LoaderUnloadRoutine.cs 22 KB

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  1. using Aitex.Core.RT.Device;
  2. using Aitex.Core.RT.Log;
  3. using Aitex.Core.RT.Routine;
  4. using Aitex.Core.Util;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Common.Routine;
  7. using MECF.Framework.Common.Utilities;
  8. using CyberX8_Core;
  9. using CyberX8_RT.Devices.AXIS;
  10. using CyberX8_RT.Devices.AXIS.CANOpen;
  11. using CyberX8_RT.Modules.PUF;
  12. using CyberX8_RT.Modules;
  13. using System;
  14. using System.Collections.Generic;
  15. using System.Linq;
  16. using System.Text;
  17. using System.Threading.Tasks;
  18. using MECF.Framework.Common.CommonData.Loader;
  19. using CyberX8_RT.Modules.Transporter;
  20. using Aitex.Core.RT.SCCore;
  21. namespace CyberX8_RT.Devices.Loader
  22. {
  23. public class LoaderUnloadRoutine : RoutineBase, IRoutine
  24. {
  25. private enum UnloadStep
  26. {
  27. CheckPreCondition,
  28. WSClampOn,
  29. LSGotoLock,
  30. LSGotoLockWait,
  31. ShuttleGotoIN,
  32. ShuttleGotoINWait,
  33. BernoulliBladderOn,
  34. BernoulliBladderOnCheck,
  35. BernoulliN2On,
  36. WSBladderOn,
  37. WSBladderOnCheck,
  38. LSVacuumOn,
  39. LSVacuumOnCheck,
  40. LSVacuumLevelCheck,
  41. LSVacuumLevelCheckWait,
  42. ShuttleGotoLS,
  43. ShuttleGotoLSWait,
  44. LSGotoSetup,
  45. LSGotoSetupWait,
  46. LSGotoUnlock,
  47. LSGotoUnlockWait,
  48. ReLSVacuumLevelCheck,
  49. ReLSVacuumLevelCheckWait,
  50. ShuttleGotoOUT,
  51. ShuttleGotoOUTWait,
  52. TiltGotoHori,
  53. TiltGotoHoriCheck,
  54. BernoulliN2Off,
  55. WSBladderOff,
  56. WSBladderOffCheck,
  57. End
  58. }
  59. #region 内部变量
  60. private string _side = "";
  61. private JetAxisBase _lsAxis;
  62. private LoaderSideBernoulliBladderRoutine _bernoulliBladderRoutine;
  63. private LoaderSideVacuumRoutine _vacuumRoutine;
  64. private LoaderSideVacuumLevelCheckRoutine _vacuumLevelCheckRoutine;
  65. private LoaderSideWhBladderRoutine _whBladderRoutine;
  66. private JetAxisBase _shuttleAxis;
  67. private JetAxisBase _tiltAxis;
  68. private JetAxisBase _rotationAxis;
  69. private LoaderSideDevice _sideDevice;
  70. private LoaderCommonDevice _loaderCommonDevice;
  71. /// <summary>
  72. /// WaferSize
  73. /// </summary>
  74. private int _waferSize;
  75. #endregion
  76. /// <summary>
  77. /// 构造函数
  78. /// </summary>
  79. /// <param name="module"></param>
  80. public LoaderUnloadRoutine(string module, string side) : base(module)
  81. {
  82. _side = side;
  83. }
  84. /// <summary>
  85. /// 中止
  86. /// </summary>
  87. public void Abort()
  88. {
  89. Runner.Stop("Manual Abort");
  90. }
  91. /// <summary>
  92. /// 监控
  93. /// </summary>
  94. /// <returns></returns>
  95. public RState Monitor()
  96. {
  97. Runner.Run(UnloadStep.CheckPreCondition,CheckPreCondition,_delay_1ms)
  98. //1. WS Clamp on
  99. .Run(UnloadStep.WSClampOn, WSClampOnAction, () => { return _loaderCommonDevice.CommonData.WaferHolderClamp; }, _delay_5s)
  100. //2. LS Goto Lock位
  101. .Run(UnloadStep.LSGotoLock, () => { return AxisPosition(_lsAxis,$"Lock{_waferSize}"); }, NullFun, _delay_1ms)
  102. .WaitWithStopCondition(UnloadStep.LSGotoLockWait, () => { return _lsAxis.Status == RState.End; },
