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CyberX8_Simulator
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Config
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_ioDefineVenus.xml

_ioDefineVenus.xml 17 KB
Historia Raaka

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  1. <?xml version='1.0'?>
    2. 

  2. <IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>
    3. 

  3. 

  4. 	<!--文件根据IO list_Venus样机_V1.0_2022_08_26.xlsx生成-->
    5. 

  5. 	<!--生成时间：09/15/2022 10:50:11-->
    6. 

  6. 	<Dig_In>
    7. 

  7. 		<DI_ITEM Index="0" Name="DI_PM_Lid_Closed" Device="" Addr="w20.00" Note="Interlock-HW" />
    8. 

  8. 		<DI_ITEM Index="1" Name="DI_PM_ATM_SW" Device="" Addr="w20.01" Note="Interlock-PLC" />
    9. 

  9. 		<DI_ITEM Index="2" Name="DI_PM_VAC_SW" Device="" Addr="w20.02" Note="Interlock-HW" />
    10. 

  10. 		<DI_ITEM Index="3" Name="DI_PCW_Flow_SW" Device="" Addr="w20.03" Note="Interlock-HW,冷却水流量开关" />
    11. 

  11. 		<DI_ITEM Index="4" Name="DI_Water_Leak_Sensor" Device="" Addr="w20.04" Note="1=normal, 0=alarm" />
    12. 

  12. 		<DI_ITEM Index="5" Name="DI_Lift_Pin_Up_POS" Device="" Addr="w20.05" Note="1=on, 0=off" />
    13. 

  13. 		<DI_ITEM Index="6" Name="DI_Lift_Pin_Down_POS" Device="" Addr="w20.06" Note="1=on, 0=off" />
    14. 

  14. 		<DI_ITEM Index="7" Name="DI_RF_Generator_Interlock" Device="" Addr="w20.07" Note="1=RF interlock normal, 0=RF interlock off" />
    15. 

  15. 		<DI_ITEM Index="8" Name="DI_Source_RF_Fan" Device="" Addr="w20.08" Note="1=normal, 0=alarm, Interlock-HW" />
    16. 

  16. 		<DI_ITEM Index="9" Name="DI_Turbo_Pump_Interlock" Device="" Addr="w20.09" Note="1= interlock normal, 0= interlock off" />
    17. 

  17. 		<DI_ITEM Index="10" Name="DI_Slit_Door_Open_POS" Device="" Addr="w20.10" Note="Interlock-HW" />
    18. 

  18. 		<DI_ITEM Index="11" Name="DI_Slit_Door_Close_POS" Device="" Addr="w20.11" Note="Interlock-HW" />
    19. 

  19. 		<DI_ITEM Index="12" Name="DI_CDA_Pressure" Device="" Addr="w20.12" Note="1=normal, 0=alarm" />
    20. 

  20. 		<DI_ITEM Index="13" Name="DI_Coolant_Inlet_TC_Broken_Alarm" Device="" Addr="w20.13" Note="0=normal, 1=alarm" />
    21. 

  21. 		<DI_ITEM Index="14" Name="DI_Coolant_Outlet_TC_Broken_Alarm" Device="" Addr="w20.14" Note="0=normal, 1=alarm" />
    22. 

  22. 		<DI_ITEM Index="15" Name="DI_Chamber_Pressure_10t_Gauge_Alarm" Device="" Addr="w20.15" Note="0=normal, 1=alarm" />
    23. 

  23. 		<DI_ITEM Index="16" Name="DI_Process_Pressure_100mt_Gauge_Alarm" Device="" Addr="w21.00" Note="0=normal, 1=alarm" />
    24. 

  24. 		<DI_ITEM Index="17" Name="DI_Chamber_Pressure_760t_Gauge_Alarm" Device="" Addr="w21.01" Note="0=normal, 1=alarm" />
    25. 

  25. 		<DI_ITEM Index="18" Name="DI_Foreline_Pressure_760t_Gauge_Alarm" Device="" Addr="w21.02" Note="0=normal, 1=alarm" />
    26. 

