Головна сторінка Огляд Довідка
Реєстрація Увійти
JetPlasma
/
CyberX8
Слідкувати 2
Зірка 0
Відгалуження 0
Файли Проблеми 0 Запити на злиття 0 Wiki
Дерево: 36274fb83c
Гілки Теги
CyberX8
/
CyberX8_Simulator
/
Config
/
_ioDefineKepler2300.xml

_ioDefineKepler2300.xml 24 KB
Історія Запис

123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348 
  1. <?xml version='1.0'?>
    2. 

  2. <IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>
    3. 

  3. 

  4. 	<!--文件根据210-0062-000-REF IO List_PM_K23 20230531.xlsx生成-->
    5. 

  5. 	<!--生成时间：05/31/2023 13:04:28-->
    6. 

  6. 	<Dig_In>
    7. 

  7. 		<DI_ITEM Index="0" Name="DI_Lid_Closed" Device="" Addr="w20.00" />
    8. 

  8. 		<DI_ITEM Index="1" Name="DI_ATM_Switch" Device="ATM_SW" Addr="w20.01" />
    9. 

  9. 		<DI_ITEM Index="2" Name="DI_VAC_Switch" Device="" Addr="w20.02" />
    10. 

  10. 		<DI_ITEM Index="3" Name="" Device="" Addr="w20.03" Note="" />
    11. 

  11. 		<DI_ITEM Index="4" Name="DI_Water_Leak_Sensor" Device="" Addr="w20.04" />
    12. 

  12. 		<DI_ITEM Index="5" Name="DI_Lift_Pin_Up_POS" Device="" Addr="w20.05" />
    13. 

  13. 		<DI_ITEM Index="6" Name="DI_Lift_Pin_Down_POS" Device="" Addr="w20.06" />
    14. 

  14. 		<DI_ITEM Index="7" Name="DI_Source_RF_Generator_Interlock" Device="" Addr="w20.07" />
    15. 

  15. 		<DI_ITEM Index="8" Name="DI_Source_RF_Fan" Device="" Addr="w20.08" />
    16. 

  16. 		<DI_ITEM Index="9" Name="DI_Turbo_Pump_Interlock" Device="" Addr="w20.09" />
    17. 

  17. 		<DI_ITEM Index="10" Name="DI_Slit_Door_Open_POS" Device="" Addr="w20.10" />
    18. 

  18. 		<DI_ITEM Index="11" Name="DI_Slit_Door_Close_POS" Device="" Addr="w20.11" />
    19. 

  19. 		<DI_ITEM Index="12" Name="DI_CDA_Pressure_Switch" Device="" Addr="w20.12" />
    20. 

  20. 		<DI_ITEM Index="13" Name="" Device="" Addr="" Note="" />
    21. 

  21. 		<DI_ITEM Index="14" Name="" Device="" Addr="" />
    22. 

  22. 		<DI_ITEM Index="15" Name="DI_Chamber_Pressure_10t_Guage_Alarm" Device="VG_PPH" Addr="w20.15" />
    23. 

  23. 		<DI_ITEM Index="16" Name="DI_Process_Pressure_100mt_Guage_Alarm" Device="VG_PPL" Addr="w21.00" />
    24. 

  24. 		<DI_ITEM Index="17" Name="" Device="VG_CHB" Addr="" Note="" />
    25. 

  25. 		<DI_ITEM Index="18" Name="DI_Foreline_Pressure_10t_Guage_Alarm" Device="VG_FL" Addr="w21.02" />
    26. 

  26. 		<DI_ITEM Index="19" Name="" Device="LL_VG_CHB" Addr="w21.03" Note="" />
    27. 

  27. 		<DI_ITEM Index="20" Name="DI_S_Valve_TC_Deviation_out_of_range" Device="" Addr="w21.04" Note="以前是Valve" />
    28. 

  28. 		<DI_ITEM Index="21" Name="DI_S_Valve_Control_TC_Broken_Alarm" Device="" Addr="w21.05" />
    29. 

  29. 		<DI_ITEM Index="22" Name="DI_S_Valve_Monitor_TC_Broken_Alarm" Device="" Addr="w21.06" />
    30. 

  30. 		<DI_ITEM Index="23" Name="DI_S_Valve_Heater_On_FB" Device="" Addr="w21.07" />
    31. 

  31. 		<DI_ITEM Index="24" Name="DI_Foreline_TC_Deviation_out_of_range" Device="" Addr="w21.08" />
    32. 

  32. 		<DI_ITEM Index="25" Name="DI_Foreline_Control_TC_Broken_Alarm" Device="" Addr="w21.09" />
    33. 

  33. 		<DI_ITEM Index="26" Name="DI_Foreline_Monitor_TC_Broken_Alarm" Device="" Addr="w21.10" />
    34. 

  34. 		<DI_ITEM Index="27" Name="DI_Foreline_Heater_On_FB" Device="" Addr="w21.11" />
    35. 

  35. 		<DI_ITEM Index="28" Name="DI_CHB_Wall_TC_Deviation_out_of_range" Device="" Addr="w21.12" />
    36. 

  36. 		<DI_ITEM Index="29" Name="DI_CHB_Wall_Control_TC_Broken_Alarm" Device="" Addr="w21.13" />
    37. 

  37. 		<DI_ITEM Index="30" Name="DI_CHB_Wall_Monitor_TC_Broken_Alarm" Device="" Addr="w21.14" />
    38. 

