SchedulerSequenceManager.cs 62 KB

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  1. using MECF.Framework.Common.RecipeCenter;
  2. using System;
  3. using System.Collections.Generic;
  4. using System.Linq;
  5. using System.Text;
  6. using System.Threading.Tasks;
  7. using MECF.Framework.Common.Equipment;
  8. using MECF.Framework.Common.Schedulers;
  9. using Aitex.Core.Common;
  10. using MECF.Framework.Common.WaferHolder;
  11. using MECF.Framework.Common.CommonData;
  12. using System.Windows;
  13. using Aitex.Core.RT.IOCore;
  14. using Aitex.Core.RT.Log;
  15. using Aitex.Core.Util;
  16. using MECF.Framework.Common.Routine;
  17. using CyberX8_RT.Modules;
  18. using Aitex.Core.RT.Fsm;
  19. using CyberX8_RT.Modules.PUF;
  20. using CyberX8_RT.Modules.Dummy;
  21. using MECF.Framework.Common.SubstrateTrackings;
  22. using MECF.Framework.Common.ToolLayout;
  23. using CyberX8_RT.Modules.Metal;
  24. using CyberX8_RT.Modules.Rinse;
  25. using MECF.Framework.RT.Core.Equipments;
  26. using MECF.Framework.Common.ProcessCell;
  27. using SecsGem.Core.ItemModel;
  28. using CyberX8_RT.Modules.Transporter;
  29. using CyberX8_Core;
  30. using Aitex.Core.RT.SCCore;
  31. using CyberX8_RT.Modules.Dryer;
  32. using CyberX8_RT.Modules.Prewet;
  33. using CyberX8_RT.Modules.SRD;
  34. using CyberX8_RT.Modules.Reservoir;
  35. using CyberX8_RT.Schedulers.Puf;
  36. using CyberX8_RT.Modules.Loader;
  37. using CyberX8_RT.Schedulers.Transporter;
  38. using CyberX8_RT.Schedulers.Loader;
  39. using CyberX8_RT.Devices.EFEM;
  40. namespace CyberX8_RT.Schedulers
  41. {
  42. public class SchedulerSequenceManager : Singleton<SchedulerSequenceManager>
  43. {
  44. #region 常量
  45. private const string ENGINEERING = "Engineering";
  46. private const string PRODUCTION = "Production";
  47. private const string TRNPA = "TRNPA";
  48. private const string TRNPB = "TRNPB";
  49. #endregion
  50. /// <summary>
  51. /// 解析Wafer所有调度工序
  52. /// </summary>
  53. /// <param name="sequenceRecipe"></param>
  54. /// <returns></returns>
  55. public List<SchedulerSequence> AnalyWaferAllSchedulerSequence(WaferInfo waferInfo,ModuleName pufModule,string side,WaferHolderInfo waferHolderInfo,SequenceRecipe sequenceRecipe)
  56. {
  57. waferInfo.LoaderSide = side;
  58. List<SchedulerSequence> schedulerSequences = new List<SchedulerSequence>();
  59. int index = 0;
  60. MoveItem moveItem = new MoveItem((ModuleName)waferInfo.OriginStation, waferInfo.OriginSlot, ModuleName.Aligner1, 0, Aitex.Sorter.Common.Hand.Blade1);
  61. SchedulerSequence efemRobotSequence = CreateEfemRobotSequence(moveItem,null,sequenceRecipe.SubstrateSize,ref index);
  62. schedulerSequences.Add(efemRobotSequence);
  63. SchedulerSequence alignerSequence=CreateAlignerSequence(sequenceRecipe,ref index);
  64. schedulerSequences.Add(alignerSequence);
  65. //从Aligner至Puf B面
  66. MoveItem moveItem2 = new MoveItem(ModuleName.Aligner1, 0, pufModule, 1, Aitex.Sorter.Common.Hand.Blade1);
  67. SchedulerSequence secondEfemRobotSequence = CreateEfemRobotSequence(moveItem2,null,sequenceRecipe.SubstrateSize, ref index);
  68. schedulerSequences.Add(secondEfemRobotSequence);
  69. SchedulerSequence pufSequence=CreatePufSequence(pufModule,sequenceRecipe,side,true,ref index);
  70. schedulerSequences.Add(pufSequence);
  71. ////Loader
  72. //SchedulerSequence loaderSequence = CreateLoaderSequence(ref index);
  73. //schedulerSequences.Add(loaderSequence);
  74. ////wafer holder装载后的recipe工序
  75. //List<SchedulerSequence> waferHolderAfterLoadedAllSequences = WaferHolderAfterLoadedAllSchedulerSequences(waferHolderInfo, sequenceRecipe, ref index);
  76. //schedulerSequences.AddRange(waferHolderAfterLoadedAllSequences);
  77. ////buffer模块至Loader
  78. //ModuleName bufferModule = ConvertToBufferModule(waferHolderInfo.BufferId);
  79. //WaferHolderMoveItem bufferToLoaderItem = new WaferHolderMoveItem(bufferModule,ModuleType.Buffer , ModuleName.Loader1, ModuleType.Loader);
  80. //SchedulerSequence bufferToLoaderSequence = CreateLoaderTransporterSequence(bufferToLoaderItem, ref index);
  81. //schedulerSequences.Add(bufferToLoaderSequence);
  82. ////Loader
  83. //SchedulerSequence backLoaderSequence = CreateLoaderSequence(ref index);
  84. //schedulerSequences.Add(backLoaderSequence);
  85. //puf模块
  86. SchedulerSequence backPufSequence = CreatePufSequence(pufModule,sequenceRecipe,"",false, ref index);
  87. schedulerSequences.Add(backPufSequence);
  88. //若经过srd
  89. if(SequenceRecipeManager.Instance.IsContainedSrd(sequenceRecipe))
  90. {
  91. SrdRecipe srdRecipe=SequenceRecipeManager.Instance.GetSrdRecipeBySequenceRecipe(sequenceRecipe);
  92. if(srdRecipe!=null)
  93. {
  94. MoveItem pufToSrdItem = new MoveItem();
  95. pufToSrdItem.SourceModule = pufModule;
  96. //A面
  97. pufToSrdItem.SourceSlot = 0;
  98. pufToSrdItem.DestinationType = ModuleType.SRD;
  99. pufToSrdItem.SourceSlot = 0;
  100. pufToSrdItem.DestinationModule = ModuleName.Unknown;
  101. pufToSrdItem.RobotHand = Aitex.Sorter.Common.Hand.Blade1;
  102. SchedulerSequence backEfemRobotSequence = CreateEfemRobotSequence(pufToSrdItem,null,sequenceRecipe.SubstrateSize, ref index);
  103. schedulerSequences.Add(backEfemRobotSequence);
  104. SchedulerSequence srdSequence = CreateSRDSequence(srdRecipe, ref index);
  105. schedulerSequences.Add(srdSequence);
  106. MoveItem srdToLoadPortItem = new MoveItem();
  107. srdToLoadPortItem.SourceModule = ModuleName.Unknown;
  108. srdToLoadPortItem.SourceType = ModuleType.SRD;
  109. srdToLoadPortItem.SourceSlot = 0;
  110. srdToLoadPortItem.DestinationType = ModuleType.LoadPort;
  111. srdToLoadPortItem.DestinationModule = (ModuleName)waferInfo.OriginStation;
  112. srdToLoadPortItem.DestinationSlot = waferInfo.OriginSlot;
  113. srdToLoadPortItem.RobotHand = Aitex.Sorter.Common.Hand.Blade1;
  114. SchedulerSequence srdToLoadPortSequence = CreateEfemRobotSequence(srdToLoadPortItem,null,sequenceRecipe.SubstrateSize, ref index);
  115. schedulerSequences.Add(srdToLoadPortSequence);
  116. }
  117. else
  118. {
  119. LOG.WriteLog(eEvent.ERR_SEQUENCE, "System", $"{sequenceRecipe.Ppid} srd recipe is invalid");
  120. return new List<SchedulerSequence>();
  121. }
  122. }
  123. else
  124. {
  125. MoveItem pufToLoadPortItem=new MoveItem(pufModule,0,(ModuleName)waferInfo.OriginStation,
  126. waferInfo.OriginSlot,Aitex.Sorter.Common.Hand.Blade1);
  127. SchedulerSequence pufToLoaderSequence=CreateEfemRobotSequence(pufToLoadPortItem,null,sequenceRecipe.SubstrateSize, ref index);
  128. schedulerSequences.Add(pufToLoaderSequence);
  129. }
  130. return schedulerSequences;
  131. }