  26. 		<DI_ITEM Index="19" Name="DI_LL_Pressure_760t_Gauge_Alarm" Device="" Addr="w21.03" Note="0=normal, 1=alarm, Loadlock Config" />
    27. 

  27. 		<DI_ITEM Index="20" Name="DI_Valve_TC_Deviation_out_of_range" Device="" Addr="w21.04" Note="0=normal, 1=alarm" />
    28. 

  28. 		<DI_ITEM Index="21" Name="DI_Valve_Control_TC_Broken_Alarm" Device="" Addr="w21.05" Note="0=normal, 1=alarm" />
    29. 

  29. 		<DI_ITEM Index="22" Name="DI_Valve_Monitor_TC_Broken_Alarm" Device="" Addr="w21.06" Note="0=normal, 1=alarm" />
    30. 

  30. 		<DI_ITEM Index="23" Name="DI_Valve_Heater_On_FB" Device="" Addr="w21.07" Note="0=off, 1=on" />
    31. 

  31. 		<DI_ITEM Index="24" Name="DI_Foreline_TC_Deviation_out_of_range" Device="" Addr="w21.08" Note="0=normal, 1=alarm" />
    32. 

  32. 		<DI_ITEM Index="25" Name="DI_Foreline_Control_TC_Broken_Alarm" Device="" Addr="w21.09" Note="0=normal, 1=alarm" />
    33. 

  33. 		<DI_ITEM Index="26" Name="DI_Foreline_Monitor_TC_Broken_Alarm" Device="" Addr="w21.10" Note="0=normal, 1=alarm" />
    34. 

  34. 		<DI_ITEM Index="27" Name="DI_Foreline_Heater_On_FB" Device="" Addr="w21.11" Note="0=off, 1=on" />
    35. 

  35. 		<DI_ITEM Index="28" Name="DI_CHB_Wall_TC_Deviation_out_of_range" Device="" Addr="w21.12" Note="0=normal, 1=alarm" />
    36. 

  36. 		<DI_ITEM Index="29" Name="DI_CHB_Wall_Control_TC_Broken_Alarm" Device="" Addr="w21.13" Note="0=normal, 1=alarm" />
    37. 

  37. 		<DI_ITEM Index="30" Name="DI_CHB_Wall_Monitor_TC_Broken_Alarm" Device="" Addr="w21.14" Note="0=normal, 1=alarm" />
    38. 

  38. 		<DI_ITEM Index="31" Name="DI_CHB_Wall_Heater_On_FB" Device="" Addr="w21.15" Note="0=off, 1=on" />
    39. 

  39. 		<DI_ITEM Index="32" Name="DI_CHB_Wall_OT_SW_Alarm" Device="" Addr="w22.00" Note="0=normal, 1=alarm" />
    40. 

  40. 		<DI_ITEM Index="33" Name="" Device="" Addr="w22.01" Note="" />
    41. 

  41. 		<DI_ITEM Index="34" Name="DI_PN2_Pressure_SW" Device="" Addr="w22.02" Note="1=normal, 0=alarm, Interlock-PLC" />
    42. 

  42. 		<DI_ITEM Index="35" Name="DI_MFC1_Pressure_SW" Device="" Addr="w22.03" Note="1=normal, 0=alarm, Interlock-PLC" />
    43. 

  43. 		<DI_ITEM Index="36" Name="DI_MFC2_Pressure_SW" Device="" Addr="w22.04" Note="1=normal, 0=alarm, Interlock-PLC" />
    44. 

  44. 		<DI_ITEM Index="37" Name="DI_MFC3_Pressure_SW" Device="" Addr="w22.05" Note="1=normal, 0=alarm, Interlock-PLC" />
    45. 

  45. 		<DI_ITEM Index="38" Name="DI_MFC4_Pressure_SW" Device="" Addr="w22.06" Note="1=normal, 0=alarm, Interlock-PLC" />
    46. 