  38. 		<DI_ITEM Index="31" Name="DI_CHB_Wall_Heater_On_FB" Device="" Addr="w21.15" />
    39. 

  39. 		<DI_ITEM Index="32" Name="DI_CHB_Wall_OT_Switch_Alarm" Device="" Addr="w22.00" />
    40. 

  40. 		<DI_ITEM Index="33" Name="" />
    41. 

  41. 		<DI_ITEM Index="34" Name="DI_PN2_Pressure_Switch" Device="PGN2" Addr="w22.02" Note="Gas Box" />
    42. 

  42. 		<DI_ITEM Index="35" Name="DI_MFC1_Pressure_Switch" Device="PG1" Addr="w22.03" Note="Gas Box" />
    43. 

  43. 		<DI_ITEM Index="36" Name="DI_MFC2_Pressure_Switch" Device="PG2" Addr="w22.04" Note="Gas Box" />
    44. 

  44. 		<DI_ITEM Index="37" Name="DI_MFC3_Pressure_Switch" Device="PG3" Addr="w22.05" Note="Gas Box" />
    45. 

  45. 		<DI_ITEM Index="38" Name="DI_MFC4_Pressure_Switch" Device="PG4" Addr="w22.06" Note="Gas Box" />
    46. 

  46. 		<DI_ITEM Index="39" Name="DI_MFC5_Pressure_Switch" Device="PG5" Addr="w22.07" Note="Gas Box" />
    47. 

  47. 		<DI_ITEM Index="40" Name="DI_MFC6_Pressure_Switch" Device="PG6" Addr="w22.08" Note="Gas Box" />
    48. 

  48. 		<DI_ITEM Index="41" Name="DI_MFC7_Pressure_Switch" Device="PG7" Addr="w22.09" Note="Gas Box" />
    49. 

  49. 		<DI_ITEM Index="42" Name="DI_MFC8_Pressure_Switch" Device="PG8" Addr="w22.10" Note="Gas Box" />
    50. 

  50. 		<DI_ITEM Index="43" Name="DI_ESC_He_Pressure_Switch" Device="PGHe" Addr="w22.11" Note="ESC配置" />
    51. 

  51. 		<DI_ITEM Index="44" Name="DI_ESC_He_Pressure_100t_Guage_Alarm" Device="VG_He" Addr="w22.12" />
    52. 

  52. 		<DI_ITEM Index="45" Name="" Device="" Addr="" Note="" />
    53. 

  53. 		<DI_ITEM Index="46" Name="" Device="" Addr="" />
    54. 

  54. 		<DI_ITEM Index="47" Name="" Device="" Addr="" />
    55. 

  55. 		<DI_ITEM Index="48" Name="" Device="" Addr="" />
    56. 

  56. 		<DI_ITEM Index="49" Name="" Device="" Addr="" />
    57. 

  57. 		<DI_ITEM Index="50" Name="" Device="LL_ATM_SW" Addr="" />
    58. 

  58. 		<DI_ITEM Index="51" Name="DI_Gas_Box_Door_Switch" Device="" Addr="w23.03" />
    59. 

  59. 		<DI_ITEM Index="52" Name="DI_Gas_Box_Pressure_Switch" Device="" Addr="w23.04" />
    60. 

  60. 		<DI_ITEM Index="53" Name="DI_Turbo_Pump_Water_Flow_Switch" Device="" Addr="w23.05" />
    61. 

  61. 		<DI_ITEM Index="54" Name="DI_Source_RF_Water_Flow_Switch" Device="" Addr="w23.06" />
    62. 

  62. 		<DI_ITEM Index="55" Name="" />
    63. 

  63. 		<DI_ITEM Index="56" Name="DI_P_Valve_TC_Deviation_out_of_range" Device="" Addr="w23.08" />
    64. 

  64. 		<DI_ITEM Index="57" Name="DI_P_Valve_Control_TC_Broken_Alarm" Device="" Addr="w23.09" />
    65. 

  65. 		<DI_ITEM Index="58" Name="DI_P_Valve_Monitor_TC_Broken_Alarm" Device="" Addr="w23.10" />
    66. 

  66. 		<DI_ITEM Index="59" Name="DI_P_Valve_Heater_On_FB" Device="" Addr="w23.11" />
    67. 

  67. 		<DI_ITEM Index="60" Name="" />
    68. 

  68. 		<DI_ITEM Index="61" Name="DI_Gas_Line_TC_Deviation_out_of_range" Device="" Addr="w23.13" />
    69. 

  69. 		<DI_ITEM Index="62" Name="DI_Gas_Line_Control_TC_Broken_Alarm" Device="" Addr="w23.14" />
    70. 

  70. 		<DI_ITEM Index="63" Name="DI_Gas_Line_Monitor_TC_Broken_Alarm" Device="" Addr="w23.15" />
    71. 

  71. 		<DI_ITEM Index="64" Name="DI_Gas_Line_Heater_On_FB" Device="" Addr="w24.00" />
    72. 

  72. 		<DI_ITEM Index="65" Name="DI_Gas_Line_OT_Switch_Alarm" Device="" Addr="w24.01" />
    73. 

  73. 		<DI_ITEM Index="66" Name="DI_S_Valve_OT_Switch_Alarm" Device="" Addr="w24.02" />
    74. 

  74. 		<DI_ITEM Index="67" Name="DI_Foreline_OT_Switch_Alarm" Device="" Addr="w24.03" />
    75. 

