CompactMembranMetalDevice.cs 39 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.RT.OperationCenter;
  5. using Aitex.Core.RT.Routine;
  6. using Aitex.Core.UI.Control;
  7. using Aitex.Core.Util;
  8. using MECF.Framework.Common.Beckhoff.IOAxis;
  9. using MECF.Framework.Common.Beckhoff.ModuleIO;
  10. using MECF.Framework.Common.CommonData;
  11. using MECF.Framework.Common.CommonData.Metal;
  12. using MECF.Framework.Common.Persistent.Reservoirs;
  13. using MECF.Framework.Common.TwinCat;
  14. using CyberX8_Core;
  15. using CyberX8_RT.Devices.Prewet;
  16. using System;
  17. using System.Collections.Generic;
  18. using System.Globalization;
  19. using System.Linq;
  20. using System.Reflection;
  21. using System.Text;
  22. using System.Threading.Tasks;
  23. using MECF.Framework.Common.ToolLayout;
  24. using CyberX8_RT.Devices.Reservoir;
  25. using MECF.Framework.Common.Layout;
  26. using Aitex.Core.RT.SCCore;
  27. using System.Diagnostics;
  28. using MECF.Framework.Common.IOCore;
  29. namespace CyberX8_RT.Devices.Metal
  30. {
  31. public class CompactMembranMetalDevice : MetalCellDevice
  32. {
  33. private enum ANCellStatus
  34. {
  35. Unknow,
  36. Filling,
  37. Emptying,
  38. Full,
  39. Empty
  40. }
  41. private enum ANCellOperation
  42. {
  43. None,
  44. Fill,
  45. Drain
  46. }
  47. #region 常量
  48. private const string SIDE_A = "SideA";
  49. private const string SIDE_B = "SideB";
  50. private const string AN_A_PINENABLE="ANAPinEnable";
  51. private const string AN_B_PINENABLE = "ANBPinEnable";
  52. private const string AN_A_POUTENABLE = "ANAPoutEnable";
  53. private const string AN_B_POUTENABLE = "ANBPoutEnable";
  54. private const string CELL_FLOW = "CellFlow";
  55. private const string WH_CLAMP = "WHClamp";
  56. private const string WH_UNCLAMP = "WHUnclamp";
  57. private const string CELL_FLOW_VALVE = "CellFlowValve";
  58. private const string COUNTER_VALUE = "CounterValue";
  59. private const string COUNTER_START = "Start";
  60. private const string COUNTER_STOP = "Stop";
  61. private const string COUNTER_RESET = "Reset";
  62. private const string AN_A_CELL_FLOW = "ANACellFlow";
  63. private const string AN_B_CELL_FLOW = "ANBCellFlow";
  64. #endregion
  65. #region 内部变量
  66. /// <summary>
  67. /// 设备数据
  68. /// </summary>
  69. private CompactMembranMetalDeviceData _metalDeviceData =new CompactMembranMetalDeviceData();
  70. /// <summary>
  71. /// 变量是否初始化字典
  72. /// </summary>
  73. private Dictionary<string, bool> _variableInitializeDic = new Dictionary<string, bool>();
  74. /// <summary>
  75. /// 阳极A面cellFlow
  76. /// </summary>
  77. private CounterFlowData _anACellFlow = new CounterFlowData();
  78. /// <summary>
  79. /// 阳极B面cellFlow
  80. /// </summary>
  81. private CounterFlowData _anBCellFlow = new CounterFlowData();
  82. /// <summary>
  83. /// Counter字典
  84. /// </summary>
  85. private Dictionary<string, CounterFlowData> _nameCounterFlowData = new Dictionary<string, CounterFlowData>();
  86. /// <summary>
  87. /// 当前阳极A面操作
  88. /// </summary>
  89. private ANCellOperation _currentANACellOperation;
  90. /// <summary>
  91. /// 当前阳机B面操作
  92. /// </summary>
  93. private ANCellOperation _currentANBCellOperation;
  94. /// <summary>
  95. /// AN Fill Routine
  96. /// </summary>
  97. private CompactMembranFillRoutine _anANACellFillRoutine;
  98. /// <summary>
  99. /// 阳机B面Fill Routine
  100. /// </summary>
  101. private CompactMembranFillRoutine _anANBCellFillRoutine;
  102. /// <summary>
  103. /// 阳极A面流量总数值
  104. /// </summary>
  105. private double _anATotalFillFlow = 0;
  106. /// <summary>
  107. /// 阳极B面流量总数值
  108. /// </summary>
  109. private double _anBTotalFillFlow = 0;
  110. /// <summary>
  111. /// 阳极A面Drain时间
  112. /// </summary>
  113. private DateTime _anADrainTime = DateTime.Now;
  114. /// <summary>
  115. /// 阳极B面Drain时间
  116. /// </summary>
  117. private DateTime _anBDrainTime = DateTime.Now;
  118. /// <summary>
  119. /// Flow Valve计时
  120. /// </summary>
  121. private Stopwatch _flowValveStopWatch = new Stopwatch();
  122. #endregion
  123. #region 属性
  124. /// <summary>
  125. /// 设备数据
  126. /// </summary>
  127. public CompactMembranMetalDeviceData MetalDeviceData { get { return _metalDeviceData; } }