  46. 		<DI_ITEM Index="39" Name="DI_MFC5_Pressure_SW" Device="" Addr="w22.07" Note="1=normal, 0=alarm, Interlock-PLC" />
    47. 

  47. 		<DI_ITEM Index="40" Name="DI_MFC6_Pressure_SW" Device="" Addr="w22.08" Note="1=normal, 0=alarm, Interlock-PLC" />
    48. 

  48. 		<DI_ITEM Index="41" Name="DI_MFC7_Pressure_SW" Device="" Addr="w22.09" Note="1=normal, 0=alarm, Interlock-PLC" />
    49. 

  49. 		<DI_ITEM Index="42" Name="DI_MFC8_Pressure_SW" Device="" Addr="w22.10" Note="1=normal, 0=alarm, Interlock-PLC" />
    50. 

  50. 		<DI_ITEM Index="43" Name="DI_He_Pressure_SW" Device="" Addr="w22.11" Note="1=normal, 0=alarm, Interlock-PLC" />
    51. 

  51. 		<DI_ITEM Index="44" Name="DI_ESC_He_Pressure_100t_Gauge_Alarm" Device="" Addr="w22.12" Note="0=normal, 1=alarm" />
    52. 

  52. 		<DI_ITEM Index="45" Name="DI_Loadlock_Lid_Closed" Device="" Addr="w22.13" Note="Loadlock" />
    53. 

  53. 		<DI_ITEM Index="46" Name="DI_Loadlock_Arm_Extend_POS" Device="" Addr="w22.14" />
    54. 

  54. 		<DI_ITEM Index="47" Name="DI_Loadlock_Arm_Retract_POS" Device="" Addr="w22.15" />
    55. 

  55. 		<DI_ITEM Index="48" Name="DI_Small_Wafer_In_POS" Device="" Addr="w23.00" />
    56. 

  56. 		<DI_ITEM Index="49" Name="DI_Big_Wafer_In_POS" Device="" Addr="w23.01" />
    57. 

  57. 		<DI_ITEM Index="50" Name="DI_Loadlock_ATM_SW" Device="" Addr="w23.02" />
    58. 

  58. 		<DI_ITEM Index="51" Name="DI_Gas_Box_Door_SW" Device="" Addr="w23.03"  Note="1=normal, 0=alarm, Interlock-PLC" />
    59. 

  59. 		<DI_ITEM Index="52" Name="DI_Gas_Box_Pressure_SW" Device="" Addr="w23.04"  Note="1=normal, 0=alarm, Interlock-PLC" />
    60. 

  60. 		<DI_ITEM Index="53" Name="DI_Turbo_Pump_Water_Flow_Switch" Device="" Addr="w23.5" Note="0=off, 1=on"/>
    61. 

  61. 		<DI_ITEM Index="54" Name="" />
    62. 

  62. 		<DI_ITEM Index="55" Name="" />
    63. 

  63. 		<DI_ITEM Index="56" Name="" />
    64. 

  64. 		<DI_ITEM Index="57" Name="" />
    65. 

  65. 		<DI_ITEM Index="58" Name="" />
    66. 

  66. 		<DI_ITEM Index="59" Name="" />
    67. 

  67. 	</Dig_In>
    68. 

  68. 	<Dig_Out>
    69. 

  69. 		<DO_ITEM Index="0" Name="DO_PVN21" Device="" Addr="w0.00" />
    70. 

  70. 		<DO_ITEM Index="1" Name="DO_PVN22" Device="" Addr="w0.01" />
    71. 

  71. 		<DO_ITEM Index="2" Name="DO_PV11" Device="" Addr="w0.02" />
    72. 

  72. 		<DO_ITEM Index="3" Name="DO_PV12" Device="" Addr="w0.03" />
    73. 

  73. 		<DO_ITEM Index="4" Name="DO_PV21" Device="" Addr="w0.04" />
    74. 