  75. 		<DI_ITEM Index="68" Name="" />
    76. 

  76. 		<DI_ITEM Index="69" Name="" />
    77. 

  77. 		<DI_ITEM Index="70" Name="" />
    78. 

  78. 		<DI_ITEM Index="71" Name="" />
    79. 

  79. 		<DI_ITEM Index="72" Name="DI_Lid_Up_Button" Device="" Addr="w24.08" />
    80. 

  80. 		<DI_ITEM Index="73" Name="DI_Lid_Down_Button" Device="" Addr="w24.09" />
    81. 

  81. 		<DI_ITEM Index="74" Name="DI_Lid_Up_Limit_Pos_SW" Device="" Addr="w24.10" />
    82. 

  82. 		<DI_ITEM Index="75" Name="DI_Lid_Down_Limit_Pos_SW" Device="" Addr="w24.11" />
    83. 

  83. 		<DI_ITEM Index="76" Name="DI_Arm_Not_Extend_to_PM" Device="" Addr="w24.12" />
    84. 

  84. 		<DI_ITEM Index="77" Name="DI_EFEM_Door_Colse" Device="" Addr="w24.13" />
    85. 

  85. 		<DI_ITEM Index="78" Name="DI_ESC_Inner_Coolant_Flow_SW" Device="" Addr="w24.14" />
    86. 

  86. 		<DI_ITEM Index="79" Name="DI_ESC_Outer_Coolant_Flow_SW" Device="" Addr="w24.15" />
    87. 

  87. 		<DI_ITEM Index="80" Name="DI_Top_Plate_Coolant_Flow_SW" Device="" Addr="w25.00" />
    88. 

  88. 		<DI_ITEM Index="81" Name="" />
    89. 

  89. 		<DI_ITEM Index="82" Name="" />
    90. 

  90. 		<DI_ITEM Index="83" Name="DI_Lid_Servo_Alarm" Device="" Addr="w25.03" />
    91. 

  91. 		<DI_ITEM Index="84" Name="DI_ADAM_communication_Alarm" Device="" Addr="w25.04" />
    92. 

  92. 		<DI_ITEM Index="85" Name="" />
    93. 

  93. 		<DI_ITEM Index="86" Name="" />
    94. 

  94. 		<DI_ITEM Index="87" Name="DI_ESC_inner_coolant_inlet_TC_Broken_Alarm" Device="" Addr="w25.07" />
    95. 

  95. 		<DI_ITEM Index="88" Name="DI_ESC_inner_coolant_outlet_TC_Broken_Alarm" Device="" Addr="w25.08" />
    96. 

  96. 		<DI_ITEM Index="89" Name="DI_ESC_outer_coolant_inlet_TC_Broken_Alarm" Device="" Addr="w25.09" />
    97. 

  97. 		<DI_ITEM Index="90" Name="DI_ESC_outer_coolant_outlet_TC_Broken_Alarm" Device="" Addr="w25.10" />
    98. 

  98. 		<DI_ITEM Index="91" Name="DI_Top_Plate_coolant_inlet_TC_Broken_Alarm" Device="" Addr="w25.11" />
    99. 

  99. 		<DI_ITEM Index="92" Name="DI_Top_Plate_coolant_outlet_TC_Broken_Alarm" Device="" Addr="w25.12" />
    100. 

  100. 		<DI_ITEM Index="93" Name="" />
    101. 

  101. 		<DI_ITEM Index="94" Name="" />
    102. 

  102. 		<DI_ITEM Index="95" Name="" />
    103. 

  103. 		<DI_ITEM Index="96" Name="" />
    104. 

  104. 		<DI_ITEM Index="97" Name="" />
    105. 

  105. 		<DI_ITEM Index="98" Name="" />
    106. 

  106. 		<DI_ITEM Index="99" Name="" />
    107. 

  107. 		<DI_ITEM Index="100" Name="" />
    108. 

  108. 		<DI_ITEM Index="101" Name="" />
    109. 

  109. 		<DI_ITEM Index="102" Name="" />
    110. 

  110. 		<DI_ITEM Index="103" Name="" />
    111. 

  111. 		<DI_ITEM Index="104" Name="" />
    112. 

  112. 		<DI_ITEM Index="105" Name="" />
    113. 

  113. 		<DI_ITEM Index="106" Name="" />
    114. 

  114. 		<DI_ITEM Index="107" Name="" />
    115. 

  115. 		<DI_ITEM Index="108" Name="" />
    116. 

  116. 		<DI_ITEM Index="109" Name="" />
    117. 

  117. 		<DI_ITEM Index="110" Name="" />
    118. 

  118. 		<DI_ITEM Index="111" Name="" />
    119. 

  119. 	</Dig_In>
    120. 

  120. 	<Dig_Out>
    121. 

  121. 		<DO_ITEM Index="0" Name="DO_PVN21" Device="GPVN21" Addr="w0.00" Note="Gas Box" />
    122. 

  122. 		<DO_ITEM Index="1" Name="DO_PVN22" Device="GPVN22" Addr="w0.01" Note="Gas Box" />
    123. 

  123. 		<DO_ITEM Index="2" Name="DO_PV11" Device="GPV11" Addr="w0.02" Note="Gas Box" />
    124. 

  124. 		<DO_ITEM Index="3" Name="DO_PV12" Device="GPV12" Addr="w0.03" Note="Gas Box" />
    125. 