  132. /// <summary>
  133. /// 解析WaferHolder的所有工序
  134. /// </summary>
  135. /// <param name="waferHolderInfo"></param>
  136. /// <param name="sequenceRecipe"></param>
  137. /// <returns></returns>
  138. public List<SchedulerSequence> AnalyWaferHolderAllSchedulerSequence(WaferHolderInfo waferHolderInfo, SequenceRecipe sequenceRecipe,int productWaferCount,int dummyWaferCount)
  139. {
  140. int totalWaferCount = productWaferCount + dummyWaferCount;
  141. int index = 0;
  142. List<SchedulerSequence> schedulerSequences = new List<SchedulerSequence>();
  143. //Buffer To Loader
  144. ModuleName currentLocationModuleName = (ModuleName)Enum.Parse(typeof(ModuleName), waferHolderInfo.CurrentLocation);
  145. TransporterAction transporterAction = GenerateTransporterTransferAction(currentLocationModuleName, ModuleType.Buffer, ModuleName.Loader1, ModuleType.Loader);
  146. string strTRNP = AnalyseLoadTransporterSide(sequenceRecipe, productWaferCount,dummyWaferCount);
  147. List<SchedulerSyncModuleMessage> synModules = GenerateLoaderTransporterSyncModuleMessage(strTRNP);
  148. SchedulerSequence bufferToLoaderSequence = CreateLoaderTransporterSequence(transporterAction,synModules,waferHolderInfo.WaferSize, ref index);
  149. schedulerSequences.Add(bufferToLoaderSequence);
  150. //尺寸不一致
  151. bool needFlip = CheckLoaderWaferSizeNotEqual() && totalWaferCount == 2;
  152. //Loader
  153. LoaderParameter parameter = new LoaderParameter();
  154. parameter.WaferCount= needFlip?1: totalWaferCount;
  155. parameter.LoadCompleteToTransporterSide = strTRNP;
  156. parameter.NeedWaitFlip = needFlip;
  157. SchedulerSequence loaderSequence = CreateLoaderSequence(parameter,sequenceRecipe.SubstrateSize, ref index);
  158. schedulerSequences.Add(loaderSequence);
  159. if (needFlip)
  160. {
  161. string reverse = GetReverseTransporterLocation(strTRNP);
  162. TransporterAction flipAction = GenerateTransporterFlipAction(reverse);
  163. SchedulerSequence flipSequence=CreateLoaderTransporterSequence(flipAction,null,sequenceRecipe.SubstrateSize, ref index);
  164. schedulerSequences.Add(flipSequence);
  165. //Loader
  166. LoaderParameter reverseParameter = new LoaderParameter();
  167. reverseParameter.WaferCount = 1;
  168. reverseParameter.LoadCompleteToTransporterSide = reverse;
  169. reverseParameter.NeedWaitFlip = false;
  170. SchedulerSequence reverseLoadSequence = CreateLoaderSequence(reverseParameter,sequenceRecipe.SubstrateSize, ref index);
  171. schedulerSequences.Add(reverseLoadSequence);
  172. }
  173. //wafer holder装载后的recipe工序
  174. List<SchedulerSequence> waferHolderAfterLoadedAllSequences = WaferHolderAfterLoadedAllSchedulerSequences(waferHolderInfo, sequenceRecipe,ref index);
  175. schedulerSequences.AddRange(waferHolderAfterLoadedAllSequences);
  176. return schedulerSequences;
  177. }
  178. /// <summary>
  179. /// 解析LoaderTransporter放至Loader第一次确定TRNP的方向
  180. /// </summary>
  181. /// <param name="sequenceRecipe"></param>
  182. /// <param name="waferCount"></param>
  183. /// <returns></returns>
  184. private string AnalyseLoadTransporterSide(SequenceRecipe sequenceRecipe,int productWaferCount,int dummyWaferCount)
  185. {
  186. LoaderEntity loaderEntity = Singleton<RouteManager>.Instance.GetModule<LoaderEntity>(ModuleName.Loader1.ToString());
  187. //单片,同时loader两边尺寸不一致
  188. if ((productWaferCount == 1||dummyWaferCount==1) && loaderEntity.SideAWaferSize != loaderEntity.SideBWaferSize)
  189. {
  190. //recipe使用B面工艺,但loader A面与recipe尺寸一致
  191. if (sequenceRecipe.LastSingleWaferToSideB && sequenceRecipe.SubstrateSize == loaderEntity.SideAWaferSize)
  192. {
  193. return "TRNPB";
  194. }
  195. //recipe使用A面工艺,但loader B面与recipe尺寸一致
  196. else if (!sequenceRecipe.LastSingleWaferToSideB && sequenceRecipe.SubstrateSize == loaderEntity.SideBWaferSize)
  197. {
  198. return "TRNPB";
  199. }
  200. }
  201. return "TRNPA";
  202. }
  203. private string GetReverseTransporterLocation(string strTrn)
  204. {
  205. return strTrn == TRNPA ? TRNPB : TRNPA;
  206. }
  207. /// <summary>
  208. /// 创建Transporter transfer指令
  209. /// </summary>
  210. /// <param name="source"></param>
  211. /// <param name="sourceType"></param>
  212. /// <param name="dest"></param>
  213. /// <param name="destType"></param>
  214. /// <returns></returns>
  215. private TransporterAction GenerateTransporterTransferAction(ModuleName source,ModuleType sourceType,ModuleName dest,ModuleType destType)
  216. {
  217. TransporterAction transporterAction = new TransporterAction();
  218. transporterAction.ActionMsg = TransporterMSG.Transfer;
  219. WaferHolderMoveItem waferHolderMoveItem = new WaferHolderMoveItem(source, sourceType, dest, destType);
  220. transporterAction.Parameter = waferHolderMoveItem;
  221. return transporterAction;
  222. }
  223. /// <summary>
  224. /// 创建Transporter pickup指令
  225. /// </summary>
  226. /// <param name="source"></param>
  227. /// <param name="sourceType"></param>
  228. /// <param name="dest"></param>
  229. /// <param name="destType"></param>
  230. /// <returns></returns>
  231. private TransporterAction GenerateTransporterFlipAction(string strTransporter)
  232. {
  233. TransporterAction transporterAction = new TransporterAction();
  234. transporterAction.ActionMsg = TransporterMSG.Flip;
  235. transporterAction.Parameter = strTransporter;
  236. return transporterAction;
  237. }
  238. /// <summary>
  239. /// 检验Loader两边waferSize不一致
  240. /// </summary>
  241. /// <returns></returns>
  242. private bool CheckLoaderWaferSizeNotEqual()
  243. {
  244. LoaderEntity loaderEntity = Singleton<RouteManager>.Instance.GetModule<LoaderEntity>(ModuleName.Loader1.ToString());
  245. return loaderEntity.SideAWaferSize != loaderEntity.SideBWaferSize;
  246. }
  247. /// <summary>
  248. /// 创建LoaderTrasporter同步模块消息
  249. /// </summary>
  250. /// <param name="tranporter"></param>
  251. /// <returns></returns>
  252. private List<SchedulerSyncModuleMessage> GenerateLoaderTransporterSyncModuleMessage(string tranporter)
  253. {
  254. List<SchedulerSyncModuleMessage> synModules = new List<SchedulerSyncModuleMessage>();
  255. SchedulerSyncModuleMessage syncModuleMessage = new SchedulerSyncModuleMessage();
  256. syncModuleMessage.ModuleEntity = Singleton<RouteManager>.Instance.GetModule<IModuleEntity>(ModuleName.Loader1.ToString());
  257. syncModuleMessage.ModuleMsg = LoaderMSG.PrepareForPlace.ToString();
  258. syncModuleMessage.parameters = new object[] { tranporter };
  259. synModules.Add(syncModuleMessage);
  260. return synModules;
  261. }
  262. /// <summary>
  263. /// Dummy Wafer对应WaferHolder任务
