LoadPortLoadRoutine.cs 3.6 KB

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  1. using System;
  2. using System.IO;
  3. using System.Windows.Input;
  4. using Aitex.Core.Common;
  5. using Aitex.Core.RT.Device;
  6. using Aitex.Core.RT.Event;
  7. using Aitex.Core.RT.Log;
  8. using Aitex.Core.RT.Routine;
  9. using Aitex.Core.RT.SCCore;
  10. using MECF.Framework.Common.Equipment;
  11. using CyberX8_Core;
  12. using MECF.Framework.Common.SubstrateTrackings;
  13. namespace CyberX8_RT.Modules.LPs
  14. {
  15. class LoadPortLoadRoutine : ModuleRoutineBase, IRoutine
  16. {
  17. enum RoutineStep
  18. {
  19. WaitEFEMIdle,
  20. GetWaferSize,
  21. CheckWaferSize,
  22. ReWaitEFEMIdle,
  23. Load,
  24. ContinueWaitEFEMIdle,
  25. Map,
  26. LastWaitEFEMIdle,
  27. End,
  28. }
  29. private int _timeout = 0;
  30. private LoadPortModule _lpModule;
  31. public LoadPortLoadRoutine(LoadPortModule lpModule) : base(ModuleHelper.Converter(lpModule.Module))
  32. {
  33. _lpModule = lpModule;
  34. Name = "Load";
  35. }
  36. public RState Start(params object[] objs)
  37. {
  38. Reset();
  39. _timeout = SC.GetValue<int>("EFEM.LoadPort.MotionTimeout");
  40. if (!_lpModule.LPDevice.HasCassette )
  41. {
  42. LOG.Write(eEvent.WARN_EFEM_COMMON_WARN, Module, $"{Module} not found carrier, can not load");
  43. return RState.Failed;
  44. }
  45. Notify($"Start");
  46. return Runner.Start(Module, Name);
  47. }
  48. public RState Monitor()
  49. {
  50. Runner.Wait(RoutineStep.WaitEFEMIdle, () => _lpModule.IsRobotIdle)
  51. .Run(RoutineStep.GetWaferSize, GetWaferSize, CheckDevice, _timeout * 1000)
  52. .Run(RoutineStep.CheckWaferSize, CheckWaferSize, _delay_1ms)
  53. .Wait(RoutineStep.ReWaitEFEMIdle, () => _lpModule.IsRobotIdle)
  54. .Run(RoutineStep.Load, Load, CheckDevice, _timeout * 1000)
  55. .Wait(RoutineStep.ContinueWaitEFEMIdle, () => _lpModule.IsRobotIdle&&WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot,0))
  56. .Run(RoutineStep.Map,Map,CheckDevice, _timeout * 1000)
  57. .Wait(RoutineStep.LastWaitEFEMIdle, () => _lpModule.IsRobotIdle)
  58. .End(RoutineStep.End, NullFun,_delay_1s);
  59. return Runner.Status;
  60. }
  61. public bool Load()
  62. {
  63. Notify($"Start Load {_lpModule.Name}");
  64. return _lpModule.LPDevice.Load();
  65. }
  66. public bool GetWaferSize()
  67. {
  68. Notify($"Start Get {_lpModule.Name} Wafer Size");
  69. return _lpModule.LPDevice.GetWaferSize();
  70. }
  71. public bool CheckWaferSize()
  72. {
  73. Notify($"Start Check {_lpModule.Name} Wafer Size");
  74. bool restult = (int)_lpModule.LPDevice.WaferSize == SC.GetValue<int>("System.WaferSize");
  75. if (!restult)
  76. {
  77. LOG.Write(eEvent.ERR_DEVICE_INFO,Module,$"Current WaferSize is {(int)_lpModule.LPDevice.WaferSize}, The Configuration is {SC.GetValue<int>("System.WaferSize")}");
  78. }
  79. return restult;
  80. }
  81. public bool Map()
  82. {
  83. Notify($"Start Map {_lpModule.Name}");
  84. _lpModule.LPDevice.Map();
  85. return true;
  86. }
  87. bool CheckDevice()
  88. {
  89. if (_lpModule.LPDevice.IsError)
  90. return false;
  91. if (_lpModule.LPDevice.IsBusy)
  92. return false;
  93. return true;
  94. }
  95. public void Abort()
  96. {
  97. }
  98. }
  99. }