MetalEntity.cs 73 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Fsm;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using Aitex.Core.Utilities;
  6. using MECF.Framework.Common.Equipment;
  7. using MECF.Framework.Common.WaferHolder;
  8. using System;
  9. using MECF.Framework.Common.ToolLayout;
  10. using MECF.Framework.Common.Persistent.Reservoirs;
  11. using Aitex.Core.RT.OperationCenter;
  12. using MECF.Framework.Common.RecipeCenter;
  13. using Aitex.Core.RT.RecipeCenter;
  14. using MECF.Framework.Common.SubstrateTrackings;
  15. using Aitex.Core.RT.Device;
  16. using MECF.Framework.Common.Routine;
  17. using MECF.Framework.Common.ProcessCell;
  18. using Aitex.Core.RT.SCCore;
  19. using MECF.Framework.Common.Alarm;
  20. using CyberX8_Core;
  21. using CyberX8_RT.Devices.Metal;
  22. using CyberX8_RT.Devices.Reservoir;
  23. using CyberX8_RT.Modules.Metal;
  24. using CyberX8_RT.Modules.Reservoir;
  25. using CyberX8_RT.Modules;
  26. using CyberX8_RT.Modules.EFEM;
  27. using static Mono.Security.X509.X520;
  28. using MECF.Framework.Common.DBCore;
  29. using Aitex.Core.Common;
  30. using Aitex.Core.RT.Routine;
  31. namespace CyberX8_RT.Modules.Metal
  32. {
  33. public class MetalEntity : Entity, IEntity, IModuleEntity
  34. {
  35. #region 常量
  36. private const string STRATUS = "Stratus";
  37. private const string AUTO = "Auto";
  38. private const string MANUAL = "Manual";
  39. private const string DISABLED = "Disabled";
  40. private const string ENGINEERING = "Engineering";
  41. private const string PRODUCTION = "Production";
  42. #endregion
  43. #region 内部变量
  44. /// <summary>
  45. /// 已经完成的Cycle次数
  46. /// </summary>
  47. private int _achievedCycle = 0;
  48. /// <summary>
  49. /// Metal项
  50. /// </summary>
  51. private MetalItem _metalItem;
  52. /// <summary>
  53. /// 持久化对象
  54. /// </summary>
  55. private MetalPersistentValue _persistentValue;
  56. /// <summary>
  57. /// c&m Initialize routine
  58. /// </summary>
  59. private CompactEmbranceInitializeRoutine _compactEmbranceInitializeRoutine;
  60. /// <summary>
  61. /// C&M Runrecipe routine
  62. /// </summary>
  63. private CompactEmbranceRunRecipeRoutine _compactEmbranceRunRecipeRoutine;
  64. /// <summary>
  65. /// S&H Initialize Routine
  66. /// </summary>
  67. private StandardHotInitializeRoutine _standardHotInitializeRoutine;
  68. /// <summary>
  69. /// S&H RunRecipe Routine
  70. /// </summary>
  71. private StandardHotRunRecipeRoutine _standardHotRunRecipeRoutine;
  72. /// <summary>
  73. /// Current short test routine
  74. /// </summary>
  75. private CurrentShortTestRoutine _currentShortTestRoutine;
  76. /// <summary>
  77. /// 当前Recipe
  78. /// </summary>
  79. private DepRecipe _currentRecipe = null;
  80. /// <summary>
  81. /// recipe时间
  82. /// </summary>
  83. private int _recipeTime;
  84. /// <summary>
  85. /// 循环次数
  86. /// </summary>
  87. private int _cycle = 0;
  88. /// <summary>
  89. /// 运行Recipe面
  90. /// </summary>
  91. private string _recipeSide = "";
  92. /// <summary>
  93. /// 当前RunRecipe Routine
  94. /// </summary>
  95. private RoutineBase _currentRunRecipeRoutine;
  96. /// <summary>
  97. /// Runrecipe已经运行的时间
  98. /// </summary>
  99. private int _runrecipeElapsedTime = 0;
  100. /// <summary>
  101. /// run recipe start time
  102. /// </summary>
  103. private DateTime _runRecipeStartTime;
  104. /// <summary>
  105. /// run recipe complete time
  106. /// </summary>
  107. private DateTime _runRecipeCompleteTime;
  108. /// <summary>
  109. /// 所在reservoir
  110. /// </summary>
  111. private StandardHotReservoirDevice _reservoirDevice;
  112. /// <summary>
  113. /// 所在reservoir名字
  114. /// </summary>
  115. private string _reservoirName;
  116. /// <summary>
  117. /// 当前完成recipe次数
  118. /// </summary>
  119. private int _currentCycleTimes;
  120. /// <summary>
  121. /// 当前recipe是否完成
  122. /// </summary>
  123. private bool _isCurrentReceipeComplete;
  124. /// <summary>
  125. /// 当前wafershuttle开始浸泡时间
  126. /// </summary>
  127. private DateTime _currentWaferShuttleStartSoakTime;
