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- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Fsm;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.OperationCenter;
- using Aitex.Core.Util;
- using Aitex.Core.Utilities;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.SubstrateTrackings;
- using MECF.Framework.Common.WaferHolder;
- using CyberX8_Core;
- using CyberX8_RT.Devices.Rinse;
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using MECF.Framework.Common.Persistent.Rinse;
- using MECF.Framework.Common.RecipeCenter;
- using Aitex.Core.RT.RecipeCenter;
- using CyberX8_RT.Devices.Safety;
- using Aitex.Core.RT.SCCore;
- using MECF.Framework.Common.Alarm;
- using MECF.Framework.Common.CommonData;
- using CyberX8_RT.Schedulers;
- using CyberX8_RT.Modules.Dryer;
- using MECF.Framework.Common.ProcessCell;
- namespace CyberX8_RT.Modules.Rinse
- {
- public class RinseEntity : Entity, IEntity, IModuleEntity
- {
- #region 常量
- private const string AUTO = "Auto";
- private const string MANUAL = "Manual";
- private const string DISABLED = "Disabled";
- private const string ENGINEERING = "Engineering";
- private const string PRODUCTION = "Production";
- #endregion
- #region 内部变量
- /// <summary>
- /// Rinse设备
- /// </summary>
- private RinseDevice _rinseDevice;
- /// <summary>
- /// Cycle次数
- /// </summary>
- private int _cycle = 0;
- /// <summary>
- /// 已经完成的Cycle次数
- /// </summary>
- private int _achievedCycle = 0;
- /// <summary>
- /// Manual模式下Cycle run
- /// </summary>
- private RinseCycleManualProcessRecipeRoutine _cycleManualProcessRoutine;
- /// <summary>
- /// Keepwet Routine
- /// </summary>
- private RinseKeepwetRoutine _keepwetRoutine;
- /// <summary>
- /// Recipe时长
- /// </summary>
- private Dictionary<string, int> _dictRecipeTime = new Dictionary<string, int>();
- /// <summary>
- /// 持久性对象
- /// </summary>
- private RinsePersistentValue _persistentValue;
- /// <summary>
- /// 当前Recipe
- /// </summary>
- private QdrRecipe _currentRecipe;
- /// <summary>
- /// Recipe时长
- /// </summary>
- private int _recipeTime;
- /// <summary>
- /// Runrecipe已经运行的时间
- /// </summary>
- private int _runrecipeElapsedTime = 0;
- /// <summary>
- /// run recipe start time
- /// </summary>
- private DateTime _runRecipeStartTime;
- /// <summary>
- /// run recipe complete time
- /// </summary>
- private DateTime _runRecipeCompleteTime;
- /// <summary>
- /// 是否Retry
- /// </summary>
- private bool _isRetry = false;
- #region 计算recipe运行时间相关的配置文件参数
- /// <summary>
- /// Concurrent Fill Time Seconds
- /// </summary>
- private int _concurrentFillTimeSeconds;
- /// <summary>
- /// 开始注水的偏差
- /// </summary>
- private double _fillingStartedDelta;
- /// <summary>
- /// 注满数值
- /// </summary>
- private int _sensorReadingFull;
- /// <summary>
- /// 液位为空数值
- /// </summary>
- private int _sensorReadingEmpty;
- /// <summary>
- /// 从开始排水到检测是否排空的间隔时间
- /// </summary>
- private int _normalDrainTimeSeconds;
- /// <summary>
- /// 开始注水后检测是否正常注水间隔
- /// </summary>
- private int _checkIsFillingTimeSeconds;
- /// <summary>
- /// 开始注水后检测是否注满间隔
- /// </summary>
- private int _checkIsFullTimeSeconds;
- /// <summary>
- /// Clamp Cycle开关次数
- /// </summary>
- private int _numberClampCyclesToComplete;
- /// <summary>
- /// Clamp开关等待时间
- /// </summary>
- private double _clampCycleTimeSeconds;
- #endregion
- #endregion
- #region 属性
- /// <summary>
- /// 模块名称
- /// </summary>
- public ModuleName Module { get; private set; }
- /// <summary>