  128. /// <summary>
  129. /// 阳极A面CellFlow
  130. /// </summary>
  131. public CounterFlowData ANACellFlow { get { return _anACellFlow; } }
  132. /// <summary>
  133. /// 阳极B面CellFlow
  134. /// </summary>
  135. public CounterFlowData ANBCellFlow { get { return _anBCellFlow; } }
  136. /// <summary>
  137. /// Flow Valve稳定状态
  138. /// </summary>
  139. public bool FlowValveStable { get { return _metalDeviceData.CellFlowValve && _flowValveStopWatch.ElapsedMilliseconds >= 3000; } }
  140. #endregion
  141. /// <summary>
  142. /// 构造函数
  143. /// </summary>
  144. /// <param name="moduleName"></param>
  145. public CompactMembranMetalDevice(string moduleName) : base(moduleName)
  146. {
  147. }
  148. /// <summary>
  149. /// 初始化
  150. /// </summary>
  151. /// <returns></returns>
  152. public override bool Initialize()
  153. {
  154. base.Initialize();
  155. InitializeRoutine();
  156. SubscribeValueAction();
  157. SubscribeData();
  158. return true;
  159. }
  160. /// <summary>
  161. /// 初始化Routine
  162. /// </summary>
  163. private void InitializeRoutine()
  164. {
  165. _anANACellFillRoutine = new CompactMembranFillRoutine(Module,"A");
  166. _anANBCellFillRoutine = new CompactMembranFillRoutine(Module,"B");
  167. }
  168. /// <summary>
  169. /// 订阅数据
  170. /// </summary>
  171. private void SubscribeData()
  172. {
  173. DATA.Subscribe($"{Module}.MetalData", () => _metalDeviceData, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  174. DATA.Subscribe($"{Module}.SideAFlow",()=>ANACellFlow.CounterValue, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  175. DATA.Subscribe($"{Module}.SideAFlowStatus", () => ANACellFlow.Status, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  176. DATA.Subscribe($"{Module}.SideBFlow", () => ANBCellFlow.CounterValue, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  177. DATA.Subscribe($"{Module}.SideBFlowStatus",()=>ANBCellFlow.Status, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  178. DATA.Subscribe($"{Module}.CellFlow",()=>MetalDeviceData.CellFlow, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  179. DATA.Subscribe($"{Module}.ANBPinEnable",()=>_metalDeviceData.ANBPinEnable, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  180. DATA.Subscribe($"{Module}.ANAPinEnable", () => _metalDeviceData.ANAPinEnable, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  181. DATA.Subscribe($"{Module}.ANAPoutEnable", () => _metalDeviceData.ANAPoutEnable, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  182. DATA.Subscribe($"{Module}.ANBPoutEnable", () => _metalDeviceData.ANBPoutEnable, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  183. DATA.Subscribe($"{Module}.CellFlowEnable", () => _metalDeviceData.CellFlowValve, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  184. DATA.Subscribe($"{Module}.WaferShuttleClamped", () => _metalDeviceData.WHClamp, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  185. DATA.Subscribe($"{Module}.WaferShuttleUnclamped", () => _metalDeviceData.WHUnclamp, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  186. }
  187. /// <summary>
  188. /// 订阅变量数值发生变化
  189. /// </summary>
  190. private void SubscribeValueAction()
  191. {
  192. BeckhoffIoSubscribeUpdateVariable(AN_A_PINENABLE);
  193. BeckhoffIoSubscribeUpdateVariable(AN_B_PINENABLE);
  194. BeckhoffIoSubscribeUpdateVariable(AN_A_POUTENABLE);
  195. BeckhoffIoSubscribeUpdateVariable(AN_B_POUTENABLE);
  196. BeckhoffIoSubscribeUpdateVariable(CELL_FLOW);
  197. BeckhoffIoSubscribeUpdateVariable(WH_CLAMP);
  198. BeckhoffIoSubscribeUpdateVariable(WH_UNCLAMP);
  199. BeckhoffIoSubscribeUpdateVariable(CELL_FLOW_VALVE);
  200. BeckhoffCounterSubscribeUpdateVariable(AN_A_CELL_FLOW,ANACellFlow);
  201. BeckhoffCounter anACellFlowCounter = BeckhoffCounterManager.Instance.GetBeckhoffCounter($"{Module}.{AN_A_CELL_FLOW}");
  202. if(anACellFlowCounter!=null)
  203. {
  204. ANACellFlow.Period = anACellFlowCounter.Period;
  205. }
  206. BeckhoffCounterSubscribeUpdateVariable(AN_B_CELL_FLOW,ANBCellFlow);
  207. BeckhoffCounter anBCellFlowCounter = BeckhoffCounterManager.Instance.GetBeckhoffCounter($"{Module}.{AN_B_CELL_FLOW}");
  208. if (anACellFlowCounter != null)
  209. {
  210. ANBCellFlow.Period = anBCellFlowCounter.Period;