  103. ()=>CheckAxisMotionStopStatus(_lsAxis))
  104. //3. Shuttle Goto OPEN
  105. .Run(UnloadStep.ShuttleGotoIN, () => { return AxisPosition(_shuttleAxis, "IN"); }, NullFun, _delay_1ms)
  106. .WaitWithStopCondition(UnloadStep.ShuttleGotoINWait, () => { return _shuttleAxis.Status == RState.End; },
  107. () => CheckAxisMotionStopStatus(_shuttleAxis))
  108. //4. BernoulliBladderOn
  109. .Run(UnloadStep.BernoulliBladderOn, () => { return _bernoulliBladderRoutine.Start(true) == RState.Running; }, _delay_1ms)
  110. .WaitWithStopCondition(UnloadStep.BernoulliBladderOnCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliBladderRoutine); },
  111. () => CheckRoutineStopStatus(_bernoulliBladderRoutine, "BernoulliBladder On failed"))
  112. //5. BernoulliN2 On
  113. .Run(UnloadStep.BernoulliN2On, BernoulliN2On, () => { return _sideDevice.SideData.BernoulliN2; }, _delay_5s)
  114. //6. WS Bladder On
  115. .Run(UnloadStep.WSBladderOn, () => { return _whBladderRoutine.Start(true) == RState.Running; }, _delay_1ms)
  116. .WaitWithStopCondition(UnloadStep.WSBladderOnCheck, () => { return CommonFunction.CheckRoutineEndState(_whBladderRoutine); },
  117. () => CheckRoutineStopStatus(_whBladderRoutine, "WSBladder On failed"))
  118. //7. LS Vacuum On
  119. .Run(UnloadStep.LSVacuumOn, () => { return _vacuumRoutine.Start(true) == RState.Running; }, _delay_1ms)
  120. .WaitWithStopCondition(UnloadStep.LSVacuumOnCheck, () => { return CommonFunction.CheckRoutineEndState(_vacuumRoutine); },
  121. () => CheckRoutineStopStatus(_vacuumRoutine, "LS Vaccum On failed"))
  122. //8. LS vacuum level check
  123. .Run(UnloadStep.LSVacuumLevelCheck, () => { return _vacuumLevelCheckRoutine.Start(true) == RState.Running; }, _delay_1ms)
  124. .WaitWithStopCondition(UnloadStep.LSVacuumLevelCheckWait, () => { return CommonFunction.CheckRoutineEndState(_vacuumLevelCheckRoutine); },
  125. () => CheckRoutineStopStatus(_vacuumLevelCheckRoutine, "LS Vacuum Level Check failed"))
  126. //9. Shuttle Goto LS
  127. .Run(UnloadStep.ShuttleGotoLS, () => { return AxisPosition(_shuttleAxis, "LS"); }, NullFun, _delay_1ms)
  128. .WaitWithStopCondition(UnloadStep.ShuttleGotoLSWait, () => { return _shuttleAxis.Status == RState.End; },
  129. () => CheckAxisMotionStopStatus(_shuttleAxis))
  130. //10. LS Goto Setup
  131. .Run(UnloadStep.LSGotoSetup, () => { return AxisPosition(_lsAxis, $"Setup{_waferSize}"); }, NullFun, _delay_1ms)
  132. .WaitWithStopCondition(UnloadStep.LSGotoSetupWait, () => { return _lsAxis.Status == RState.End; },
  133. () => CheckAxisMotionStopStatus(_lsAxis))
  134. //11. LS Goto Unlock
  135. .Run(UnloadStep.LSGotoUnlock, () => { return AxisPosition(_lsAxis, $"Unlock{_waferSize}"); }, NullFun, _delay_1ms)
  136. .WaitWithStopCondition(UnloadStep.LSGotoUnlockWait, () => { return _lsAxis.Status == RState.End; },
  137. () => CheckAxisMotionStopStatus(_lsAxis))
  138. //12. Re LS Vacuum level Check
  139. .Run(UnloadStep.ReLSVacuumLevelCheck, () => { return _vacuumLevelCheckRoutine.Start(true) == RState.Running; }, _delay_1ms)
  140. .WaitWithStopCondition(UnloadStep.ReLSVacuumLevelCheckWait, () => { return CommonFunction.CheckRoutineEndState(_vacuumLevelCheckRoutine); },
  141. () => CheckRoutineStopStatus(_vacuumLevelCheckRoutine,"LS Vacuum Level check failed"))
