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- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Routine;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.Routine;
- using CyberX8_Core;
- using CyberX8_RT.Devices.AXIS;
- using CyberX8_RT.Devices.Loader;
- using System;
- using System.Collections.Generic;
- using Aitex.Core.RT.Log;
- using MECF.Framework.Common.Utilities;
- using MECF.Framework.Common.CommonData.Loader;
- using MECF.Framework.Common.CommonData;
- using Aitex.Core.RT.DataCenter;
- namespace CyberX8_RT.Modules.Loader
- {
- public class LoaderUnloadAllSideRoutine : RoutineBase, IRoutine
- {
- private enum UnloadStep
- {
- RotationGoToLOADA,
- RotationGoToLOADAWait,
- SideAUnload,
- Delay,
- SideBUnload,
- UnloadAllWait,
- End
- }
- #region 常量
- private const string SIDE_A = "SideA";
- private const string SIDE_B = "SideB";
- private const int LOTTRACK_TIME = 1000;
- #endregion
- #region 内部变量
- private JetAxisBase _rotationAxis;
- private LoaderUnloadRoutine _sideAUnloadRoutine;
- private LoaderUnloadRoutine _sideBUnloadRoutine;
- private bool _isSideAUnloaded = false;
- private bool _isSideBunloaded = false;
- private bool _isSideAStop = false;
- private bool _isSideBStop = false;
- /// <summary>
- /// lotTrack time
- /// </summary>
- private DateTime _lotTackTime = DateTime.Now;
- /// <summary>
- /// Loader Common
- /// </summary>
- private LoaderCommonDevice _loaderCommon;
- /// <summary>
- /// LoaderSide A
- /// </summary>
- private LoaderSideDevice _loaderSideA;
- /// <summary>
- /// LoaderSide B
- /// </summary>
- private LoaderSideDevice _loaderSideB;
- /// <summary>
- /// Loader LotTrackData
- /// </summary>
- private List<LoaderLotTrackData> _datas = new List<LoaderLotTrackData>();
- #endregion
- #region 属性
- /// <summary>
- /// UnLoad LotTrackData
- /// </summary>
- public List<LoaderLotTrackData> UnloadLotTrackDatas { get { return _datas; } }
- #endregion
- /// <summary>
- /// 构造函数
- /// </summary>
- /// <param name="module"></param>
- public LoaderUnloadAllSideRoutine(string module) : base(module)
- {
- }
- /// <summary>
- /// 中止
- /// </summary>
- public void Abort()
- {
- }
- /// <summary>
- /// 监控
- /// </summary>
- /// <returns></returns>
- public RState Monitor()
- {
- LottrackRecord();
- Runner.Run(UnloadStep.RotationGoToLOADA,RotationGotoLOADA,_delay_1ms)
- .WaitWithStopCondition(UnloadStep.RotationGoToLOADAWait,CheckRotationPositionStatus,CheckRotationPositionRunStop)
- .Run(UnloadStep.SideAUnload, () => StartUnloadRoutine(_sideAUnloadRoutine,_isSideAUnloaded), _delay_1ms)
- .Delay(UnloadStep.Delay,500)
- .Run(UnloadStep.SideBUnload, () => StartUnloadRoutine(_sideBUnloadRoutine,_isSideBunloaded), _delay_1ms)
- .WaitWithStopCondition(UnloadStep.UnloadAllWait, CheckUnloadAllRoutineEndStatus,CheckUnloadAllRoutineStopStatus)
- .End(UnloadStep.End, NullFun, _delay_1ms);
- return Runner.Status;
- }
- /// <summary>
- /// Rotation Goto LOADA
- /// </summary>
- /// <returns></returns>
- private bool RotationGotoLOADA()
- {
- bool result = _rotationAxis.PositionStation("LOADA", false);
- if (!result)
- {
- NotifyError(eEvent.ERR_LOADER, "rotation start goto LOADA failed", 0);
- }
- return result;
- }
- /// <summary>
- /// 检验Rotation移动状态
- /// </summary>
- /// <returns></returns>
- private bool CheckRotationPositionStatus()
- {
- return _rotationAxis.Status == RState.End;
- }
- /// <summary>
- /// 检验Rotation是否还在运动
- /// </summary>
- /// <returns></returns>
- private bool CheckRotationPositionRunStop()
- {
- bool result = _rotationAxis.Status == RState.Failed || _rotationAxis.Status == RState.Timeout ;
- if (result)
- {
- NotifyError(eEvent.ERR_LOADER, "rotation goto position failed",0);
- }
- return result;
- }
- /// <summary>
- /// 启动Unload routine
- /// </summary>
- /// <param name="unloadRoutine"></param>
- /// <returns></returns>