  264. /// </summary>
  265. /// <param name="waferHolderInfo"></param>
  266. /// <returns></returns>
  267. public List<SchedulerSequence> AnalyseDummyWaferHolderAllSchedulerSequence(WaferHolderInfo waferHolderInfo,int productWaferCount,int dummyWaferCount)
  268. {
  269. int index = 0;
  270. List<SchedulerSequence> schedulerSequences = new List<SchedulerSequence>();
  271. string strTRNP = AnalyseLoadTransporterSide(waferHolderInfo.SequenceRecipe, productWaferCount,dummyWaferCount);
  272. //Buffer To Loader
  273. ModuleName currentLocationModuleName = (ModuleName)Enum.Parse(typeof(ModuleName), waferHolderInfo.CurrentLocation);
  274. ModuleName bufferModule = (ModuleName)Enum.Parse(typeof(ModuleName), waferHolderInfo.OriginalBuffer);
  275. List<SchedulerSyncModuleMessage> synModules = GenerateLoaderTransporterSyncModuleMessage(strTRNP);
  276. TransporterAction transporterAction = GenerateTransporterTransferAction(currentLocationModuleName, ModuleType.Buffer, ModuleName.Loader1, ModuleType.Loader);
  277. SchedulerSequence bufferToLoaderSequence = CreateLoaderTransporterSequence(transporterAction,synModules,waferHolderInfo.WaferSize, ref index);
  278. schedulerSequences.Add(bufferToLoaderSequence);
  279. //尺寸不一致
  280. bool needFlip = CheckLoaderWaferSizeNotEqual() && dummyWaferCount == 2;
  281. //Loader
  282. LoaderParameter parameter = new LoaderParameter();
  283. parameter.WaferCount = needFlip ? 1 : dummyWaferCount; ;
  284. parameter.LoadCompleteToTransporterSide = strTRNP;
  285. parameter.NeedWaitFlip = needFlip;
  286. SchedulerSequence loaderSequence = CreateLoaderSequence(parameter,waferHolderInfo.WaferSize,ref index);
  287. schedulerSequences.Add(loaderSequence);
  288. if (needFlip)
  289. {
  290. string reverse = GetReverseTransporterLocation(strTRNP);
  291. TransporterAction flipAction = GenerateTransporterFlipAction(reverse);
  292. SchedulerSequence flipSequence = CreateLoaderTransporterSequence(flipAction, null,waferHolderInfo.WaferSize, ref index);
  293. schedulerSequences.Add(flipSequence);
  294. //Loader
  295. LoaderParameter reverseParameter = new LoaderParameter();
  296. reverseParameter.WaferCount = 1;
  297. reverseParameter.LoadCompleteToTransporterSide = reverse;
  298. reverseParameter.NeedWaitFlip = false;
  299. SchedulerSequence reverseLoadSequence = CreateLoaderSequence(reverseParameter,waferHolderInfo.WaferSize, ref index);
  300. schedulerSequences.Add(reverseLoadSequence);
  301. }
  302. //Loader To Buffer
  303. TransporterAction loaderMoveToBufferAction=GenerateTransporterTransferAction (ModuleName.Loader1, ModuleType.Loader,
  304. bufferModule, ModuleType.Buffer);
  305. SchedulerSequence loaderToBufferSequence = CreateLoaderTransporterSequence(loaderMoveToBufferAction,null,waferHolderInfo.WaferSize, ref index);
  306. schedulerSequences.Add(loaderToBufferSequence);
  307. return schedulerSequences;
  308. }
  309. /// <summary>
  310. /// 解析Dummy Wafer所有调度工序
  311. /// </summary>
  312. /// <param name="sequenceRecipe"></param>
  313. /// <returns></returns>
  314. public List<SchedulerSequence> AnalyDummyWaferAllSchedulerSequence(SequenceRecipe sequenceRecipe,WaferInfo waferInfo, ModuleName pufModule,string side)
  315. {
  316. waferInfo.LoaderSide = side;
  317. List<SchedulerSequence> schedulerSequences = new List<SchedulerSequence>();
  318. int index = 0;
  319. //DummyCassete至Aligner
  320. MoveItem moveItem = new MoveItem((ModuleName)waferInfo.Station, waferInfo.Slot, ModuleName.Aligner1, 0, Aitex.Sorter.Common.Hand.Blade1);
  321. SchedulerSequence secondEfemRobotSequence = CreateEfemRobotSequence(moveItem, null,sequenceRecipe.SubstrateSize, ref index);
  322. schedulerSequences.Add(secondEfemRobotSequence);
  323. //Aligner
  324. SchedulerSequence alignerSequence = alignerSequence=CreateAlignerSequence(sequenceRecipe, ref index);
  325. schedulerSequences.Add(alignerSequence);
  326. //Aligner至Puf
  327. MoveItem alignerToPufMoveItem = new MoveItem(ModuleName.Aligner1, 0, pufModule, 1, Aitex.Sorter.Common.Hand.Blade1);
  328. SchedulerSequence alignerToPufEfemRobotSequence = CreateEfemRobotSequence(alignerToPufMoveItem, null,sequenceRecipe.SubstrateSize, ref index);
  329. schedulerSequences.Add(alignerToPufEfemRobotSequence);
  330. SchedulerSequence pufSequence = CreatePufSequence(pufModule,sequenceRecipe, side,true, ref index);
  331. schedulerSequences.Add(pufSequence);
  332. return schedulerSequences;
  333. }
  334. /// <summary>
  335. /// Loader装载后Recipe工序
  336. /// </summary>
  337. /// <param name="waferHolderInfo"></param>
  338. /// <param name="sequenceRecipe"></param>
  339. /// <param name="index"></param>
  340. /// <returns></returns>
  341. private List<SchedulerSequence> WaferHolderAfterLoadedAllSchedulerSequences(WaferHolderInfo waferHolderInfo,SequenceRecipe sequenceRecipe,ref int index)
  342. {
  343. List<SchedulerSequence> schedulerSequences = new List<SchedulerSequence>();
  344. if(!Enum.TryParse(waferHolderInfo.OriginalBuffer,out ModuleName moduleName))
  345. {
  346. return schedulerSequences;
  347. }
  348. //Loader To Buffer
  349. TransporterAction loaderMoveToBufferAction = GenerateTransporterTransferAction(ModuleName.Loader1, ModuleType.Loader,
  350. moduleName, ModuleType.Buffer);
  351. SchedulerSequence loaderToBufferSequence = CreateLoaderTransporterSequence(loaderMoveToBufferAction,null,sequenceRecipe.SubstrateSize, ref index);
  352. schedulerSequences.Add(loaderToBufferSequence);
  353. //解析sequence recipe后续的工序
  354. var sequences = AnalyseSequenceRecipeScheduler(sequenceRecipe);
  355. SchedulerSequence firstSequence = sequences[0];
  356. //buffer to recipe第一个工序
  357. TransporterAction bufferToFirstAction = GenerateTransporterTransferAction(moduleName, ModuleType.Buffer, firstSequence.ModuleName, firstSequence.ModuleType);
  358. SchedulerSequence bufferSequence = CreateLoaderTransporterSequence(bufferToFirstAction,null,sequenceRecipe.SubstrateSize, ref index);
  359. schedulerSequences.Add(bufferSequence);
  360. //调整工序后面的索引
  361. foreach (SchedulerSequence item in sequences)
  362. {
  363. item.SequenceIndex = index;
  364. index++;
  365. }
  366. schedulerSequences.AddRange(sequences);
  367. //从recipe最后工序
  368. SchedulerSequence lastSequence = sequences[sequences.Count - 1];
  369. TransporterAction lastToBufferAction = GenerateTransporterTransferAction(lastSequence.ModuleName, lastSequence.ModuleType, moduleName, ModuleType.Buffer);
  370. SchedulerSequence lastToBufferSequence = CreateLoaderTransporterSequence(lastToBufferAction,null,sequenceRecipe.SubstrateSize, ref index);
  371. schedulerSequences.Add(lastToBufferSequence);