  142. //13. Shuttle Goto OUT
  143. .Run(UnloadStep.ShuttleGotoOUT, () => { return AxisPosition(_shuttleAxis, $"OUT{_waferSize}"); }, NullFun, _delay_1ms)
  144. .WaitWithStopCondition(UnloadStep.ShuttleGotoOUTWait, () => { return _shuttleAxis.Status == RState.End; },
  145. () => CheckAxisMotionStopStatus(_shuttleAxis))
  146. //14. Tilt Goto HORI
  147. .Run(UnloadStep.TiltGotoHori, () => { return AxisPosition(_tiltAxis,"HORI"); }, NullFun, _delay_1ms)
  148. .WaitWithStopCondition(UnloadStep.TiltGotoHoriCheck, () => { return _tiltAxis.Status == RState.End; },
  149. () => CheckAxisMotionStopStatus(_tiltAxis))
  150. //15. Bernoulli N2 Off
  151. .Run(UnloadStep.BernoulliN2Off, BernoulliN2Off, () => { return !_sideDevice.SideData.BernoulliN2; }, _delay_5s)
  152. //16. WS Bladder Off
  153. .Run(UnloadStep.WSBladderOff, () => { return _whBladderRoutine.Start(false) == RState.Running; }, _delay_1ms)
  154. .WaitWithStopCondition(UnloadStep.WSBladderOffCheck, () => { return CommonFunction.CheckRoutineEndState(_whBladderRoutine); },
  155. () => CheckRoutineStopStatus(_whBladderRoutine, "WSBladder Off failed"))
  156. //17 Home CRS Axis
  157. //.Run(UnloadStep.HomingCRSAxis, CRSHome, _delay_1ms)
  158. //.WaitWithStopCondition(UnloadStep.HomingCRSAxisWait, () => { return _lsAxis.Status == RState.End; },
  159. // () => CheckCRSHomeStopStatus())
  160. //.Run(UnloadStep.CRSHomedGotoSetUp, () => { return AxisPosition(_lsAxis, $"Setup{_waferSize}"); }, _delay_1ms)
  161. //.WaitWithStopCondition(UnloadStep.CRSHomedGotoSetUpCheck, () => { return _lsAxis.Status == RState.End; },
  162. // () => CheckAxisMotionStopStatus(_lsAxis))
  163. .End(UnloadStep.End, NullFun, 10);
  164. return Runner.Status;
  165. }
  166. /// <summary>
  167. /// 检验Routine异常状态
  168. /// </summary>
  169. /// <returns></returns>
  170. private bool CheckRoutineStopStatus(IRoutine routine,string error)
  171. {
  172. bool result = CommonFunction.CheckRoutineStopState(routine);
  173. if (result)
  174. {
  175. NotifyError(eEvent.ERR_LOADER, $"{error}", 0);
  176. }
  177. return result;
  178. }
  179. /// <summary>
  180. /// Axis goto position
  181. /// </summary>
  182. /// <param name="axis"></param>
  183. /// <param name="station"></param>
  184. /// <returns></returns>
  185. private bool AxisPosition(JetAxisBase axis,string station)
  186. {
  187. bool result = axis.PositionStation(station);
  188. if (!result)
  189. {
  190. NotifyError(eEvent.ERR_LOADER, $"{axis.Module} goto {station} failed", 0);
  191. }
  192. return result;
  193. }
  194. /// <summary>
  195. /// 检验电机运动异常状态
  196. /// </summary>
  197. /// <param name="axis"></param>
  198. /// <returns></returns>
  199. private bool CheckAxisMotionStopStatus(JetAxisBase axis)
  200. {
  201. bool result = axis.Status == RState.Failed || axis.Status == RState.Timeout;
  202. if (result)
  203. {
  204. NotifyError(eEvent.ERR_LOADER, $"{axis.Module} motion failed", 0);
  205. }
  206. return result;
  207. }
  208. /// <summary>
  209. /// BerolliN2 On
  210. /// </summary>
  211. /// <returns></returns>
  212. private bool BernoulliN2On()
  213. {
  214. bool result= _sideDevice.BernoulliN2OnAction("", null);
  215. if (!result)
  216. {
