EfemVacuumRoutine.cs 2.4 KB

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  1. using Aitex.Core.Common;
  2. using MECF.Framework.Common.Equipment;
  3. using CyberX8_RT.Devices.EFEM;
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using Aitex.Core.RT.Log;
  10. using Aitex.Core.RT.Routine;
  11. using Aitex.Sorter.Common;
  12. using MECF.Framework.Common.Schedulers;
  13. using MECF.Framework.Common.SubstrateTrackings;
  14. using System.Diagnostics;
  15. using CyberX8_Core;
  16. using Aitex.Core.RT.SCCore;
  17. using System.Threading;
  18. namespace CyberX8_RT.Modules.EFEM
  19. {
  20. public class EfemVacuumRoutine : ModuleRoutineBase, IRoutine
  21. {
  22. private bool _vacuumStatus;
  23. private ModuleName _vacuumModule;
  24. private enum VacuumStep
  25. {
  26. VacuumAction,
  27. End,
  28. }
  29. EfemBase _efem;
  30. /// <summary>
  31. /// 构造函数
  32. /// </summary>
  33. /// <param name="efem"></param>
  34. public EfemVacuumRoutine(EfemBase efem) : base(ModuleName.EFEM)
  35. {
  36. _efem = efem;
  37. }
  38. /// <summary>
  39. /// 启动
  40. /// </summary>
  41. /// <param name="objs"></param>
  42. /// <returns></returns>
  43. public RState Start(params object[] objs)
  44. {
  45. _vacuumModule = (ModuleName)objs[0];
  46. _vacuumStatus = (bool)objs[1];
  47. return Runner.Start(Module, "Vacumm");
  48. }
  49. /// <summary>
  50. /// 监控
  51. /// </summary>
  52. /// <returns></returns>
  53. public RState Monitor()
  54. {
  55. Runner.Run(VacuumStep.VacuumAction, ()=> { return Vacuum(_vacuumModule, _vacuumStatus);}, CheckVacuumDone, 30000)
  56. .End(VacuumStep.End, NullFun, 0);
  57. return Runner.Status;
  58. }
  59. /// <summary>
  60. /// Vacuum功能
  61. /// </summary>
  62. /// <returns></returns>
  63. private bool Vacuum(ModuleName moduleName,bool VacuumState)
  64. {
  65. return _efem.Vacuum(moduleName,VacuumState);
  66. }
  67. private bool CheckVacuumDone()
  68. {
  69. if (_efem.Status == RState.End)
  70. {
  71. return true;
  72. }
  73. else if (_efem.Status == RState.Failed)
  74. {
  75. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, Module, $"Efem Vacuum failed: {_efem.Status}");
  76. return true;
  77. }
  78. return false;
  79. }
  80. public void Abort()
  81. {
  82. Runner.Stop("Manual Abort");
  83. }
  84. }
  85. }