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- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Aitex.Sorter.Common;
- using CyberX8_RT.Devices;
- using MECF.Framework.Common.Routine;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.SubstrateTrackings;
- using CyberX8_Core;
- using Aitex.Core.RT.Log;
- using Aitex.Core.Util;
- using MECF.Framework.Common.Schedulers;
- using System.Collections.Generic;
- using CyberX8_RT.Devices.EFEM;
- using CyberX8_RT.Modules.LPs;
- using CyberX8_RT.Modules.SRD;
- using System.Runtime.InteropServices;
- using CyberX8_RT.Modules.PUF;
- using Aitex.Core.RT.Device;
- using CyberX8_RT.Devices.AXIS;
- using MECF.Framework.Common.Utilities;
- using CyberX8_RT.Devices.PUF;
- using CyberX8_RT.Modules.Transporter;
- using MECF.Framework.Common.WaferHolder;
- using System;
- using Aitex.Core.UI.ControlDataContext;
- namespace CyberX8_RT.Modules.EFEM
- {
- class EfemPickRoutine : RoutineBase, IRoutine
- {
- private enum PickStep
- {
- WaitModuleReady,
- PufVacuumOff,
- Picking1,
- Picking2,
- End,
- }
- private int _moveTimeout = 20 * 1000;
- private ModuleName _targetModule = ModuleName.System;
- int _targetSlot;
- int _targetSlot2;
- string _targetPufSlot;
- Hand _hand;
- Hand _hand2;
- EfemBase _efem;
- bool _bDoublePick = false;
- private SRDEntity _srdModule;
- private PUFEntity _pufModule;
- private Queue<MoveItem> _moveQueue;
- public EfemPickRoutine(EfemBase efem) : base(ModuleName.EfemRobot.ToString())
- {
- _efem = efem;
- }
- public RState Start(params object[] objs)
- {
- _bDoublePick = false;
- _moveQueue = (Queue<MoveItem>)objs[0];
- _targetModule = _moveQueue.Peek().SourceModule;
- _targetSlot = _moveQueue.Peek().SourceSlot;
- _hand = _moveQueue.Peek().RobotHand;
- if(_moveQueue.Count >= 2)
- {
- _bDoublePick = true;
- }
- if (!CheckPreCondition())
- {
- return RState.Failed;
- }
- _moveTimeout = SC.GetValue<int>($"EFEM.MotionTimeout") * 1000;
- return Runner.Start(Module, $"Pick from {_targetModule}");
- }
- private Loadport GetLoadPort(ModuleName station)
- {
- LoadPortModule loadPortModule = Singleton<RouteManager>.Instance.EFEM.GetLoadportModule(station - ModuleName.LP1);
- return loadPortModule.LPDevice;
- }
- private bool CheckPreCondition()
- {
- //LoadPort状态判断
- if (ModuleHelper.IsLoadPort(_targetModule) && ModuleHelper.IsInstalled(_targetModule))
- {
- Loadport loadPort=GetLoadPort(_targetModule);
- if (loadPort == null)
- {
- return false;
- }
- if (!loadPort.IsLoaded)
- {
- NotifyError(eEvent.ERR_EFEM_ROBOT, $"LoadPort not load, cannot do the pick action",-1);
- return false;
- }
- }
- if (ModuleHelper.IsSRD(_targetModule) && ModuleHelper.IsInstalled(_targetModule))
- {
- _srdModule = Singleton<RouteManager>.Instance.GetModule<SRDEntity>(_targetModule.ToString());
- if (!_srdModule.IsHomed)
- {
- NotifyError(eEvent.ERR_EFEM_ROBOT, $"{_targetModule} is not homed, please home it first",-1);
- return false;
- }
- //判断arm是否在home位置上
- JetAxisBase jetAxisBase = DEVICE.GetDevice<JetAxisBase>($"{_targetModule}.Arm");
