| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355 | using Aitex.Core.RT.Routine;using Aitex.Core.RT.SCCore;using Aitex.Sorter.Common;using CyberX8_RT.Devices;using MECF.Framework.Common.Routine;using MECF.Framework.Common.Equipment;using MECF.Framework.Common.SubstrateTrackings;using CyberX8_Core;using Aitex.Core.RT.Log;using Aitex.Core.Util;using MECF.Framework.Common.Schedulers;using System.Collections.Generic;using CyberX8_RT.Devices.EFEM;using CyberX8_RT.Modules.LPs;using CyberX8_RT.Modules.SRD;using System.Runtime.InteropServices;using CyberX8_RT.Modules.PUF;using Aitex.Core.RT.Device;using CyberX8_RT.Devices.AXIS;using MECF.Framework.Common.Utilities;using CyberX8_RT.Devices.PUF;using CyberX8_RT.Modules.Transporter;using MECF.Framework.Common.WaferHolder;using System;using Aitex.Core.UI.ControlDataContext;using Aitex.Core.Common;namespace CyberX8_RT.Modules.EFEM{    class EfemPickRoutine : RoutineBase, IRoutine    {        private enum PickStep        {            WaitModuleReady,            PufVacuumOff,            Picking1,            Picking2,            End,        }        private int _moveTimeout = 20 * 1000;        private ModuleName _targetModule = ModuleName.System;        int _targetSlot;        int _targetSlot2;        string _targetPufSlot;        Hand _hand;        Hand _hand2;        EfemBase _efem;        bool _bDoublePick = false;        private SRDEntity _srdModule;        private PUFEntity _pufModule;        private Queue<MoveItem> _moveQueue;        public EfemPickRoutine(EfemBase efem) : base(ModuleName.EfemRobot.ToString())        {            _efem = efem;        }        public RState Start(params object[] objs)        {            _bDoublePick = false;            _moveQueue = (Queue<MoveItem>)objs[0];            _targetModule = _moveQueue.Peek().SourceModule;            _targetSlot = _moveQueue.Peek().SourceSlot;            _hand = _moveQueue.Peek().RobotHand;            if(_moveQueue.Count >= 2)            {                _bDoublePick = true;            }            if (!CheckPreCondition())            {                return RState.Failed;            }            _moveTimeout = SC.GetValue<int>($"EFEM.MotionTimeout") * 1000;            return Runner.Start(Module, $"Pick from {_targetModule}");        }        private Loadport GetLoadPort(ModuleName station)        {            LoadPortModule loadPortModule = Singleton<RouteManager>.Instance.EFEM.GetLoadportModule(station - ModuleName.LP1);            return loadPortModule.LPDevice;        }        private bool CheckPreCondition()        {            //LoadPort状态判断            if (ModuleHelper.IsLoadPort(_targetModule) && ModuleHelper.IsInstalled(_targetModule))            {                Loadport loadPort=GetLoadPort(_targetModule);                if (loadPort == null)                {                    return false;                }                if (!loadPort.IsLoaded)                {                    NotifyError(eEvent.ERR_EFEM_ROBOT,  $"LoadPort not load, cannot do the pick action",-1);                    return false;                }            }            if (ModuleHelper.IsSRD(_targetModule) && ModuleHelper.IsInstalled(_targetModule))            {                _srdModule = Singleton<RouteManager>.Instance.GetModule<SRDEntity>(_targetModule.ToString());                if (!_srdModule.IsHomed)                {                    NotifyError(eEvent.ERR_EFEM_ROBOT,  $"{_targetModule} is not homed, please home it first",-1);                    return false;                }                //判断arm是否在home位置上                //JetAxisBase jetAxisBase = DEVICE.GetDevice<JetAxisBase>($"{_targetModule}.Arm");                //double position = jetAxisBase.MotionData.MotorPosition;                //bool result = jetAxisBase.CheckPositionIsInStation(position, "Home");                //if (!result)                //{                //    NotifyError(eEvent.ERR_EFEM_ROBOT,  $"{_targetModule} armaxis {position} is not in homed place",-1);                //    return false;                //}                if (_srdModule.IsSrdDoorClosed)                {                    NotifyError(eEvent.ERR_EFEM_ROBOT,  $"{_targetModule} door closed, can not pick",-1);                    return false;                }                if (!