  211. }
  212. }
  213. /// <summary>
  214. /// 订阅Operation
  215. /// </summary>
  216. protected override void InitializeOperation()
  217. {
  218. base.InitializeOperation();
  219. OP.Subscribe($"{Module}.ANAFillOn",AnSideAFillOn);
  220. OP.Subscribe($"{Module}.ANAFillOff", AnSideAFillOff);
  221. OP.Subscribe($"{Module}.ANBFillOn", AnSideBFillOn);
  222. OP.Subscribe($"{Module}.ANBFillOff", AnSideBFillOff);
  223. OP.Subscribe($"{Module}.ANADrainOn", AnSideADrainOn);
  224. OP.Subscribe($"{Module}.ANADrainOff", AnSideADrainOff);
  225. OP.Subscribe($"{Module}.ANBDrainOn", AnSideBDrainOn);
  226. OP.Subscribe($"{Module}.ANBDrainOff", AnSideBDrainOff);
  227. OP.Subscribe($"{Module}.WHClampOn", WHClampOn);
  228. OP.Subscribe($"{Module}.WHClampOff", WHClampOff);
  229. OP.Subscribe($"{Module}.WHUnclampOn", WHUnClampOn);
  230. OP.Subscribe($"{Module}.WHUnclampOff", WHUnClampOff);
  231. OP.Subscribe($"{Module}.CellFlowValveOn", CellFlowValveOn);
  232. OP.Subscribe($"{Module}.CellFlowValveOff", CellFlowValveOff);
  233. OP.Subscribe($"{Module}.WaferHolderClampOn", WaferHolderClampOn);
  234. OP.Subscribe($"{Module}.WaferHolderUnclampOn", WaferHolderUnclampOn);
  235. OP.Subscribe($"{Module}.WaferHolderDisconnect", WaferHolderDisConnect);
  236. OP.Subscribe($"{Module}.A.Fill", ANSideAFillOperation);
  237. OP.Subscribe($"{Module}.B.Fill", ANSideBFillOperation);
  238. OP.Subscribe($"{Module}.A.Stop", ANSideAStopOperation);
  239. OP.Subscribe($"{Module}.B.Stop", ANSideBStopOperation);
  240. OP.Subscribe($"{Module}.A.Drain", ANSideADrainOperation);
  241. OP.Subscribe($"{Module}.B.Drain", ANSideBDrainOperation);
  242. }
  243. /// <summary>
  244. /// 订阅IO变量
  245. /// </summary>
  246. /// <param name="variable"></param>
  247. private void BeckhoffIoSubscribeUpdateVariable(string variable)
  248. {
  249. _variableInitializeDic[variable] = false;
  250. IOModuleManager.Instance.SubscribeModuleVariable(Module, variable, UpdateVariableValue);
  251. }
  252. /// <summary>
  253. /// 更新变量数值
  254. /// </summary>
  255. /// <param name="variable"></param>
  256. /// <param name="value"></param>
  257. private void UpdateVariableValue(string variable, object value)
  258. {
  259. if (!_metalDeviceData.IsDataInitialized)
  260. {
  261. _metalDeviceData.IsDataInitialized = true;
  262. }
  263. PropertyInfo property = _metalDeviceData.GetType().GetProperty(variable);
  264. if (property != null)
  265. {
  266. property.SetValue(_metalDeviceData, value);
  267. }
  268. if (_variableInitializeDic.ContainsKey(variable) && !_variableInitializeDic[variable])
  269. {
  270. _variableInitializeDic[variable] = true;
  271. }
  272. if (variable == CELL_FLOW_VALVE)
  273. {
  274. bool bValue = (bool)value;
  275. if (bValue)
  276. {
  277. _flowValveStopWatch.Restart();
  278. }
  279. }
  280. }
  281. /// <summary>
  282. /// 订阅Counter变量
  283. /// </summary>
  284. /// <param name="variable"></param>
  285. private void BeckhoffCounterSubscribeUpdateVariable(string variable,CounterFlowData counterFlowData)
  286. {
  287. _nameCounterFlowData[$"{Module}.{variable}"] = counterFlowData;
  288. BeckhoffCounterManager.Instance.SubscribeModuleVariable($"{Module}.{variable}", COUNTER_VALUE, UpdateCounterVariableValue);
  289. BeckhoffCounterManager.Instance.SubscribeModuleVariable($"{Module}.{variable}", COUNTER_START, UpdateCounterVariableValue);
  290. BeckhoffCounterManager.Instance.SubscribeModuleVariable($"{Module}.{variable}", COUNTER_STOP, UpdateCounterVariableValue);
  291. BeckhoffCounterManager.Instance.SubscribeModuleVariable($"{Module}.{variable}", COUNTER_RESET, UpdateCounterVariableValue);
  292. }
  293. /// <summary>
  294. /// 更新变量数值
  295. /// </summary>
  296. /// <param name="variable"></param>
  297. /// <param name="value"></param>
  298. private void UpdateCounterVariableValue(string variable, object value)
  299. {
  300. string[] strAry = variable.Split('.');
  301. string lastVariable = strAry[strAry.Length - 1];
  302. PropertyInfo property = null;
  303. string key = variable.Replace($".{lastVariable}", "");
  304. if(_nameCounterFlowData.ContainsKey(key))
  305. {
  306. CounterFlowData counterFlowData = _nameCounterFlowData[key];
  307. if (counterFlowData != null)
