| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256 | using Aitex.Core.RT.Routine;using Aitex.Core.RT.SCCore;using Aitex.Sorter.Common;using CyberX8_RT.Devices;using MECF.Framework.Common.Routine;using MECF.Framework.Common.Equipment;using MECF.Framework.Common.SubstrateTrackings;using CyberX8_Core;using Aitex.Core.RT.Log;using Aitex.Core.Common;using Aitex.Core.Util;using MECF.Framework.Common.Schedulers;using System.Collections.Generic;using CyberX8_RT.Devices.EFEM;using MECF.Framework.Common.Utilities;namespace CyberX8_RT.Modules.EFEM{    class EfemHomeRoutine : ModuleRoutineBase, IRoutine    {        private enum HomeStep        {            PowerOn,            SetHomeSpeed,            CheckVacuum,            InitAligner,            HomeAll,            CheckWaferPresence,            DummyMap,            CheckDummyMap,            SetRobotSpeed,            End,        }        private enum HomeModuleStep        {            SetHomeSpeed,            Home,            HomeAxes,            SetRobotSpeed,            End,        }        private int _homeTimeout = 30 * 1000;        ModuleName _targetModule;        EfemBase _efem;        int _defaultSpeed = SC.GetValue<int>("EFEM.DefaultMoveSpeedInPercent");        int _homeSpeed = SC.GetValue<int>("EFEM.DefaultHomeSpeedInPercent");                bool _isLP1Unable = SC.GetValue<bool>("EFEM.IsLoadPort1Unable");        bool _isLP2Unable = SC.GetValue<bool>("EFEM.IsLoadPort2Unable");        bool _isLP3Unable = SC.GetValue<bool>("EFEM.IsLoadPort3Unable");        double _chuckVacuumIsValid = SC.GetValue<double>("EFEM.ChuckVacuumIsValid");        private Hand _hand = Hand.Blade1;        private EfemMapDummyRoutine _mapDummyRoutine;                public EfemHomeRoutine(EfemBase efem) : base(ModuleName.EfemRobot)        {            _efem = efem;            _mapDummyRoutine = new EfemMapDummyRoutine(efem);        }        public RState Start(params object[] objs)        {            if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, (int)_hand))            {                LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Efem robot arm{_hand} already has a wafer, cannot do the home action");                return RState.Failed;            }            _isLP1Unable = SC.GetValue<bool>("EFEM.IsLoadPort1Unable");            _isLP2Unable = SC.GetValue<bool>("EFEM.IsLoadPort2Unable");            _isLP3Unable = SC.GetValue<bool>("EFEM.IsLoadPort3Unable");                        _defaultSpeed = SC.GetValue<int>("EFEM.DefaultMoveSpeedInPercent");            _homeSpeed = SC.GetValue<int>("EFEM.DefaultHomeSpeedInPercent");                        _targetModule = (ModuleName)objs[0];            _homeTimeout = SC.GetValue<int>($"EFEM.HomeTimeout") * 1000;            _chuckVacuumIsValid = SC.GetValue<double>("EFEM.ChuckVacuumIsValid");            return Runner.Start(Module, $"Home {_targetModule}");        }        public RState Monitor()        {            if(_targetModule == ModuleName.EFEM)            {                Runner.Run(HomeStep.PowerOn, PowerOn, IsStepComplete, _delay_5s)                    .Run(HomeStep.SetHomeSpeed,            SetHomeSpeed,           IsStepComplete,         _delay_5s)                    .Run(HomeStep.CheckVacuum,CheckVacuumIsValid,_delay_1ms)                    .Run(HomeStep.InitAligner, HomeAligner, IsStepComplete, _homeTimeout)                    .Run(HomeStep.HomeAll,          HomeAll,   IsStepComplete, _homeTimeout)                    .Run(HomeStep.CheckWaferPresence,      CheckWaferPresence,     VerifyWaferPresence,    _delay_5s)                    .Run(HomeStep.DummyMap, StartMapDummy,_delay_1ms)                    .WaitWithStopCondition(HomeStep.CheckDummyMap,()=>CommonFunction.CheckRoutineEndState(_mapDummyRoutine),                        ()=>CommonFunction.CheckRoutineStopState(_mapDummyRoutine))                    .Run(HomeStep.SetRobotSpeed,           SetRobotSpeed,          IsStepComplete,         _delay_5s)                    .End(HomeStep.End,                     NullFun,                                        _delay_1ms);            }            else            {                Runner.Run(HomeStep.PowerOn, PowerOn, IsStepComplete, _delay_5s)                    .Run(HomeModuleStep.SetHomeSpeed, SetHomeSpeed,        IsStepComplete, _delay_5s)                    .Run(HomeModuleStep.Home,           HomeModule,         IsStepComplete,     _homeTimeout)                    .Run(HomeModuleStep.SetRobotSpeed,  SetRobotSpeed,      IsStepComplete, _delay_5s)                    .End(HomeModuleStep.End,        NullFun,            _delay_50ms);            }            return Runner.Status;        }        private bool CheckVacuumIsValid()        {            EfemEntity efemEntity = Singleton<RouteManager>.Instance.EFEM;            double vacuumValue = efemEntity.VacuumValue;            bool result = vacuumValue < _chuckVacuumIsValid;            if (!result)            {                LOG.WriteLog(eEvent.ERROR_EFEM_VAC, Module.ToString(), $"Vacumm {vacuumValue} is over {_chuckVacuumIsValid}");            }            return result;        }        private bool StartMapDummy()        {            return _mapDummyRoutine.Start() == RState.Running;        }        public void Abort()        {        }        private bool IsStepComplete()        {            if (_efem.Status == RState.End)            {                return true;            }            else if (_efem.Status == RState.Failed)            {                Runner.Stop($"Efem home failed: {_efem.Status}");                return true;            }            else                return false;        }        private bool HomeAll()        {            return _efem.HomeAll();        }        private bool HomeAligner()        {            return _efem.Home(ModuleName.Aligner1);        }        private bool HomeModule()        {            return _efem.Home(_targetModule);        }        private bool CheckWaferPresence()        {            return _efem.CheckWaferPresence();        }        private bool PowerOn()        {            return _efem.RobotPowerOn(ModuleName.EfemRobot, true);        }        private bool SetHomeSpeed()        {            return _efem.SetRobotSpeed(ModuleName.EfemRobot, _homeSpeed);        }        private bool SetRobotSpeed()        {            return _efem.SetRobotSpeed(ModuleName.EfemRobot, _defaultSpeed);        }        private bool VerifyWaferPresence()        {            if (_efem.Status == RState.End)            {                var waferPresence = _efem.GetWaferPresence();                //000/111 upperArmWafer, lowerArmWafer, alignerWafer1,                 //if (waferPresence.Length != 3)                //{                //    LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"EFEM Track wafer present return invalid value, Wafer Presence:{waferPresence}, should be 3 characters");                //    return false;                //}                               //aligner2                //if (waferPresence[3] == '1')                //{                //    if (WaferManager.Instance.CheckNoWafer(ModuleName.Aligner2, 0))                //    {                //        WaferManager.Instance.CreateWafer(ModuleName.Aligner2, 0, WaferStatus.Normal);                //    }                //}                //else                //{                //    if (WaferManager.Instance.CheckHasWafer(ModuleName.Aligner2, 0))                //    {                //        LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Aligner2} has wafer information, while EFEM return empty, manually delete if really no wafer");                //    }                //}                //cooling1                //if (waferPresence[4] == '1')                //{                //    if (WaferManager.Instance.CheckNoWafer(ModuleName.Cooling1, 0))                //    {                //        WaferManager.Instance.CreateWafer(ModuleName.Cooling1, 0, WaferStatus.Normal);                //    }                //}                //else                //{                //    if (WaferManager.Instance.CheckHasWafer(ModuleName.Cooling1, 0))                //    {                //        LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Cooling1} has wafer information, while EFEM return empty, manually delete if really no wafer");                //    }                //}                //cooling2                //if (waferPresence[5] == '1')                //{                //    if (WaferManager.Instance.CheckNoWafer(ModuleName.Cooling2, 0))                //    {                //        WaferManager.Instance.CreateWafer(ModuleName.Cooling2, 0, WaferStatus.Normal);                //    }                //}                //else                //{                //    if (WaferManager.Instance.CheckHasWafer(ModuleName.Cooling2, 0))                //    {                //        LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Cooling2} has wafer information, while EFEM return empty, manually delete if really no wafer");                //    }                //}                return true;            }            else if (_efem.Status == RState.Failed||_efem.Status==RState.Timeout)            {                LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Efem StateTrack failed: {_efem.Status}");                return false;            }            else                return false;        }    }}
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