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AXIS
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e246616627
Revise FwdLimit;
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8 月之前 |
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BarcodeReader
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f7533a737b
Initialize
|
10 月之前 |
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Dose
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31c26804e6
add Festo Communication Protocol
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10 月之前 |
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Dryer
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31c26804e6
add Festo Communication Protocol
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10 月之前 |
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EFEM
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1af6a448da
update dummy wafersize
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8 月之前 |
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Facilities
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31c26804e6
add Festo Communication Protocol
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10 月之前 |
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LinMot
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f7533a737b
Initialize
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10 月之前 |
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Loader
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57ec4c0d76
update transporter scheduler
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8 月之前 |
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Metal
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31c26804e6
add Festo Communication Protocol
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10 月之前 |
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PUF
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0f6f0fbadc
update efem pick and place wafer size
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8 月之前 |
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PowerSupplier
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f7533a737b
Initialize
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10 月之前 |
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Prewet
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31c26804e6
add Festo Communication Protocol
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10 月之前 |
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Reservoir
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31c26804e6
add Festo Communication Protocol
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10 月之前 |
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Resistivity
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f7533a737b
Initialize
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10 月之前 |
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Rinse
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31c26804e6
add Festo Communication Protocol
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10 月之前 |
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SRD
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48517b7d99
Add SRDLiftUpRoutine; Revise IO ModuleIOCfg.xml and SRD UI; Add SRD related Simulator;
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8 月之前 |
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Safety
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0f6f0fbadc
update efem pick and place wafer size
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8 月之前 |
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SignalLight
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e2d5bb5c5d
update galil controller inputs
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8 月之前 |
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Temperature
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31c26804e6
add Festo Communication Protocol
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10 月之前 |
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TransPorter
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2192df7ad3
Modify Transporter related routine and UI;
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8 月之前 |
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DataDefine.cs
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f7533a737b
Initialize
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10 月之前 |
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DeviceManager.cs
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00c6fabca5
update transporter
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8 月之前 |
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FinsPlc.cs
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f7533a737b
Initialize
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10 月之前 |
chenkui
1af6a448da
update dummy wafersize