  308. {
  309. property = counterFlowData.GetType().GetProperty(lastVariable);
  310. if (property != null)
  311. {
  312. property.SetValue(counterFlowData, value);
  313. }
  314. }
  315. }
  316. }
  317. #region Fill
  318. /// <summary>
  319. /// AN A面Fill On
  320. /// </summary>
  321. /// <param name="cmd"></param>
  322. /// <param name="param"></param>
  323. /// <returns></returns>
  324. public bool AnSideAFillOn(string cmd, object[] param)
  325. {
  326. string ioName= BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{AN_A_PINENABLE}");
  327. string countName= BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{AN_A_CELL_FLOW}");
  328. bool result= BeckhoffCounterManager.Instance.StartCounter(countName);
  329. if (result)
  330. {
  331. return IOModuleManager.Instance.WriteIoValue(ioName, true);
  332. }
  333. else
  334. {
  335. return false;
  336. }
  337. }
  338. /// <summary>
  339. /// AN A面Fill Off
  340. /// </summary>
  341. /// <param name="cmd"></param>
  342. /// <param name="param"></param>
  343. /// <returns></returns>
  344. public bool AnSideAFillOff(string cmd, object[] param)
  345. {
  346. string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{AN_A_PINENABLE}");
  347. string countName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{AN_A_CELL_FLOW}");
  348. bool result = BeckhoffCounterManager.Instance.StopCounter(countName);
  349. if(result)
  350. {
  351. result= BeckhoffCounterManager.Instance.ResetCounter(countName,0);
  352. if(result)
  353. {
  354. return IOModuleManager.Instance.WriteIoValue(ioName, false);
  355. }
  356. }
  357. return false;
  358. }
  359. /// <summary>
  360. /// AN B面Fill On
  361. /// </summary>
  362. /// <param name="cmd"></param>
  363. /// <param name="param"></param>
  364. /// <returns></returns>
  365. public bool AnSideBFillOn(string cmd, object[] param)
  366. {
  367. string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{AN_B_PINENABLE}");
  368. string countName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{AN_B_CELL_FLOW}");
  369. bool result = BeckhoffCounterManager.Instance.StartCounter(countName);
  370. if (result)
  371. {
  372. return IOModuleManager.Instance.WriteIoValue(ioName, true);
  373. }
  374. else
  375. {
  376. return false;
  377. }
  378. }
  379. /// <summary>
  380. /// AN B面Fill Off
  381. /// </summary>
  382. /// <param name="cmd"></param>
  383. /// <param name="param"></param>
  384. /// <returns></returns>
  385. public bool AnSideBFillOff(string cmd, object[] param)
  386. {
  387. string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{AN_B_PINENABLE}");
  388. string countName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{AN_B_CELL_FLOW}");
  389. bool result = BeckhoffCounterManager.Instance.StopCounter(countName);
  390. if (result)
  391. {
  392. result = BeckhoffCounterManager.Instance.ResetCounter(countName, 0);
  393. if (result)
  394. {
  395. return IOModuleManager.Instance.WriteIoValue(ioName, false);
  396. }
  397. }
  398. return false;
  399. }
  400. #endregion
  401. #region Drain
  402. /// <summary>
  403. /// AN A面Drain On
  404. /// </summary>
  405. /// <param name="cmd"></param>
  406. /// <param name="param"></param>
  407. /// <returns></returns>
  408. private bool AnSideADrainOn(string cmd, object[] param)
  409. {
  410. string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{AN_A_POUTENABLE}");
  411. return IOModuleManager.Instance.WriteIoValue(ioName, true);
  412. }
  413. /// <summary>
  414. /// AN A面Drain Off
  415. /// </summary>
  416. /// <param name="cmd"></param>
  417. /// <param name="param"></param>
  418. /// <returns></returns>
  419. public bool AnSideADrainOff(string cmd, object[] param)
  420. {
  421. string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{AN_A_POUTENABLE}");
  422. return IOModuleManager.Instance.WriteIoValue(ioName, false);
  423. }
  424. /// <summary>
  425. /// AN B面Drain On
  426. /// </summary>
  427. /// <param name="cmd"></param>
  428. /// <param name="param"></param>
  429. /// <returns></returns>
  430. private bool AnSideBDrainOn(string cmd, object[] param)
  431. {
  432. string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{AN_B_POUTENABLE}");