  372. return schedulerSequences;
  373. }
  374. /// <summary>
  375. /// 分析Sequence recipe对应的调度步骤
  376. /// </summary>
  377. /// <param name="sequenceRecipe"></param>
  378. /// <returns></returns>
  379. private List<SchedulerSequence> AnalyseSequenceRecipeScheduler(SequenceRecipe sequenceRecipe)
  380. {
  381. List<SchedulerSequence> schedulerSequences= new List<SchedulerSequence>();
  382. List<SchedulerSequence> tmpLst = new List<SchedulerSequence>();
  383. var processResult = AnalyseLastProcessRecipeIndex(sequenceRecipe.Recipes);
  384. bool isExistSrd = sequenceRecipe.Recipes.FindIndex(O=>O.ToLower().EndsWith("srd.rcp"))!=-1;
  385. int lastIndex = isExistSrd ? sequenceRecipe.Recipes.Count - 2 : sequenceRecipe.Recipes.Count - 1;
  386. for(int i=0;i<sequenceRecipe.Recipes.Count;i++)
  387. {
  388. string item = sequenceRecipe.Recipes[i];
  389. if(item.ToLower().EndsWith("srd.rcp"))//跳过SRD
  390. {
  391. continue;
  392. }
  393. SchedulerSequence schedulerSequence = new SchedulerSequence();
  394. if (i == 0 && item.ToLower().EndsWith("qdr.rcp"))
  395. {
  396. RinseItem rinsePwtItem = RinseItemManager.Instance.GetPrewetRinseItem();
  397. if (rinsePwtItem != null)
  398. {
  399. schedulerSequence.ModuleName = (ModuleName)Enum.Parse(typeof(ModuleName), rinsePwtItem.ModuleName);
  400. schedulerSequence.SchedulerModule = SchedulerManager.Instance.GetScheduler(schedulerSequence.ModuleName);
  401. }
  402. else
  403. {
  404. schedulerSequence.ModuleName = ModuleName.Unknown;
  405. }
  406. }
  407. else
  408. {
  409. schedulerSequence.ModuleName = ModuleName.Unknown;
  410. }
  411. schedulerSequence.ModuleType=SequenceRecipeManager.Instance.GetModuleType(item);
  412. schedulerSequence.SequenceIndex=i;
  413. schedulerSequence.WaferSize = sequenceRecipe.SubstrateSize;
  414. MECF.Framework.Common.RecipeCenter.RecipeType recipeType =SequenceRecipeManager.Instance.GetRecipeType(item);
  415. schedulerSequence.Recipe = SequenceRecipeManager.Instance.LoadSequenceTypeRecipe(sequenceRecipe.SequenceType,item, recipeType);
  416. schedulerSequence.SequenceType = sequenceRecipe.SequenceType;
  417. schedulerSequence.State = RState.Init;
  418. schedulerSequence.MaterialType = MaterialType.WaferHolder;
  419. tmpLst.Add(schedulerSequence);
  420. if (i != lastIndex)
  421. {
  422. string nextModule = sequenceRecipe.Recipes[i + 1];
  423. schedulerSequence.NextModuleType = SequenceRecipeManager.Instance.GetModuleType(nextModule);
  424. MECF.Framework.Common.RecipeCenter.RecipeType nextRecipeType = SequenceRecipeManager.Instance.GetRecipeType(nextModule);
  425. schedulerSequence.NextRecipe = SequenceRecipeManager.Instance.LoadSequenceTypeRecipe(sequenceRecipe.SequenceType, nextModule, nextRecipeType);
  426. }
  427. schedulerSequence.IsProcessSequece = true;
  428. if(i==processResult.lastIndex)
  429. {
  430. schedulerSequence.IsLastProcessSequence = true;
  431. }
  432. }
  433. int index = 0;
  434. for(int i=0;i<tmpLst.Count;i++)
  435. {
  436. tmpLst[i].SequenceIndex = 0;
  437. schedulerSequences.Add(tmpLst[i]);
  438. index++;
  439. if(i<tmpLst.Count-1)
  440. {
  441. TransporterAction transporterAction = new TransporterAction();
  442. transporterAction.ActionMsg = TransporterMSG.Transfer;
  443. WaferHolderMoveItem moveItem = new WaferHolderMoveItem(tmpLst[i].ModuleName, tmpLst[i].ModuleType, tmpLst[i+1].ModuleName, tmpLst[i + 1].ModuleType);
  444. transporterAction.Parameter = moveItem;
  445. SchedulerSequence schedulerSequence=CreateProcessTransporterSequence(transporterAction,sequenceRecipe.SubstrateSize,ref index);
  446. schedulerSequences.Add(schedulerSequence);
  447. }
  448. }
  449. return schedulerSequences;
  450. }
  451. /// <summary>
  452. /// 分析最后加工recipe索引
  453. /// </summary>
  454. /// <param name="recipes"></param>
  455. /// <returns></returns>
  456. private (int lastIndex,List<int> processIndexList) AnalyseLastProcessRecipeIndex(List<string> recipes)
  457. {
  458. int index = 0;
  459. List<int> lst = new List<int>();
  460. for(int i=0;i<recipes.Count; i++)
  461. {
  462. string item=recipes[i];
  463. if(item.ToLower().EndsWith("dep.rcp"))
  464. {
  465. index = i;
  466. if(lst.Contains(i))
  467. {
  468. lst.Add(i);
  469. }
  470. }
  471. }
  472. if(lst.Count==0)
  473. {
  474. lst.Add(0);
  475. }
  476. return (index,lst);
  477. }
  478. /// <summary>
  479. /// 创建EFEM Robot步骤
  480. /// </summary>
  481. /// <param name="index"></param>
  482. /// <returns></returns>
  483. private SchedulerSequence CreateEfemRobotSequence(MoveItem moveItem,List<SchedulerSyncModuleMessage> synModules,int waferSize,ref int index)
  484. {
  485. SchedulerSequence sequence = new SchedulerSequence();
  486. sequence.SchedulerModule = SchedulerManager.Instance.GetScheduler(ModuleName.EfemRobot);
  487. sequence.SequenceIndex= index;
  488. sequence.ModuleName=ModuleName.EfemRobot;
  489. sequence.State = RState.Init;
  490. sequence.Recipe = null;
  491. sequence.ModuleType=ModuleType.EfemRobot;
  492. sequence.Parameters =moveItem;
  493. sequence.MaterialType = MaterialType.Wafer;
  494. sequence.SynchronousModuleMessages = synModules;
  495. sequence.WaferSize = waferSize;
  496. index++;
  497. return sequence;
  498. }
  499. /// <summary>
  500. /// 创建Aligner步骤
  501. /// </summary>
  502. /// <param name="index"></param>
  503. /// <returns></returns>
  504. private SchedulerSequence CreateAlignerSequence(SequenceRecipe recipe,ref int index)
  505. {
  506. SchedulerSequence sequence = new SchedulerSequence();
  507. sequence.SchedulerModule = SchedulerManager.Instance.GetScheduler(ModuleName.Aligner1);
  508. sequence.SequenceIndex = index;
  509. sequence.ModuleName = ModuleName.Aligner1;
  510. sequence.State = RState.Init;
  511. sequence.Recipe = recipe;
  512. sequence.ModuleType = ModuleType.Aligner;
  513. sequence.Parameters = null;
  514. sequence.MaterialType = MaterialType.Wafer;
  515. sequence.WaferSize = sequence.WaferSize;
  516. index++;
  517. return sequence;
  518. }
  519. /// <summary>
  520. /// 创建PUF步骤
  521. /// </summary>
  522. /// <param name="pufModuleName"></param>
  523. /// <param name="index"></param>
  524. /// <returns></returns>
  525. private SchedulerSequence CreatePufSequence(ModuleName pufModuleName,SequenceRecipe sequenceRecipe,string side,bool forward,ref int index)
  526. {
  527. SchedulerSequence sequence = new SchedulerSequence();
  528. sequence.SchedulerModule = SchedulerManager.Instance.GetScheduler(pufModuleName);
  529. sequence.SequenceIndex = index;
  530. sequence.ModuleName = pufModuleName;
