SunWayEfemSimulator.cs 19 KB

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  1. using System;
  2. using System.Text.RegularExpressions;
  3. using System.Threading;
  4. using System.Threading.Tasks;
  5. using Aitex.Core.UI.Control;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using Aitex.Core.Util;
  8. using CyberX8_Core;
  9. using Aitex.Core.RT.DataCenter;
  10. using System.Linq;
  11. using MECF.Framework.Common.DataCenter;
  12. using Aitex.Core.RT.ConfigCenter;
  13. using CyberX8_Simulator.Instances;
  14. using System.Collections.Generic;
  15. namespace CyberX8_Simulator.Devices
  16. {
  17. public class SunWayEfemSimulator : SocketDeviceSimulator
  18. {
  19. private const string SCMD = @"(?<=\:)(.*?)(?=\/)";
  20. private const string SFOUP = @"(?<=P)(\d{1})(?=[\;\/])";
  21. private const string ACK = "ACK";
  22. private readonly char[] delimiters = { ':', '/', '>', '|', ';' };
  23. private string[] _slotMap = new string[25];
  24. private string[] _slotDummy = new string[25];
  25. private PeriodicJob _HwThread;
  26. private bool _bCommReady;
  27. private bool _isDoorOpen;
  28. private bool _isLp1Placed;
  29. private bool _isLp2Placed;
  30. private bool _isLp3Placed;
  31. private bool _isLp1Clamped;
  32. private bool _isLp2Clamped;
  33. private bool _isLp3Clamped;
  34. private bool _isLP1Docked;
  35. private bool _isLP2Docked;
  36. private bool _isLP3Docked;
  37. public int WaferSize = 200;
  38. private int _speed = 20;
  39. private string _carrier1ID = "12345678";
  40. private string _carrier2ID = "12345678";
  41. private string _carrier3ID = "12345678";
  42. private List<int> _lpStationNumber;
  43. private List<int> _dummyStationNumber;
  44. public string SlotMap
  45. {
  46. get { return string.Join("", _slotMap); }
  47. }
  48. public bool _isVacuumError { get; set; }
  49. public bool _isAirError { get; set; }
  50. public bool _isFlowError { get; set; }
  51. public bool _isLeak { get; set; }
  52. public bool _isMaintain { get; set; }
  53. public bool _isWaferPresent { get; set; }
  54. public bool _isMaintainDoorOpen { get; private set; }
  55. public bool _isProtrude1 { get; set; }
  56. public bool _isProtrude2 { get; set; }
  57. public bool _isVAC { get; set; }
  58. public bool _isAIR { get; set; }
  59. private bool _isDoorOpen1;
  60. public bool IsDoorOpen1 { get { return _isDoorOpen1; } set { _isDoorOpen1 = value; SendLP1Data(); } }
  61. private bool _isDoorOpen2;
  62. public bool IsDoorOpen2 { get { return _isDoorOpen2; } set { _isDoorOpen2 = value;SendLP2Data(); } }
  63. private bool _isDoorOpen3;
  64. public bool IsDoorOpen3
  65. {
  66. get { return _isDoorOpen3; }
  67. set { _isDoorOpen3 = value; SendLP3Data(); }
  68. }
  69. public SunWayEfemSimulator() : base(13001, -1, "\r", ' ')
  70. {
  71. for (int i = 0; i < _slotMap.Length; i++)
  72. _slotMap[i] = "0";
  73. for(int i=0; i < _slotDummy.Length; i++)
  74. {
  75. _slotDummy[i]="0";
  76. }
  77. _HwThread = new PeriodicJob(5000, OnSendEvent, "EfemHardware", true);
  78. GetStationNumber();
  79. }
  80. private bool OnSendEvent()
  81. {
  82. if (IsConnected)
  83. {
  84. }
  85. return true;
  86. }
  87. private void GetStationNumber()