  74. 		<DO_ITEM Index="5" Name="DO_PV22" Device="" Addr="w0.05" />
    75. 

  75. 		<DO_ITEM Index="6" Name="DO_PV31" Device="" Addr="w0.06" />
    76. 

  76. 		<DO_ITEM Index="7" Name="DO_PV32" Device="" Addr="w0.07" />
    77. 

  77. 		<DO_ITEM Index="8" Name="DO_PV41" Device="" Addr="w0.08" />
    78. 

  78. 		<DO_ITEM Index="9" Name="DO_PV42" Device="" Addr="w0.09" />
    79. 

  79. 		<DO_ITEM Index="10" Name="DO_N2_Valve" Device="" Addr="w0.10" />
    80. 

  80. 		<DO_ITEM Index="11" Name="DO_MFC1_Valve" Device="" Addr="w0.11" />
    81. 

  81. 		<DO_ITEM Index="12" Name="DO_MFC2_Valve" Device="" Addr="w0.12" />
    82. 

  82. 		<DO_ITEM Index="13" Name="DO_MFC3_Valve" Device="" Addr="w0.13" />
    83. 

  83. 		<DO_ITEM Index="14" Name="DO_MFC4_Valve" Device="" Addr="w0.14" />
    84. 

  84. 		<DO_ITEM Index="15" Name="DO_MFC5_Valve" Device="" Addr="w0.15" />
    85. 

  85. 		<DO_ITEM Index="16" Name="DO_MFC6_Valve" Device="" Addr="w1.00" />
    86. 

  86. 		<DO_ITEM Index="17" Name="DO_MFC7_Valve" Device="" Addr="w1.01" />
    87. 

  87. 		<DO_ITEM Index="18" Name="DO_MFC8_Valve" Device="" Addr="w1.02" />
    88. 

  88. 		<DO_ITEM Index="19" Name="DO_PVHe1" Device="" Addr="w1.03" />
    89. 

  89. 		<DO_ITEM Index="20" Name="DO_PVHe2" Device="" Addr="w1.04" />
    90. 

  90. 		<DO_ITEM Index="21" Name="DO_Gas_Final_Valve" Device="" Addr="w1.05" />
    91. 

  91. 		<DO_ITEM Index="22" Name="DO_Soft_Pumping_Valve" Device="" Addr="w1.06" />
    92. 

  92. 		<DO_ITEM Index="23" Name="DO_Fast_Pumping_Valve" Device="" Addr="w1.07" />
    93. 

  93. 		<DO_ITEM Index="24" Name="DO_Slit_Door_Open" Device="" Addr="w1.08" />
    94. 

  94. 		<DO_ITEM Index="25" Name="DO_Slit_Door_Close" Device="" Addr="w1.09" />
    95. 

  95. 		<DO_ITEM Index="26" Name="DO_Lift_Pin_Up" Device="" Addr="w1.10" />
    96. 

  96. 		<DO_ITEM Index="27" Name="DO_Lift_Pin_Down" Device="" Addr="w1.11" />
    97. 

  97. 		<DO_ITEM Index="28" Name="" Device="" Addr="w1.12" />
    98. 

  98. 		<DO_ITEM Index="29" Name="DO_Turbo_Pump_Pumping_Valve" Device="" Addr="w1.13" />
    99. 

  99. 		<DO_ITEM Index="30" Name="DO_Turbo_Pump_Purge_Valve" Device="" Addr="w1.14" />
    100. 

  100. 		<DO_ITEM Index="31" Name="DO_Guage_Valve" Device="" Addr="w1.15" />
    101. 

  101. 		<DO_ITEM Index="32" Name="DO_Reset_Signal" Device="" Addr="w2.00" Note="PC to PLC" />
    102. 

  102. 		<DO_ITEM Index="33" Name="DO_Valve_Heater_On" Device="" Addr="w2.01" Note="Heater On==1, Heater Off ==0" />
    103. 