  433. return IOModuleManager.Instance.WriteIoValue(ioName, true);
  434. }
  435. /// <summary>
  436. /// AN A面Drain Off
  437. /// </summary>
  438. /// <param name="cmd"></param>
  439. /// <param name="param"></param>
  440. /// <returns></returns>
  441. public bool AnSideBDrainOff(string cmd, object[] param)
  442. {
  443. string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{AN_B_POUTENABLE}");
  444. return IOModuleManager.Instance.WriteIoValue(ioName, false);
  445. }
  446. #endregion
  447. #region WH Clamp
  448. /// <summary>
  449. /// WH Clamp On
  450. /// </summary>
  451. /// <param name="cmd"></param>
  452. /// <param name="param"></param>
  453. /// <returns></returns>
  454. private bool WHClampOn(string cmd, object[] param)
  455. {
  456. string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{WH_CLAMP}");
  457. return IOModuleManager.Instance.WriteIoValue(ioName, true);
  458. }
  459. /// <summary>
  460. /// WH Clamp Off
  461. /// </summary>
  462. /// <param name="cmd"></param>
  463. /// <param name="param"></param>
  464. /// <returns></returns>
  465. private bool WHClampOff(string cmd, object[] param)
  466. {
  467. string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{WH_CLAMP}");
  468. return IOModuleManager.Instance.WriteIoValue(ioName, false);
  469. }
  470. /// <summary>
  471. /// WH UnClamp On
  472. /// </summary>
  473. /// <param name="cmd"></param>
  474. /// <param name="param"></param>
  475. /// <returns></returns>
  476. private bool WHUnClampOn(string cmd, object[] param)
  477. {
  478. string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{WH_UNCLAMP}");
  479. return IOModuleManager.Instance.WriteIoValue(ioName, true);
  480. }
  481. /// <summary>
  482. /// WH UnClamp Off
  483. /// </summary>
  484. /// <param name="cmd"></param>
  485. /// <param name="param"></param>
  486. /// <returns></returns>
  487. private bool WHUnClampOff(string cmd, object[] param)
  488. {
  489. string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{WH_UNCLAMP}");
  490. return IOModuleManager.Instance.WriteIoValue(ioName, false);
  491. }
  492. /// <summary>
  493. /// Wafer Holder Clamp On
  494. /// </summary>
  495. /// <param name="cmd"></param>
  496. /// <param name="param"></param>
  497. /// <returns></returns>
  498. public bool WaferHolderClampOn(string cmd, object[] param)
  499. {
  500. string unclampIOName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{WH_UNCLAMP}");
  501. bool result = IOModuleManager.Instance.WriteIoValue(unclampIOName, false);
  502. if(result)
  503. {
  504. string clampIOName= BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{WH_CLAMP}");
  505. return IOModuleManager.Instance.WriteIoValue(clampIOName, true);
  506. }
  507. return false;
  508. }
  509. /// <summary>
  510. /// Wafer Holder Clamp On
  511. /// </summary>
  512. /// <param name="cmd"></param>
  513. /// <param name="param"></param>
  514. /// <returns></returns>
  515. public bool WaferHolderUnclampOn(string cmd, object[] param)
  516. {
  517. string clampIOName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{WH_CLAMP}");
  518. bool result = IOModuleManager.Instance.WriteIoValue(clampIOName, false);
  519. if (result)
  520. {
  521. string unclampIOName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{WH_UNCLAMP}");
  522. return IOModuleManager.Instance.WriteIoValue(unclampIOName, true);
  523. }
  524. return false;
  525. }
  526. /// <summary>
  527. /// Wafer Holder Disconnect
  528. /// </summary>
  529. /// <param name="cmd"></param>
  530. /// <param name="param"></param>
  531. /// <returns></returns>
  532. public bool WaferHolderDisConnect(string cmd, object[] param)
  533. {
  534. string clampIOName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{WH_CLAMP}");
  535. bool result = IOModuleManager.Instance.WriteIoValue(clampIOName, false);
  536. if (result)
  537. {
  538. string unclampIOName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{WH_UNCLAMP}");
  539. return IOModuleManager.Instance.WriteIoValue(unclampIOName, false);
  540. }
  541. return false;
  542. }
  543. #endregion
  544. #region Cell Flow Valve
  545. /// <summary>
  546. /// Cell Flow On
  547. /// </summary>