  88. {
  89. _lpStationNumber = new List<int>();
  90. _lpStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.LP1.Cassete200Station"));
  91. _lpStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.LP1.Cassete150Station"));
  92. _lpStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.LP1.Cassete100Station"));
  93. _lpStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.LP2.Cassete200Station"));
  94. _lpStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.LP2.Cassete150Station"));
  95. _lpStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.LP2.Cassete100Station"));
  96. _lpStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.LP3.Cassete200Station"));
  97. _lpStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.LP3.Cassete150Station"));
  98. _lpStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.LP3.Cassete100Station"));
  99. _dummyStationNumber = new List<int>();
  100. _dummyStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.Dummy1.Cassete200Station"));
  101. _dummyStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.Dummy1.Cassete150Station"));
  102. _dummyStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.Dummy1.Cassete100Station"));
  103. _dummyStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.Dummy2.Cassete200Station"));
  104. _dummyStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.Dummy2.Cassete150Station"));
  105. _dummyStationNumber.Add(SystemConfig.Instance.GetValue<int>("EFEM.Dummy2.Cassete100Station"));
  106. }
  107. protected override void ProcessUnsplitMessage(string str)
  108. {
  109. //OnWriteMessage(ack);
  110. // 处理INF
  111. OnWork(str);
  112. }
  113. internal void SetCassetteDoor(bool doorOpen)
  114. {
  115. _isMaintainDoorOpen = doorOpen;
  116. uint data = doorOpen ? (uint)0b0111111111000001110 : (uint)0b0111111111000001111;
  117. string msg = $"EVT:SIGSTAT/System/{data:X8}/00000000;";
  118. OnWriteMessage(msg);
  119. }
  120. internal void SetMaintain(bool maintain)
  121. {
  122. _isMaintain = maintain;
  123. uint data = maintain ? (uint)0b0111111111000011111 : (uint)0b0111111111000001111;
  124. string msg = $"EVT:SIGSTAT/System/{data:X8}/00000000;";
  125. OnWriteMessage(msg);
  126. }
  127. internal void SetProtrude1(bool protrude)
  128. {
  129. _isProtrude1 = protrude;
  130. uint data = protrude? (uint)0b0111111111000101111: (uint)0b0111111111000001111;
  131. string msg = $"EVT:SIGSTAT/System/{data:X8}/00000000;";
  132. OnWriteMessage(msg);
  133. }
  134. internal void SetProtrude2(bool protrude)
  135. {
  136. _isProtrude2 = protrude;
  137. uint data = protrude ? (uint)0b0111111111001001111 : (uint)0b0111111111000001111;
  138. string msg = $"EVT:SIGSTAT/System/{data:X8}/00000000;";
  139. OnWriteMessage(msg);
  140. }
  141. internal void SetVAC(bool VAC)
  142. {
  143. _isVAC = VAC;
  144. uint data = VAC ? (uint)0b0111111111000001101 : (uint)0b0111111111000001111;
  145. string msg = $"EVT:SIGSTAT/System/{data:X8}/00000000;";
  146. OnWriteMessage(msg);
  147. }
  148. internal void SetAIR(bool AIR)
  149. {
  150. _isAIR = AIR;
  151. uint data = AIR ? (uint)0b0111111111000001011 : (uint)0b0111111111000001111;
  152. string msg = $"EVT:SIGSTAT/System/{data:X8}/00000000;";
