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- namespace CyberX8_Core
- {
- public enum Kepler2300Device
- {
- ValveMfc1,
- ValveMfc2,
- ValveMfc3,
- ValveMfc4,
- ValveMfc5,
- ValveMfc6,
- ValveMfc7,
- ValveMfc8,
- ValvePVN21,
- ValvePVN22,
- ValvePV11,
- ValvePV12,
- ValvePV21,
- ValvePV22,
- ValvePV31,
- ValvePV32,
- ValvePV41,
- ValvePV42,
- ValveN2,
- ValvePVHe1,
- ValvePVHe2,
- ValveGasFinal,
- ValveSoftPump,
- ValveFastPump,
- ValveCHBPurge,
- ValveTurboPumpPumping,
- ValveTurboPumpPurge,
- ValveGuage,
- ValveLoadlockVent,
- ValveLoadlockPumping,
- MfcGas1,
- MfcGas2,
- MfcGas3,
- MfcGas4,
- MfcGas5,
- GasStick1,
- GasStick2,
- GasStick3,
- TemperatureControl,
- ChamberLid,
- ATM_SW,
- VAC_SW,
- WaterFlow_SW,
- N2_Pressure,
- ProcessGauge,
- PressureGauge,
- ForelineGauge,
- MainPump,
- Chiller,
- Rf,
- BiasRf,
- Match,
- BiasMatch,
- PressureControl,
- ThrottleValve,
- HeaterChamber,
- ForelineHeater,
- Heartbeat,
- ResetPlcSignal,
- LiftPin,
- SlitDoor,
- SmallPin,
- MediumPin,
- LoadLockArm,
- StatisticsRfOnTime,
- StatisticsPumpOnTime,
- PlcDateTime,
- Lid,
- LidLoadlock,
- LidLocker,
- ESCHV,
- PendulumValve,
- TurboPump,
- EndPoint,
- TMLid,
- LLALid,
- LLBLid,
- LLATSlitDoor,
- LLBTSlitDoor,
- LLAESlitDoor,
- LLBESlitDoor,
- TMValveN2,
- TMSoftPumpValve,
- TMFastPumpValve,
- TMPurgeValve,
- //TMVentValve,
- TMSoftVentValve,
- TMFastVentValve,
- LLASoftPumpValve,
- LLAFastPumpValve,
- LLAPurgeValve,
- LLAVentValve,
- LLBSoftPumpValve,
- LLBFastPumpValve,
- LLBPurgeValve,
- LLBVentValve,
- ValveWaterRelay,
- TMPowerOn,
- TMInSafty,
- WaferLeakSensor,
- EFEMSideDoorClosed,
- TMPCWFlowSwitch,
- LLAPCWFlowSwitch,
- LLBPCWFlowSwitch,
- TMLidClosed,
- CDAPressureSwitch,
- VaccumPressureSwitch,
- N2PressureSwitch,
- TMPressureCtrl,
- TMRobotNotExtendPMA,
- TMRobotNotExtendPMB,
- TMRobotNotExtendPMC,
- TMRobotNotExtendPMD,
- TMRobotNotExtendLLA,
- TMRobotNotExtendLLB,
- EfemRobotNotExtendLLA,
- EfemRobotNotExtendLLB,
- TMVacSwitch,
- LLAVacSwitch,
- LLBVacSwitch,
- TMATMSwitch,
- LLAATMSwitch,
- LLBATMSwitch,
- LLAWaferSizeCheckSwitch,
- LLBWaferSizeCheckSwitch,
- PMAWaferSizeCheckSwitch,
- PMBWaferSizeCheckSwitch,
- PMCWaferSizeCheckSwitch,
- PMDWaferSizeCheckSwitch,
- }
- }
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