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- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.RecipeCenter;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using MECF.Framework.Common.DataCenter;
- using MECF.Framework.Common.RecipeCenter;
- using MECF.Framework.Common.Routine;
- using MECF.Framework.Common.ToolLayout;
- using MECF.Framework.Common.Utilities;
- using CyberX8_Core;
- using CyberX8_RT.Devices.Resistivity;
- using CyberX8_RT.Devices.Rinse;
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- using System.Windows.Documents;
- namespace CyberX8_RT.Modules.Rinse
- {
- public class RinseSecondStepRoutine:RoutineBase,IRoutine
- {
- private enum RinseSecondStep
- {
- PrepareStart,
- Recipe_StartSecondRinseCycle,
- Recipe_PerformSecondRinseCycle,
- Recipe_SecondRinseCycleStartFilling,
- Recipe_SecondRinseCycleRecordStartWaterLevel,
- Recipe_SecondRinseCycleStartFillingWait,
- Recipe_SecondRinseCycleWaitFillingDetected,
- Recipe_SecondRinseCycleWaitFull,
- Recipe_SecondRinseCycleWaitEndFillTime,
- Recipe_SecondRinseCycleWaitDwell,
- Recipe_SecondRinseCycleWaitDrain,
- Recipe_SecondRinseCycleCheckDrain,
- Recipe_SecondRinseCycleWaitDrainExtraTime,
- Recipe_SecondRinseCycleWaitResistivityStart,
- Recipe_SecondRinseCycleResistivityAveraging,
- Recipe_SecondRinseCycleCheckResistivity,
- Recipe_SecondRinseCycleWaitDrain2,
- Recipe_SecondRinseCycleCheckDrain2,
- Recipe_SecondRinseCycleWaitDrain2ExtraTime,
- Recipe_SecondRinseCycleEnd,
- Recipe_SecondRinseCycleComplete
- }
- #region 内部变量
- /// <summary>
- /// 设备对象
- /// </summary>
- private RinseDevice _device;
- /// <summary>
- /// Recipe
- /// </summary>
- private QdrRecipe _recipe;
- /// <summary>
- /// Fill打开注水记录Water Level
- /// </summary>
- private double _fillingDetectStartWaterLevel;
- /// <summary>
- /// Concurrent Fill Time Seconds
- /// </summary>
- private int _concurrentFillTimeSeconds;
- /// <summary>
- /// 开始注水的偏差
- /// </summary>
- private double _fillingStartedDelta;
- /// <summary>
- /// 注满数值
- /// </summary>
- private int _sensorReadingFull;
- /// <summary>
- /// 液位为空数值
- /// </summary>
- private int _sensorReadingEmpty;
- /// <summary>
- /// 开始流水时间
- /// </summary>
- private DateTime _startFillTime;
- /// <summary>
- /// 从开始排水到检测是否排空的间隔时间
- /// </summary>
- private int _normalDrainTimeSeconds;
- /// <summary>
- /// 表示当前正在执行第几次rinse
- /// </summary>
- private int _rinseCycleTwo_RinsesCompleted = 0;
- /// <summary>
- /// Resistivity取值样本列表
- /// </summary>
- private List<double> _resistivitySample = new List<double>();
- /// <summary>
- /// 开始注水后检测是否正常注水间隔
- /// </summary>
- private int _checkIsFillingTimeSeconds;
- /// <summary>
- /// 开始注水后检测是否注满间隔
- /// </summary>
- private int _checkIsFullTimeSeconds;
- /// <summary>
- /// 采样水阻值次数
- /// </summary>
- private int _readResistivityCount = 0;
- /// <summary>
- /// 当前执行到哪一步的显示
- /// </summary>
- private string _currentStateMachine;
- /// <summary>
- /// 开始采样时间
- /// </summary>
- private DateTime _startSampleTime = DateTime.Now;
- /// <summary>
- /// 采样时间
- /// </summary>
- private DateTime _sampeIntervalTime = DateTime.Now;
- /// <summary>
- /// 启动采样
- /// </summary>
- private bool _startSample = false;
- #endregion
- /// <summary>
- /// 构造函数
- /// </summary>