  531. sequence.State = RState.Init;
  532. sequence.Recipe = sequenceRecipe;
  533. PufSchedulerParameter parameter = new PufSchedulerParameter()
  534. {
  535. IsForward = forward,
  536. Side = side,
  537. };
  538. sequence.Parameters = parameter;
  539. sequence.IsWaitNotify = !forward;
  540. sequence.ModuleType = ModuleType.PUF;
  541. sequence.MaterialType = MaterialType.Wafer;
  542. sequence.WaferSize = sequenceRecipe.SubstrateSize;
  543. index++;
  544. return sequence;
  545. }
  546. /// <summary>
  547. /// 创建Loader步骤
  548. /// </summary>
  549. /// <param name="index"></param>
  550. /// <returns></returns>
  551. private SchedulerSequence CreateLoaderSequence(LoaderParameter parameter,int waferSize,ref int index)
  552. {
  553. SchedulerSequence sequence = new SchedulerSequence();
  554. sequence.SchedulerModule = SchedulerManager.Instance.GetScheduler(ModuleName.Loader1);
  555. sequence.SequenceIndex = index;
  556. sequence.ModuleName = ModuleName.Loader1;
  557. sequence.State = RState.Init;
  558. sequence.Recipe = null;
  559. sequence.Parameters = parameter;
  560. sequence.ModuleType = ModuleType.Loader;
  561. sequence.MaterialType = MaterialType.WaferHolder;
  562. sequence.WaferSize = waferSize;
  563. index++;
  564. return sequence;
  565. }
  566. /// <summary>
  567. /// 创建Loader步骤
  568. /// </summary>
  569. /// <param name="index"></param>
  570. /// <returns></returns>
  571. private SchedulerSequence CreateSRDSequence(SrdRecipe recipe,ref int index)
  572. {
  573. SchedulerSequence sequence = new SchedulerSequence();
  574. sequence.SequenceIndex = index;
  575. sequence.State = RState.Init;
  576. sequence.Recipe = recipe;
  577. sequence.ModuleType = ModuleType.SRD;
  578. sequence.MaterialType = MaterialType.Wafer;
  579. index++;
  580. return sequence;
  581. }
  582. /// <summary>
  583. /// 创建LoaderTransporter步骤
  584. /// </summary>
  585. /// <param name="index"></param>
  586. /// <returns></returns>
  587. private SchedulerSequence CreateLoaderTransporterSequence(TransporterAction transporterAction, List<SchedulerSyncModuleMessage> synModules,int waferSize, ref int index)
  588. {
  589. SchedulerSequence sequence = new SchedulerSequence();
  590. sequence.ModuleType = ModuleType.Transporter;
  591. sequence.ModuleName = ModuleName.Transporter2;
  592. sequence.SequenceIndex = index;
  593. sequence.State = RState.Init;
  594. sequence.Recipe = null;
  595. sequence.SchedulerModule = SchedulerManager.Instance.GetScheduler(ModuleName.Transporter2);
  596. sequence.Parameters = transporterAction;
  597. sequence.MaterialType = MaterialType.WaferHolder;
  598. sequence.SynchronousModuleMessages = synModules;
  599. sequence.WaferSize = waferSize;
  600. index++;
  601. return sequence;
  602. }
  603. /// <summary>
  604. /// 创建LoaderTransporter步骤
  605. /// </summary>
  606. /// <param name="index"></param>
  607. /// <returns></returns>
  608. private SchedulerSequence CreateProcessTransporterSequence(TransporterAction transporterAction,int waferSize, ref int index)
  609. {
  610. SchedulerSequence sequence = new SchedulerSequence();
  611. sequence.ModuleType = ModuleType.Transporter;
  612. sequence.ModuleName = ModuleName.Transporter1;
  613. sequence.SequenceIndex = index;
  614. sequence.State = RState.Init;
  615. sequence.Recipe = null;
  616. sequence.SchedulerModule = SchedulerManager.Instance.GetScheduler(ModuleName.Transporter1);
  617. sequence.Parameters= transporterAction;
  618. sequence.MaterialType = MaterialType.WaferHolder;
  619. sequence.WaferSize = waferSize;
  620. index++;
  621. return sequence;
  622. }
  623. /// <summary>
  624. /// 获取可用Dummy slot
  625. /// </summary>
  626. /// <param name="moduleType"></param>
  627. /// <returns></returns>
  628. public (ModuleName moduleName, int slot) GetAvaibleDummySlots(WaferSize waferSize)
  629. {
  630. if (ModuleHelper.IsInstalled(ModuleName.Dummy1))
  631. {
  632. DummyEntity dummyEntity = Singleton<RouteManager>.Instance.GetModule<DummyEntity>(ModuleName.Dummy1.ToString());
  633. DummyDevice dummyDevice = Singleton<RouteManager>.Instance.EFEM.GetDummyDevice(0);
  634. if (dummyDevice != null && dummyDevice.HasCassette && dummyDevice.WaferSize == waferSize)
  635. {
  636. for (int i = 0; i < dummyEntity.MaxSlotNumber; i++)
  637. {
  638. if (WaferManager.Instance.CheckNoWafer(ModuleName.Dummy1, i))
  639. {
  640. return (ModuleName.Dummy1, i);
  641. }
  642. }
  643. }
  644. }
  645. if (ModuleHelper.IsInstalled(ModuleName.Dummy2))
  646. {
  647. DummyEntity dummyEntity = Singleton<RouteManager>.Instance.GetModule<DummyEntity>(ModuleName.Dummy2.ToString());
  648. DummyDevice dummyDevice = Singleton<RouteManager>.Instance.EFEM.GetDummyDevice(1);
  649. if (dummyDevice != null && dummyDevice.HasCassette && dummyDevice.WaferSize == waferSize)
  650. {
  651. for (int i = 0; i < dummyEntity.MaxSlotNumber; i++)
  652. {
  653. if (WaferManager.Instance.CheckNoWafer(ModuleName.Dummy2, i))
  654. {
  655. return (ModuleName.Dummy2, i);
  656. }
  657. }
  658. }
  659. }
  660. return (ModuleName.Unknown, -1);
  661. }
  662. /// <summary>
  663. /// 根据模块类型获取可用模块
  664. /// </summary>
  665. /// <param name="moduleType"></param>
  666. /// <returns></returns>
  667. public ModuleName GetAvaibleModuleCell(string sequenceType,ModuleType moduleType, ModuleName moduleName = ModuleName.Unknown)
  668. {
  669. if (ModuleHelper.IsMetal(moduleName))
  670. {
  671. List<IModuleEntity> entities = Singleton<RouteManager>.Instance.GetModulesByModuleType(moduleType);
  672. return GetMetalAvaibleRinseModule(entities, moduleName);
  673. }
  674. else
  675. {
  676. List<IModuleEntity> entities = Singleton<RouteManager>.Instance.GetModulesByModuleType(moduleType);
  677. List<IModuleEntity> avaibles = new List<IModuleEntity>();
  678. foreach (var item in entities)
  679. {
  680. bool result = CheckAvaibleModule(item,moduleType,sequenceType);
  681. if (result)
  682. {
  683. avaibles.Add(item);
  684. }
  685. }
  686. return GetMinTimeToReadyModule(avaibles,moduleType);
  687. }
  688. }
  689. /// <summary>
  690. /// 根据模块类型获取可用模块(不包含WH)
  691. /// </summary>
  692. /// <param name="moduleType"></param>
  693. /// <returns></returns>
  694. public ModuleName GetAvaibleEmptyModuleCell(ModuleType moduleType,string sequenceType, ModuleName moduleName = ModuleName.Unknown)
  695. {
  696. if (ModuleHelper.IsMetal(moduleName))
  697. {
  698. List<IModuleEntity> entities = Singleton<RouteManager>.Instance.GetModulesByModuleType(moduleType);
  699. return GetMetalAvaibleEmptyRinseModule(entities, moduleName);
  700. }
  701. else
  702. {