  548. /// <param name="cmd"></param>
  549. /// <param name="param"></param>
  550. /// <returns></returns>
  551. public bool CellFlowValveOn(string cmd, object[] param)
  552. {
  553. string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{CELL_FLOW_VALVE}");
  554. return IOModuleManager.Instance.WriteIoValue(ioName, true);
  555. }
  556. /// <summary>
  557. /// Cell Flow Off
  558. /// </summary>
  559. /// <param name="cmd"></param>
  560. /// <param name="param"></param>
  561. /// <returns></returns>
  562. public bool CellFlowValveOff(string cmd, object[] param)
  563. {
  564. string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{CELL_FLOW_VALVE}");
  565. return IOModuleManager.Instance.WriteIoValue(ioName, false);
  566. }
  567. #endregion
  568. #region AN Fill
  569. /// <summary>
  570. /// 阳极A面Fill
  571. /// </summary>
  572. /// <param name="cmd"></param>
  573. /// <param name="objects"></param>
  574. /// <returns></returns>
  575. private bool ANSideAFillOperation(string cmd, object[] objects)
  576. {
  577. if(_currentANACellOperation!=ANCellOperation.None)
  578. {
  579. LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} current is {_currentANACellOperation},cannot execute AN Side A Fill");
  580. return false;
  581. }
  582. bool result = _anANACellFillRoutine.Start() == RState.Running;
  583. if (result)
  584. {
  585. _currentANACellOperation = ANCellOperation.Fill;
  586. }
  587. return result;
  588. }
  589. /// <summary>
  590. /// 阳极B面Fill
  591. /// </summary>
  592. /// <param name="cmd"></param>
  593. /// <param name="objects"></param>
  594. /// <returns></returns>
  595. private bool ANSideBFillOperation(string cmd, object[] objects)
  596. {
  597. if (_currentANBCellOperation != ANCellOperation.None)
  598. {
  599. LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} current is {_currentANBCellOperation},cannot execute AN Side B Fill");
  600. return false;
  601. }
  602. bool result = _anANBCellFillRoutine.Start() == RState.Running;
  603. if (result)
  604. {
  605. _currentANBCellOperation = ANCellOperation.Fill;
  606. }
  607. return result;
  608. }
  609. #endregion
  610. #region AN Drain
  611. /// <summary>
  612. /// 阳极A面Drain
  613. /// </summary>
  614. /// <param name="cmd"></param>
  615. /// <param name="objects"></param>
  616. /// <returns></returns>
  617. private bool ANSideADrainOperation(string cmd, object[] objects)
  618. {
  619. if (_currentANACellOperation != ANCellOperation.None)
  620. {
  621. LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} current is {_currentANACellOperation},cannot execute AN Side A Drain");
  622. return false;
  623. }
  624. bool result = true;
  625. CompactMembranReservoirDevice reservoirDevice = GetReservoirDevice();
  626. if(CheckOtherMetalDeviceDrainStatus(reservoirDevice,"A"))
  627. {
  628. return false;
  629. }
  630. if (reservoirDevice != null && reservoirDevice.ReservoirData.ANADrainPump == 0)
  631. {
  632. result = reservoirDevice.AnADrainPumpOn("", null);
  633. }
  634. if (result)
  635. {
  636. result = AnSideADrainOn("", null);
  637. if (result)
  638. {
  639. ANACellFlow.Status = ANCellStatus.Emptying.ToString();
  640. _anATotalFillFlow = 0;
  641. _anADrainTime=DateTime.Now;
  642. }
  643. else
  644. {
  645. reservoirDevice.AnADrainPump(0);
  646. }
  647. }
  648. return result;
  649. }
  650. /// <summary>
  651. /// 其他Metal Drain是否打开
  652. /// </summary>
  653. /// <param name="reservoirDevice"></param>
  654. /// <param name="side"></param>
  655. /// <returns></returns>
  656. private bool CheckOtherMetalDeviceDrainStatus(CompactMembranReservoirDevice reservoirDevice,string side)
  657. {
  658. if(reservoirDevice==null)
  659. {
  660. return false;
  661. }
  662. ReservoirItem reservoirItem = ReservoirItemManager.Instance.GetReservoirItem(reservoirDevice.Module);
  663. if(reservoirItem!=null)
  664. {
  665. foreach(var item in reservoirItem.MetalCells)
  666. {
  667. if(item.ModuleName!=Module)
  668. {
  669. CompactMembranMetalDevice metalDevice = DEVICE.GetDevice<CompactMembranMetalDevice>(item.ModuleName);
  670. if(metalDevice!=null)
  671. {
  672. if(side=="A"&&metalDevice.MetalDeviceData.ANAPoutEnable)
  673. {