  125. 		<DO_ITEM Index="4" Name="DO_PV21" Device="GPV21" Addr="w0.04" Note="Gas Box" />
    126. 

  126. 		<DO_ITEM Index="5" Name="DO_PV22" Device="GPV22" Addr="w0.05" Note="Gas Box" />
    127. 

  127. 		<DO_ITEM Index="6" Name="DO_PV31" Device="GPV31" Addr="w0.06" Note="Gas Box" />
    128. 

  128. 		<DO_ITEM Index="7" Name="DO_PV32" Device="GPV32" Addr="w0.07" Note="Gas Box" />
    129. 

  129. 		<DO_ITEM Index="8" Name="DO_PV41" Device="GPV41" Addr="w0.08" Note="Gas Box" />
    130. 

  130. 		<DO_ITEM Index="9" Name="DO_PV42" Device="GPV42" Addr="w0.09" Note="Gas Box" />
    131. 

  131. 		<DO_ITEM Index="10" Name="DO_N2_Valve" Device="GPVN2" Addr="w0.10" Note="Gas Box" />
    132. 

  132. 		<DO_ITEM Index="11" Name="DO_MFC1_Valve" Device="GPV1" Addr="w0.11" Note="Gas Box" />
    133. 

  133. 		<DO_ITEM Index="12" Name="DO_MFC2_Valve" Device="GPV2" Addr="w0.12" Note="Gas Box" />
    134. 

  134. 		<DO_ITEM Index="13" Name="DO_MFC3_Valve" Device="GPV3" Addr="w0.13" Note="Gas Box" />
    135. 

  135. 		<DO_ITEM Index="14" Name="DO_MFC4_Valve" Device="GPV4" Addr="w0.14" Note="Gas Box" />
    136. 

  136. 		<DO_ITEM Index="15" Name="DO_MFC5_Valve" Device="GPV5" Addr="w0.15" Note="Gas Box" />
    137. 

  137. 		<DO_ITEM Index="16" Name="DO_MFC6_Valve" Device="GPV6" Addr="w1.00" Note="Gas Box" />
    138. 

  138. 		<DO_ITEM Index="17" Name="DO_MFC7_Valve" Device="GPV7" Addr="w1.01" Note="Gas Box" />
    139. 

  139. 		<DO_ITEM Index="18" Name="DO_MFC8_Valve" Device="GPV8" Addr="w1.02" Note="Gas Box" />
    140. 

  140. 		<DO_ITEM Index="19" Name="DO_PVHe1" Device="GPVHe1" Addr="w1.03" Note="ESC配置" />
    141. 

  141. 		<DO_ITEM Index="20" Name="DO_PVHe2" Device="GPVHe2" Addr="w1.04" />
    142. 

  142. 		<DO_ITEM Index="21" Name="DO_Gas_Final_Valve" Device="PV1" Addr="w1.05" />
    143. 

  143. 		<DO_ITEM Index="22" Name="DO_Soft_Pumping_Valve" Device="PV2" Addr="w1.06" />
    144. 

  144. 		<DO_ITEM Index="23" Name="DO_Fast_Pumping_Valve" Device="PV3" Addr="w1.07" />
    145. 

  145. 		<DO_ITEM Index="24" Name="DO_Slit_Door_Open" Device="PV4" Addr="w1.08" />
    146. 

  146. 		<DO_ITEM Index="25" Name="DO_Slit_Door_Close" Device="PV4" Addr="w1.09" />
    147. 

  147. 		<DO_ITEM Index="26" Name="DO_Lift_Pin_Up" Device="PV5" Addr="w1.10" />
    148. 

  148. 		<DO_ITEM Index="27" Name="DO_Lift_Pin_Down" Device="PV5" Addr="w1.11" />
    149. 

  149. 		<DO_ITEM Index="28" Name="" />
    150. 

  150. 		<DO_ITEM Index="29" Name="DO_Turbo_Pump_Pumping_Valve" Device="PV6" Addr="w1.13" />
    151. 

  151. 		<DO_ITEM Index="30" Name="DO_Turbo_Pump_Purge_Valve" Device="PV7" Addr="w1.14" />
    152. 

  152. 		<DO_ITEM Index="31" Name="DO_Guage_Valve" Device="PV8" Addr="w1.15" />
    153. 

  153. 		<DO_ITEM Index="32" Name="DO_Reset_Signal" Device="" Addr="w2.00" />
    154. 

  154. 		<DO_ITEM Index="33" Name="DO_S_Valve_Heater_On" Device="" Addr="w2.01" Note="以前是Valve" />
    155. 

  155. 		<DO_ITEM Index="34" Name="DO_Foreline_Heater_On" Device="" Addr="w2.02" />
    156. 

  156. 		<DO_ITEM Index="35" Name="DO_CHB_Wall_Heater_On" Device="" Addr="w2.03" />
    157. 

  157. 		<DO_ITEM Index="36" Name="" Device="" Addr="" Note="" />
    158. 

  158. 		<DO_ITEM Index="37" Name="" Device="" Addr="" />
    159. 

  159. 		<DO_ITEM Index="38" Name="" Device="" Addr="" />
    160. 

  160. 		<DO_ITEM Index="39" Name="" Device="" Addr="" />
    161. 

  161. 		<DO_ITEM Index="40" Name="" Device="" Addr="" />
    162. 

  162. 		<DO_ITEM Index="41" Name="" Device="" Addr="" />
    163. 