  703. List<IModuleEntity> entities = Singleton<RouteManager>.Instance.GetModulesByModuleType(moduleType);
  704. List<IModuleEntity> avaibles = new List<IModuleEntity>();
  705. foreach (var item in entities)
  706. {
  707. bool result = CheckAvaibleModule(item,moduleType,sequenceType);
  708. if (result&&!WaferHolderManager.Instance.HasWaferHolder(item.Module.ToString()))
  709. {
  710. avaibles.Add(item);
  711. }
  712. }
  713. return avaibles.Count != 0 ? avaibles[0].Module : ModuleName.Unknown;
  714. }
  715. }
  716. /// <summary>
  717. /// 根据化学液计算时间获取可用MetalCell(参考其他Metal剩余时间)
  718. /// </summary>
  719. /// <param name="chemistry"></param>
  720. /// <returns></returns>
  721. public ModuleName CalculateAvaibleMetalCellByChemistry(string chemistry,string startRinse,string sequenceType,int waferSize,ref bool isExistEnableMetal)
  722. {
  723. if(!Enum.TryParse(startRinse,out ModuleName startRinseModule)||!ModuleHelper.IsRinse(startRinseModule))
  724. {
  725. startRinse = "";
  726. }
  727. isExistEnableMetal = false;
  728. List<MetalEntity> moduleEntities = GetAvaibleMetalList(chemistry,sequenceType,waferSize,true);
  729. List<IModuleEntity> avaibleMetalEntities = new List<IModuleEntity>();
  730. foreach (var item in moduleEntities)
  731. {
  732. if(CheckAvaibleModule(item,ModuleType.Metal,sequenceType))
  733. {
  734. if (item.WaferHolderInfo == null)
  735. {
  736. if (CheckMetalModuleRinseAvaible(item, startRinse))
  737. {
  738. avaibleMetalEntities.Add(item);
  739. }
  740. }
  741. isExistEnableMetal = true;
  742. }
  743. }
  744. if (avaibleMetalEntities.Count > 0)
  745. {
  746. return GetMinUsageMetal(avaibleMetalEntities);
  747. }
  748. return ModuleName.Unknown;
  749. }
  750. /// <summary>
  751. /// 根据化学液获取可用Metal
  752. /// </summary>
  753. /// <param name="chemistry"></param>
  754. /// <param name="sequenceType"></param>
  755. /// <returns></returns>
  756. public bool CalculateAvaibleMetalCellByChemistry(string chemistry,string sequenceType,int waferSize)
  757. {
  758. List<MetalEntity> moduleEntities = GetAvaibleMetalList(chemistry, sequenceType,waferSize,false);
  759. return moduleEntities.Count != 0;
  760. }
  761. /// <summary>
  762. /// 检验Metal模块Rinse可用性
  763. /// </summary>
  764. /// <param name="item"></param>
  765. /// <returns></returns>
  766. private bool CheckMetalModuleRinseAvaible(MetalEntity item,string startRinse)
  767. {
  768. List<LayoutCellItem> rinseItems = CellItemManager.Instance.GetRinseItemsByMetal(item.Module.ToString());
  769. List<string> sharedRinseItems = new List<string>();
  770. List<string> singleRinseItems = new List<string>();
  771. foreach (var cellItem in rinseItems)
  772. {
  773. RinseEntity rinseEntity = Singleton<RouteManager>.Instance.GetModule<RinseEntity>(cellItem.ModuleName);
  774. if (!CellItemManager.Instance.CheckRinseIsShared(cellItem.ModuleName))
  775. {
  776. if (CheckAvaibleModule(rinseEntity, ModuleType.Rinse, "") && rinseEntity.WaferHolderInfo == null)
  777. {
  778. singleRinseItems.Add(cellItem.ModuleName);
  779. }
  780. }
  781. else
  782. {
  783. if (CheckAvaibleModule(rinseEntity,ModuleType.Rinse,"") && rinseEntity.WaferHolderInfo == null)
  784. {
  785. sharedRinseItems.Add(cellItem.ModuleName);
  786. }
  787. //增加自己
  788. if (cellItem.ModuleName == startRinse && rinseEntity != null && (rinseEntity.IsIdle||rinseEntity.State==(int)RinseState.KeepWeting))
  789. {
  790. sharedRinseItems.Add(startRinse);
  791. }
  792. }
  793. }
  794. //独立的Rinse集合
  795. if(singleRinseItems.Count!=0)
  796. {
  797. bool result = CheckSingleRinseItemsCanUsed(singleRinseItems, item.Module.ToString());
  798. if(result)
  799. {
  800. return true;
  801. }
  802. }
  803. //仅剩下共享Rinse
  804. List<string> avaibleSharedList = new List<string>();
  805. if (sharedRinseItems.Count != 0)
  806. {
  807. foreach (string sharedRinse in sharedRinseItems)
  808. {
  809. RinseEntity rinseEntity = Singleton<RouteManager>.Instance.GetModule<RinseEntity>(sharedRinse);
  810. if (rinseEntity.IsBusy&&sharedRinse!=startRinse)
  811. {
  812. continue;
  813. }
  814. //检验共享Rinse是否可用
  815. if (CheckShardRinseCanUse(sharedRinse, item.Module.ToString(),startRinse))
  816. {
  817. avaibleSharedList.Add(sharedRinse);
  818. }
  819. }
  820. }
  821. if (avaibleSharedList.Count != 0)
  822. {
  823. var result = CalculateMetalReservoirAllBusyMetalCount(item.Module.ToString());
  824. if (result.success)
  825. {
  826. bool transporterTransfering = CheckProcessTransporterTransfering(avaibleSharedList);
  827. if(transporterTransfering)
  828. {
  829. return result.busyCount + 1 < avaibleSharedList.Count;
  830. }
  831. else
  832. {
  833. return result.busyCount < avaibleSharedList.Count+singleRinseItems.Count;
  834. }
  835. }
  836. }
  837. return false;
  838. }
  839. /// <summary>
  840. /// 检验Process transporter正在Transfer WH移动至Rinse
  841. /// </summary>
  842. /// <returns></returns>
  843. private bool CheckProcessTransporterTransfering(List<string> rinseList)
  844. {
  845. TransporterEntity processTransporterEntity = Singleton<RouteManager>.Instance.GetModule<TransporterEntity>(ModuleName.Transporter1.ToString());
  846. if(processTransporterEntity!=null)
  847. {
  848. if (processTransporterEntity.IsBusy)
  849. {
  850. string targetCell = processTransporterEntity.TargetCell;
  851. if (rinseList.Contains(targetCell))
  852. {
  853. return true;
  854. }
  855. }
  856. }
  857. return false;
  858. }
  859. /// <summary>
  860. /// 计算Metal所在Reservoir Busy Metal数量
  861. /// </summary>
  862. /// <param name="item"></param>
  863. /// <returns></returns>
  864. private (bool success,int busyCount) CalculateMetalReservoirAllBusyMetalCount(string metalName)
  865. {
  866. string reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(metalName);
  867. if (string.IsNullOrEmpty(reservoirName))
  868. {
  869. return (false,0);
  870. }
  871. List<string> metals = ReservoirItemManager.Instance.GetMetalsByReservoir(reservoirName);
  872. int count = 0;
  873. foreach (string item in metals)
  874. {
  875. if (metalName == item)
  876. {
  877. continue;
  878. }
  879. MetalEntity metalEntity = Singleton<RouteManager>.Instance.GetModule<MetalEntity>(item);
  880. if (metalEntity.IsBusy || metalEntity.WaferHolderInfo != null)
  881. {
  882. count++;
  883. }
  884. }
  885. return (true,count);
  886. }
  887. /// <summary>
  888. /// 检验独立Rinse是否可用
  889. /// </summary>
  890. /// <param name="singleRinseItems"></param>
  891. /// <param name="metalName"></param>
  892. /// <returns></returns>