- /// 初始化状态
- /// </summary>
- public bool IsInit
- {
- get { return fsm.State == (int)RinseState.Init; }
- }
- /// <summary>
- /// 是否完成初始化
- /// </summary>
- public bool IsInitialized
- {
- get { return fsm.State >= (int)RinseState.Initialized; }
- }
- /// <summary>
- /// 空闲状态
- /// </summary>
- public bool IsIdle
- {
- get
- {
- return fsm.State == (int)RinseState.Idle;
- }
- }
- /// <summary>
- /// 是否发生错误
- /// </summary>
- public bool IsError
- {
- get { return fsm.State == (int)RinseState.Error; }
- }
- /// <summary>
- /// 是否正在作业
- /// </summary>
- public bool IsBusy { get { return fsm.State > (int)RinseState.Idle; } }
- /// <summary>
- /// WaferHolder信息
- /// </summary>
- public WaferHolderInfo WaferHolderInfo { get { return WaferHolderManager.Instance.GetWaferHolder(Module.ToString()); } }
- /// <summary>
- /// 已完成的RunRecipeCycle次数
- /// </summary>
- public int AchievedCycle { get { return _achievedCycle; } }
- /// <summary>
- /// 当前状态机状态
- /// </summary>
- public int State { get { return fsm.State; } }
- /// <summary>
- /// Recipe时长
- /// </summary>
- public int RecipeTime
- {
- get { return _recipeTime; }
- }
- /// <summary>
- /// 剩余时间
- /// </summary>
- public override int TimeToReady
- {
- get
- {
- if (_currentRecipe == null)
- {
- return base.TimeToReady;
- }
- switch (fsm.State)
- {
- case (int)RinseState.RunReciping:
- return Math.Max(_recipeTime - fsm.ElapsedTime / 1000, 0);
- default:
- return base.TimeToReady;
- }
- }
- }
- /// <summary>
- /// 是否禁用
- /// </summary>
- public bool IsDisable { get { return _persistentValue == null || _persistentValue.OperatingMode == DISABLED; } }
- /// <summary>
- /// 自动模式
- /// </summary>
- public bool IsAuto { get { return _persistentValue != null && _persistentValue.OperatingMode == AUTO; } }
- /// <summary>
- /// 自动模式
- /// </summary>
- public bool IsManual { get { return _persistentValue != null && _persistentValue.OperatingMode == MANUAL; } }
- /// <summary>
- /// 是否为工程模式
- /// </summary>
- public bool IsEngineering { get { return _persistentValue != null && _persistentValue.RecipeOperatingMode == ENGINEERING; } }
- /// <summary>
- /// 是否为产品模式
- /// </summary>
- public bool IsProduction { get { return _persistentValue != null && _persistentValue.RecipeOperatingMode == PRODUCTION; } }
- #endregion
- /// <summary>
- /// 构造函数
- /// </summary>
- /// <param name="module"></param>
- public RinseEntity(ModuleName module)
- {
- Module = module;
- _rinseDevice=DEVICE.GetDevice<RinseDevice>(Module.ToString());
- WaferManager.Instance.SubscribeLocation(Module, 2);
- //相关配置文件
-
- InitialFsm();
- }
- /// <summary>
- /// 初始化
- /// </summary>
- /// <returns></returns>
- protected override bool Init()
- {
- InitializeParameter();
- InitializeDATA();
- InitializeRoutine();
- InitializeOperation();
- InitializeRoutine();
- return true;
- }
- /// <summary>
- /// 初始化状态机
- /// </summary>
- private void InitialFsm()
- {
- fsm = new StateMachine<RinseEntity>(Module.ToString(), (int)RinseState.Init, 20);
- fsm.EnableRepeatedMsg(true);
- AnyStateTransition(RinseMsg.Error, ErrorSolution, RinseState.Error);
- Transition(RinseState.Error, RinseMsg.ResumeError, (param) => { return true; }, RinseState.Init);
- //Initialized
- AnyStateTransition(RinseMsg.Initialize, InitializeAll, RinseState.Initialized);
- //直接进入Idle
- Transition(RinseState.Initialized, FSM_MSG.TIMER, NullFunc, RinseState.Idle);
- //CycleRunRecipe
- Transition(RinseState.Idle, RinseMsg.CycleProcessRecipe, RunRecipeProcess, RinseState.CycleManualProcessing);