  103. 		<DO_ITEM Index="34" Name="DO_Foreline_Heater_On" Device="" Addr="w2.02" Note="Heater On==1, Heater Off ==0" />
    104. 

  104. 		<DO_ITEM Index="35" Name="DO_CHB_Wall_Heater_On" Device="" Addr="w2.03" Note="Heater On==1, Heater Off ==0" />
    105. 

  105. 		<DO_ITEM Index="36" Name="DO_Red_Light" Device="" Addr="w2.04" Note="Warning Light" />
    106. 

  106. 		<DO_ITEM Index="37" Name="DO_Yellow_Light" Device="" Addr="w2.05" />
    107. 

  107. 		<DO_ITEM Index="38" Name="DO_Green_Light" Device="" Addr="w2.06" />
    108. 

  108. 		<DO_ITEM Index="39" Name="DO_Blue_Light" Device="" Addr="w2.07" />
    109. 

  109. 		<DO_ITEM Index="40" Name="DO_Buzzer1" Device="" Addr="w2.08" />
    110. 

  110. 		<DO_ITEM Index="41" Name="DO_Buzzer2" Device="" Addr="w2.09" />
    111. 

  111. 		<DO_ITEM Index="42" Name="DO_Loadlock_Pumping_Valve" Device="" Addr="w2.10" Note="Loadlock" />
    112. 

  112. 		<DO_ITEM Index="43" Name="DO_Loadlock_Vent_Valve" Device="" Addr="w2.11" />
    113. 

  113. 		<DO_ITEM Index="44" Name="DO_Loadlock_Arm_Extend" Device="" Addr="w2.12" />
    114. 

  114. 		<DO_ITEM Index="45" Name="DO_Loadlock_Arm_Retract" Device="" Addr="w2.13" />
    115. 

  115. 		<DO_ITEM Index="46" Name="" />
    116. 

  116. 		<DO_ITEM Index="47" Name="" />
    117. 

  117. 		<DO_ITEM Index="48" Name="" />
    118. 

  118. 		<DO_ITEM Index="49" Name="" />
    119. 

  119. 		<DO_ITEM Index="50" Name="" />
    120. 

  120. 		<DO_ITEM Index="51" Name="" />
    121. 

  121. 		<DO_ITEM Index="52" Name="" />
    122. 

  122. 		<DO_ITEM Index="53" Name="" />
    123. 

  123. 		<DO_ITEM Index="54" Name="" />
    124. 

  124. 		<DO_ITEM Index="55" Name="" />
    125. 

  125. 		<DO_ITEM Index="56" Name="" />
    126. 

  126. 		<DO_ITEM Index="57" Name="" />
    127. 

  127. 		<DO_ITEM Index="58" Name="" />
    128. 

  128. 		<DO_ITEM Index="59" Name="" />
    129. 

  129. 	</Dig_Out>
    130. 

  130. 	<Ana_Out>
    131. 

  131. 		<AO_ITEM Index="0" Name="AO_MFC1_Flow_Setpoint"              BufferOffset="0" Device=""  Addr="d1000" Note="MFC" />
    132. 

  132. 		<AO_ITEM Index="1" Name="AO_MFC2_Flow_Setpoint"              BufferOffset="2" Device=""  Addr="d1002" Note="MFC" />
    133. 

  133. 		<AO_ITEM Index="2" Name="AO_MFC3_Flow_Setpoint"              BufferOffset="4" Device=""  Addr="d1004" Note="MFC" />
    134. 

  134. 		<AO_ITEM Index="3" Name="AO_MFC4_Flow_Setpoint"              BufferOffset="6" Device=""  Addr="d1006" Note="MFC" />
    135. 

  135. 		<AO_ITEM Index="4" Name="AO_MFC5_Flow_Setpoint"              BufferOffset="8" Device=""  Addr="d1008" Note="MFC" />
    136. 

  136. 		<AO_ITEM Index="5" Name="AO_MFC6_Flow_Setpoint"              BufferOffset="10" Device="" Addr="d1010" Note="MFC" />
    137. 