- private bool StartUnloadRoutine(LoaderUnloadRoutine unloadRoutine,bool isSideUnloaded)
- {
- if (isSideUnloaded)
- {
- return true;
- }
- bool result= unloadRoutine.Start()==RState.Running;
- if(!result)
- {
- NotifyError(eEvent.ERR_LOADER, unloadRoutine.ErrorMsg, 0);
- }
- return result;
- }
- /// <summary>
- /// 检验UnloadAll完成状态
- /// </summary>
- /// <returns></returns>
- private bool CheckUnloadAllRoutineEndStatus()
- {
- bool sideAResult = true;
- if (!_isSideAUnloaded)
- {
- sideAResult = CheckUnloadRoutineEndStatus(_sideAUnloadRoutine);
- }
- bool sideBResult = true;
- if (!_isSideBunloaded)
- {
- sideBResult = CheckUnloadRoutineEndStatus(_sideBUnloadRoutine);
- }
- return sideAResult && sideBResult;
- }
- /// <summary>
- /// 检查UnloadAll停止状态
- /// </summary>
- /// <returns></returns>
- private bool CheckUnloadAllRoutineStopStatus()
- {
- bool sideAComplete = false;
- if (!_isSideAUnloaded&&!_isSideAStop)
- {
- RState ret = _sideAUnloadRoutine.Monitor();
- _isSideAStop = ret == RState.Failed || ret == RState.Timeout;
- sideAComplete = (ret != RState.Running);
- if (_isSideAStop)
- {
- NotifyError(eEvent.ERR_LOADER, $"unload A failed\r\n{_sideAUnloadRoutine.ErrorMsg}", 1);
- }
- }
- bool sideBComplete = false;
- if(!_isSideBunloaded&&!_isSideBStop)
- {
- RState ret = _sideBUnloadRoutine.Monitor();
- _isSideBStop = ret == RState.Failed || ret == RState.Timeout;
- sideBComplete = (ret != RState.Running);
- if (_isSideBunloaded)
- {
- NotifyError(eEvent.ERR_LOADER, $"unload B failed\r\n{_sideBUnloadRoutine.ErrorMsg}", 1);
- }
- }
- return (_isSideAStop && sideBComplete) || (_isSideBStop && sideAComplete);
- }
- /// <summary>
- /// 检验routine完成状态
- /// </summary>
- /// <param name="unloadRoutine"></param>
- /// <returns></returns>
- private bool CheckUnloadRoutineEndStatus(LoaderUnloadRoutine unloadRoutine)
- {
- return unloadRoutine.Monitor() == RState.End;
- }
- /// <summary>
- /// 检验Routine结束状态
- /// </summary>
- /// <param name="unloadRoutine"></param>
- /// <returns></returns>
- private bool CheckUnloadRoutineStopStatus(LoaderUnloadRoutine unloadRoutine,string side)
- {
- RState state=unloadRoutine.Monitor();
- if (state == RState.Failed || state == RState.Timeout)
- {
- NotifyError(eEvent.ERR_LOADER, $"{side} Unload failed", 0);
- return true;
- }
- return false;
- }
- /// <summary>
- /// 启动
- /// </summary>
- /// <param name="objs"></param>
- /// <returns></returns>
- public RState Start(params object[] objs)
- {
- InitializeParameters();
- _loaderCommon = DEVICE.GetDevice<LoaderCommonDevice>($"{Module}.Common");
- _loaderSideA = DEVICE.GetDevice<LoaderSideDevice>($"{Module}.SideA");
- _loaderSideB = DEVICE.GetDevice<LoaderSideDevice>($"{Module}.SideB");
- return Runner.Start(Module, "Start UnloadAll");
- }
- /// <summary>
- /// 初始化参数
- /// </summary>
- private void InitializeParameters()
- {
- _rotationAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Rotation");
- _sideAUnloadRoutine = new LoaderUnloadRoutine(ModuleName.Loader1.ToString(), "SideA");
- _sideBUnloadRoutine = new LoaderUnloadRoutine(ModuleName.Loader1.ToString(), "SideB");
- _isSideAUnloaded = false;
- _isSideBunloaded = false;
- _isSideAStop = false;
- _isSideBStop = false;
- }
- /// <summary>
- /// 重试
- /// </summary>
- /// <param name="step"></param>
- public RState Retry(int step)
- {
- InitializeParameters();
- List<Enum> preStepIds = new List<Enum>();
- if (step == 0||step==-1)
- {
- return Runner.Retry(UnloadStep.RotationGoToLOADA,preStepIds,Module,"UnloadAll Retry");
- }
- else
- {
- _isSideAUnloaded = CheckSideUnloadCondition("A", step,false);
- _isSideBunloaded= CheckSideUnloadCondition("B", step,false);
- AddPreSteps(UnloadStep.SideAUnload, preStepIds);
- return Runner.Retry(UnloadStep.SideBUnload,preStepIds, Module, $"UnloadAll step {UnloadStep.SideBUnload} Retry");
- }
- }
- /// <summary>
- /// 忽略前
- /// </summary>
- /// <param name="step"></param>
