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- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.Routine;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.Routine;
- using MECF.Framework.Common.Utilities;
- using CyberX8_Core;
- using CyberX8_RT.Devices.AXIS;
- using CyberX8_RT.Devices.Loader;
- using CyberX8_RT.Devices.PUF;
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- using CyberX8_RT.Devices.Safety;
- using Aitex.Core.Util;
- using CyberX8_RT.Modules.PUF;
- using CyberX8_RT.Modules.Transporter;
- using Aitex.Core.Common;
- using static Mono.Security.X509.X520;
- using Aitex.Core.RT.SCCore;
- namespace CyberX8_RT.Modules.Loader
- {
- public class LoaderHomeAllRoutine : RoutineBase, IRoutine
- {
- private enum HomeAllStep
- {
- CheckPreCondition,
- ShuttleAHome,
- WaitShuttleAHome,
- TiltAHome,
- WaitTiltAHome,
- TiltAGotoVERT,
- TiltAGotoVERTCheck,
- ShuttleAGotoMID,
- ShuttleAGotoMIDCheck,
- ShuttleBHome,
- WaitShuttleBHome,
- TiltBHome,
- WaitTiltBHome,
- TiltBGotoVERT,
- TiltBGotoVERTCheck,
- ShuttleBGotoMID,
- ShuttleBGotoMIDCheck,
- LSAHome,
- WaitLSAHome,
- LSAGotoSetup,
- LSAGotoSetupCheck,
- LSBHome,
- WaitLSBHome,
- LSBGotoSetup,
- LSBGotoSetupCheck,
- RotationHome,
- WaitRotationHome,
- RotationGotoTrnpa,
- RotationGotoTrnpaCheck,
- End
- }
- #region 内部变量
- private JetAxisBase _shuttleAAxis;
- private JetAxisBase _shuttleBAxis;
- private JetAxisBase _tiltAAxis;
- private JetAxisBase _tiltBAxis;
- private JetAxisBase _rotationAxis;
- private JetAxisBase _lsAAxis;
- private JetAxisBase _lsBAxis;
- private LoaderSideDevice _sideADevice;
- private LoaderSideDevice _sideBDevice;
- private int _sideAWaferSize;
- private int _sideBWaferSize;
- #endregion
- public LoaderHomeAllRoutine(string module) : base(module)
- {
- _shuttleAAxis = DEVICE.GetDevice<JetAxisBase>($"{module}.ShuttleA");
- _shuttleBAxis = DEVICE.GetDevice<JetAxisBase>($"{module}.ShuttleB");
- _tiltAAxis = DEVICE.GetDevice<JetAxisBase>($"{module}.TiltA");
- _tiltBAxis = DEVICE.GetDevice<JetAxisBase>($"{module}.TiltB");
- _lsAAxis = DEVICE.GetDevice<JetAxisBase>($"{module}.LSA");
- _lsBAxis = DEVICE.GetDevice<JetAxisBase>($"{module}.LSB");
- _rotationAxis = DEVICE.GetDevice<JetAxisBase>($"{module}.Rotation");
- }
- public void Abort()
- {
- Runner.Stop("Manual Abort");
- }
- public RState Monitor()
- {
-
- Runner.Run(HomeAllStep.CheckPreCondition, CheckPreCondition, _delay_1ms)
- //Home Shuttle Goto MID
- .Run(HomeAllStep.ShuttleAHome, () => { return _shuttleAAxis.Home(); }, _delay_1ms)
- .WaitWithStopCondition(HomeAllStep.WaitShuttleAHome, () => { return _shuttleAAxis.Status == RState.End; }, () => { return _shuttleAAxis.Status == RState.Failed; })
- //Home Tilt Goto VERT
- .Run(HomeAllStep.TiltAHome, () => { return _tiltAAxis.Home(); },_delay_1ms)
- .WaitWithStopCondition(HomeAllStep.WaitTiltAHome, () => { return _tiltAAxis.Status == RState.End; }, () => {return _tiltAAxis.Status == RState.Failed; })
- .Run(HomeAllStep.TiltAGotoVERT, () => { return _tiltAAxis.PositionStation("VERT",true); },100)
- .WaitWithStopCondition(HomeAllStep.TiltAGotoVERTCheck, () => { return _tiltAAxis.Status == RState.End; }, () => { return _tiltAAxis.Status == RState.Failed; })
- .Run(HomeAllStep.ShuttleBHome, () => { return _shuttleBAxis.Home(); }, _delay_1ms)
- .WaitWithStopCondition(HomeAllStep.WaitShuttleBHome, () => { return _shuttleBAxis.Status == RState.End; }, () => { return _shuttleBAxis.Status == RState.Failed; })
- .Run(HomeAllStep.TiltBHome, () => { return _tiltBAxis.Home(); }, _delay_1ms)
- .WaitWithStopCondition(HomeAllStep.WaitTiltBHome, () => { return _tiltBAxis.Status == RState.End; }, () => { return _tiltBAxis.Status == RState.Failed; })
- .Run(HomeAllStep.TiltBGotoVERT, () => { return _tiltBAxis.PositionStation("VERT",true); }, 100)
- .WaitWithStopCondition(HomeAllStep.TiltBGotoVERTCheck, () => { return _tiltBAxis.Status == RState.End; }, () => { return _tiltBAxis.Status == RState.Failed; })
- .Run(HomeAllStep.ShuttleAGotoMID, () => { return _shuttleAAxis.PositionStation("MID",true); }, 100)
- .WaitWithStopCondition(HomeAllStep.ShuttleAGotoMIDCheck, () => { return _shuttleAAxis.Status == RState.End; }, () => { return _shuttleAAxis.Status == RState.Failed; })