  217. NotifyError(eEvent.ERR_LOADER, $"BernoulliN2 On failed", 0);
  218. }
  219. return result;
  220. }
  221. /// <summary>
  222. /// BernoulliN2Off
  223. /// </summary>
  224. /// <returns></returns>
  225. private bool BernoulliN2Off()
  226. {
  227. bool result = _sideDevice.BernoulliN2OffAction("", null);
  228. if (!result)
  229. {
  230. NotifyError(eEvent.ERR_LOADER, "BernoulliN2 Off failed", 0);
  231. }
  232. return result;
  233. }
  234. /// <summary>
  235. /// Wafer Holder Clamp Off
  236. /// </summary>
  237. /// <returns></returns>
  238. public bool WSClampOffAction()
  239. {
  240. bool result = _loaderCommonDevice.WaferHolderClampOffAction();
  241. if (!result)
  242. {
  243. NotifyError(eEvent.ERR_LOADER, "Wafer Shuttle Clamp Off failed", 2);
  244. }
  245. return result;
  246. }
  247. /// <summary>
  248. /// Wafer Holder Clamp On
  249. /// </summary>
  250. /// <returns></returns>
  251. public bool WSClampOnAction()
  252. {
  253. bool result = _loaderCommonDevice.WaferHolderClampOnAction();
  254. if (!result)
  255. {
  256. NotifyError(eEvent.ERR_LOADER, "Wafer Shuttle Clamp On failed", 2);
  257. }
  258. return result;
  259. }
  260. /// <summary>
  261. /// 启动
  262. /// </summary>
  263. /// <param name="objs"></param>
  264. /// <returns></returns>
  265. /// <exception cref="NotImplementedException"></exception>
  266. public RState Start(params object[] objs)
  267. {
  268. if (SC.ContainsItem($"Loader1.{_side}WaferSize"))
  269. {
  270. _waferSize = SC.GetValue<int>($"Loader1.{_side}WaferSize");
  271. }
  272. _shuttleAxis = GetShuttleAxis();
  273. _lsAxis = GetCrsAxis();
  274. _tiltAxis = GetTiltAxis();
  275. _loaderCommonDevice = DEVICE.GetDevice<LoaderCommonDevice>($"Loader1.Common");
  276. _rotationAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.Rotation");
  277. _sideDevice = DEVICE.GetDevice<LoaderSideDevice>($"{Module}.{_side}");
  278. _vacuumRoutine = new LoaderSideVacuumRoutine($"{Module}.{_side}");
  279. _vacuumLevelCheckRoutine = new LoaderSideVacuumLevelCheckRoutine($"{Module}.{_side}");
  280. //_unloadVacuumLevelCheckRoutine = new LoaderSideUnloadVacuumLevelCheckRoutine($"{Module}.{_side}");
  281. _whBladderRoutine = new LoaderSideWhBladderRoutine($"{Module}.{_side}");
  282. _bernoulliBladderRoutine = new LoaderSideBernoulliBladderRoutine($"{Module}.{_side}");
  283. Runner.Start(Module, $"Unload {_side}");
  284. return RState.Running;
  285. }
  286. /// <summary>
  287. /// 获取Shuttle轴对象
  288. /// </summary>
  289. /// <returns></returns>
  290. private JetAxisBase GetShuttleAxis()
  291. {
  292. switch (_side)
  293. {
  294. case "SideA":
  295. return DEVICE.GetDevice<JetAxisBase>($"{Module}.ShuttleA");
  296. default:
  297. return DEVICE.GetDevice<JetAxisBase>($"{Module}.ShuttleB");
  298. }
  299. }
  300. /// <summary>
  301. /// 获取CRS轴对象
  302. /// </summary>
  303. /// <returns></returns>
  304. private JetAxisBase GetCrsAxis()
  305. {
  306. switch (_side)
  307. {
  308. case "SideA":
  309. return DEVICE.GetDevice<JetAxisBase>($"{Module}.LSA");
  310. default:
  311. return DEVICE.GetDevice<JetAxisBase>($"{Module}.LSB");
  312. }
  313. }
  314. /// <summary>
  315. /// 获取Tilt轴对象
  316. /// </summary>