- /// <param name="module"></param>
- public RinseSecondStepRoutine(string module) : base(module)
- {
-
- }
- /// <summary>
- /// 启动
- /// </summary>
- /// <param name="objects"></param>
- /// <returns></returns>
- public RState Start(params object[] objects)
- {
- _startSample = false;
- _device = DEVICE.GetDevice<RinseDevice>(Module);
- _resistivitySample.Clear();
- _readResistivityCount = 0;
- _recipe = objects[0] as QdrRecipe;
- _concurrentFillTimeSeconds = SC.GetValue<int>("QDR.ConcurrentFillTimeSeconds");
- _fillingStartedDelta = SC.GetValue<double>("QDR.FillingStartedDelta");
- _sensorReadingFull = SC.GetValue<int>("QDR.SensorReadingFull");
- _sensorReadingEmpty = SC.GetValue<int>("QDR.SensorReadingEmpty");
- _normalDrainTimeSeconds = SC.GetValue<int>("QDR.NominalDrainTimeSeconds");
- _checkIsFillingTimeSeconds = SC.GetValue<int>("QDR.NominalCheckFillWaterTimeSeconds");
- _checkIsFullTimeSeconds = SC.GetValue<int>("QDR.NominalCheckFillFullTimeSeconds");
- //配置项规范性验证
- if (_checkIsFillingTimeSeconds + _checkIsFullTimeSeconds > _concurrentFillTimeSeconds)
- {
- NotifyError(eEvent.ERR_RINSE, $"configuration item 'QDR.NominalCheckFillWaterTimeSeconds' plus 'QDR.NominalCheckFillFullTimeSeconds' is large than QDR.ConcurrentFillTimeSeconds", 0);
- return RState.Failed;
- }
- if (_normalDrainTimeSeconds > _recipe.DumpTimeSeconds)
- {
- NotifyError(eEvent.ERR_RINSE, $"configuration item 'QDR.NominalDrainTimeSeconds' is large than 'recipe.DumpTimeSeconds",0);
- return RState.Failed;
- }
- return Runner.Start(Module, "Start Rinse Second Step");
- }
- /// <summary>
- /// 监控
- /// </summary>
- /// <returns></returns>
- public RState Monitor()
- {
- _currentStateMachine = Runner.CurrentStep.ToString();
- _device.UpdateStateMachine(_currentStateMachine);
- Runner.RunIf(RinseSecondStep.PrepareStart, _recipe.Step2N2BubbleOn, N2ValveOff, _delay_1ms)
- //2.6-StartSecondRinseCycle
- .LoopStart(RinseSecondStep.Recipe_StartSecondRinseCycle, "Rinse Second step", _recipe.Step2NumberOfRinse, NullFun, _delay_1ms)
- //2.7-PerformSecondRinseCycle
- .LoopRun(RinseSecondStep.Recipe_PerformSecondRinseCycle, OpenN2ValveAndCloseDumpValve, _delay_1ms)
- //2.8-SecondRinseCycleStartFilling
- .LoopRun(RinseSecondStep.Recipe_SecondRinseCycleStartFilling, () => _device.FillValveOn(), _delay_1ms)
- .LoopRun(RinseSecondStep.Recipe_SecondRinseCycleRecordStartWaterLevel, CheckFillValveOn, _delay_1ms)
- .LoopRunOnlyTimeOutFault(RinseSecondStep.Recipe_SecondRinseCycleStartFillingWait, CheckFillNormalStatus, _checkIsFillingTimeSeconds * 1000)
- //2.9-SecondRinseCycleWaitFillingDetected //3.0-SecondRinseCycleWaitFull
- .LoopRunOnlyTimeOutFault(RinseSecondStep.Recipe_SecondRinseCycleWaitFillingDetected, CheckFillFullStatus, _checkIsFullTimeSeconds * 1000)
- //.LoopRun(RinseSecondStep.Recipe_SecondRinseCycleWaitFull, CheckFillFullStatus, _delay_1s)
- //3.1-SecondRinseCycleWaitEndFillTime
- .LoopDelay(RinseSecondStep.Recipe_SecondRinseCycleWaitEndFillTime, (_concurrentFillTimeSeconds - _checkIsFillingTimeSeconds - _checkIsFullTimeSeconds) * 1000)
- //3.2-SecondRinseCycleWaitDwell
- .LoopRunIf(RinseSecondStep.Recipe_SecondRinseCycleWaitDwell, ((_rinseCycleTwo_RinsesCompleted < _recipe.Step2NumberOfRinse - 1) && !_recipe.FinalRinseDry)