  137. 		<AO_ITEM Index="6" Name="AO_MFC7_Flow_Setpoint"              BufferOffset="12" Device="" Addr="d1012" Note="MFC" />
    138. 

  138. 		<AO_ITEM Index="7" Name="AO_MFC8_Flow_Setpoint"              BufferOffset="14" Device="" Addr="d1014" Note="MFC" />
    139. 

  139. 		<AO_ITEM Index="8" Name="AO_He_Flow_Setpoint"                BufferOffset="16" Device="" Addr="d1016" Note="MFC" />
    140. 

  140. 		<AO_ITEM Index="9" Name="AO_Turbo_Pump_N2_Flow_Setpoint"     BufferOffset="18" Device="" Addr="d1018" Note="MFC" />
    141. 

  141. 		<AO_ITEM Index="10" Name="AO_Valve_Temperature_Setpoint"     BufferOffset="20" Device="" Addr="d1020" Note="阀门加热设定温度" />
    142. 

  142. 		<AO_ITEM Index="11" Name="AO_Valve_Temp_Limit_Setpoint"      BufferOffset="22" Device="" Addr="d1022" Note="Temp Limit" />
    143. 

  143. 		<AO_ITEM Index="12" Name="AO_Foreline_Temperature_Setpoint"  BufferOffset="24" Device="" Addr="d1024" Note="前级管道设定温度" />
    144. 

  144. 		<AO_ITEM Index="13" Name="AO_Foreline_Temp_Limit_Setpoint"   BufferOffset="26" Device="" Addr="d1026" Note="Temp Limit" />
    145. 

  145. 		<AO_ITEM Index="14" Name="AO_CHB_Wall_Temperature_Setpoint"  BufferOffset="28" Device="" Addr="d1028" Note="腔体壁设定温度" />
    146. 

  146. 		<AO_ITEM Index="15" Name="AO_CHB_Wall_Temp_Limit_Setpoint"   BufferOffset="30" Device="" Addr="d1030" Note="Temp Limit" />
    147. 

  147. 		<AO_ITEM Index="16" Name="AO_Heartbeat"                      BufferOffset="32" Device="" Addr="d1032" Note="PC to PLC" />
    148. 

  148. 		<AO_ITEM Index="17" Name="AO_ESC_He_Pressure_Setpoint"       BufferOffset="34" Device=""       Addr="d1034" Note="He气体压力设定" />
    149. 

  149. 		<AO_ITEM Index="18" Name="AO_ESC_He_Control_Mode"            BufferOffset="36" Device=""       Addr="d1036" Note="He气体控制模式" />
    150. 

  150. 		<AO_ITEM Index="19" Name="" />
    151. 

  151. 		<AO_ITEM Index="20" Name="" />
    152. 

  152. 		<AO_ITEM Index="21" Name="" />
    153. 

  153. 		<AO_ITEM Index="22" Name="" />
    154. 

  154. 		<AO_ITEM Index="23" Name="" />
    155. 

  155. 		<AO_ITEM Index="24" Name="" />
    156. 

  156. 		<AO_ITEM Index="25" Name="" />
    157. 

  157. 		<AO_ITEM Index="26" Name="" />
    158. 

  158. 		<AO_ITEM Index="27" Name="" />
    159. 

  159. 		<AO_ITEM Index="28" Name="" />
    160. 

  160. 		<AO_ITEM Index="29" Name="" />
    161. 

  161. 		<AO_ITEM Index="30" Name="" />
    162. 

  162. 		<AO_ITEM Index="31" Name="" />
    163. 

  163. 		<AO_ITEM Index="32" Name="" />
    164. 

  164. 		<AO_ITEM Index="33" Name="" />
    165. 

  165. 		<AO_ITEM Index="34" Name="" />
    166. 

  166. 		<AO_ITEM Index="35" Name="" />
    167. 

  167. 		<AO_ITEM Index="36" Name="" />
    168. 