  163. 		<DO_ITEM Index="42" Name="" Device="" Addr="" />
    164. 

  164. 		<DO_ITEM Index="43" Name="" Device="" Addr="" />
    165. 

  165. 		<DO_ITEM Index="44" Name="" Device="" Addr="" />
    166. 

  166. 		<DO_ITEM Index="45" Name="" Device="" Addr="" />
    167. 

  167. 		<DO_ITEM Index="46" Name="DO_P_Valve_Heater_On" Device="" Addr="w2.14" />
    168. 

  168. 		<DO_ITEM Index="47" Name="DO_Gas_Line_Heater_On" Device="" Addr="w2.15" />
    169. 

  169. 		<DO_ITEM Index="48" Name="" />
    170. 

  170. 		<DO_ITEM Index="49" Name="" />
    171. 

  171. 		<DO_ITEM Index="50" Name="DO_Lid_Up" Device="" Addr="w3.02" />
    172. 

  172. 		<DO_ITEM Index="51" Name="DO_Lid_Down" Device="" Addr="w3.03" />
    173. 

  173. 		<DO_ITEM Index="52" Name="" />
    174. 

  174. 		<DO_ITEM Index="53" Name="" />
    175. 

  175. 		<DO_ITEM Index="54" Name="" />
    176. 

  176. 		<DO_ITEM Index="55" Name="" />
    177. 

  177. 		<DO_ITEM Index="56" Name="" />
    178. 

  178. 		<DO_ITEM Index="57" Name="" />
    179. 

  179. 		<DO_ITEM Index="58" Name="" />
    180. 

  180. 		<DO_ITEM Index="59" Name="" />
    181. 

  181. 		<DO_ITEM Index="60" Name="" />
    182. 

  182. 		<DO_ITEM Index="61" Name="" />
    183. 

  183. 		<DO_ITEM Index="62" Name="" />
    184. 

  184. 		<DO_ITEM Index="63" Name="" />
    185. 

  185. 		<DO_ITEM Index="64" Name="" />
    186. 

  186. 		<DO_ITEM Index="65" Name="" />
    187. 

  187. 		<DO_ITEM Index="66" Name="" />
    188. 

  188. 		<DO_ITEM Index="67" Name="" />
    189. 

  189. 		<DO_ITEM Index="68" Name="" />
    190. 

  190. 		<DO_ITEM Index="69" Name="" />
    191. 

  191. 		<DO_ITEM Index="70" Name="" />
    192. 

  192. 		<DO_ITEM Index="71" Name="" />
    193. 

  193. 		<DO_ITEM Index="72" Name="" />
    194. 

  194. 		<DO_ITEM Index="73" Name="" />
    195. 

  195. 		<DO_ITEM Index="74" Name="" />
    196. 

  196. 		<DO_ITEM Index="75" Name="" />
    197. 

  197. 		<DO_ITEM Index="76" Name="" />
    198. 

  198. 		<DO_ITEM Index="77" Name="" />
    199. 

  199. 		<DO_ITEM Index="78" Name="" />
    200. 

  200. 		<DO_ITEM Index="79" Name="" />
    201. 

  201. 		<DO_ITEM Index="80" Name="" />
    202. 

  202. 		<DO_ITEM Index="81" Name="" />
    203. 

  203. 		<DO_ITEM Index="82" Name="" />
    204. 

  204. 		<DO_ITEM Index="83" Name="" />
    205. 

  205. 		<DO_ITEM Index="84" Name="" />
    206. 

  206. 		<DO_ITEM Index="85" Name="" />
    207. 

  207. 		<DO_ITEM Index="86" Name="" />
    208. 

  208. 		<DO_ITEM Index="87" Name="" />
    209. 

  209. 		<DO_ITEM Index="88" Name="" />
    210. 

  210. 		<DO_ITEM Index="89" Name="" />
    211. 

  211. 		<DO_ITEM Index="90" Name="" />
    212. 

  212. 		<DO_ITEM Index="91" Name="" />
    213. 

  213. 		<DO_ITEM Index="92" Name="" />
    214. 

  214. 		<DO_ITEM Index="93" Name="" />
    215. 

  215. 		<DO_ITEM Index="94" Name="" />
    216. 

  216. 		<DO_ITEM Index="95" Name="" />
    217. 

  217. 		<DO_ITEM Index="96" Name="" />
    218. 

  218. 		<DO_ITEM Index="97" Name="" />
    219. 

  219. 		<DO_ITEM Index="98" Name="" />
    220. 

  220. 		<DO_ITEM Index="99" Name="" />
    221. 

  221. 		<DO_ITEM Index="100" Name="" />
    222. 

  222. 		<DO_ITEM Index="101" Name="" />
    223. 

  223. 		<DO_ITEM Index="102" Name="" />
    224. 

  224. 		<DO_ITEM Index="103" Name="" />
    225. 

  225. 		<DO_ITEM Index="104" Name="" />
    226. 

  226. 		<DO_ITEM Index="105" Name="" />
    227. 

  227. 		<DO_ITEM Index="106" Name="" />
    228. 

  228. 		<DO_ITEM Index="107" Name="" />
    229. 

  229. 		<DO_ITEM Index="108" Name="" />
    230. 

  230. 		<DO_ITEM Index="109" Name="" />
    231. 

  231. 		<DO_ITEM Index="110" Name="" />
    232. 

  232. 		<DO_ITEM Index="111" Name="" />
    233. 