- || ((_rinseCycleTwo_RinsesCompleted < _recipe.Step2NumberOfRinse) && _recipe.FinalRinseDry),
- StartDwell, _recipe.Step2DwellTimeSeconds * 1000)
- //3.3-SecondRinseCycleWaitDrain
- .LoopRunIf(RinseSecondStep.Recipe_SecondRinseCycleWaitDrain, ((_rinseCycleTwo_RinsesCompleted < _recipe.Step2NumberOfRinse - 1) && !_recipe.FinalRinseDry)
- || ((_rinseCycleTwo_RinsesCompleted < _recipe.Step2NumberOfRinse) && _recipe.FinalRinseDry),
- StartOpenDumpValve, _delay_1ms)
- .LoopRunIfOnlyTimeOutFault(RinseSecondStep.Recipe_SecondRinseCycleCheckDrain, ((_rinseCycleTwo_RinsesCompleted < _recipe.Step2NumberOfRinse - 1) && !_recipe.FinalRinseDry)
- || ((_rinseCycleTwo_RinsesCompleted < _recipe.Step2NumberOfRinse) && _recipe.FinalRinseDry),
- CheckWaterLevelEmpty, _normalDrainTimeSeconds * 1000)
- //3.4-SecondRinseCycleWaitDrainExtraTime
- .LoopRunIf(RinseSecondStep.Recipe_SecondRinseCycleWaitDrainExtraTime, ((_rinseCycleTwo_RinsesCompleted < _recipe.Step2NumberOfRinse - 1) && !_recipe.FinalRinseDry && _recipe.DumpTimeSeconds - _normalDrainTimeSeconds > 0)
- || ((_rinseCycleTwo_RinsesCompleted < _recipe.Step2NumberOfRinse) && _recipe.FinalRinseDry && _recipe.DumpTimeSeconds - _normalDrainTimeSeconds > 0),
- NullFun, (_recipe.DumpTimeSeconds - _normalDrainTimeSeconds) * 1000)
- //3.7-SecondRinseCycleWaitResistivityStart 条件:(Final Rinse == false && RinseComplete == _recipe.Step2NumberOfRinse - 1)
- .LoopRunIf(RinseSecondStep.Recipe_SecondRinseCycleWaitResistivityStart, (_rinseCycleTwo_RinsesCompleted == _recipe.Step2NumberOfRinse - 1) && !_recipe.FinalRinseDry,
- ResistivityStart, _recipe.ResistivityStartTimeSeconds*1000)
- //3.8-SecondRinseCycleResistivityAveraging 条件:(Final Rinse == false && RinseComplete == _recipe.Step2NumberOfRinse - 1)
- .LoopRunIf(RinseSecondStep.Recipe_SecondRinseCycleResistivityAveraging, (_rinseCycleTwo_RinsesCompleted == _recipe.Step2NumberOfRinse - 1) && !_recipe.FinalRinseDry,
- ResistivityAveraging, _delay_1ms)
- //3.9-SecondRinseCycleCheckResistivity 条件:(Final Rinse == false && RinseComplete == _recipe.Step2NumberOfRinse - 1)
- .LoopWaitIf(RinseSecondStep.Recipe_SecondRinseCycleCheckResistivity, (_rinseCycleTwo_RinsesCompleted == _recipe.Step2NumberOfRinse - 1) && !_recipe.FinalRinseDry,
- ResitivitySampleResitivity,_recipe.ResistivityDurationSeconds*1000)
- //4.0-SecondRinseCycleWaitDrain 条件:(Final Rinse == false && RinseComplete == _recipe.Step2NumberOfRinse - 1)
- .LoopRunIf(RinseSecondStep.Recipe_SecondRinseCycleWaitDrain2, (_rinseCycleTwo_RinsesCompleted == _recipe.Step2NumberOfRinse - 1) && !_recipe.FinalRinseDry,
- StartOpenDumpValve, _delay_1ms)
- .LoopRunIfOnlyTimeOutFault(RinseSecondStep.Recipe_SecondRinseCycleCheckDrain2, (_rinseCycleTwo_RinsesCompleted == _recipe.Step2NumberOfRinse - 1) && !_recipe.FinalRinseDry,
- CheckWaterLevelEmpty, _normalDrainTimeSeconds * 1000)
- //4.1-Recipe_SecondRinseCycleWaitDrain2ExtraTime 条件:(Final Rinse == false && RinseComplete == _recipe.Step2NumberOfRinse - 1)
- .LoopRunIf(RinseSecondStep.Recipe_SecondRinseCycleWaitDrain2ExtraTime, (_rinseCycleTwo_RinsesCompleted == _recipe.Step2NumberOfRinse - 1) && !_recipe.FinalRinseDry && _recipe.DumpTimeSeconds - _normalDrainTimeSeconds > 0,
- NullFun, (_recipe.DumpTimeSeconds - _normalDrainTimeSeconds) * 1000)