  674. LOG.WriteLog(eEvent.ERR_METAL, Module, $"{item.ModuleName} A Drain is on");
  675. return true;
  676. }
  677. if (side == "B" && metalDevice.MetalDeviceData.ANBPoutEnable)
  678. {
  679. LOG.WriteLog(eEvent.ERR_METAL, Module, $"{item.ModuleName} B Drain is on");
  680. return true;
  681. }
  682. }
  683. }
  684. }
  685. }
  686. return false;
  687. }
  688. /// <summary>
  689. /// 阳极A面Drain
  690. /// </summary>
  691. /// <param name="cmd"></param>
  692. /// <param name="objects"></param>
  693. /// <returns></returns>
  694. private bool ANSideBDrainOperation(string cmd, object[] objects)
  695. {
  696. if (_currentANBCellOperation != ANCellOperation.None)
  697. {
  698. LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} current is {_currentANBCellOperation},cannot execute AN Side A Drain");
  699. return false;
  700. }
  701. bool result = true;
  702. CompactMembranReservoirDevice reservoirDevice = GetReservoirDevice();
  703. if (CheckOtherMetalDeviceDrainStatus(reservoirDevice, "B"))
  704. {
  705. return false;
  706. }
  707. if(reservoirDevice!=null&&reservoirDevice.ReservoirData.ANBDrainPump==0)
  708. {
  709. result= reservoirDevice.AnBDrainPumpOn("", null);
  710. }
  711. if (result)
  712. {
  713. result = AnSideBDrainOn("", null);
  714. if (result)
  715. {
  716. ANBCellFlow.Status = ANCellStatus.Emptying.ToString();
  717. _anBTotalFillFlow = 0;
  718. _anBDrainTime=DateTime.Now;
  719. }
  720. else
  721. {
  722. reservoirDevice.AnBDrainPump(0);
  723. }
  724. }
  725. return result;
  726. }
  727. #endregion
  728. #region AN Stop
  729. /// <summary>
  730. /// 阳面A停止
  731. /// </summary>
  732. /// <param name="cmd"></param>
  733. /// <param name="objs"></param>
  734. /// <returns></returns>
  735. private bool ANSideAStopOperation(string cmd, object[] objs)
  736. {
  737. CompactMembranReservoirDevice reservoirDevice = GetReservoirDevice();
  738. if (reservoirDevice != null)
  739. {
  740. if (reservoirDevice.ReservoirData.ANPump != 0)
  741. {
  742. reservoirDevice.AnPump(0);
  743. }
  744. if (reservoirDevice.ReservoirData.ANADrainPump != 0)
  745. {
  746. reservoirDevice.AnADrainPump(0);
  747. }
  748. }
  749. if (MetalDeviceData.ANAPinEnable)
  750. {
  751. AnSideAFillOff("", null);
  752. }
  753. if (MetalDeviceData.ANAPoutEnable)
  754. {
  755. AnSideADrainOff("", null);
  756. }
  757. ANACellFlow.Status = ANCellStatus.Unknow.ToString();
  758. _anATotalFillFlow = 0;
  759. return true;
  760. }
  761. /// <summary>
  762. /// 阳面A停止
  763. /// </summary>
  764. /// <param name="cmd"></param>
  765. /// <param name="objs"></param>
  766. /// <returns></returns>
  767. private bool ANSideBStopOperation(string cmd, object[] objs)
  768. {
  769. CompactMembranReservoirDevice reservoirDevice = GetReservoirDevice();
  770. if (reservoirDevice != null)
  771. {
  772. if (reservoirDevice.ReservoirData.ANPump != 0)
  773. {
  774. reservoirDevice.AnPump(0);
  775. }
  776. if(reservoirDevice.ReservoirData.ANBDrainPump!=0)
  777. {
  778. reservoirDevice.AnBDrainPump(0);
  779. }
  780. }
  781. if(MetalDeviceData.ANBPinEnable)
  782. {
  783. AnSideBFillOff("", null);
  784. }
  785. if(MetalDeviceData.ANBPoutEnable)
  786. {
  787. AnSideBDrainOff("", null);
  788. }
  789. ANBCellFlow.Status = ANCellStatus.Unknow.ToString();
  790. _anBTotalFillFlow = 0;
  791. return true;
  792. }
  793. #endregion
  794. #region Timer定时器
  795. /// <summary>
  796. /// 定时器
  797. /// </summary>
  798. /// <returns></returns>
  799. public override bool OnTimer(int interval)
  800. {
  801. if (_currentANACellOperation == ANCellOperation.Fill)
  802. {
  803. SideFillRoutineMonitor(_anANACellFillRoutine, "A", ANACellFlow, ref _currentANACellOperation);
  804. }
  805. if (_currentANBCellOperation == ANCellOperation.Fill)
  806. {
  807. SideFillRoutineMonitor(_anANBCellFillRoutine, "B", ANBCellFlow, ref _currentANBCellOperation);
  808. }
  809. //正在Filing
  810. if (ANACellFlow.Status == ANCellStatus.Filling.ToString())
  811. {
  812. JudgeFillFull(ANACellFlow,interval,ref _anATotalFillFlow);
  813. }
  814. if (ANBCellFlow.Status == ANCellStatus.Filling.ToString())
  815. {
  816. JudgeFillFull(ANBCellFlow,interval,ref _anBTotalFillFlow);
  817. }