  233. 	</Dig_Out>
    234. 

  234. 	<Ana_Out>
    235. 

  235. 		<AO_ITEM Index="0" Name="AO_MFC1_Flow_Setpoint"                 BufferOffset="0" Device="" Addr="d1000" Note="MFC" />
    236. 

  236. 		<AO_ITEM Index="1" Name="AO_MFC2_Flow_Setpoint"                 BufferOffset="2" Device="" Addr="d1002" Note="MFC" />
    237. 

  237. 		<AO_ITEM Index="2" Name="AO_MFC3_Flow_Setpoint"                 BufferOffset="4" Device="" Addr="d1004" Note="MFC" />
    238. 

  238. 		<AO_ITEM Index="3" Name="AO_MFC4_Flow_Setpoint"                 BufferOffset="6" Device="" Addr="d1006" Note="MFC" />
    239. 

  239. 		<AO_ITEM Index="4" Name="AO_MFC5_Flow_Setpoint"                 BufferOffset="8" Device="" Addr="d1008" Note="MFC" />
    240. 

  240. 		<AO_ITEM Index="5" Name="AO_MFC6_Flow_Setpoint"                 BufferOffset="10" Device="" Addr="d1010" Note="MFC" />
    241. 

  241. 		<AO_ITEM Index="6" Name="AO_MFC7_Flow_Setpoint"                 BufferOffset="12" Device="" Addr="d1012" Note="MFC" />
    242. 

  242. 		<AO_ITEM Index="7" Name="AO_MFC8_Flow_Setpoint"                 BufferOffset="14" Device="" Addr="d1014" Note="MFC" />
    243. 

  243. 		<AO_ITEM Index="8" Name="AO_He_Flow_Setpoint"                   BufferOffset="16"   Device="" Addr="d1016" Note="MFC" />
    244. 

  244. 		<AO_ITEM Index="9" Name="AO_Turbo_Pump_N2_Flow_Setpoint"        BufferOffset="18"  Device="" Addr="d1018" Note="MFC" />
    245. 

  245. 		<AO_ITEM Index="10" Name="AO_S_Valve_Temperature_Setpoint"      BufferOffset="20" Device="" Addr="d1020" Note="以前是Valve" />
    246. 

  246. 		<AO_ITEM Index="11" Name="AO_S_Valve_Temp_Limit_Setpoint"       BufferOffset="22" Device="" Addr="d1022" />
    247. 

  247. 		<AO_ITEM Index="12" Name="AO_Foreline_Temperature_Setpoint"     BufferOffset="24" Device="" Addr="d1024" Note="前级管道设定温度" />
    248. 

  248. 		<AO_ITEM Index="13" Name="AO_Foreline_Temp_Limit_Setpoint"      BufferOffset="26" Device="" Addr="d1026" Note="Temp Limit" />
    249. 

  249. 		<AO_ITEM Index="14" Name="AO_CHB_Wall_Temperature_Setpoint"     BufferOffset="28"  Device="" Addr="d1028" Note="腔体壁设定温度" />
    250. 

  250. 		<AO_ITEM Index="15" Name="AO_CHB_Wall_Temp_Limit_Setpoint"      BufferOffset="30" Device="" Addr="d1030" Note="Temp Limit" />
    251. 

  251. 		<AO_ITEM Index="16" Name="AO_Heartbeat"                         BufferOffset="32" Device="" Addr="d1032" Note="PC to PLC" />
    252. 

  252. 		<AO_ITEM Index="17" Name="AO_ESC_He_Pressure_Setpoint"          BufferOffset="34" Device="" Addr="d1034" Note="ESC配置" />
    253. 

  253. 		<AO_ITEM Index="18" Name="AO_ESC_He_Control_Mode"               BufferOffset="36" Device="" Addr="d1036" />
    254. 

  254. 		<AO_ITEM Index="19" Name="AO_P_Valve_Temperature_Setpoint"      BufferOffset="38" Device="" Addr="d1038" Note="钟摆阀门加热设定温度" />
    255. 

  255. 		<AO_ITEM Index="20" Name="AO_P_Valve_Temp_Limit_Setpoint"       BufferOffset="40" Device="" Addr="d1040" Note="钟摆阀门Temp Limit" />
    256. 

  256. 		<AO_ITEM Index="21" Name="AO_Gas_Line_Temperature_Setpoint"     BufferOffset="42" Device="" Addr="d1042" Note="Gas Line加热设定温度" />
    257. 

  257. 		<AO_ITEM Index="22" Name="AO_Gas_Line_Temp_Limit_Setpoint"      BufferOffset="44" Device="" Addr="d1044" Note="Gas LineTemp Limit" />
    258. 

  258. 		<AO_ITEM Index="23" Name="" />
    259. 

  259. 		<AO_ITEM Index="24" Name="" />
    260. 

  260. 		<AO_ITEM Index="25" Name="" />
    261. 

  261. 		<AO_ITEM Index="26" Name="" />
    262. 

  262. 		<AO_ITEM Index="27" Name="" />
    263. 

  263. 		<AO_ITEM Index="28" Name="" />
    264. 

  264. 		<AO_ITEM Index="29" Name="" />
    265. 

  265. 		<AO_ITEM Index="30" Name="" />
    266. 

  266. 		<AO_ITEM Index="31" Name="" />
    267. 

  267. 		<AO_ITEM Index="32" Name="" />
    268. 

  268. 		<AO_ITEM Index="33" Name="" />
    269. 