  317. /// <returns></returns>
  318. private JetAxisBase GetTiltAxis()
  319. {
  320. switch (_side)
  321. {
  322. case "SideA":
  323. return DEVICE.GetDevice<JetAxisBase>($"{Module}.TiltA");
  324. default:
  325. return DEVICE.GetDevice<JetAxisBase>($"{Module}.TiltB");
  326. }
  327. }
  328. /// <summary>
  329. /// 检验前置条件
  330. /// </summary>
  331. /// <returns></returns>
  332. private bool CheckPreCondition()
  333. {
  334. if (!CheckHomeCondition())
  335. {
  336. return false;
  337. }
  338. if (!CheckUnloadAxisCondition())
  339. {
  340. return false;
  341. }
  342. if (!UnloadStatusCheck())
  343. {
  344. return false;
  345. }
  346. return true;
  347. }
  348. /// <summary>
  349. /// 检验Home条件
  350. /// </summary>
  351. /// <returns></returns>
  352. private bool CheckHomeCondition()
  353. {
  354. //检验PUF、Loader Transporter,Robot均Homed
  355. //Efem Home
  356. if (ModuleHelper.IsInstalled(ModuleName.EFEM))
  357. {
  358. EfemEntity efemEntity = Singleton<RouteManager>.Instance.GetModule<EfemEntity>(ModuleName.EFEM.ToString());
  359. if (!efemEntity.IsHomed)
  360. {
  361. LOG.WriteLog(eEvent.ERR_EFEM_ROBOT, Module, $"{ModuleName.EFEM.ToString()} is not home, Cannot execute GotoSavedPosition");
  362. return false;
  363. }
  364. }
  365. if (ModuleHelper.IsInstalled(ModuleName.PUF1))
  366. {
  367. PUFEntity puf1Entity = Singleton<RouteManager>.Instance.GetModule<PUFEntity>(ModuleName.PUF1.ToString());
  368. if (!puf1Entity.IsHomed)
  369. {
  370. NotifyError(eEvent.ERR_LOADER, "PUF1 is not homed",-1);
  371. return false;
  372. }
  373. }
  374. if (ModuleHelper.IsInstalled(ModuleName.Transporter2))
  375. {
  376. TransporterEntity loaderTransportEntity = Singleton<RouteManager>.Instance.GetModule<TransporterEntity>(ModuleName.Transporter2.ToString());
  377. if (!loaderTransportEntity.IsHomed)
  378. {
  379. NotifyError(eEvent.ERR_LOADER, "Loader Transporter is not homed",-1);
  380. return false;
  381. }
  382. }
  383. return true;
  384. }
  385. /// <summary>
  386. /// 检验Axis条件
  387. /// </summary>
  388. /// <param name="side"></param>
  389. /// <returns></returns>
  390. private bool CheckUnloadAxisCondition()
  391. {
  392. if (!_rotationAxis.IsHomed)
  393. {
  394. NotifyError(eEvent.ERR_LOADER, $"Rotation is not homed",-1);
  395. return false;
  396. }
  397. if (!_shuttleAxis.IsHomed)
  398. {
  399. NotifyError(eEvent.ERR_LOADER, $"{_shuttleAxis.Name} is not homed", -1);
  400. return false;
  401. }
  402. if (!_tiltAxis.IsHomed)
  403. {
  404. NotifyError(eEvent.ERR_LOADER, $"{_tiltAxis.Name} is not homed",-1);
  405. return false;
  406. }
  407. if (!_lsAxis.IsHomed)
  408. {
  409. NotifyError(eEvent.ERR_LOADER, $"{_lsAxis.Name} is not homed", -1);
  410. return false;
  411. }
  412. //LS已经运动到 Setup 位
  413. double crsPosition = _lsAxis.MotionData.MotorPosition;
  414. if (!_lsAxis.CheckPositionIsInStation(crsPosition, $"Setup{_waferSize}"))
  415. {
  416. NotifyError(eEvent.ERR_LOADER, $"LS {crsPosition} not in Setup{_waferSize}", -1);
  417. return false;
  418. }
  419. //Rotation已经运动到 loaderA 位(sideA 下片时)或 loaderB 位(sideB 下片时)
  420. double rotationPosition = _rotationAxis.MotionData.MotorPosition;
  421. if(_side == "SideA")
  422. {