- Transition(RinseState.CycleManualProcessing, FSM_MSG.TIMER, RunRecipeMonitor, RinseState.Idle);
- Transition(RinseState.CycleManualProcessing,RinseMsg.Abort,RunRecipeAbort, RinseState.Idle);
- //RunRecipe
- Transition(RinseState.Idle, RinseMsg.RunRecipe, RunRecipeProcess, RinseState.RunReciping);
- Transition(RinseState.RunReciping, FSM_MSG.TIMER, RunRecipeMonitor, RinseState.RunRecipeComplete);
- Transition(RinseState.RunRecipeComplete, RinseMsg.RecipeComplete, NullFunc, RinseState.Idle);
- Transition(RinseState.RunReciping, RinseMsg.Abort, RunRecipeAbort, RinseState.Abort);
- //KeepWet
- Transition(RinseState.RunRecipeComplete, RinseMsg.Keepwet, Keepwet, RinseState.KeepWeting);
- Transition(RinseState.KeepWetComplete, RinseMsg.Keepwet, Keepwet, RinseState.KeepWeting);
- Transition(RinseState.KeepWeting, FSM_MSG.TIMER, KeepwetMonitor, RinseState.KeepWetComplete);
- Transition(RinseState.KeepWeting, RinseMsg.RecipeComplete, KeepwetingComplete, RinseState.Idle);
- //Enter Init
- Transition(RinseState.Idle, RinseMsg.Init, NullFunc, RinseState.Init);
- //Retry
- Transition(RinseState.Error, RinseMsg.Retry, NullFunc, RinseState.Retrying);
- Transition(RinseState.Retrying, FSM_MSG.TIMER, RinseRetry, RinseState.Retrying);
- Transition(RinseState.Retrying, RinseMsg.RunRecipe, RetryRunRecipe, RinseState.RunReciping);
- EnumLoop<RinseState>.ForEach((item) => { fsm.MapState((int)item, item.ToString()); });
- EnumLoop<RinseMsg>.ForEach((item) => { fsm.MapMessage((int)item, item.ToString()); });
- }
- /// <summary>
- /// 初始化参数
- /// </summary>
- private void InitializeParameter()
- {
- _persistentValue = RinsePersistentManager.Instance.GetRinsePersistentValue(Module.ToString());
- if (_persistentValue == null)
- {
- LOG.WriteLog(eEvent.ERR_RESERVOIR, Module.ToString(), "Persistent Value Object is not exist");
- }
- }
- /// <summary>
- /// 初始化DATA
- /// </summary>
- private void InitializeDATA()
- {
- InitializeSvid();
- DATA.Subscribe($"{Module}.FsmState", () => ((RinseState)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.WaferHolder", () => WaferHolderInfo, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.IsInit", () => IsInit, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.IsIdle", () => IsIdle, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.IsError", () => IsError, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.IsBusy", () => IsBusy, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.IsDisable", () => IsDisable, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.AchievedCycle", () => AchievedCycle, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.CurrentRecipe", () => _currentRecipe != null ? _currentRecipe.Ppid : "", SubscriptionAttribute.FLAG.IgnoreSaveDB);
- }
- /// <summary>
- /// 初始化SVID
- /// </summary>
- private void InitializeSvid()
- {
- DATA.Subscribe($"{Module}.State", () => ((RinseState)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.LotID", () => (WaferHolderInfo!