  269. 		<AO_ITEM Index="34" Name="" />
    270. 

  270. 		<AO_ITEM Index="35" Name="" />
    271. 

  271. 		<AO_ITEM Index="36" Name="" />
    272. 

  272. 		<AO_ITEM Index="37" Name="" />
    273. 

  273. 		<AO_ITEM Index="38" Name="" />
    274. 

  274. 		<AO_ITEM Index="39" Name="" />
    275. 

  275. 		<AO_ITEM Index="40" Name="" />
    276. 

  276. 		<AO_ITEM Index="41" Name="" />
    277. 

  277. 		<AO_ITEM Index="42" Name="" />
    278. 

  278. 		<AO_ITEM Index="43" Name="" />
    279. 

  279. 		<AO_ITEM Index="44" Name="" />
    280. 

  280. 		<AO_ITEM Index="45" Name="" />
    281. 

  281. 		<AO_ITEM Index="46" Name="" />
    282. 

  282. 		<AO_ITEM Index="47" Name="" />
    283. 

  283. 		<AO_ITEM Index="48" Name="" />
    284. 

  284. 		<AO_ITEM Index="49" Name="" />
    285. 

  285. 	</Ana_Out>
    286. 

  286. 	<Ana_In>
    287. 

  287. 		<AI_ITEM Index="0" Name="AI_Chamber_Pressure_10t"                 BufferOffset="0" Device="" Addr="d2000" Note="float" />
    288. 

  288. 		<AI_ITEM Index="1" Name="AI_Process_Pressure_100mt"               BufferOffset="2" Device="" Addr="d2002" Note="float" />
    289. 

  289. 		<AI_ITEM Index="2" Name="AI_Foreline_Pressure_10t"                BufferOffset="4" Device="" Addr="d2004" Note="float" />
    290. 

  290. 		<AI_ITEM Index="3" Name="AI_ESC_He_Pressure_100t"                 BufferOffset="6" Device="" Addr="d2006" Note="float" />
    291. 

  291. 		<AI_ITEM Index="4" Name="AI_MFC1_Flow"                            BufferOffset="8" Device="" Addr="d2008" Note="float" />
    292. 

  292. 		<AI_ITEM Index="5" Name="AI_MFC2_Flow"                            BufferOffset="10" Device="" Addr="d2010" Note="float" />
    293. 

  293. 		<AI_ITEM Index="6" Name="AI_MFC3_Flow"                            BufferOffset="12" Device="" Addr="d2012" Note="float" />
    294. 

  294. 		<AI_ITEM Index="7" Name="AI_MFC4_Flow"                            BufferOffset="14" Device="" Addr="d2014" Note="float" />
    295. 

  295. 		<AI_ITEM Index="8" Name="AI_MFC5_Flow"                            BufferOffset="16" Device="" Addr="d2016" Note="float" />
    296. 

  296. 		<AI_ITEM Index="9" Name="AI_MFC6_Flow"                            BufferOffset="18" Device="" Addr="d2018" Note="float" />
    297. 

  297. 		<AI_ITEM Index="10" Name="AI_MFC7_Flow"                           BufferOffset="20" Device="" Addr="d2020" Note="float" />
    298. 

  298. 		<AI_ITEM Index="11" Name="AI_MFC8_Flow"                           BufferOffset="22" Device="" Addr="d2022" Note="float" />
    299. 

  299. 		<AI_ITEM Index="12" Name="AI_ESC_He_Flow"                         BufferOffset="24" Device="" Addr="d2024" Note="float" />
    300. 

  300. 		<AI_ITEM Index="13" Name="AI_Turbo_Pump_N2_Flow"                  BufferOffset="26" Device="" Addr="d2026" Note="float" />
    301. 

  301. 		<AI_ITEM Index="14" Name="AI_S_Valve_Control_TC_Temp"             BufferOffset="28" Device="" Addr="d2028" Note="float" />
    302. 

  302. 		<AI_ITEM Index="15" Name=""                                       BufferOffset="30" Device="" Addr="" Note="float" />
    303. 

  303. 		<AI_ITEM Index="16" Name="AI_Foreline_Control_TC_Temp"            BufferOffset="32" Device="" Addr="d2032" Note="float" />
    304. 

  304. 		<AI_ITEM Index="17" Name=""                                       BufferOffset="34" Device="" Addr="" Note="float" />
    305. 

  305. 		<AI_ITEM Index="18" Name="AI_CHB_Wall_Control_TC_Temp"            BufferOffset="36" Device="" Addr="d2036" Note="float" />
    306. 

  306. 		<AI_ITEM Index="19" Name=""                                       BufferOffset="38" Device="" Addr="" Note="float" />
    307. 

  307. 		<AI_ITEM Index="20" Name=""                                       BufferOffset="40" Device="" Addr="" Note="float" />
    308. 

  308. 		<AI_ITEM Index="21" Name=""                                       BufferOffset="42" Device="" Addr="" Note="float" />
    309. 

  309. 		<AI_ITEM Index="22" Name="AI_Heartbeat_FB"                        BufferOffset="44" Device="" Addr="d2044" Note="float" />
    310. 

  310. 		<AI_ITEM Index="23" Name="AI_Second"                              BufferOffset="46" Device="" Addr="d2046" Note="float" />
    311. 

  311. 		<AI_ITEM Index="24" Name="AI_Minute"                              BufferOffset="48" Device="" Addr="d2048" Note="float" />
    312. 