  423. if (!_rotationAxis.CheckPositionIsInStation(rotationPosition, $"LOADA{_waferSize}"))
  424. {
  425. NotifyError(eEvent.ERR_LOADER, $"Rotation {rotationPosition} not in LOADA{_waferSize}", -1);
  426. return false;
  427. }
  428. }
  429. else
  430. {
  431. if (!_rotationAxis.CheckPositionIsInStation(rotationPosition, $"LOADB{_waferSize}"))
  432. {
  433. NotifyError(eEvent.ERR_LOADER, $"Rotation {rotationPosition} not in LOADB{_waferSize}", -1);
  434. return false;
  435. }
  436. }
  437. //Shuttle已经运动到 MID 位
  438. double shuttlePosition =_shuttleAxis.MotionData.MotorPosition;
  439. if (!_shuttleAxis.CheckPositionIsInStation(shuttlePosition, "MID"))
  440. {
  441. NotifyError(eEvent.ERR_LOADER, $"Shuttle {shuttlePosition} not in MID", -1);
  442. return false;
  443. }
  444. //Tilt已经运动到 VERT 位
  445. double tiltPosition = _tiltAxis.MotionData.MotorPosition;
  446. if (!_tiltAxis.CheckPositionIsInStation(tiltPosition, "VERT"))
  447. {
  448. NotifyError(eEvent.ERR_LOADER, $"Tilt {tiltPosition} not in VERT", -1);
  449. return false;
  450. }
  451. return true;
  452. }
  453. /// <summary>
  454. /// 检验状态条件
  455. /// </summary>
  456. /// <param name="side"></param>
  457. /// <returns></returns>
  458. private bool UnloadStatusCheck()
  459. {
  460. LoaderSideData sideData = _sideDevice.SideData;
  461. LoaderCommonData commonData = _loaderCommonDevice.CommonData;
  462. //Bernoulli Bladder(WS Bladder on)
  463. if (!sideData.BernoulliBladder)
  464. {
  465. NotifyError(eEvent.ERR_LOADER, "Bernoulli Bladder is off", -1);
  466. return false;
  467. }
  468. //Bernoulli N2(BernoulliN2 off)
  469. if (sideData.BernoulliN2)
  470. {
  471. NotifyError(eEvent.ERR_LOADER, "Bernoulli N2 is on",-1);
  472. return false;
  473. }
  474. //LS Vacuum检验(LS Vaccum off)
  475. if (sideData.CRSVacuum)
  476. {
  477. NotifyError(eEvent.ERR_LOADER, "LS Vacuum is on", -1);
  478. return false;
  479. }
  480. //Wafer Shuttle Present(WS present)
  481. if (!commonData.WaferHolderPresent)
  482. {
  483. NotifyError(eEvent.ERR_LOADER, "Wafer Shuttle is absent", -1);
  484. return false;
  485. }
  486. //Wafer Shuttle Clamp(Clamp on/off均可)
  487. //Wafer Shuttle Bladder(Bladder off)
  488. if (sideData.WHBladder)
  489. {
  490. NotifyError(eEvent.ERR_LOADER, "Wafer Shuttle Bladder is on", -1);
  491. return false;
  492. }
  493. //Drip Tray Fluid(Drip Tray Fluid正常)
  494. if (commonData.DripTrayFluid)
  495. {
  496. NotifyError(eEvent.ERR_LOADER, "Drip Tray Fluid is on", -1);
  497. return false;
  498. }
  499. return true;
  500. }
  501. /// <summary>
  502. /// CRS Home
  503. /// </summary>
  504. /// <returns></returns>
  505. private bool CRSHome()
  506. {
  507. bool result = _lsAxis.Home();
  508. if (!result)
  509. {
  510. NotifyError(eEvent.ERR_LOADER, "LS Axis home failed", 0);
  511. }
  512. return result;
  513. }
  514. /// <summary>
  515. /// 检验CRS home异常状态
  516. /// </summary>
  517. /// <returns></returns>
  518. private bool CheckCRSHomeStopStatus()
  519. {
  520. bool result = _lsAxis.Status == RState.Failed || _lsAxis.Status == RState.Timeout;
  521. if (result)
  522. {
  523. NotifyError(eEvent.ERR_LOADER, "LS Axis home failed", 0);
  524. }
  525. return result;
  526. }
  527. }
  528. }