  893. private bool CheckSingleRinseItemsCanUsed(List<string> singleRinseItems, string metalName)
  894. {
  895. var result = CalculateMetalReservoirAllBusyMetalCount(metalName);
  896. if(result.success)
  897. {
  898. bool transporterTransfering = CheckProcessTransporterTransfering(singleRinseItems);
  899. if (transporterTransfering)
  900. {
  901. return result.busyCount + 1 < singleRinseItems.Count;
  902. }
  903. else
  904. {
  905. return result.busyCount < singleRinseItems.Count;
  906. }
  907. }
  908. return false;
  909. }
  910. /// <summary>
  911. /// 检验共享Rinse是否可用
  912. /// </summary>
  913. /// <param name="sharedRinse"></param>
  914. /// <param name="metalName"></param>
  915. /// <returns></returns>
  916. private bool CheckShardRinseCanUse(string sharedRinse, string metalName,string startRinse)
  917. {
  918. string reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(metalName);
  919. List<string> shardReservoirs = CellItemManager.Instance.GetReservoirsBySharedRinse(sharedRinse);
  920. if (shardReservoirs == null || shardReservoirs.Count == 0)
  921. {
  922. return false;
  923. }
  924. foreach (string reservoir in shardReservoirs)
  925. {
  926. if (reservoir==reservoirName)
  927. {
  928. continue;
  929. }
  930. List<string> metals=ReservoirItemManager.Instance.GetMetalsByReservoir(reservoir);
  931. int metalCount = 0;
  932. int busyMetalCount = 0;
  933. foreach(string metal in metals)
  934. {
  935. MetalEntity metalEntity = Singleton<RouteManager>.Instance.GetModule<MetalEntity>(metal);
  936. if(metalEntity.IsAuto&&metalEntity.IsInitialized)
  937. {
  938. metalCount++;
  939. }
  940. if(metalEntity.IsBusy||metalEntity.WaferHolderInfo!=null)
  941. {
  942. busyMetalCount++;
  943. }
  944. }
  945. List<string> reservoirRinseLst = CellItemManager.Instance.GetRinsesByReservoir(reservoir);
  946. int rinseCount = 0;
  947. int busyRinseCount = 0;
  948. foreach(string rinseItem in reservoirRinseLst)
  949. {
  950. RinseEntity rinseEntity = Singleton<RouteManager>.Instance.GetModule<RinseEntity>(rinseItem);
  951. if(rinseEntity.IsAuto&&rinseEntity.IsInitialized)
  952. {
  953. rinseCount++;
  954. }
  955. if (rinseItem == sharedRinse)
  956. {
  957. continue;
  958. }
  959. if (rinseItem == startRinse)
  960. {
  961. continue;
  962. }
  963. if(rinseEntity.IsBusy||rinseEntity.WaferHolderInfo!=null)
  964. {
  965. busyRinseCount++;
  966. }
  967. }
  968. int resRinseCount=rinseCount- busyRinseCount;
  969. //计算剩余Rinse数量小于等于busy metal数量,则不可用
  970. if (resRinseCount <= busyMetalCount)
  971. {
  972. return false;
  973. }
  974. }
  975. return true;
  976. }
  977. /// <summary>
  978. /// 检验模块是否可用(不包含WH)
  979. /// </summary>
  980. /// <param name="item"></param>
  981. /// <returns></returns>
  982. private bool CheckAvaibleEmptyModule(IModuleEntity item,ModuleType moduleType,string sequenceType)
  983. {
  984. if (!CheckAvaibleModule(item, moduleType, sequenceType))
  985. {
  986. return false;
  987. }
  988. if (!ModuleHelper.IsSRD(item.Module))
  989. {
  990. WaferHolderInfo waferHolderInfo = WaferHolderManager.Instance.GetWaferHolder(item.Module.ToString());
  991. if (waferHolderInfo == null)
  992. {
  993. return true;
  994. }
  995. }
  996. else
  997. {
  998. if (!WaferManager.Instance.CheckHasWafer(item.Module, 0))
  999. {
  1000. return true;
  1001. }
  1002. }
  1003. return false;
  1004. }
  1005. /// <summary>
  1006. /// 检验模块是否可用
  1007. /// </summary>
  1008. /// <param name="item"></param>
  1009. /// <returns></returns>
  1010. public bool CheckAvaibleModule(IModuleEntity item,ModuleType moduleType,string sequenceType)
  1011. {
  1012. if (item.IsDisable)
  1013. {
  1014. return false;
  1015. }
  1016. if (!item.IsAuto)
  1017. {
  1018. return false;
  1019. }
  1020. if (item.IsError)
  1021. {
  1022. return false;
  1023. }
  1024. if (item.IsInit)
  1025. {
  1026. return false;
  1027. }
  1028. if (moduleType==ModuleType.Metal)
  1029. {
  1030. if(item.IsProduction && sequenceType == ENGINEERING)
  1031. return false;
  1032. if (item.IsEngineering && sequenceType == PRODUCTION)
  1033. return false;
  1034. }
  1035. return true;
  1036. }
  1037. /// <summary>
  1038. /// 获取剩余时间最小的模块
  1039. /// </summary>
  1040. /// <param name="avaibles"></param>
  1041. /// <returns></returns>
  1042. private ModuleName GetMinTimeToReadyModule(List<IModuleEntity> avaibles,ModuleType moduleType)
  1043. {
  1044. if (avaibles.Count == 1)
  1045. {
  1046. return avaibles[0].Module;
  1047. }
  1048. int timeToReady = int.MaxValue;
  1049. IModuleEntity selectedModule = null;
  1050. List<IModuleEntity> idleModuleEtities = new List<IModuleEntity>();
  1051. foreach (var item in avaibles)
  1052. {
  1053. if (item.IsIdle)
  1054. {
  1055. if(moduleType!=ModuleType.Metal)
  1056. {
  1057. return item.Module;
  1058. }
  1059. idleModuleEtities.Add(item);
  1060. }
  1061. if (item.TimeToReady < timeToReady&&idleModuleEtities.Count==0)
  1062. {
  1063. timeToReady = item.TimeToReady;
  1064. selectedModule = item;
  1065. }
  1066. }
  1067. if (idleModuleEtities.Count != 0)
  1068. {
  1069. return GetMinUsageMetal(idleModuleEtities);
  1070. }
  1071. if (selectedModule != null)
  1072. {
  1073. return selectedModule.Module;
  1074. }
  1075. return ModuleName.Unknown;
  1076. }
  1077. /// <summary>
  1078. /// 获取电量最小的Metal
  1079. /// </summary>
  1080. /// <param name="idleModuleEntities"></param>
  1081. /// <returns></returns>
  1082. private ModuleName GetMinUsageMetal(List<IModuleEntity> idleModuleEntities)
  1083. {
  1084. double usage = double.MaxValue;
  1085. ModuleName selectedModuleName = ModuleName.Unknown;
  1086. foreach (var item in idleModuleEntities)
  1087. {
  1088. MetalEntity metalEntity= item as MetalEntity;
  1089. if(metalEntity!=null)
  1090. {
  1091. MetalUsage metalUsage = metalEntity.MetalUsage;
  1092. if (metalUsage == null)
  1093. {
  1094. return metalEntity.Module;
  1095. }
  1096. if (metalUsage.TotalUsage < usage)
  1097. {
  1098. usage= metalUsage.TotalUsage;
  1099. selectedModuleName = metalEntity.Module;
  1100. }
  1101. }
  1102. }
  1103. return selectedModuleName;
  1104. }
  1105. /// <summary>
  1106. /// 获取Metal可用的Rinse模块
  1107. /// </summary>
  1108. /// <param name="metalName"></param>
  1109. /// <returns></returns>
  1110. private ModuleName GetMetalAvaibleRinseModule(List<IModuleEntity> items, ModuleName metalName)
  1111. {
  1112. int metalId = CellItemManager.Instance.GetCellIdByModuleName(metalName.ToString());
  1113. if (metalId == 0)
  1114. {
  1115. return ModuleName.Unknown;
  1116. }
