| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131 | using Aitex.Core.RT.DataCenter;using Aitex.Core.RT.Device;using Aitex.Core.RT.Log;using MECF.Framework.Common.Utilities;using CyberX8_RT.Devices.AXIS;using CyberX8_RT.Devices.AXIS.CANOpen;using CyberX8_RT.Devices.YASKAWA;using System;using System.Collections.Generic;using System.Linq;using System.Text;using System.Threading.Tasks;using MECF.Framework.Common.SubstrateTrackings;namespace CyberX8_RT.Devices.PUF{    public class PufFlipAxisInterLock : IAxisInterLock    {        #region 内部变量        private JetAxisBase _axis;        #endregion        #region 属性        /// <summary>        /// 模块名称        /// </summary>        public string Module { get { return _axis.Module; } }        /// <summary>        /// 子模块名称        /// </summary>        public string Name { get { return _axis.Name; } }        #endregion        /// <summary>        /// 构造函数        /// </summary>        /// <param name="Module"></param>        /// <param name="name"></param>        public PufFlipAxisInterLock(JetAxisBase axis)        {            _axis=axis;        }        /// <summary>        /// Positon前校验inter lock        /// </summary>        /// <param name="station"></param>        /// <returns></returns>        public bool CheckGotoPosition(string station)        {            if (!_axis.IsHomed)            {                LOG.WriteLog(eEvent.ERROR_PUF_NOT_HOME, $"{Module}.{Name}", "axis is not homed, Cannot execute GotoSavedPosition");                return false;            }            if (!AxisManager.Instance.CheckModuleAxisSwitchOn(Module,Name))            {                return false;            }            PufVacuum _pufVacuum = DEVICE.GetDevice<PufVacuum>($"{Module}.Vacuum");            bool chuckAWaferPresent = _pufVacuum.ChuckAWaferPresent;            bool chuckBWaferPresent = _pufVacuum.ChuckBWaferPresent;            JetAxisBase rotationAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Rotation");            if(rotationAxis.IsRun)            {                LOG.WriteLog(eEvent.ERROR_PUF_OTHERAXIS_RUNNING, $"{Module}.{Name}", "rotation is running, Cannot execute GotoSavedPosition");                return false;            }            JetAxisBase verticalAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Vertical");            if (verticalAxis.IsRun)            {                LOG.WriteLog(eEvent.ERROR_PUF_OTHERAXIS_RUNNING, $"{Module}.{Name}", "vertical is running, Cannot execute GotoSavedPosition");                return false;            }            double rotationPosition = rotationAxis.MotionData.MotorPosition;            double verticalPosition= verticalAxis.MotionData.MotorPosition;            //A面存在Wafer同时A面Vacuum is released            if(WaferManager.Instance.CheckHasWafer(Module,0)&&_pufVacuum.IsChuckAReleased)            {                LOG.WriteLog(eEvent.ERROR_PUF_HAS_WAFER, $"{Module}.{Name}", "Side A Has Wafer,Vacuum is Off");                return false;            }            //B面存在Wafer同时B面Vacuum is released            if (WaferManager.Instance.CheckHasWafer(Module, 1) && _pufVacuum.ISChuckBReleased)            {                LOG.WriteLog(eEvent.ERROR_PUF_HAS_WAFER, $"{Module}.{Name}", "Side B Has Wafer,Vacuum is Off");                return false;            }            if (chuckAWaferPresent || chuckBWaferPresent)//Wafer Present,            {                if (verticalAxis.CheckPositionIsEmpty(verticalPosition))                {                    LOG.WriteLog(eEvent.ERROR_PUF_OTHER_AXIS_EMPTY, $"{Module}.{Name}", $"vertical axis {verticalPosition} is empty, Cannot execute GotoSavedPosition");                    return false;                }                else if (rotationAxis.CheckPositionIsEmpty(rotationPosition))                {                    LOG.WriteLog(eEvent.ERROR_PUF_OTHER_AXIS_EMPTY, $"{Module}.{Name}", $"rotation axis {rotationPosition} is empty, Cannot execute GotoSavedPosition");                    return false;                }                else if (rotationAxis.CheckPositionIsInStation(rotationPosition, "Flip") &&                     verticalAxis.CheckPositionIsInStation(verticalPosition, "Flip"))//rotation轴和vertical轴同时在Flip,可以使用GotoSavedPosition                {                    return true;                }                else                {                    LOG.WriteLog(eEvent.ERROR_PUF_OTHER_AXIS_STATION, $"{Module}.{Name}", $"rotation station {rotationPosition} and vertical station {verticalPosition} not both in Flip Station,Cannot execute GotoSavedPosition");                    return false;                }            }            else//Wafer Absent            {                if (verticalAxis.CheckPositionIsEmpty(verticalPosition))                {                    LOG.WriteLog(eEvent.ERROR_PUF_OTHER_AXIS_EMPTY, $"{Module}.{Name}", $"vertical {verticalPosition} is empty, Cannot execute GotoSavedPosition");                    return false;                }                else if (verticalAxis.CheckPositionIsInStation(verticalPosition, "Park") ||                    verticalAxis.CheckPositionIsInStation(verticalPosition, "Flip")) //vertical轴在Flip或Park,可以使用GotoSavedPosition                {                    return true;                }                else                {                    LOG.WriteLog(eEvent.ERROR_PUF_OTHER_AXIS_STATION, $"{Module}.{Name}", $"wafer absent,vertical station {verticalPosition} not in Park or Flip, Cannot execute GotoSavedPosition");                    return false;                }            }        }    }}
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