=null?WaferHolderInfo.LotId:""), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.WSID", () => (WaferHolderInfo != null ? WaferHolderInfo.Id : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.LSAID", () => (WaferHolderInfo != null ? WaferHolderInfo.CrsAId : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.LSBID", () => (WaferHolderInfo != null ? WaferHolderInfo.CrsBId : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.ModuleRecipe", () => (_currentRecipe != null ? _currentRecipe.Ppid : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.SequenceRecipe", () => (WaferHolderInfo != null ? WaferHolderInfo.SequenceId : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.WaferAID", () => (WaferHolderInfo != null ? WaferHolderInfo.WaferAId : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.WaferBID", () => (WaferHolderInfo != null ? WaferHolderInfo.WaferBId : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.TotalTime", () => _recipeTime, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.TimeRemain", () => _recipeTime != 0 ? (_recipeTime - Math.Round((double)_cycleManualProcessRoutine.ElapsedMilliseconds / 1000, 0)) : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.Task", () => WaferHolderInfo != null ? WaferHolderInfo.CurrentControlJobId : "", SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.OperatingMode", () => _persistentValue != null ? _persistentValue.OperatingMode : "None", SubscriptionAttribute.FLAG.IgnoreSaveDB);
- }
- /// <summary>
- /// 初始化Routine
- /// </summary>
- private void InitializeRoutine()
- {
- _cycleManualProcessRoutine = new RinseCycleManualProcessRecipeRoutine(Module.ToString());
- _keepwetRoutine = new RinseKeepwetRoutine(Module.ToString());
- }
- /// <summary>
- /// 初始化操作
- /// </summary>
- private void InitializeOperation()
- {
- OP.Subscribe($"{Module}.InitializeAll", (cmd, args) => { return CheckToPostMessage<RinseState, RinseMsg>(eEvent.ERR_RINSE, Module.ToString(), (int)RinseMsg.Initialize); });
- OP.Subscribe($"{Module}.CycleManualProcessRecipe", (cmd, args) =>
- {
- QdrRecipe recipe = RecipeFileManager.Instance.LoadGenericityRecipe<QdrRecipe>(args[0].ToString());
- if (recipe == null)
- {
- LOG.WriteLog(eEvent.ERR_RINSE, Module.ToString(), $"{args[0]} recipe is null");
- return false;
- }
- object[] objects = new object[args.Length];
- objects[0] = recipe;
- for (int i = 1; i < args.Length; i++)
- {
- objects[i] = args[i];
- }
- return CheckToPostMessage<RinseState, RinseMsg>(eEvent.ERR_RINSE, Module.ToString(), (int)RinseMsg.CycleProcessRecipe, objects);
- });
- OP.Subscribe($"{Module}.Abort", (cmd, args) => { return CheckToPostMessage<RinseState, RinseMsg>(Aitex.Core.RT.Log.eEvent.ERR_RINSE, Module.ToString(), (int)RinseMsg.Abort); });
-
- }
- /// <summary>
- /// EnterInit
- /// </summary>
- public void EnterInit()
- {
- if ((RinseState)fsm.State != RinseState.Idle) return;
- else
- {
- CheckToPostMessage<RinseState, RinseMsg>(eEvent.ERR_RINSE, Module.ToString(), (int)RinseMsg.Init);
- }
- }
- #region Initialized
- /// <summary>
- /// Initialize
- /// </summary>
- /// <param name="param"></param>
- /// <returns></returns>
- private bool InitializeAll(object[] param)
- {
- if (fsm.State == (int)RinseState.Initializing)
- {
- LOG.WriteLog(eEvent.WARN_RINSE, Module.ToString(), "state is Initializing,cannot do initialize");
- return false;
- }
- _rinseDevice.UpdateStateMachine("Idle");
- _rinseDevice.UpdateStatus("Idle");
- if (!CheckSafety())
- {
- return false;
- }
- if (!_rinseDevice.IOInitialized)
- {
- return false;
- }
- return _rinseDevice.IOInitialized;
- }
- /// <summary>
- /// 检验Safety
- /// </summary>
- /// <returns></returns>
- private bool CheckSafety()
- {
- SafetyDevice safetyDevice = DEVICE.GetDevice<SafetyDevice>("Safety");
- if (safetyDevice != null)
- {
- bool result= safetyDevice.SafetyData.TwincatState == 8;
- if (!result)
- {