- double position = jetAxisBase.MotionData.MotorPosition;
- bool result = jetAxisBase.CheckPositionIsInStation(position, "Home");
- if (!result)
- {
- NotifyError(eEvent.ERR_EFEM_ROBOT, $"{_targetModule} armaxis {position} is not in homed place",-1);
- return false;
- }
- if (_srdModule.IsSrdDoorClosed)
- {
- NotifyError(eEvent.ERR_EFEM_ROBOT, $"{_targetModule} door closed, can not pick",-1);
- return false;
- }
- if (!_srdModule.IsSrdChuckVacuum)
- {
- NotifyError(eEvent.ERR_EFEM_ROBOT, $"{_targetModule} Vacuum on, can not pick",-1);
- return false;
- }
- }
- if (ModuleHelper.IsPUF(_targetModule) && ModuleHelper.IsInstalled(_targetModule))
- {
- _pufModule = Singleton<RouteManager>.Instance.GetModule<PUFEntity>(_targetModule.ToString());
- if (!_pufModule.IsHomed)
- {
- NotifyError(eEvent.ERR_EFEM_ROBOT, $"{_targetModule} is not homed, please home it first",-1);
- return false;
- }
- if (!_pufModule.IsInRobotStation)
- {
- NotifyError(eEvent.ERR_EFEM_ROBOT, $"{_targetModule} not in robot station, cannot do the pick action",-1);
- return false;
- }
- }
- if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, (int)_hand))
- {
- NotifyError(eEvent.ERR_EFEM_ROBOT, $"Efem robot arm{_hand} already has a wafer, cannot do the pick action",-1);
- return false;
- }
- if (WaferManager.Instance.CheckNoWafer(_targetModule, _targetSlot))
- {
- if (ModuleHelper.IsPUF(_targetModule))
- {
- _targetPufSlot = _targetSlot == 0 ? "SideA" : "SideB";
- NotifyError(eEvent.ERR_EFEM_ROBOT, $"The target: {_targetModule}.{_targetPufSlot} has no wafer, cannot do the pick action",-1);
- }
- else
- {
- NotifyError(eEvent.ERR_EFEM_ROBOT, $"The target slot: {_targetModule}.{_targetSlot + 1} has no wafer, cannot do the pick action",-1);
- }
- return false;
- }
- if (_moveQueue.Count >= 2)
- {
- if (!ModuleHelper.IsLoadPort(_targetModule))
- {
- NotifyError(eEvent.ERR_EFEM_ROBOT, $"Wrong double pick command, target is not loadport",-1);
- return false;
- }
- _hand2 = _hand != Hand.Blade1 ? Hand.Blade1 : Hand.Blade2;
- if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, (int)_hand2))
- {
- NotifyError(eEvent.ERR_EFEM_ROBOT, $"Efem robot arm{_hand2} already has a wafer, cannot do the double pick action",-1);
- return false;
- }
- _targetSlot2 = _moveQueue.ToArray()[1].SourceSlot;
- if (WaferManager.Instance.CheckNoWafer(_targetModule, _targetSlot2))
- {
- NotifyError(eEvent.ERR_EFEM_ROBOT, $"The target slot: {_targetModule}.{_targetSlot2 + 1} has no wafer, cannot do the double pick action",-1);
- return false;
- }
- }
- return true;
- }
- public RState Monitor()
- {
- if(_bDoublePick)
- {
- Runner.Wait(PickStep.WaitModuleReady, WaitModuleReady)
- .Run(PickStep.Picking1, Pick1, Pick1Done, _moveTimeout)
- .Run(PickStep.Picking2, Pick2, Pick2Done, _moveTimeout)
- .End(PickStep.End, ActionDone);
- }
- else
- {
- Runner.Wait(PickStep.WaitModuleReady, WaitModuleReady)
- .RunIf(PickStep.PufVacuumOff, ModuleHelper.IsPUF(_targetModule), PufVacuumOff, CheckPufVacuumOff, _delay_2s)