  153. OnWriteMessage(msg);
  154. }
  155. private void OnWork(string str)
  156. {
  157. string ack = "";
  158. if (str.StartsWith("RQ LOAD")) //查询手指是否带片
  159. {
  160. ack = "LOAD A OFF\n_RDY";
  161. }
  162. else if (str.StartsWith("RSR")) //返回扫片结果
  163. {
  164. string[] strings = str.Split(' ').ToArray();
  165. int stationNumber = int.Parse(strings[1]);
  166. if (_lpStationNumber.Contains(stationNumber)) //LP
  167. {
  168. string lpwafer = "";
  169. foreach (var item in _slotMap)
  170. {
  171. lpwafer += $" {item}";
  172. }
  173. ack = "MAP" + lpwafer;
  174. }
  175. else if (_dummyStationNumber.Contains(stationNumber)) //dummy
  176. {
  177. string dummywafer = "";
  178. foreach (var item in _slotDummy)
  179. {
  180. dummywafer += $" {item}";
  181. }
  182. ack = "MAP" + dummywafer;
  183. }
  184. }
  185. else //默认回复
  186. {
  187. if (str.StartsWith("PICK") || str.StartsWith("PLACE") || str.StartsWith("MAP") || str.StartsWith("ALIGNER ALGN") || str.StartsWith("ALIGNER HOME"))
  188. {
  189. Thread.Sleep((ushort)2200);
  190. }
  191. ack = "_RDY";
  192. }
  193. OnWriteMessage(ack);
  194. //// match basic
  195. //Match m1 = Regex.Match(strACK, SCMD);
  196. //// get mock delay time
  197. //string sBasic = m1.Groups[1].Value;
  198. //if (string.IsNullOrEmpty(sBasic))
  199. // return;
  200. //EfemOperation op = EfemConstant.ToOperation(sBasic);
  201. //ushort millionSec = this.SimuOperationTime(op);
  202. //// delay
  203. ////await Task.Delay(millionSec);
  204. //Thread.Sleep(millionSec);
  205. //// build the INF string
  206. //string strINF = string.Empty;
  207. //switch (EfemConstant.ToOperation(strACK))
  208. //{
  209. // case EfemOperation.GetWaferInfo:
  210. // strINF = strACK.Replace(ACK, "INF");
  211. // strINF = strINF.TrimEnd(';');
  212. // string map1 = string.Join("", _slotMap);
  213. // strINF += $"/{map1};";
  214. // break;
  215. // case EfemOperation.Home:
  216. // int data1 = 0b011111111010100000;
  217. // string s1 = $"EVT:SIGSTAT/LP1/00000000/00000003;\rEVT:SIGSTAT/LP2/0000000/00000003;\rEVT:SIGSTAT/LP3/000000/00000003;\rEVT:SIGSTAT/System/{data1}/00000;\r";
  218. // strINF = s1 + strACK.Replace(ACK, "INF");
  219. // SendSystemData();
  220. // SendLP1Data();
  221. // SendLP2Data();
  222. // SendLP3Data();
  223. // SendAlignData();
  224. // OnWriteMessage(strACK.Replace(ACK, "INF"));
  225. // return;
  226. // case EfemOperation.Map:
  227. // if(strACK.Contains("BF"))
  228. // {
  229. // string map = string.Join("", _slotDummy);
  230. // string strEVT = strACK.Replace(ACK,"EVT");
  231. // strEVT = strEVT.Replace("WAFSH","MAPDT");
  232. // strEVT = strEVT.TrimEnd(';');
  233. // string str = $"{strEVT}/{map};";
  234. // OnWriteMessage(str);
  235. // }
  236. // else if (strACK.Contains("LP"))
  237. // {
  238. // string map = string.Join("", _slotMap);
  239. // string strEVT = strACK.Replace(ACK, "EVT");
  240. // strEVT = strEVT.Replace("WAFSH", "MAPDT");
  241. // strEVT = strEVT.TrimEnd(';');
  242. // string str = $"{strEVT}/{map};";
  243. // OnWriteMessage(str);
  244. // }
  245. // strINF = strACK.Replace(ACK, "INF");
  246. // break;
  247. // case EfemOperation.Load:
  248. // strINF = strACK.Replace(ACK, "INF");
  249. // break;
  250. // case EfemOperation.StateTrack:
  251. // strINF = "INF:STATE/TRACK/NONE/NONE;";
  252. // break;
  253. // case EfemOperation.CarrierId:
  254. // break;
  255. // case EfemOperation.Size:
  256. // break;
  257. // case EfemOperation.Dock:
  258. // Match mDock = Regex.Match(strACK, SFOUP);
  259. // if (mDock.Success)
  260. // {
  261. // UpdateLocked(mDock.Groups[1].Value, true);
  262. // }
  263. // strINF = strACK.Replace(ACK, "INF");
  264. // break;
  265. // case EfemOperation.Undock:
  266. // Match mUnDock = Regex.Match(strACK, SFOUP);
  267. // if (mUnDock.Success)
  268. // {
  269. // UpdateLocked(mUnDock.Groups[1].Value, false);
  270. // }
  271. // strINF = strACK.Replace(ACK, "INF");
  272. // break;
  273. // case EfemOperation.Clamp:
  274. // Match mClamp= Regex.Match(strACK, SFOUP);
  275. // if (mClamp.Success)
  276. // {
  277. // UpdateClamped(mClamp.Groups[1].Value, true);
  278. // }
  279. // strINF = strACK.Replace(ACK, "INF");
  280. // break;
  281. // case EfemOperation.Unclamp:
  282. // Match mUnClamp = Regex.Match(strACK, SFOUP);
  283. // if (mUnClamp.Success)
  284. // {
  285. // UpdateClamped(mUnClamp.Groups[1].Value, false);
  286. // }
  287. // strINF = strACK.Replace(ACK, "INF");
  288. // break;
  289. // case EfemOperation.Speed:
  290. // break;
  291. // case EfemOperation.Align:
  292. // case EfemOperation.Pick:
  293. // case EfemOperation.Place:
  294. // case EfemOperation.Orgsh:
  295. // case EfemOperation.Light:
  296. // case EfemOperation.SigStatus:
  297. // default:
  298. // strINF = strACK.Replace(ACK, "INF");
  299. // break;
  300. //}
  301. //OnWriteMessage(strINF);
  302. }
  303. private void UpdateLocked(string lpNumber,bool locked)
  304. {
  305. if (lpNumber== "1")
  306. {
  307. _isLP1Docked = locked;
  308. SendLP1Data();
  309. }
  310. else if (lpNumber == "2")
  311. {
  312. _isLP2Docked = locked;
  313. SendLP2Data();
  314. }
  315. else if (lpNumber == "3")
  316. {
  317. _isLP3Docked = locked;
  318. SendLP3Data();
  319. }
  320. }
  321. private void UpdateClamped(string lpNumber, bool clamped)
  322. {
  323. if (lpNumber == "1")
  324. {
  325. _isLp1Clamped = clamped;
  326. SendLP1Data();
  327. }
  328. else if (lpNumber == "2")
  329. {
  330. _isLp2Clamped = clamped;
  331. SendLP2Data();
  332. }
  333. else if (lpNumber == "3")
  334. {
  335. _isLp3Clamped = clamped;
  336. SendLP3Data();
  337. }
  338. }
  339. private void SendLP1Data()
  340. {
  341. uint data = GetLP1Data1();
  342. string msg = $"EVT:SIGSTAT/LP1/{data:X8}/0000;";
  343. OnWriteMessage(msg);
  344. }
  345. private void SendLP2Data()
  346. {
  347. uint data = GetLP2Data1();
  348. string msg = $"EVT:SIGSTAT/LP2/{data:X8}/0000;";
  349. OnWriteMessage(msg);
  350. }
  351. private void SendLP3Data()
  352. {
  353. uint data = GetLP3Data1();
  354. string msg = $"EVT:SIGSTAT/LP3/{data:X8}/0000;";
  355. OnWriteMessage(msg);
  356. }
  357. private void SendAlignData()
  358. {
  359. string msg = $"EVT:ALIGN/ALN1/0;";
  360. OnWriteMessage(msg);
  361. }
  362. private void SendDummyMapData(string dummy)
  363. {
  364. string s2 = $"EVT:MAPDT/{dummy}/{_slotDummy};\r";