  818. if (ANACellFlow.Status == ANCellStatus.Emptying.ToString())
  819. {
  820. JudgeDrainEmpty("A");
  821. }
  822. if (ANBCellFlow.Status == ANCellStatus.Emptying.ToString())
  823. {
  824. JudgeDrainEmpty("B");
  825. }
  826. return true;
  827. }
  828. /// <summary>
  829. /// 单面Fill Routine监控
  830. /// </summary>
  831. /// <param name="routine"></param>
  832. /// <param name="side"></param>
  833. /// <param name="operation"></param>
  834. private void SideFillRoutineMonitor(IRoutine routine, string side,CounterFlowData counterFlowData, ref ANCellOperation operation)
  835. {
  836. RState state = routine.Monitor();
  837. if (state == RState.Failed || state == RState.Timeout)
  838. {
  839. CloseReservoirPumpAndMetalFill(side);
  840. operation = ANCellOperation.None;
  841. }
  842. else if (state == RState.End)
  843. {
  844. counterFlowData.Status = ANCellStatus.Filling.ToString();
  845. operation = ANCellOperation.None;
  846. }
  847. }
  848. /// <summary>
  849. /// 判定是否fill Full
  850. /// </summary>
  851. private void JudgeFillFull(CounterFlowData counterFlowData,int interval,ref double totalFillFlow)
  852. {
  853. double anodeFillVolume = SC.GetValue<double>($"Metal.AnodeFillVolume");
  854. totalFillFlow += counterFlowData.CounterValue / 60 * ((double)interval / 1000);
  855. if (totalFillFlow >= anodeFillVolume)
  856. {
  857. counterFlowData.Status = "Full";
  858. }
  859. }
  860. /// <summary>
  861. /// 判定是否Drain Empty
  862. /// </summary>
  863. /// <param name="counterFlowData"></param>
  864. private void JudgeDrainEmpty(string side)
  865. {
  866. if (side == "A")
  867. {
  868. JudgeSideADrain(ANACellFlow, _anADrainTime);
  869. if(ANACellFlow.Status==ANCellStatus.Empty.ToString())
  870. {
  871. CompactMembranReservoirDevice reservoirDevice = GetReservoirDevice();
  872. if (reservoirDevice != null)
  873. {
  874. reservoirDevice.AnADrainPump(0);
  875. }
  876. AnSideADrainOff("", null);
  877. }
  878. }
  879. else
  880. {
  881. JudgeSideADrain(ANBCellFlow, _anBDrainTime);
  882. if (ANBCellFlow.Status == ANCellStatus.Empty.ToString())
  883. {
  884. CompactMembranReservoirDevice reservoirDevice = GetReservoirDevice();
  885. if (reservoirDevice != null)
  886. {
  887. reservoirDevice.AnBDrainPump(0);
  888. }
  889. AnSideBDrainOff("", null);
  890. }
  891. }
  892. }
  893. /// <summary>
  894. /// 判定单面Drain的情况
  895. /// </summary>
  896. /// <param name="counterFlowData"></param>
  897. /// <param name="drainDateTime"></param>
  898. private void JudgeSideADrain(CounterFlowData counterFlowData, DateTime drainDateTime)
  899. {
  900. double anodeDrainTime = SC.GetValue<double>("Metal.AnodeDrainTime");
  901. if (DateTime.Now.Subtract(drainDateTime).TotalMilliseconds >= anodeDrainTime * 1000)
  902. {
  903. counterFlowData.Status = ANCellStatus.Empty.ToString();
  904. }
  905. }
  906. /// <summary>
  907. /// 关闭Reservoir Pump和Metal Fill
  908. /// </summary>
  909. private void CloseReservoirPumpAndMetalFill(string side)
  910. {
  911. CompactMembranReservoirDevice reservoirDevice = GetReservoirDevice();
  912. if (reservoirDevice != null)
  913. {
  914. reservoirDevice.AnPump(0);
  915. if (side == "A")
  916. {
  917. AnSideAFillOff("", null);
  918. }
  919. else
  920. {
  921. AnSideBDrainOff("", null);
  922. }
  923. }
  924. }
  925. /// <summary>
  926. /// 获取Reservoir设备
  927. /// </summary>
  928. /// <returns></returns>
  929. private CompactMembranReservoirDevice GetReservoirDevice()
  930. {
  931. string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module);
  932. return DEVICE.GetDevice<CompactMembranReservoirDevice>(reservoir);
  933. }
  934. #endregion
  935. /// <summary>
  936. /// Enter Disabled Operation
  937. /// </summary>
  938. /// <returns></returns>
  939. public void EnterDisabledOperation()
  940. {
  941. ANSideAStopOperation("", null);
  942. ANSideBStopOperation("", null);
  943. if (_metalDeviceData.CellFlowValve)
  944. {
  945. CellFlowValveOff("", null);
  946. }
  947. }
  948. #region 设备接口
  949. public override void Monitor()
  950. {
  951. }
  952. public override void Reset()
  953. {
  954. }
  955. public override void Terminate()
  956. {
  957. }
  958. #endregion
  959. }
  960. }