- LOG.WriteLog(eEvent.ERR_RINSE, Module.ToString(), "Twincat Status is not OP status");
- return false;
- }
- }
- return true;
- }
- #endregion
- private bool ErrorSolution(object[] param)
- {
- bool result = _rinseDevice.FillValveOff();
- if (!result)
- {
- LOG.WriteLog(eEvent.ERR_RINSE, "Close Fill Valve error");
-
- }
- result = _rinseDevice.N2ValveOff();
- if (!result)
- {
- LOG.WriteLog(eEvent.ERR_RINSE, "Close N2 Valve error");
- }
- return true;
- }
- #region RunRecipe
- /// <summary>
- /// Run Recipe
- /// </summary>
- /// <param name="param"></param>
- /// <returns></returns>
- private bool RunRecipeProcess(object[] param)
- {
- _concurrentFillTimeSeconds = SC.GetValue<int>("QDR.ConcurrentFillTimeSeconds");
- _fillingStartedDelta = SC.GetValue<double>("QDR.FillingStartedDelta");
- _sensorReadingFull = SC.GetValue<int>("QDR.SensorReadingFull");
- _sensorReadingEmpty = SC.GetValue<int>("QDR.SensorReadingEmpty");
- _normalDrainTimeSeconds = SC.GetValue<int>("QDR.NominalDrainTimeSeconds");
- _checkIsFillingTimeSeconds = SC.GetValue<int>("QDR.NominalCheckFillWaterTimeSeconds");
- _checkIsFullTimeSeconds = SC.GetValue<int>("QDR.NominalCheckFillFullTimeSeconds");
- _numberClampCyclesToComplete = SC.GetValue<int>("QDR.NumberClampCyclesToComplete");
- _clampCycleTimeSeconds = SC.GetValue<double>("QDR.ClampCycleTimeSeconds");
-
- _cycle = (int)param[1];
- QdrRecipe recipe = param[0] as QdrRecipe;
- bool result = _cycleManualProcessRoutine.Start(param) == RState.Running;
- _runrecipeElapsedTime = 0;
- if (result)
- {
- //_recipeTime = 0;
- _isRetry = false;
- _recipeTime = CalculateRunRecipeTime(recipe, _cycle);
- _currentRecipe = recipe;
- _runRecipeStartTime = DateTime.Now;
- if (WaferHolderInfo != null && _currentRecipe != null)
- {
- FaModuleNotifier.Instance.NotifyWaferShuttleRecipeStart(WaferHolderInfo, _currentRecipe.Ppid);
- }
- }
- return result;
- }
- private int CalculateRunRecipeTime(QdrRecipe _recipe, int cycle)
- {
- int totaltime = 0;
- Dictionary<string, int> processTimeDic = new Dictionary<string, int>();
- processTimeDic.Add("RinseFirstStep.WaitDrianEmpty", _recipe.DumpTimeSeconds);
- if (_recipe.Step1N2BubbleOn)
- {
- processTimeDic.Add("RinseFirstStep.N2BubbleOnDelay", _recipe.N2ChargeTimeSeconds);
- }
- processTimeDic.Add("RinseFirstStep.Recipe_FirstRinseCycleWaitEndFillTime", _concurrentFillTimeSeconds * _recipe.Step1NumberOfRinse);
- processTimeDic.Add("RinseFirstStep.Recipe_FirstRinseCycleWaitDwell", _recipe.Step1DwellTimeSeconds * _recipe.Step1NumberOfRinse);
- processTimeDic.Add("RinseFirstStep.Recipe_FirstRinseCycleWaitDrainExtraTime", _recipe.DumpTimeSeconds * _recipe.Step1NumberOfRinse);
- if (!_recipe.FinalRinseDry) //没有第三步rinse
- {
- processTimeDic.Add("RinseSecondStep.Recipe_SecondRinseCycleWaitEndFillTime", _concurrentFillTimeSeconds * _recipe.Step2NumberOfRinse);
- processTimeDic.Add("RinseSecondStep.Recipe_SecondRinseCycleWaitDwell", _recipe.Step2DwellTimeSeconds * (_recipe.Step2NumberOfRinse - 1));
- processTimeDic.Add("RinseSecondStep.Recipe_SecondRinseCycleWaitDrainExtraTime", _recipe.DumpTimeSeconds * _recipe.Step2NumberOfRinse);
- processTimeDic.Add("RinseSecondStep.Recipe_SecondRinseCycleWaitResistivityStart", _recipe.ResistivityStartTimeSeconds);
- processTimeDic.Add("RinseSecondStep.Recipe_SecondRinseCycleResistivityAveraging", _recipe.ResistivityDurationSeconds);
- }
- else //有第三步rinse
- {
- processTimeDic.Add("RinseSecondStep.Recipe_SecondRinseCycleWaitEndFillTime", _concurrentFillTimeSeconds * _recipe.Step2NumberOfRinse);