- .Run(HomeAllStep.ShuttleBGotoMID, () => { return _shuttleBAxis.PositionStation("MID", true); }, 100)
- .WaitWithStopCondition(HomeAllStep.ShuttleBGotoMIDCheck, () => { return _shuttleBAxis.Status == RState.End; }, () => { return _shuttleBAxis.Status == RState.Failed; })
- //Home LS Goto Setup
- .Run(HomeAllStep.LSAHome, () => { return _lsAAxis.Home(); }, _delay_1ms)
- .WaitWithStopCondition(HomeAllStep.WaitLSAHome, () => { return _lsAAxis.Status == RState.End; }, () => { return _lsAAxis.Status == RState.Failed; })
- .Run(HomeAllStep.LSAGotoSetup, () => { return _lsAAxis.PositionStation($"Setup{_sideAWaferSize}", true); }, _delay_1ms)
- .WaitWithStopCondition(HomeAllStep.LSAGotoSetupCheck, () => { return _lsAAxis.Status == RState.End; }, () => { return _lsAAxis.Status == RState.Failed; })
- .Run(HomeAllStep.LSBHome, () => { return _lsBAxis.Home(); }, _delay_1ms)
- .WaitWithStopCondition(HomeAllStep.WaitLSBHome, () => { return _lsBAxis.Status == RState.End; }, () => { return _lsBAxis.Status == RState.Failed; })
- .Run(HomeAllStep.LSBGotoSetup, () => { return _lsBAxis.PositionStation($"Setup{_sideBWaferSize}",true); }, 100)
- .WaitWithStopCondition(HomeAllStep.LSBGotoSetupCheck, () => { return _lsBAxis.Status == RState.End; }, () => { return _lsBAxis.Status == RState.Failed; })
- //Home Rotation Goto TRNPA
- .Run(HomeAllStep.RotationHome, () => { return _rotationAxis.Home(); }, _delay_1ms)
- .WaitWithStopCondition(HomeAllStep.WaitRotationHome, () => { return _rotationAxis.Status == RState.End; }, () => { return _rotationAxis.Status == RState.Failed; })
- .Run(HomeAllStep.RotationGotoTrnpa, () => { return _rotationAxis.PositionStation("TRNPA", true); }, 100)
- .WaitWithStopCondition(HomeAllStep.RotationGotoTrnpaCheck, () => { return _rotationAxis.Status == RState.End; }, () => { return _rotationAxis.Status == RState.Failed; })
- .End(HomeAllStep.End,NullFun);
- return Runner.Status;
- }
-
- public RState Start(params object[] objs)
- {
- _sideADevice = DEVICE.GetDevice<LoaderSideDevice>($"{Module}.SideA");
- _sideBDevice = DEVICE.GetDevice<LoaderSideDevice>($"{Module}.SideB");
- if (SC.ContainsItem($"Loader1.SideAWaferSize"))
- {
- _sideAWaferSize = SC.GetValue<int>($"Loader1.SideAWaferSize");
- }
- if (SC.ContainsItem($"Loader1.SideBWaferSize"))
- {
- _sideBWaferSize = SC.GetValue<int>($"Loader1.SideBWaferSize");
- }
- Runner.Start(Module, "Home All");
- return RState.Running;
- }
- /// <summary>
- /// 检验前置条件
- /// </summary>
- /// <returns></returns>
- private bool CheckPreCondition()
- {
- if (!CheckHomeCondition())
- {
- return false;
- }
- if (!CheckAxisCondition())
- {
- return false;
- }
- return true;
- }
- /// <summary>
- /// 检验Home条件
- /// </summary>
- /// <returns></returns>
- private bool CheckHomeCondition()
- {
- //检验PUF、Loader Transporter,Robot均Homed
- //Efem Home
- if (ModuleHelper.IsInstalled(ModuleName.EFEM))
- {
- EfemEntity efemEntity = Singleton<RouteManager>.Instance.GetModule<EfemEntity>(ModuleName.EFEM.ToString());
- if (!efemEntity.IsHomed)
- {
- LOG.WriteLog(eEvent.ERR_EFEM_ROBOT, Module, $"{ModuleName.EFEM.ToString()} is not home, Cannot execute GotoSavedPosition");
- return false;
- }
- }
- if (ModuleHelper.IsInstalled(ModuleName.PUF1))
- {
- PUFEntity puf1Entity = Singleton<RouteManager>.Instance.GetModule<PUFEntity>(ModuleName.PUF1.ToString());
- if (!puf1Entity.IsHomed)
- {
- NotifyError(eEvent.ERR_LOADER, "PUF1 is not homed", -1);
- return false;
- }
- }
- if (ModuleHelper.IsInstalled(ModuleName.Transporter2))
- {
- TransporterEntity loaderTransportEntity = Singleton<RouteManager>.Instance.GetModule<TransporterEntity>(ModuleName.Transporter2.ToString());
- if (!loaderTransportEntity.IsHomed)
- {
- NotifyError(eEvent.ERR_LOADER, "Loader Transporter is not homed", -1);
- return false;
- }
- }
- return true;
- }
- /// <summary>
- /// 检验Axis条件
- /// </summary>
- /// <param name="side"></param>
- /// <returns></returns>
- private bool CheckAxisCondition()
- {
- //Check all motor switch on
- if (!AxisManager.Instance.CheckModuleAxisSwitchOn(Module, ""))
- {
- return false;
- }
- return true;
- }
- }
- }
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