  1117. List<LayoutCellItem> rinseItems = CellItemManager.Instance.GetRinseItemsByMetal(metalName.ToString());
  1118. if (rinseItems.Count == 0)
  1119. {
  1120. return ModuleName.Unknown;
  1121. }
  1122. List<IModuleEntity> avaibles = new List<IModuleEntity>();
  1123. foreach (var item in items)
  1124. {
  1125. LayoutCellItem cellItem = rinseItems.Find(O => O.ModuleName == item.Module.ToString());
  1126. if (cellItem != null)
  1127. {
  1128. RinseEntity rinseEntity = (RinseEntity)item;
  1129. if (rinseEntity.IsInitialized && rinseEntity.IsAuto)
  1130. {
  1131. avaibles.Add(rinseEntity);
  1132. }
  1133. }
  1134. }
  1135. int minInterval = int.MaxValue;
  1136. IModuleEntity moduleEntity = null;
  1137. foreach (var item in avaibles)
  1138. {
  1139. LayoutCellItem cellItem = rinseItems.Find(O => O.ModuleName == item.Module.ToString());
  1140. if (cellItem != null)
  1141. {
  1142. int abiasId = Math.Abs(metalId - cellItem.CellID);
  1143. if (abiasId < minInterval)
  1144. {
  1145. minInterval = abiasId;
  1146. moduleEntity = item;
  1147. }
  1148. }
  1149. }
  1150. if (moduleEntity != null)
  1151. {
  1152. return moduleEntity.Module;
  1153. }
  1154. return ModuleName.Unknown;
  1155. }
  1156. /// <summary>
  1157. /// 检验Metal可用的Rinse模块
  1158. /// </summary>
  1159. /// <param name="metalName"></param>
  1160. /// <returns></returns>
  1161. private ModuleName GetMetalAvaibleEmptyRinseModule(List<IModuleEntity> items, ModuleName metalName)
  1162. {
  1163. int metalId = CellItemManager.Instance.GetCellIdByModuleName(metalName.ToString());
  1164. if (metalId == 0)
  1165. {
  1166. return ModuleName.Unknown;
  1167. }
  1168. List<LayoutCellItem> rinseItems = CellItemManager.Instance.GetRinseItemsByMetal(metalName.ToString());
  1169. if (rinseItems.Count == 0)
  1170. {
  1171. return ModuleName.Unknown;
  1172. }
  1173. List<IModuleEntity> avaibles = new List<IModuleEntity>();
  1174. List<ModuleName> sharedRinseList = new List<ModuleName>();
  1175. foreach (var item in items)
  1176. {
  1177. LayoutCellItem cellItem = rinseItems.Find(O => O.ModuleName == item.Module.ToString());
  1178. if (cellItem != null)
  1179. {
  1180. RinseEntity rinseEntity = (RinseEntity)item;
  1181. if (rinseEntity.IsIdle && rinseEntity.IsAuto && rinseEntity.WaferHolderInfo == null)
  1182. {
  1183. avaibles.Add(rinseEntity);
  1184. if(CellItemManager.Instance.CheckRinseIsShared(rinseEntity.Module.ToString()))
  1185. {
  1186. sharedRinseList.Add(rinseEntity.Module);
  1187. }
  1188. }
  1189. }
  1190. }
  1191. int minInterval = int.MaxValue;
  1192. IModuleEntity moduleEntity = null;
  1193. foreach (var item in avaibles)
  1194. {
  1195. if (sharedRinseList.Contains(item.Module))
  1196. {
  1197. continue;
  1198. }
  1199. LayoutCellItem cellItem = rinseItems.Find(O => O.ModuleName == item.Module.ToString());
  1200. if (cellItem != null)
  1201. {
  1202. int abiasId = Math.Abs(metalId - cellItem.CellID);
  1203. if (abiasId < minInterval)
  1204. {
  1205. minInterval = abiasId;
  1206. moduleEntity = item;
  1207. }
  1208. }
  1209. }
  1210. if (moduleEntity != null)
  1211. {
  1212. return moduleEntity.Module;
  1213. }
  1214. else if(sharedRinseList.Count!=0)
  1215. {
  1216. return sharedRinseList[0];
  1217. }
  1218. return ModuleName.Unknown;
  1219. }
  1220. /// <summary>
  1221. /// 检验Metal cell recipe时间是否可用
  1222. /// </summary>
  1223. /// <param name="depRecipe"></param>
  1224. /// <returns></returns>
  1225. public bool CheckMetalCellRecipeTimeAvaible(IModuleEntity metalEntity,DepRecipe depRecipe)
  1226. {
  1227. List<IModuleEntity> metalEntities=Singleton<RouteManager>.Instance.GetModulesByModuleType(ModuleType.Metal);
  1228. int maxTimeToReady = 0;
  1229. foreach (MetalEntity item in metalEntities)
  1230. {
  1231. if (metalEntity.Module == item.Module)
  1232. {
  1233. continue;
  1234. }
  1235. if(item.IsBusy)
  1236. {
  1237. if(maxTimeToReady>item.TimeToReady)
  1238. {
  1239. maxTimeToReady = item.TimeToReady;
  1240. }
  1241. }
  1242. }
  1243. int transferOffSecond = SC.GetValue<int>("Transporter.TransporterTransferOffSeconds");
  1244. int recipeTotalTime = depRecipe.CalculateRecipeTotalTime();
  1245. //增加了Transporter最大传输时间和最小传输时间的差值
  1246. if (recipeTotalTime>=maxTimeToReady+transferOffSecond)
  1247. {
  1248. return true;
  1249. }
  1250. return false;
  1251. }
  1252. /// <summary>
  1253. /// 根据化学液获取可用的metal集合
  1254. /// </summary>
  1255. /// <param name="chemistry"></param>
  1256. /// <returns></returns>
  1257. public List<MetalEntity> GetAvaibleMetalList(string chemistry, string sequenceType,int waferSize, bool isEmpty)
  1258. {
  1259. List<IModuleEntity> reservoirEntities = Singleton<RouteManager>.Instance.GetModulesByModuleType(ModuleType.Reservoir);
  1260. List<string> avaibles = new List<string>();
  1261. foreach (IModuleEntity item in reservoirEntities)
  1262. {
  1263. ReservoirEntity entity = item as ReservoirEntity;
  1264. if (entity.Chemistry == chemistry && entity.IsAuto && entity.IsInitialized)
  1265. {
  1266. avaibles.Add(entity.Module.ToString());
  1267. }
  1268. }
  1269. List<MetalEntity> metals = new List<MetalEntity>();
  1270. foreach (string item in avaibles)
  1271. {
  1272. ReservoirItem reservoirItem = ReservoirItemManager.Instance.GetReservoirItem(item);
  1273. if (reservoirItem == null)
  1274. {
  1275. continue;
  1276. }
  1277. foreach (MetalItem subItem in reservoirItem.MetalCells)
  1278. {
  1279. MetalEntity entity = Singleton<RouteManager>.Instance.GetModule<MetalEntity>($"Metal{subItem.MetalID}");
  1280. if (!CheckAvaibleModule(entity, ModuleType.Metal, sequenceType))
  1281. {
  1282. continue;
  1283. }
  1284. if (entity.MetalWaferSize != waferSize)
  1285. {
  1286. continue;
  1287. }
  1288. if (!isEmpty || (isEmpty && entity.WaferHolderInfo == null))
  1289. {
  1290. metals.Add(entity);
  1291. }
  1292. }
  1293. }
  1294. return metals;
  1295. }
  1296. /// <summary>
  1297. /// 获取上一个Metal
  1298. /// </summary>
  1299. /// <param name="sequenceIndex"></param>
  1300. /// <param name="sequences"></param>
  1301. /// <returns></returns>
  1302. public ModuleName GetPreMetalModuleName(int sequenceIndex,List<SchedulerSequence> sequences)
  1303. {
  1304. for(int i = sequenceIndex - 1; i >= 0; i--)
  1305. {
  1306. SchedulerSequence schedulerSequence= sequences[i];
  1307. if (schedulerSequence.ModuleType == ModuleType.Metal && ModuleHelper.IsMetal(schedulerSequence.ModuleName))
  1308. {
  1309. return schedulerSequence.ModuleName;
  1310. }
  1311. }
  1312. return ModuleName.Unknown;
  1313. }
  1314. }
  1315. }