  168. 		<AO_ITEM Index="37" Name="" />
    169. 

  169. 		<AO_ITEM Index="38" Name="" />
    170. 

  170. 		<AO_ITEM Index="39" Name="" />
    171. 

  171. 		<AO_ITEM Index="40" Name="" />
    172. 

  172. 		<AO_ITEM Index="41" Name="" />
    173. 

  173. 		<AO_ITEM Index="42" Name="" />
    174. 

  174. 		<AO_ITEM Index="43" Name="" />
    175. 

  175. 		<AO_ITEM Index="44" Name="" />
    176. 

  176. 		<AO_ITEM Index="45" Name="" />
    177. 

  177. 		<AO_ITEM Index="46" Name="" />
    178. 

  178. 		<AO_ITEM Index="47" Name="" />
    179. 

  179. 		<AO_ITEM Index="48" Name="" />
    180. 

  180. 		<AO_ITEM Index="49" Name="" />
    181. 

  181. 	</Ana_Out>
    182. 

  182. 	<Ana_In>
    183. 

  183. 		<AI_ITEM Index="0" Name="AI_Chamber_Pressure_10t" BufferOffset="0" Device="" Addr="d2000" />
    184. 

  184. 		<AI_ITEM Index="1" Name="AI_Process_Pressure_100mt" BufferOffset="2" Device="" Addr="d2002" />
    185. 

  185. 		<AI_ITEM Index="2" Name="AI_Foreline_Pressure_760t" BufferOffset="4" Device="" Addr="d2004" />
    186. 

  186. 		<AI_ITEM Index="3" Name="AI_ESC_He_Pressure_100t" BufferOffset="6" Device="" Addr="d2006" />
    187. 

  187. 		<AI_ITEM Index="4" Name="AI_MFC1_Flow" BufferOffset="8" Device="" Addr="d2008" Note="MFC" />
    188. 

  188. 		<AI_ITEM Index="5" Name="AI_MFC2_Flow" BufferOffset="10" Device="" Addr="d2010" Note="MFC" />
    189. 

  189. 		<AI_ITEM Index="6" Name="AI_MFC3_Flow" BufferOffset="12" Device="" Addr="d2012" Note="MFC" />
    190. 

  190. 		<AI_ITEM Index="7" Name="AI_MFC4_Flow" BufferOffset="14" Device="" Addr="d2014" Note="MFC" />
    191. 

  191. 		<AI_ITEM Index="8" Name="AI_MFC5_Flow" BufferOffset="16" Device="" Addr="d2016" Note="MFC" />
    192. 

  192. 		<AI_ITEM Index="9" Name="AI_MFC6_Flow" BufferOffset="18" Device="" Addr="d2018" Note="MFC" />
    193. 

  193. 		<AI_ITEM Index="10" Name="AI_MFC7_Flow" BufferOffset="20" Device="" Addr="d2020" Note="MFC" />
    194. 

  194. 		<AI_ITEM Index="11" Name="AI_MFC8_Flow" BufferOffset="22" Device="" Addr="d2022" Note="MFC" />
    195. 

  195. 		<AI_ITEM Index="12" Name="AI_ESC_He_Flow" BufferOffset="24" Device="" Addr="d2024" Note="MFC" />
    196. 

  196. 		<AI_ITEM Index="13" Name="AI_Turbo_Pump_N2_Flow" BufferOffset="26" Device="" Addr="d2026" Note="MFC" />
    197. 

  197. 		<AI_ITEM Index="14" Name="AI_Valve_Control_TC_Temp" BufferOffset="28" Device="" Addr="d2028" Note="TC temp" />
    198. 

  198. 		<AI_ITEM Index="15" Name="AI_Valve_Monitor_TC_Temp" BufferOffset="30" Device="" Addr="d2030" Note="TC temp" />
    199. 

  199. 		<AI_ITEM Index="16" Name="AI_Fline_Control_TC_Temp" BufferOffset="32" Device="" Addr="d2032" Note="TC temp" />
    200. 