  312. 		<AI_ITEM Index="25" Name="AI_Time"                                BufferOffset="50" Device="" Addr="d2050" Note="float" />
    313. 

  313. 		<AI_ITEM Index="26" Name="AI_Day"                                 BufferOffset="52" Device="" Addr="d2052" Note="float" />
    314. 

  314. 		<AI_ITEM Index="27" Name="AI_Month"                               BufferOffset="54" Device="" Addr="d2054" Note="float" />
    315. 

  315. 		<AI_ITEM Index="28" Name="AI_Year"                                BufferOffset="56" Device="" Addr="d2056" Note="float" />
    316. 

  316. 		<AI_ITEM Index="29" Name=""                                       BufferOffset="58" Device="" Addr="" Note="float" />
    317. 

  317. 		<AI_ITEM Index="30" Name=""                                       BufferOffset="60" Device="" Addr="" Note="float" />
    318. 

  318. 		<AI_ITEM Index="31" Name="AI_Chamber_Pressure_Virtual"            BufferOffset="62" Device="" Addr="d2062" Note="float" />
    319. 

  319. 		<AI_ITEM Index="32" Name="AI_P_Valve_Control_TC_Temp"             BufferOffset="64" Device="" Addr="d2064" Note="float" />
    320. 

  320. 		<AI_ITEM Index="33" Name="AI_Gas_Line_Control_TC_Temp"            BufferOffset="66" Device="" Addr="d2066" Note="float" />
    321. 

  321. 		<AI_ITEM Index="34" Name=""                                       BufferOffset="68"/>
    322. 

  322. 		<AI_ITEM Index="35" Name="AI_S_Valve_Monitor_TC1_Temp"            BufferOffset="70" Device="" Addr="d2070" Note="float" />
    323. 

  323. 		<AI_ITEM Index="36" Name=""                                       BufferOffset="72"/>
    324. 

  324. 		<AI_ITEM Index="37" Name=""                                       BufferOffset="74"/>
    325. 

  325. 		<AI_ITEM Index="38" Name=""                                       BufferOffset="76"/>
    326. 

  326. 		<AI_ITEM Index="39" Name="AI_Foreline_Monitor_TC1_Temp"           BufferOffset="78" Device="" Addr="d2078" Note="float" />
    327. 

  327. 		<AI_ITEM Index="40" Name="AI_Foreline_Monitor_TC2_Temp"           BufferOffset="80" Device="" Addr="d2080" Note="float" />
    328. 

  328. 		<AI_ITEM Index="41" Name="AI_Foreline_Monitor_TC3_Temp"           BufferOffset="82" Device="" Addr="d2082" Note="float" />
    329. 

  329. 		<AI_ITEM Index="42" Name=""                                       BufferOffset="84"/>
    330. 

  330. 		<AI_ITEM Index="43" Name="AI_CHB_Wall_Monitor_TC1_Temp"           BufferOffset="86" Device="" Addr="d2086" Note="float" />
    331. 

  331. 		<AI_ITEM Index="44" Name="AI_CHB_Wall_Monitor_TC2_Temp"           BufferOffset="88" Device="" Addr="d2088" Note="float" />
    332. 

  332. 		<AI_ITEM Index="45" Name="AI_CHB_Wall_Monitor_TC3_Temp"           BufferOffset="90" Device="" Addr="d2090" Note="float" />
    333. 

  333. 		<AI_ITEM Index="46" Name=""                                       BufferOffset="92"/>
    334. 

  334. 		<AI_ITEM Index="47" Name=""                                       BufferOffset="94"/>
    335. 

  335. 		<AI_ITEM Index="48" Name=""                                       BufferOffset="96"/>
    336. 

  336. 		<AI_ITEM Index="49" Name=""                                       BufferOffset="98"/>
    337. 

  337. 		<AI_ITEM Index="50" Name=""                                       BufferOffset="100"/>
    338. 

  338. 		<AI_ITEM Index="51" Name=""                                       BufferOffset="102"/>
    339. 

  339. 		<AI_ITEM Index="52" Name=""                                       BufferOffset="104"/>
    340. 

  340. 		<AI_ITEM Index="53" Name="AI_ESC_inner_coolant_inlet_TC_Temp"     BufferOffset="106" Device="" Addr="d2106" Note="float" />
    341. 

  341. 		<AI_ITEM Index="54" Name="AI_ESC_inner_coolant_outlet_TC_Temp"    BufferOffset="108" Device="" Addr="d2108" Note="float" />
    342. 

  342. 		<AI_ITEM Index="55" Name="AI_ESC_outer_coolant_inlet_TC_Temp"     BufferOffset="110" Device="" Addr="d2110" Note="float" />
    343. 

  343. 		<AI_ITEM Index="56" Name="AI_ESC_outer_coolant_outlet_TC_Temp"    BufferOffset="112" Device="" Addr="d2112" Note="float" />
    344. 

  344. 		<AI_ITEM Index="57" Name="AI_Top_Plate_coolant_inlet_TC_Temp"     BufferOffset="114" Device="" Addr="d2114" Note="float" />
    345. 

  345. 		<AI_ITEM Index="58" Name="AI_Top_Plate_coolant_outlet_TC_Temp"    BufferOffset="116" Device="" Addr="d2116" Note="float" />
    346. 

  346. 	</Ana_In>
    347. 

  347. </IO_DEFINE>
    348. 

  348.