- .LoopEnd(RinseSecondStep.Recipe_SecondRinseCycleEnd, CountNumberofRinsesComplete, _delay_1ms)
- .End(RinseSecondStep.Recipe_SecondRinseCycleComplete, ResetRinseComplete, _delay_1ms);
- return Runner.Status;
- }
- /// <summary>
- /// N2 Valve Off
- /// </summary>
- /// <returns></returns>
- private bool N2ValveOff()
- {
- if (_recipe.Step1N2BubbleOn)
- {
- return _device.N2ValveOff();
- }
- else
- {
- return true;
- }
- }
- /// <summary>
- /// 检验N2Valve off
- /// </summary>
- /// <returns></returns>
- private bool CheckN2ValveOff()
- {
- if (_recipe.Step1N2BubbleOn)
- {
- return !_device.RinseData.N2Valve;
- }
- else
- {
- return true;
- }
- }
- /// <summary>
- /// 启动N2和关闭Dump Valve
- /// </summary>
- /// <returns></returns>
- private bool OpenN2ValveAndCloseDumpValve()
- {
- bool result = true;
- if (_recipe.Step2N2BubbleOn)
- {
- result = _device.N2ValveOn();
- if (!result)
- {
- NotifyError(eEvent.ERR_RINSE, "Open N2 Valve error", 0);
- return false;
- }
- }
- result = _device.DrainValveOff();
- if (!result)
- {
- NotifyError(eEvent.ERR_RINSE, "Close Dump Valve error",0);
- }
- return result;
- }
- /// <summary>
- /// 检验Fill Valve打开状态
- /// </summary>
- /// <returns></returns>
- private bool CheckFillValveOn()
- {
- _startFillTime = DateTime.Now;
- _fillingDetectStartWaterLevel = _device.RinseData.WaterLevel;
- return true;
- }
- /// <summary>
- /// 检验是否正常注水
- /// </summary>
- /// <returns></returns>
- private bool CheckFillNormalStatus()
- {
- double currentWaterLevel = _device.RinseData.WaterLevel;
- return (currentWaterLevel - _fillingDetectStartWaterLevel) > _fillingStartedDelta;
- }
- /// <summary>
- /// 检验是否注满
- /// </summary>
- /// <returns></returns>
- private bool CheckFillFullStatus()
- {
- double currentWaterLevel = _device.RinseData.WaterLevel;
- bool result = currentWaterLevel > _sensorReadingFull;
- return result;
- }
- /// <summary>
- /// 增加已完成Rinses的次数
- /// </summary>
- /// <returns></returns>
- private bool CountNumberofRinsesComplete()
- {
- _rinseCycleTwo_RinsesCompleted++;
- return true;
- }
- /// <summary>
- /// 开始Dwell
- /// </summary>
- /// <returns></returns>
- private bool StartDwell()
- {
- bool result = _device.FillValveOff();
- if (!result)
- {
- NotifyError(eEvent.ERR_RINSE, "Fill Valve off error", 0);
- return false;
- }
- if (_recipe.Step2N2BubbleOn)
- {
- result = _device.N2ValveOff();
- if (!result)
- {
- NotifyError(eEvent.ERR_RINSE, "N2 Valve off error",0);
- return false;
- }
- }
- return true;
- }
- /// <summary>
- /// 打开Dump Valve
- /// </summary>
- /// <returns></returns>
- private bool StartOpenDumpValve()
- {
- CheckNeedCloseMetalDrain();
- bool result = _device.DrainValveOn();
- if (!result)
- {
- NotifyError(eEvent.ERR_RINSE, "Open Dump valve error", 0);
- return false;
- }
- return result;
- }
- /// <summary>
- /// 检验快排是否排空
- /// </summary>
- /// <returns></returns>
- private bool CheckWaterLevelEmpty()
- {
- double currentWaterLevel = _device.RinseData.WaterLevel;
- bool reseult = currentWaterLevel < _sensorReadingEmpty;
- if (!reseult)
- {
- NotifyError(eEvent.ERR_RINSE, $"current water level: {currentWaterLevel} is large than sensorReadingEmpty: {_sensorReadingEmpty}",0);
- }
- return reseult;
- }
- /// <summary>
- /// 检验是否需要关闭Metal Valve 加上第一步的number of rinse