- /// <param name="preStepIds"></param>
- private void AddPreSteps(UnloadStep step,List<Enum> preStepIds)
- {
- for(int i = 0;i<(int)step;i++)
- {
- preStepIds.Add((UnloadStep)i);
- }
- }
- /// <summary>
- /// 检验前面Unload完成状态
- /// </summary>
- /// <returns></returns>
- public bool CheckCompleteCondition(int index)
- {
- if (!CheckSideUnloadCondition("A", index,true))
- {
- return false;
- }
- if (!CheckSideUnloadCondition("B", index, true))
- {
- return false;
- }
- return true;
- }
- /// <summary>
- /// 检验Side Unload情况
- /// </summary>
- /// <param name="side"></param>
- /// <param name="index"></param>
- /// <returns></returns>
- private bool CheckSideUnloadCondition(string side, int index,bool showError)
- {
- JetAxisBase shuttleAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.Shuttle{side}");
- double shuttlePosition = shuttleAxis.MotionData.MotorPosition;
- if (!shuttleAxis.CheckPositionIsInStation(shuttlePosition, "OPEN"))
- {
- if (showError)
- {
- NotifyError(eEvent.ERR_LOADER, $"shuttle{side} {shuttlePosition} is not in open", index);
- }
- return false;
- }
- JetAxisBase tiltAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.Tilt{side}");
- double tiltPosition = tiltAxis.MotionData.MotorPosition;
- if (!tiltAxis.CheckPositionIsInStation(tiltPosition, "HORI"))
- {
- if (showError)
- {
- NotifyError(eEvent.ERR_LOADER, $"tilt{side} {tiltPosition} is not in HORI", index);
- return false;
- }
- }
- JetAxisBase crsAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.LS{side}");
- double crsPosition = crsAxis.MotionData.MotorPosition;
- if (!crsAxis.CheckPositionIsInStation(crsPosition, "Unlock"))
- {
- if (showError)
- {
- NotifyError(eEvent.ERR_LOADER, $"LS{side} {crsPosition} is not in Unlock", index);
- }
- return false;
- }
- LoaderSideDevice loaderSideDevice = DEVICE.GetDevice<LoaderSideDevice>($"{ModuleName.Loader1}.Side{side}");
- if (loaderSideDevice.SideData.DoorLowerLocked || loaderSideDevice.SideData.DoorUpperLocked)
- {
- if (showError)
- {
- NotifyError(eEvent.ERR_LOADER, $"side{side} door locked", index);
- }
- }
- return true;
- }
- /// <summary>
- /// 记录Lottrack
- /// </summary>
- private void LottrackRecord()
- {
- //记录Lottrack
- if (DateTime.Now.Subtract(_lotTackTime).TotalMilliseconds >= LOTTRACK_TIME)
- {
- AddLotTrackData();
- _lotTackTime = DateTime.Now;
- }
- }
- /// <summary>
- /// 获取Lot Track数据
- /// </summary>
- /// <returns></returns>
- private void AddLotTrackData()
- {
- LoaderLotTrackData data = new LoaderLotTrackData();
- data.TimeStamp = DateTime.Now;
- data.LoaderABernoulliBladderEnable = _loaderSideA.SideData.BernoulliBladder;
- data.LoaderABernoulliExtended = _loaderSideA.SideData.BernoulliExtended;
- data.LoaderABernoulliBladderPressure = _loaderSideA.SideData.BernoulliBladderPressure;
- data.LoaderABernoulliN2Pressure = _loaderSideA.SideData.BernoulliPressure;
- data.LoaderACRSVacuum = _loaderSideA.SideData.CRSVacuum;
- data.LoaderACRSVacuumAnlg = _loaderSideA.SideData.CRSVacuumValue;
- data.LoaderAWHPressure = _loaderSideA.SideData.WHBladderPressure;
- data.LoaderATranslatePressure = _loaderSideA.SideData.TransPressure;
- data.LoaderBBernoulliBladderEnable = _loaderSideB.SideData.BernoulliBladder;
- data.LoaderBBernoulliExtended = _loaderSideB.SideData.BernoulliExtended;
- data.LoaderBBernoulliBladderPressure = _loaderSideB.SideData.BernoulliBladderPressure;
- data.LoaderBBernoulliN2Pressure = _loaderSideB.SideData.BernoulliPressure;
- data.LoaderBCRSVacuum = _loaderSideB.SideData.CRSVacuum;
- data.LoaderBCRSVacuumAnlg = _loaderSideB.SideData.CRSVacuumValue;
- data.LoaderBWHPressure = _loaderSideB.SideData.WHBladderPressure;
- data.LoaderBTranslatePressure = _loaderSideB.SideData.TransPressure;
- data.LoaderWHClamped = _loaderCommon.CommonData.WaferHolderClamp;
- _datas.Add(data);
- }
-
- }
- }
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