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Buffer
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8c811f7802
update double wafers scheduler
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2 ヶ月 前 |
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Dryer
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6497945cbe
Revise jobcreate and lottrack bugs;
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2 ヶ月 前 |
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Dummy
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f7533a737b
Initialize
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4 ヶ月 前 |
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EFEM
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0b609ee2cd
add EFEM DoorLocked signal
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1 ヶ月 前 |
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LPs
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c695867e44
update loadport status
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2 ヶ月 前 |
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Loader
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2facb74aa2
add QDR Prewet function;
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1 ヶ月 前 |
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Metal
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2facb74aa2
add QDR Prewet function;
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1 ヶ月 前 |
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PUF
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2a9a5325f5
modify error code
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1 ヶ月 前 |
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Prewet
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6550cc0e88
Add Manual KeepWet LotTrack;
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1 ヶ月 前 |
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Reservoir
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07fbbfc5ca
EFEM place routine add aligner wafersize and distance command
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1 ヶ月 前 |
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Rinse
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2bf0be7542
update loader waferSize
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2 ヶ月 前 |
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SRD
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72f614e1ff
Add SRD Flipper Animation;
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2 ヶ月 前 |
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Transporter
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2facb74aa2
add QDR Prewet function;
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1 ヶ月 前 |
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Autotransfer_LP_FA.cs
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f7533a737b
Initialize
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4 ヶ月 前 |
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DVIDName.cs
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f7533a737b
Initialize
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4 ヶ月 前 |
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EntityTaskBase.cs
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f7533a737b
Initialize
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4 ヶ月 前 |
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FaModuleNotifier.cs
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f7533a737b
Initialize
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4 ヶ月 前 |
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FaRemoteManager.cs
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371876b350
add robot map routine
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4 ヶ月 前 |
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ManualTransfer.cs
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f7533a737b
Initialize
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4 ヶ月 前 |
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ModuleHomeAllRoutine.cs
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7849fa3cd1
update scheduler
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3 ヶ月 前 |
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ReservoirMetalHomeRoutine.cs
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f7533a737b
Initialize
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4 ヶ月 前 |
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ResourceMonitor.cs
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f7533a737b
Initialize
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4 ヶ月 前 |
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RouteManager.cs
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4feb75325b
update ui log
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2 ヶ月 前 |
chenkui
0b609ee2cd
add EFEM DoorLocked signal