- .Run(PickStep.Picking1, Pick1, Pick1Done, _moveTimeout)
- .End(PickStep.End, ActionDone);
- }
- return Runner.Status;
- }
- /// <summary>
- /// Puf关闭真空
- /// </summary>
- /// <returns></returns>
- private bool PufVacuumOff()
- {
- PufVacuum pufVacuum = DEVICE.GetDevice<PufVacuum>($"{_targetModule}.Vacuum");
- if (_targetSlot == 0)
- {
- return pufVacuum.VacuumAOff();
- }
- else
- {
- return pufVacuum.VacuumBOff();
- }
- }
- /// <summary>
- /// 检验Puf是否关闭真空
- /// </summary>
- /// <returns></returns>
- private bool CheckPufVacuumOff()
- {
- PufVacuum pufVacuum = DEVICE.GetDevice<PufVacuum>($"{_targetModule}.Vacuum");
- if (_targetSlot == 0)
- {
- return pufVacuum.IsChuckAReleased;
- }
- else
- {
- return pufVacuum.ISChuckBReleased;
- }
- }
- public void Abort()
- {
- _efem.Halt();
- }
- private bool WaitModuleReady()
- {
- return _efem.Status == RState.End;
- }
- private bool Pick1()
- {
- return _efem.Pick(_targetModule, _targetSlot, _hand);
- }
- private bool Pick1Done()
- {
- if (_efem.Status == RState.End)
- {
- WaferManager.Instance.WaferMoved(_targetModule, _targetSlot, ModuleName.EfemRobot, (int)_hand);
- return true;
- }
- else if (_efem.Status == RState.Failed)
- {
- NotifyError(eEvent.ERR_EFEM_ROBOT, $"Efem robot picking failed: {_efem.Status}",-1);
- return true;
- }
- return false;
- }
- private bool Pick2()
- {
- return _efem.Pick(_targetModule, _targetSlot2, _hand2);
- }
- private bool Pick2Done()
- {
- if (_efem.Status == RState.End)
- {
- WaferManager.Instance.WaferMoved(_targetModule, _targetSlot2, ModuleName.EfemRobot, (int)_hand2);
- return true;
- }
- else if (_efem.Status == RState.Failed)
- {
- NotifyError(eEvent.ERR_EFEM_ROBOT, $"Efem robot picking failed: {_efem.Status}",-1);
- return true;
- }
- return false;
- }
- private bool ActionDone()
- {
- return true;
- }
- /// <summary>
- /// 重试
- /// </summary>
- /// <param name="step"></param>
- public RState Retry(int step)
- {
- if(!CheckPreCondition())
- {
- return RState.Failed;
- }
- _efem.Reset();
- List<Enum> preStepIds = new List<Enum>();
- AddPreSteps(PickStep.PufVacuumOff, preStepIds);
- return Runner.Retry(PickStep.PufVacuumOff, preStepIds, Module, "Pick Retry");
- }
- /// <summary>
- /// 忽略前
- /// </summary>
- /// <param name="step"></param>
- /// <param name="preStepIds"></param>
- private void AddPreSteps(PickStep step, List<Enum> preStepIds)
- {
- for (int i = 0; i < (int)step; i++)
- {
- preStepIds.Add((PickStep)i);
- }
- }
- /// <summary>
- /// 检验前面完成状态
- /// </summary>
- /// <returns></returns>
- public bool CheckCompleteCondition(int index)
- {
- if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, (int)_hand))
- {
- NotifyError(eEvent.ERR_EFEM_ROBOT, $"Efem robot arm{_hand} has no wafer", -1);
- return false;
- }
- if (WaferManager.Instance.CheckHasWafer(_targetModule, _targetSlot))
- {
- NotifyError(eEvent.ERR_EFEM_ROBOT, $"{_targetModule} Slot{_targetSlot} has no wafer", -1);
- return false;
- }
- return true;
- }
- }
- }
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