  200. 		<AI_ITEM Index="17" Name="AI_Fline_Monitor_TC_Temp" BufferOffset="34"  Device="" Addr="d2034" Note="TC temp" />
    201. 

  201. 		<AI_ITEM Index="18" Name="AI_CHB_Wall_Control_TC_Temp" BufferOffset="36"  Device="" Addr="d2036" Note="TC temp" />
    202. 

  202. 		<AI_ITEM Index="19" Name="AI_CHB_Wall_Monitor_TC_Temp" BufferOffset="38"  Device="" Addr="d2038" Note="TC temp" />
    203. 

  203. 		<AI_ITEM Index="20" Name="AI_Coolant_Inlet_Temp" BufferOffset="40" Device="" Addr="d2040" Note="TC temp" />
    204. 

  204. 		<AI_ITEM Index="21" Name="AI_Coolant_Outlet_Temp" BufferOffset="42" Device="" Addr="d2042" Note="TC temp" />
    205. 

  205. 		<AI_ITEM Index="22" Name="AI_Heartbeat_FB" BufferOffset="44"  Device="" Addr="d2044" Note="PLC to PC" />
    206. 

  206. 		<AI_ITEM Index="23" Name="AI_Second" BufferOffset="46" Device="" Addr="d2046" />
    207. 

  207. 		<AI_ITEM Index="24" Name="AI_Minute" BufferOffset="48"  Device="" Addr="d2048" />
    208. 

  208. 		<AI_ITEM Index="25" Name="AI_Time" BufferOffset="50"  Device="" Addr="d2050" />
    209. 

  209. 		<AI_ITEM Index="26" Name="AI_Day" BufferOffset="52"  Device="" Addr="d2052" />
    210. 

  210. 		<AI_ITEM Index="27" Name="AI_Month" BufferOffset="54" Device="" Addr="d2054" />
    211. 

  211. 		<AI_ITEM Index="28" Name="AI_Year" BufferOffset="56"  Device="" Addr="d2056" />
    212. 

  212. 		<AI_ITEM Index="29" Name="AI_Chamber_Pressure_760t" BufferOffset="58"  Device="" Addr="d2058" />
    213. 

  213. 		<AI_ITEM Index="30" Name="AI_LL_Pressure_760t" BufferOffset="60"  Device="" Addr="d2060" Note="Loadlock" />
    214. 

  214. 		<AI_ITEM Index="31" Name="AI_Chamber_Pressure_Virtual" BufferOffset="62"  Addr="d2062" Note="VG PP" />
    215. 

  215. 		<AI_ITEM Index="32" Name="" />
    216. 

  216. 		<AI_ITEM Index="33" Name="" />
    217. 

  217. 		<AI_ITEM Index="34" Name="" />
    218. 

  218. 		<AI_ITEM Index="35" Name="" />
    219. 

  219. 		<AI_ITEM Index="36" Name="" />
    220. 

  220. 		<AI_ITEM Index="37" Name="" />
    221. 

  221. 		<AI_ITEM Index="38" Name="" />
    222. 

  222. 		<AI_ITEM Index="39" Name="" />
    223. 

  223. 		<AI_ITEM Index="40" Name="" />
    224. 

  224. 		<AI_ITEM Index="41" Name="" />
    225. 

  225. 		<AI_ITEM Index="42" Name="" />
    226. 

  226. 		<AI_ITEM Index="43" Name="" />
    227. 

  227. 		<AI_ITEM Index="44" Name="" />
    228. 

  228. 		<AI_ITEM Index="45" Name="" />
    229. 

  229. 		<AI_ITEM Index="46" Name="" />
    230. 

  230. 		<AI_ITEM Index="47" Name="" />
    231. 

  231. 		<AI_ITEM Index="48" Name="" />
    232. 

  232. 		<AI_ITEM Index="49" Name="" />
    233. 

  233. 	</Ana_In>
    234. 

  234. </IO_DEFINE>
    235. 

  235.