  365. OnWriteMessage(s2);
  366. }
  367. private void SendSystemData()
  368. {
  369. uint data = 0b0111111111000001111;
  370. string msg = $"EVT:SIGSTAT/System/{data:X8}/00000000;";
  371. OnWriteMessage(msg);
  372. }
  373. private ushort SimuOperationTime(EfemOperation op)
  374. {
  375. ushort sec = 0;
  376. switch (op)
  377. {
  378. case EfemOperation.Map:
  379. case EfemOperation.GetWaferInfo:
  380. case EfemOperation.Align:
  381. sec = 2200;
  382. break;
  383. case EfemOperation.Pick:
  384. case EfemOperation.Place:
  385. case EfemOperation.Orgsh:
  386. sec = 2200;
  387. break;
  388. case EfemOperation.Light:
  389. case EfemOperation.SigStatus:
  390. sec = 0;
  391. break;
  392. default:
  393. sec = 100;
  394. break;
  395. }
  396. return sec;
  397. }
  398. public void PlaceCarrier1()
  399. {
  400. _isLp1Placed = true;
  401. SendLP1Data();
  402. }
  403. public void RemoveCarrier1()
  404. {
  405. _isLp1Placed = false;
  406. SendLP1Data();
  407. }
  408. public void PlaceCarrier2()
  409. {
  410. _isLp2Placed = true;
  411. SendLP2Data();
  412. }
  413. public void RemoveCarrier2()
  414. {
  415. _isLp2Placed = false;
  416. SendLP2Data();
  417. }
  418. public void PlaceCarrier3()
  419. {
  420. _isLp3Placed = true;
  421. SendLP3Data();
  422. }
  423. public void RemoveCarrier3()
  424. {
  425. _isLp3Placed = false;
  426. SendLP3Data();
  427. }
  428. public void ClearWafer()
  429. {
  430. for (int i = 0; i < _slotMap.Length; i++)
  431. {
  432. _slotMap[i] = "0";
  433. }
  434. for (int i = 0; i < _slotDummy.Length; i++)
  435. {
  436. _slotDummy[i] = "0";
  437. }
  438. }
  439. public void SetAllWafer()
  440. {
  441. for (int i = 0; i < _slotMap.Length; i++)
  442. {
  443. _slotMap[i] = "1";
  444. }
  445. }
  446. public void RandomWafer()
  447. {
  448. Random _rd = new Random();
  449. for (int i = 0; i < _slotMap.Length; i++)
  450. {
  451. //_slotMap[i] = (i % 9).ToString();
  452. _slotMap[i]= _rd.Next(0, 10) < 6 ? "0" : "1";
  453. }
  454. }
  455. public void RandomDummyWafer()
  456. {
  457. Random _rdDummy = new Random();
  458. for (int i = 0; i < _slotDummy.Length; i++)
  459. {
  460. _slotDummy[i] = _rdDummy.Next(0, 10) < 6 ? "0" : "1";
  461. }
  462. }
  463. private uint GetLP1Data1()
  464. {
  465. uint data1 = 0x0u;
  466. data1 |= (_isLp1Placed ? 0x00000001u : 0x0);
  467. data1 |= (_isLp1Clamped ? 0x00000002u : 0x0);
  468. data1 |= (_isLP1Docked ? 0x00000004u : 0x0);
  469. data1 |= (_isDoorOpen1 ? 0x00000020u : 0x0);
  470. return data1;
  471. }
  472. private uint GetLP2Data1()
  473. {
  474. uint data1 = 0x0u;
  475. data1 |= (_isLp2Placed ? 0x00000001u : 0x0);
  476. data1 |= (_isLp2Clamped ? 0x00000002u : 0x0);
  477. data1 |= (_isLP2Docked ? 0x00000004u : 0x0);
  478. data1 |= (_isDoorOpen2 ? 0x00000020u : 0x0);
  479. return data1;
  480. }
  481. private uint GetLP3Data1()
  482. {
  483. uint data1 = 0x0u;
  484. data1 |= (_isLp3Placed ? 0x00000001u : 0x0);
  485. data1 |= (_isLp3Clamped ? 0x00000002u : 0x0);
  486. data1 |= (_isLP3Docked ? 0x00000004u : 0x0);
  487. data1 |= (_isDoorOpen3 ? 0x00000020u : 0x0);
  488. return data1;
  489. }
  490. }
  491. }