- /// </summary>
- /// <returns></returns>
- private void CheckNeedCloseMetalDrain()
- {
- if (_recipe.Step1NumberOfRinse + _rinseCycleTwo_RinsesCompleted + 1 > _recipe.Step1NumberOfDumpToMetalDrain)
- {
- bool result = _device.WasteValveOn();
- if (!result)
- {
- NotifyError(eEvent.ERR_RINSE, "Close Metal Drain Valve error", 0);
-
- }
- }
- }
- /// <summary>
- /// ResistivityStart
- /// </summary>
- /// <returns></returns>
- private bool ResistivityStart()
- {
- bool result = true;
- result = _device.FillValveOff();
- if (!result)
- {
- NotifyError(eEvent.ERR_RINSE, "Fill Valve Off error",0);
- return false;
- }
- if (_recipe.Step2N2BubbleOn)
- {
- result = _device.N2ValveOff();
- if (!result)
- {
- NotifyError(eEvent.ERR_RINSE, "N2 Valve Off error",0);
- return false;
- }
- }
- return result;
- }
- /// <summary>
- /// ResistivityAveraging
- /// </summary>
- /// <returns></returns>
- private bool ResistivityAveraging()
- {
- if (_recipe.ResistivityDurationSeconds == 0)
- {
- _resistivitySample.Add(GetResitivity());
- }
- else
- {
- _startSampleTime = DateTime.Now;
- _sampeIntervalTime = DateTime.Now;
- _startSample = true;
- }
- return true;
- }
- /// <summary>
- /// 采样Resitivity
- /// </summary>
- /// <returns></returns>
- private bool ResitivitySampleResitivity()
- {
- if (!_startSample)
- {
- return true;
- }
- int sampleTotalCount = (int)Math.Ceiling(_recipe.ResistivityDurationSeconds / 0.1);
- //每隔100毫秒采样
- if(DateTime.Now.Subtract(_sampeIntervalTime).TotalMilliseconds>=100)
- {
- _sampeIntervalTime= DateTime.Now;
- _readResistivityCount++;
- _resistivitySample.Add(GetResitivity());
- }
- //ResistivityDurationSeconds时长减去0.1s,避免超时
- if (DateTime.Now.Subtract(_startSampleTime).TotalMilliseconds>=_recipe.ResistivityDurationSeconds*1000-100)
- {
- bool result= CheckResistivity();
- //if (!result)
- //{
- // Runner.Stop("Sample Resitiviy abormal", true);
- //}
- return result;
- }
- return false;
- }
- //读取Resitivity的值
- private double GetResitivity()
- {
- double resistivity = 0;
- ResistivityController resistivityController = DEVICE.GetDevice<ResistivityController>(_device.RinseItem.ResistivityID);
- if (resistivityController != null)
- {
- try
- {
- resistivity = double.Parse(resistivityController.ResisitivityValue.Trim());
- }
- catch
- {
- resistivity = 0;
- //LOG.WriteLog(eEvent.ERR_RINSE, Module, "Resitivity value abnormal");
- }
- }
- return resistivity;
- }
- /// <summary>
- /// CheckResistivity
- /// </summary>
- /// <returns></returns>
- private bool CheckResistivity()
- {
- if(_recipe.ResistivityMegaOhms == 0)
- {
- _resistivitySample.Clear();
- return true;
- }
- double resistivityAverageValue = _resistivitySample.Average();
- if((_resistivitySample.Count == 1 && _resistivitySample[0]<_recipe.ResistivityMegaOhms)|| resistivityAverageValue < _recipe.ResistivityMegaOhms)
- {
- NotifyError(eEvent.ERR_RINSE, $"The detected resistivity value is abnormal,:{resistivityAverageValue}",0);
- }
- _resistivitySample.Clear();
- return true;
- }
- private bool ResetRinseComplete()
- {
- _rinseCycleTwo_RinsesCompleted = 0;
- return true;
- }
-
- /// <summary>
- /// Abort
- /// </summary>
- public void Abort()
- {
- Runner.Stop("Manual abort");
- }
- }
- }
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