PufFlipAxisInterLock.cs 5.6 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.Log;
  4. using MECF.Framework.Common.Utilities;
  5. using CyberX8_RT.Devices.AXIS;
  6. using CyberX8_RT.Devices.AXIS.CANOpen;
  7. using CyberX8_RT.Devices.YASKAWA;
  8. using System;
  9. using System.Collections.Generic;
  10. using System.Linq;
  11. using System.Text;
  12. using System.Threading.Tasks;
  13. using MECF.Framework.Common.SubstrateTrackings;
  14. namespace CyberX8_RT.Devices.PUF
  15. {
  16. public class PufFlipAxisInterLock : IAxisInterLock
  17. {
  18. #region 内部变量
  19. private JetAxisBase _axis;
  20. #endregion
  21. #region 属性
  22. /// <summary>
  23. /// 模块名称
  24. /// </summary>
  25. public string Module { get { return _axis.Module; } }
  26. /// <summary>
  27. /// 子模块名称
  28. /// </summary>
  29. public string Name { get { return _axis.Name; } }
  30. #endregion
  31. /// <summary>
  32. /// 构造函数
  33. /// </summary>
  34. /// <param name="Module"></param>
  35. /// <param name="name"></param>
  36. public PufFlipAxisInterLock(JetAxisBase axis)
  37. {
  38. _axis=axis;
  39. }
  40. /// <summary>
  41. /// Positon前校验inter lock
  42. /// </summary>
  43. /// <param name="station"></param>
  44. /// <returns></returns>
  45. public bool CheckGotoPosition(string station)
  46. {
  47. if (!_axis.IsHomed)
  48. {
  49. LOG.WriteLog(eEvent.ERROR_PUF_NOT_HOME, $"{Module}.{Name}", "axis is not homed, Cannot execute GotoSavedPosition");
  50. return false;
  51. }
  52. if (!AxisManager.Instance.CheckModuleAxisSwitchOn(Module,Name))
  53. {
  54. return false;
  55. }
  56. PufVacuum _pufVacuum = DEVICE.GetDevice<PufVacuum>($"{Module}.Vacuum");
  57. bool chuckAWaferPresent = _pufVacuum.ChuckAWaferPresent;
  58. bool chuckBWaferPresent = _pufVacuum.ChuckBWaferPresent;
  59. JetAxisBase rotationAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Rotation");
  60. if(rotationAxis.IsRun)
  61. {
  62. LOG.WriteLog(eEvent.ERROR_PUF_OTHERAXIS_RUNNING, $"{Module}.{Name}", "rotation is running, Cannot execute GotoSavedPosition");
  63. return false;
  64. }
  65. JetAxisBase verticalAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Vertical");
  66. if (verticalAxis.IsRun)
  67. {
  68. LOG.WriteLog(eEvent.ERROR_PUF_OTHERAXIS_RUNNING, $"{Module}.{Name}", "vertical is running, Cannot execute GotoSavedPosition");
  69. return false;
  70. }
  71. double rotationPosition = rotationAxis.MotionData.MotorPosition;
  72. double verticalPosition= verticalAxis.MotionData.MotorPosition;
  73. //A面存在Wafer同时A面Vacuum is released
  74. if(WaferManager.Instance.CheckHasWafer(Module,0)&&_pufVacuum.IsChuckAReleased)
  75. {
  76. LOG.WriteLog(eEvent.ERROR_PUF_HAS_WAFER, $"{Module}.{Name}", "Side A Has Wafer,Vacuum is Off");
  77. return false;
  78. }
  79. //B面存在Wafer同时B面Vacuum is released
  80. if (WaferManager.Instance.CheckHasWafer(Module, 1) && _pufVacuum.ISChuckBReleased)
  81. {
  82. LOG.WriteLog(eEvent.ERROR_PUF_HAS_WAFER, $"{Module}.{Name}", "Side B Has Wafer,Vacuum is Off");
  83. return false;
  84. }
  85. if (chuckAWaferPresent || chuckBWaferPresent)//Wafer Present,
  86. {
  87. if (verticalAxis.CheckPositionIsEmpty(verticalPosition))
  88. {
  89. LOG.WriteLog(eEvent.ERROR_PUF_OTHER_AXIS_EMPTY, $"{Module}.{Name}", $"vertical axis {verticalPosition} is empty, Cannot execute GotoSavedPosition");
  90. return false;
  91. }
  92. else if (rotationAxis.CheckPositionIsEmpty(rotationPosition))
  93. {
  94. LOG.WriteLog(eEvent.ERROR_PUF_OTHER_AXIS_EMPTY, $"{Module}.{Name}", $"rotation axis {rotationPosition} is empty, Cannot execute GotoSavedPosition");
  95. return false;
  96. }
  97. else if (rotationAxis.CheckPositionIsInStation(rotationPosition, "Flip") &&
  98. verticalAxis.CheckPositionIsInStation(verticalPosition, "Flip"))//rotation轴和vertical轴同时在Flip,可以使用GotoSavedPosition
  99. {
  100. return true;
  101. }
  102. else
  103. {
  104. LOG.WriteLog(eEvent.ERROR_PUF_OTHER_AXIS_STATION, $"{Module}.{Name}", $"rotation station {rotationPosition} and vertical station {verticalPosition} not both in Flip Station,Cannot execute GotoSavedPosition");
  105. return false;
  106. }
  107. }
  108. else//Wafer Absent
  109. {
  110. if (verticalAxis.CheckPositionIsEmpty(verticalPosition))
  111. {
  112. LOG.WriteLog(eEvent.ERROR_PUF_OTHER_AXIS_EMPTY, $"{Module}.{Name}", $"vertical {verticalPosition} is empty, Cannot execute GotoSavedPosition");
  113. return false;
  114. }
  115. else if (verticalAxis.CheckPositionIsInStation(verticalPosition, "Park") ||
  116. verticalAxis.CheckPositionIsInStation(verticalPosition, "Flip")) //vertical轴在Flip或Park,可以使用GotoSavedPosition
  117. {
  118. return true;
  119. }
  120. else
  121. {
  122. LOG.WriteLog(eEvent.ERROR_PUF_OTHER_AXIS_STATION, $"{Module}.{Name}", $"wafer absent,vertical station {verticalPosition} not in Park or Flip, Cannot execute GotoSavedPosition");
  123. return false;
  124. }
  125. }
  126. }
  127. }
  128. }