- processTimeDic.Add("RinseSecondStep.Recipe_SecondRinseCycleWaitDwell", _recipe.Step2DwellTimeSeconds * _recipe.Step2NumberOfRinse);
- processTimeDic.Add("RinseSecondStep.Recipe_SecondRinseCycleWaitDrainExtraTime", _recipe.DumpTimeSeconds * _recipe.Step2NumberOfRinse);
- processTimeDic.Add("RinseThirdStep.Recipe_ThirdRinseWaitEndFillTime", _concurrentFillTimeSeconds);
- processTimeDic.Add("RinseThirdStep.Recipe_ThirdRinseWaitClampTime", _recipe.FinalRinsePulseClampTime);
- processTimeDic.Add("RinseThirdStep.Recipe_ThirdRinseCycleWaitSlowDrainTime", _recipe.FinalRinseSlowDrainTime);
- processTimeDic.Add("RinseThirdStep.Recipe_ThirdRinseCycleWaitDrainExtraTime", _recipe.DumpTimeSeconds);
- }
- totaltime = processTimeDic.Sum(x => x.Value);
- return totaltime * cycle;
- }
- /// <summary>
- /// Retry RunRecipe
- /// </summary>
- /// <param name="param"></param>
- /// <returns></returns>
- private bool RetryRunRecipe(object[] param)
- {
- int stepIndex = (int)param[0];
- bool result = _cycleManualProcessRoutine.Retry(stepIndex) == RState.Running;
- if (result)
- {
- _isRetry = true;
- if (_currentRecipe != null)
- {
- _recipeTime = CalculateRunRecipeTime(_currentRecipe, _cycle);
- }
- }
- return result;
- }
- /// <summary>
- /// 监控
- /// </summary>
- /// <param name="param"></param>
- /// <returns></returns>
- private bool RunRecipeMonitor(object[] param)
- {
- RState state = _cycleManualProcessRoutine.Monitor();
- if (Singleton<RouteManager>.Instance.IsAutoRunning&&_runrecipeElapsedTime!=TimeToReady)
- {
- _runrecipeElapsedTime =TimeToReady;
- LOG.WriteLog(eEvent.INFO_RINSE, Module.ToString(), $"{WaferHolderInfo?.Id} {Module} RunRecipe TimeToReady {_recipeTime-fsm.ElapsedTime/1000}s.");
- }
- if (state == RState.Failed || state == RState.Timeout)
- {
- if (Singleton<RouteManager>.Instance.IsAutoRunning)
- {
- //不存在其他可用的Rinse
- if (!CheckOtherRinseAvaible())
- {
- AlarmList alarmList = new AlarmList(Module.ToString(), ((RinseState)fsm.State).ToString(), (int)RinseMsg.RunRecipe,
- _cycleManualProcessRoutine.ErrorMsg, _cycleManualProcessRoutine.ErrorStep, (int)AlarmType.Error);
- AlarmListManager.Instance.AddAlarm(alarmList);
- }
- }
- PostMsg(RinseMsg.Error);
- _rinseDevice.UpdateStateMachine("Error");
- _rinseDevice.UpdateStatus("Error");
- _runrecipeElapsedTime = 0;
- //记录LotTrack
- _runRecipeCompleteTime = DateTime.Now;
- _cycleManualProcessRoutine.RinseLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
- RinseLotTrackUtil.ExportRinseLotTrack(Module.ToString(), _cycleManualProcessRoutine.RinseLotTrackDatas,
- _cycleManualProcessRoutine.RinseLotTrackHeaderDatas, IsAuto, _isRetry);
- if (WaferHolderInfo != null && _currentRecipe != null)
- {
- FaModuleNotifier.Instance.NotifyWaferShuttleRecipeFailed(WaferHolderInfo, _currentRecipe.Ppid);
- }
- return false;
- }
- _achievedCycle = _cycleManualProcessRoutine.GetAchievedCycle();
- bool result = state == RState.End;
- if (result)
- {
- _runrecipeElapsedTime = 0;
- if (Singleton<RouteManager>.Instance.IsAutoRunning)
- {
- AlarmListManager.Instance.CheckModuleAlamAndRemove(Module.ToString(), RinseState.RunReciping.ToString());
- }
- //记录LotTrack
- _runRecipeCompleteTime = DateTime.Now;
- int timeLength = (int)(_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds;
- _cycleManualProcessRoutine.RinseLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
- RinseLotTrackUtil.ExportRinseLotTrack(Module.ToString(), _cycleManualProcessRoutine.RinseLotTrackDatas,
