index="36" Name="" Device="" Addr="" />
  80. </Dig_Out>
  81. <Ana_Out>
  82. <AO_ITEM Index="0" Name="AO_MFC_Flow_Setpoint" BufferOffset="0" Device="" Addr="d200" Note="MFC Flow Setpoint" />
  83. <AO_ITEM Index="1" Name="AO_TM_Vacuum_Gauge" BufferOffset="1" Device="" Addr="d201" Note="TM"/>
  84. <AO_ITEM Index="2" Name="" BufferOffset="" />
  85. <AO_ITEM Index="3" Name="" BufferOffset="" />
  86. <AO_ITEM Index="4" Name="" BufferOffset="" />
  87. <AO_ITEM Index="5" Name="" BufferOffset="" />
  88. <AO_ITEM Index="6" Name="" BufferOffset="" />
  89. <AO_ITEM Index="7" Name="" BufferOffset="" />
  90. <AO_ITEM Index="8" Name="" BufferOffset=""/>
  91. <AO_ITEM Index="9" Name="" BufferOffset="" />
  92. <AO_ITEM Index="10" Name="" BufferOffset="" />
  93. <AO_ITEM Index="11" Name="" BufferOffset="" />
  94. <AO_ITEM Index="12" Name="" BufferOffset="" />
  95. <AO_ITEM Index="13" Name="" BufferOffset="" />
  96. <AO_ITEM Index="14" Name="" BufferOffset="" />
  97. <AO_ITEM Index="15" Name="" BufferOffset="" />
  98. <AO_ITEM Index="16" Name="" BufferOffset="" />
  99. <AO_ITEM Index="17" Name="" BufferOffset="" />
  100. <AO_ITEM Index="18" Name="" BufferOffset="" />
  101. <AO_ITEM Index="19" Name="" BufferOffset="" />
  102. <AO_ITEM Index="20" Name="" BufferOffset="" />
  103. <AO_ITEM Index="21" Name="" />
  104. <AO_ITEM Index="22" Name="" />
  105. <AO_ITEM Index="23" Name="" />
  106. <AO_ITEM Index="24" Name="" />
  107. <AO_ITEM Index="25" Name="" />
  108. <AO_ITEM Index="26" Name="" />
  109. <AO_ITEM Index="27" Name="" />
  110. <AO_ITEM Index="28" Name="" />
  111. <AO_ITEM Index="29" Name="" />
  112. <AO_ITEM Index="30" Name="" />
  113. <AO_ITEM Index="31" Name="" />
  114. <AO_ITEM Index="32" Name="" />
  115. <AO_ITEM Index="33" Name="" />
  116. <AO_ITEM Index="34" Name="" />
  117. <AO_ITEM Index="35" Name="" />
  118. <AO_ITEM Index="36" Name="" />
  119. <AO_ITEM Index="37" Name="" />
  120. <AO_ITEM Index="38" Name="" />
  121. <AO_ITEM Index="39" Name="" />
  122. <AO_ITEM Index="40" Name="" />
  123. <AO_ITEM Index="41" Name="" />
  124. <AO_ITEM Index="42" Name="" />
  125. <AO_ITEM Index="43" Name="" />
  126. <AO_ITEM Index="44" Name="" />
  127. <AO_ITEM Index="45" Name="" />
  128. <AO_ITEM Index="46" Name="" />
  129. <AO_ITEM Index="47" Name="" />
  130. <AO_ITEM Index="48" Name="" />
  131. <AO_ITEM Index="49" Name="" />
  132. </Ana_Out>
  133. <Ana_In>
  134. <AI_ITEM Index="0" Name="AI_MFC_Flow_Setpoint" BufferOffset="2" Device="" Addr="D100" />
  135. <AI_ITEM Index="1" Name="AI_VCE_Vacuum_Gauge" BufferOffset="10" Device="" Addr="D101" />
  136. <AI_ITEM Index="2" Name="AI_TM_Vacuum_Gauge" BufferOffset="2" Device="" Addr="D102"/>
  137. <AI_ITEM Index="3" Name="AI_VCE_Pipeline_Vacuum_Gauge" BufferOffset="10" Device="" Addr="D103"/>
  138. <AI_ITEM Index="4" Name="AI_TM_Pipeline_Vacuum_Gauge" BufferOffset="22" Device="" Addr="D104"/>
  139. <AI_ITEM Index="5" Name=""/>
  140. <AI_ITEM Index="6" Name="" />
  141. <AI_ITEM Index="7" Name=""/>
  142. <AI_ITEM Index="8" Name=""/>
  143. <AI_ITEM Index="9" Name=""/>
  144. <AI_ITEM Index="10" Name="" />
  145. <AI_ITEM Index="11" Name=""/>
  146. <AI_ITEM Index="12" Name=""/>
  147. <AI_ITEM Index="13" Name=""/>
  148. <AI_ITEM Index="14" Name=""/>
  149. <AI_ITEM Index="15" Name=""/>
  150. <AI_ITEM Index="16" Name=""/>
  151. <AI_ITEM Index="17" Name=""/>
  152. <AI_ITEM Index="18" Name=""/>
  153. <AI_ITEM Index="19" Name=""/>
  154. <AI_ITEM Index="20" Name=""/>
  155. <AI_ITEM Index="21" Name="" />
  156. <AI_ITEM Index="22" Name=""/>
  157. <AI_ITEM Index="23" Name=""/>
  158. <AI_ITEM Index="24" Name=""/>
  159. <AI_ITEM Index="25" Name=""/>
  160. <AI_ITEM Index="26" Name="" />
  161. <AI_ITEM Index="27" Name="" />
  162. <AI_ITEM Index="28" Name="" />
  163. <AI_ITEM Index="29" Name="" />
  164. <AI_ITEM Index="30" Name="" />
  165. <AI_ITEM Index="31" Name="" />
  166. <AI_ITEM Index="32" Name="" />
  167. <AI_ITEM Index="33" Name="" />
  168. <AI_ITEM Index="34" Name="" />
  169. <AI_ITEM Index="35" Name="" />
  170. <AI_ITEM Index="36" Name="" />
  171. <AI_ITEM Index="37" Name="" />
  172. <AI_ITEM Index="38" Name="" />
  173. <AI_ITEM Index="39" Name="" />
  174. <AI_ITEM Index="40" Name="" />
  175. <AI_ITEM Index="41" Name="" />
  176. <AI_ITEM Index="42" Name="" />
  177. <AI_ITEM Index="43" Name="" />
  178. <AI_ITEM Index="44" Name="" />
  179. <AI_ITEM Index="45" Name="" />
  180. <AI_ITEM Index="46" Name="" />
  181. <AI_ITEM Index="47" Name="" />
  182. <AI_ITEM Index="48" Name="" />
  183. <AI_ITEM Index="49" Name="" />
  184. </Ana_In>
  185. </IO_DEFINE>