_srdModule.IsSrdChuckVacuum)                {                    NotifyError(eEvent.ERR_EFEM_ROBOT,  $"{_targetModule} Vacuum on, can not pick",-1);                    return false;                }            }            if (ModuleHelper.IsPUF(_targetModule) && ModuleHelper.IsInstalled(_targetModule))            {                _pufModule = Singleton<RouteManager>.Instance.GetModule<PUFEntity>(_targetModule.ToString());                if (!_pufModule.IsHomed)                {                    NotifyError(eEvent.ERR_EFEM_ROBOT,  $"{_targetModule} is not homed, please home it first",-1);                    return false;                }                if (!_pufModule.IsInRobotStation)                {                    NotifyError(eEvent.ERR_EFEM_ROBOT,  $"{_targetModule} not in robot station, cannot do the pick action",-1);                    return false;                }            }            if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, (int)_hand))            {                NotifyError(eEvent.ERR_EFEM_ROBOT,  $"Efem robot arm{_hand} already has a wafer, cannot do the pick action",-1);                return false;            }            if (WaferManager.Instance.CheckNoWafer(_targetModule, _targetSlot))            {                if (ModuleHelper.IsPUF(_targetModule))                {                    _targetPufSlot = _targetSlot == 0 ? "SideA" : "SideB";                    NotifyError(eEvent.ERR_EFEM_ROBOT,  $"The target: {_targetModule}.{_targetPufSlot} has no wafer, cannot do the pick action",-1);                }                else                {                    NotifyError(eEvent.ERR_EFEM_ROBOT,  $"The target slot: {_targetModule}.{_targetSlot + 1} has no wafer, cannot do the pick action",-1);                }                return false;            }            else            {                WaferInfo waferInfo = WaferManager.Instance.GetWafer(_targetModule, _targetSlot);                if(waferInfo.Status!=WaferStatus.Normal)                {                    NotifyError(eEvent.ERR_EFEM_ROBOT, $"The target slot: {_targetModule}.{_targetSlot + 1} wafer status is {waferInfo.Status}, cannot do the pick action", -1);                    return false;                }            }            if (_moveQueue.Count >= 2)            {                if (!ModuleHelper.IsLoadPort(_targetModule))                {                    NotifyError(eEvent.ERR_EFEM_ROBOT,  $"Wrong double pick command, target is not loadport",-1);                    return false;                }                _hand2 = _hand != Hand.Blade1 ? Hand.Blade1 : Hand.Blade2;                if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, (int)_hand2))                {                    NotifyError(eEvent.ERR_EFEM_ROBOT,  $"Efem robot arm{_hand2} already has a wafer, cannot do the double pick action",-1);                    return false;                }                _targetSlot2 = _moveQueue.ToArray()[1].SourceSlot;                if (WaferManager.Instance.CheckNoWafer(_targetModule, _targetSlot2))                {                    NotifyError(eEvent.ERR_EFEM_ROBOT,  $"The target slot: {_targetModule}.{_targetSlot2 + 1} has no wafer, cannot do the double pick action",-1);                    return false;                }            }            return true;        }        public RState Monitor()        {            if(_bDoublePick)            {                Runner.Wait(PickStep.WaitModuleReady,  WaitModuleReady)                        .Run(PickStep.Picking1,        Pick1,          Pick1Done,      _moveTimeout)                        .Run(PickStep.Picking2,        Pick2,          Pick2Done,      _moveTimeout)                        .End(PickStep.End,             ActionDone);            }            else            {                Runner.Wait(PickStep.WaitModuleReady, WaitModuleReady)                    .RunIf(PickStep.PufVacuumOff, ModuleHelper.IsPUF(_targetModule), PufVacuumOff, CheckPufVacuumOff, _delay_2s)                        .Run(PickStep.Picking1,        Pick1,          Pick1Done,      _moveTimeout)                        .End(PickStep.End,             ActionDone);            }            return Runner.Status;        }        /// <summary>        /// Puf关闭真空        /// </summary>        /// <returns></returns>        private bool PufVacuumOff()        {            PufVacuum pufVacuum = DEVICE.GetDevice<PufVacuum>($"{_targetModule}.Vacuum");            if (_targetSlot == 0)            {                return pufVacuum.VacuumAOff();            }            else            {                return pufVacuum.VacuumBOff();            }        }        /// <summary>        /// 检验Puf是否关闭真空        /// </summary>        /// <returns></returns>        private bool CheckPufVacuumOff()        {            PufVacuum pufVacuum = DEVICE.GetDevice<PufVacuum>($"{_targetModule}.Vacuum");            if (_targetSlot == 0)            {                return pufVacuum.IsChuckAReleased;            }            else            {                return pufVacuum.ISChuckBReleased;            }        }        public void Abort()        {            _efem.Halt();        }        private bool WaitModuleReady()        {            return _efem.Status == RState.End;        }        private bool Pick1()        {            return _efem.Pick(_targetModule, _targetSlot, _hand);        }        private bool Pick1Done()        {            if (_efem.Status == RState.End)            {                WaferManager.Instance.WaferMoved(_targetModule, _targetSlot, ModuleName.EfemRobot, (int)_hand);                return true;            }            else if (_efem.Status == RState.Failed)            {                NotifyError(eEvent.ERR_EFEM_ROBOT,  $"Efem robot picking failed: {_efem.Status}",-1);                return true;            }            return false;        }        private bool Pick2()        {            return _efem.Pick(_targetModule, _targetSlot2, _hand2);        }        private bool Pick2Done()        {            if (_efem.Status == RState.End)            {                WaferManager.Instance.WaferMoved(_targetModule, _targetSlot2, ModuleName.EfemRobot, (int)_hand2);                return true;            }            else if (_efem.Status == RState.Failed)            {                NotifyError(eEvent.ERR_EFEM_ROBOT,  $"Efem robot picking failed: {_efem.Status}",-1);                return true;            }            return false;        }        private bool ActionDone()        {             return true;         }        /// <summary>        /// 重试        /// </summary>        /// <param name="step"></param>        public RState Retry(int step)        {            if(!CheckPreCondition())            {                return RState.Failed;            }            _efem.Reset();            List<Enum> preStepIds = new List<Enum>();            AddPreSteps(PickStep.PufVacuumOff, preStepIds);            return Runner.Retry(PickStep.PufVacuumOff, preStepIds, Module, "Pick Retry");        }        /// <summary>        /// 忽略前        /// </summary>        /// <param name="step"></param>        /// <param name="preStepIds"></param>        private void AddPreSteps(PickStep step, List<Enum> preStepIds)        {            for (int i = 0; i < (int)step; i++)            {                preStepIds.Add((PickStep)i);            }        }        /// <summary>        /// 检验前面完成状态        /// </summary>        /// <returns></returns>        public bool CheckCompleteCondition(int index)        {            if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, (int)_hand))            {                NotifyError(eEvent.ERR_EFEM_ROBOT, $"Efem robot arm{_hand} has no wafer", -1);                return false;            }            if (WaferManager.Instance.CheckHasWafer(_targetModule, _targetSlot))            {                NotifyError(eEvent.ERR_EFEM_ROBOT, $"{_targetModule} Slot{_targetSlot} has no wafer", -1);                return false;            }            return true;        }    }}
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