- _cycleManualProcessRoutine.RinseLotTrackHeaderDatas, IsAuto, _isRetry);
- if (WaferHolderInfo != null && _currentRecipe != null)
- {
- FaModuleNotifier.Instance.NotifyWaferShuttleRecipeEnd(WaferHolderInfo, _currentRecipe.Ppid, timeLength);
- }
- }
- return result;
- }
- /// <summary>
- /// 校验其他rinse是否可用
- /// </summary>
- /// <returns></returns>
- private bool CheckOtherRinseAvaible()
- {
- ModuleName metalName = WaferHolderInfo.MetalModuleName;
- if (metalName!=ModuleName.Unknown)
- {
- return SchedulerSequenceManager.Instance.GetAvaibleModuleCell(_persistentValue.RecipeOperatingMode,ModuleType.Rinse, metalName)!=ModuleName.Unknown;
- }
- else
- {
- return false;
- }
- }
- private bool RunRecipeAbort(object[] param)
- {
- _cycleManualProcessRoutine.Abort();
- _rinseDevice.UpdateStateMachine("Abort");
- _rinseDevice.UpdateStatus("Abort");
- //记录LotTrack
- _runRecipeCompleteTime = DateTime.Now;
- _cycleManualProcessRoutine.RinseLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
- RinseLotTrackUtil.ExportRinseLotTrack(Module.ToString(), _cycleManualProcessRoutine.RinseLotTrackDatas,
- _cycleManualProcessRoutine.RinseLotTrackHeaderDatas, IsAuto, _isRetry);
- return true;
- }
- #endregion
- #region Keepwet
- /// <summary>
- /// keepwet
- /// </summary>
- /// <param name="param"></param>
- /// <returns></returns>
- private bool Keepwet(object[] param)
- {
- return _keepwetRoutine.Start(param) == RState.Running;
- }
- /// <summary>
- /// 停止Keepwet
- /// </summary>
- /// <param name="param"></param>
- /// <returns></returns>
- private bool KeepwetingComplete(object[] param)
- {
- // _keepwetRoutine.Abort();
- return true;
- }
- /// <summary>
- /// keepwet
- /// </summary>
- /// <param name="param"></param>
- /// <returns></returns>
- private bool KeepwetMonitor(object[] param)
- {
- RState ret = _keepwetRoutine.Monitor();
- if (ret == RState.End)
- {
- return true;
- }
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(RinseMsg.Error);
- }
- return false;
- }
- #endregion
- #region RinseRetry
- /// <summary>
- /// Retry
- /// </summary>
- /// <param name="param"></param>
- /// <returns></returns>
- private bool RinseRetry(object[] param)
- {
- AlarmList alarmList = AlarmListManager.Instance.GetAlarmListByModule(Module.ToString());
- if (alarmList != null)
- {
- CheckToPostMessage<RinseState, RinseMsg>(eEvent.WARN_RINSE, Module.ToString(), alarmList.ModuleCmd,
- alarmList.ModuleStep);
- }
- return false;
- }
- #endregion
- public bool Check(int msg, out string reason, params object[] args)
- {
- reason = "";
- return true;
- }
- public bool CheckAcked(int msg)
- {
- return true;
- }
- public int Invoke(string function, params object[] args)
- {
- switch (function)
- {
- case "HomeAll":
- if (IsIdle)
- {
- return (int)FSM_MSG.NONE;
- }
- if (CheckToPostMessage<RinseState, RinseMsg>(eEvent.ERR_RINSE, Module.ToString(), (int)RinseMsg.Initialize))
- {
- return (int)RinseMsg.Initialize;
- }
- else
- {
- return (int)FSM_MSG.NONE;
- }
- case "Retry":
- if (CheckToPostMessage<RinseState, RinseMsg>(eEvent.ERR_RINSE, Module.ToString(), (int)RinseMsg.Retry))
- {
- return (int)RinseMsg.Retry;
- }
- else
- {
- return (int)FSM_MSG.NONE;
- }
- }
- return (int)FSM_MSG.NONE;
- }
- }
- public enum RinseMsg
- {
- Error,
- Initialize,
- ResumeError,
- CycleProcessRecipe,
- RunRecipe,
- Abort,
- Keepwet,
- RecipeComplete,
- Init,
- Retry
- }
- }
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