RtState.cs 5.7 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Text;
  5. using System.Threading.Tasks;
  6. namespace CyberX8_Core
  7. {
  8. public enum RtState
  9. {
  10. Init,
  11. Initializing,
  12. Idle,
  13. Manual,
  14. Transfer,
  15. AutoIdle,
  16. AutoRunning,
  17. AutoRunningPaused,
  18. AutoAborting,
  19. ReturningCassette,
  20. Cycle,
  21. PrepareCycle,
  22. PostCycle,
  23. SetSpeed,
  24. Error,
  25. Reset,
  26. Processing,
  27. PostProcess,
  28. PauseProcess,
  29. //Maintenance,
  30. //WaferMapping,
  31. //Cycling,
  32. TMCycle,
  33. SETMCycle,
  34. SERunning,
  35. ReturnWafer,
  36. SETransfer,
  37. SEReturnWafer
  38. }
  39. public enum EFEMSTATE
  40. {
  41. Unknown, // 0
  42. Homing, // 1
  43. Idle, // 2
  44. Error, // 3
  45. Picking, // 4
  46. Placing, // 5
  47. Aligning, // 6
  48. Mapping, // 7
  49. Init, // 8
  50. Orgshing, // 9
  51. Lifting, // 10
  52. InitingAL, // 11
  53. InitingRB, // 12
  54. Extending, // 13
  55. Retracting, // 14
  56. //SettingLamp, // 15
  57. Swapping,
  58. Gotoing,
  59. Gripping,
  60. Ungripping,
  61. Fliping,
  62. Initializing,
  63. Vacuuming,
  64. Retrying,
  65. ConfirmCompleting,
  66. ErrorPicking,
  67. ErrorPlacing,
  68. RobotCycleing,
  69. ErrorInitingAL
  70. }
  71. public enum PUFSTATE
  72. {
  73. Unknown, // 0
  74. Homing, // 1
  75. Idle, // 2
  76. Error,
  77. Init,
  78. SwitchOning,
  79. SwitchOffing,
  80. Calibrating,
  81. Picking,
  82. Placing,
  83. Positioning,
  84. GotoRobotPositionForPlace,
  85. GotoRobotPositionForPick,
  86. WaitForRobotPlacing,
  87. WaitForRobotPlace,
  88. WaitForSwaping,
  89. WaitForSwap,
  90. Swaping,
  91. AferSwapParkStation,
  92. WaitForRobotPicking,
  93. WaitForRobotPick,
  94. BackToPackStationing,
  95. Retrying,
  96. ConfirmCompleting,
  97. Fliping
  98. }
  99. public enum LOADERSTATE
  100. {
  101. Unknown, // 0
  102. Homing, // 1
  103. Idle, // 2
  104. Error,
  105. Init,
  106. Positioning,
  107. SwitchOning,
  108. SwitchOffing,
  109. Loading,
  110. Unloading,
  111. InstallCRSing,
  112. PrepreForPlacing,
  113. WaitForUnload,
  114. WaitForLoad,
  115. WaitForPick,
  116. Retrying,
  117. ConfirmCompleting,
  118. WaitForFlip
  119. }
  120. public enum TransporterState
  121. {
  122. Unknown,
  123. Init,
  124. Initialized,
  125. Homing,
  126. Idle,
  127. Error,
  128. ErrorGantryPositioning,
  129. GantryPositioning,
  130. Positioning,
  131. SwitchOning,
  132. SwitchOffing,
  133. PickUping,
  134. MovingTo,
  135. Placing,
  136. Parking,
  137. ElevatorUping,
  138. ElevatorLowing,
  139. Transfering,
  140. PickUpMoveToing,
  141. PickUpMoveToComplete,
  142. PickUpValidating,
  143. PickUpValidateComplete,
  144. ValidateMoveTo,
  145. ValidateMoveToComplete,
  146. GantrySafeMoving,
  147. Retrying,
  148. ConfirmCompleting
  149. }
  150. public enum SRDState
  151. {
  152. Unknown,
  153. Init,
  154. Initialized,
  155. Initializing,
  156. InitializeHoming,
  157. Homing,
  158. Idle,
  159. Error,
  160. SwitchOning,
  161. SwitchOffing,
  162. Positioning,
  163. Aborting,
  164. Abort,
  165. Rotating,
  166. Stopping,
  167. PresenceTesting,
  168. ProcessReciping,
  169. ProcessError,
  170. AWCCycling,
  171. AWCHoming,
  172. Retrying,
  173. ConfirmCompleting,
  174. Loading,
  175. Unloading
  176. }
  177. public enum PrewetState
  178. {
  179. Unknown,
  180. Error,
  181. Abort,
  182. Init,
  183. Initialized,
  184. Idle,
  185. Initializing,
  186. PrepareToTransfering,
  187. ReadyForPick,
  188. KeepWeting,
  189. Linmot_Scanning,
  190. ManualProcessing,
  191. CycleManualProcessing,
  192. RunReciping,
  193. Aborting,
  194. PreparingToPick,
  195. PreparingToPlace,
  196. WaitForPick,
  197. WaitForPlace,
  198. RunRecipeComplete,
  199. DelayKeepweting,
  200. DelayKeepwetComplete
  201. }
  202. public enum DryerState
  203. {
  204. Unknown,
  205. Disable,
  206. Abort,
  207. Error,
  208. Init,
  209. Initialized,
  210. Idle,
  211. Initializing,
  212. RunReciping,
  213. CycleManualProcessing,
  214. Retrying
  215. }
  216. public enum RinseState
  217. {
  218. Unknown,
  219. Disable,
  220. Error,
  221. Init,
  222. Initialized,
  223. Idle,
  224. Initializing,
  225. CycleManualProcessing,
  226. RunReciping,
  227. RunRecipeComplete,
  228. KeepWeting,
  229. KeepWetComplete,
  230. Retrying,
  231. Aborting,
  232. Abort,
  233. }
  234. public enum MetalState
  235. {
  236. Unknown,
  237. Disable,
  238. Error,
  239. Init,
  240. Initialized,
  241. Idle,
  242. Initializing,
  243. ShortTesting,
  244. RunReciping,
  245. CurrentShortTesting,
  246. WaitCloseFlow,
  247. WaitOpenFlow,
  248. WaitForRunRecipe,
  249. Abort
  250. }
  251. public enum DummyState
  252. {
  253. Unknown,
  254. Disable,
  255. Error,
  256. Init,
  257. Initializing,
  258. Initialized,
  259. Idle
  260. }
  261. public enum ReservoirState
  262. {
  263. Unknown,
  264. Disable,
  265. Error,
  266. Init,
  267. Initializing,
  268. Initialized,
  269. Idle,
  270. }
  271. }