  128. /// <summary>
  129. /// Wafershuttle最大浸泡时间
  130. /// </summary>
  131. private int _waferShuttleSoakMaxTime;
  132. /// <summary>
  133. /// Flow错误标识
  134. /// </summary>
  135. private bool _flowErrorFlag = false;
  136. #endregion
  137. #region 属性
  138. /// <summary>
  139. /// 模块名称
  140. /// </summary>
  141. public ModuleName Module { get; private set; }
  142. /// <summary>
  143. /// 初始化状态
  144. /// </summary>
  145. public bool IsInit { get { return fsm.State == (int)MetalState.Init; } }
  146. /// <summary>
  147. /// 空闲状态
  148. /// </summary>
  149. public bool IsIdle { get { return fsm.State == (int)MetalState.Idle; } }
  150. /// <summary>
  151. /// 是否发生错误
  152. /// </summary>
  153. public bool IsError { get { return fsm.State == (int)MetalState.Error; } }
  154. /// <summary>
  155. /// 是否正在作业
  156. /// </summary>
  157. public bool IsBusy { get { return fsm.State > (int)MetalState.Idle; } }
  158. /// <summary>
  159. /// 是否初始化完成
  160. /// </summary>
  161. public bool IsInitialized { get { return fsm.State >= (int)MetalState.Initialized; } }
  162. /// <summary>
  163. /// 是否禁用
  164. /// </summary>
  165. public bool IsDisable { get { return _persistentValue == null || _persistentValue.OperatingMode == DISABLED; } }
  166. /// <summary>
  167. /// 自动模式
  168. /// </summary>
  169. public bool IsAuto { get { return _persistentValue != null && _persistentValue.OperatingMode == AUTO; } }
  170. /// <summary>
  171. /// 自动模式
  172. /// </summary>
  173. public bool IsManual { get { return _persistentValue != null && _persistentValue.OperatingMode == MANUAL; } }
  174. /// <summary>
  175. /// 是否为工程模式
  176. /// </summary>
  177. public bool IsEngineering { get { return _persistentValue != null && _persistentValue.RecipeOperatingMode == ENGINEERING; } }
  178. /// <summary>
  179. /// 是否为产品模式
  180. /// </summary>
  181. public bool IsProduction { get { return _persistentValue != null && _persistentValue.RecipeOperatingMode == PRODUCTION; } }
  182. /// <summary>
  183. /// WaferHolder信息
  184. /// </summary>
  185. public WaferHolderInfo WaferHolderInfo { get { return WaferHolderManager.Instance.GetWaferHolder(Module.ToString()); } }
  186. /// <summary>
  187. /// 已完成的RunRecipeCycle次数
  188. /// </summary>
  189. public int AchievedCycle { get { return _achievedCycle; } }
  190. /// <summary>
  191. /// 当前状态机状态
  192. /// </summary>
  193. public int State { get { return fsm.State; } }
  194. /// <summary>
  195. /// 当前Metal设置的WaferSize
  196. /// </summary>
  197. public int MetalWaferSize { get { return _persistentValue.MetalWaferSize; } }
  198. /// <summary>
  199. /// recipe时长
  200. /// </summary>
  201. public int RecipeTime { get { return _recipeTime; } }
  202. /// <summary>
  203. /// 剩余时间
  204. /// </summary>
  205. public override int TimeToReady
  206. {
  207. get
  208. {
  209. if (IsIdle)
  210. {
  211. return 0;
  212. }
  213. switch (fsm.State)
  214. {
  215. case (int)MetalState.RunReciping:
  216. return Math.Max(_recipeTime - fsm.ElapsedTime / 1000, 0);
  217. default:
  218. return 0;
  219. }
  220. }
  221. }
  222. /// <summary>
  223. /// 用量
  224. /// </summary>
  225. public MetalUsage MetalUsage { get { return MetalUsageManager.Instance.GetMetalUsage(Module.ToString()); } }
  226. #endregion
  227. /// <summary>
  228. /// 构造函数
  229. /// </summary>
  230. /// <param name="moduleName"></param>
  231. public MetalEntity(ModuleName moduleName)
  232. {
  233. this.Module = moduleName;
  234. WaferManager.Instance.SubscribeLocation(Module, 2);
  235. InitialFsm();
  236. }
  237. /// <summary>
  238. /// 初始化
  239. /// </summary>
  240. /// <returns></returns>
  241. protected override bool Init()
  242. {
  243. InitializeDATA();
  244. InitializeParameter();
  245. InitializeRoutine();
  246. InitializeOperation();
  247. return true;
  248. }
  249. /// <summary>
  250. /// 初始化参数
  251. /// </summary>
  252. private void InitializeParameter()
  253. {
  254. _persistentValue = MetalPersistentManager.Instance.GetMetalPersistentValue(Module.ToString());
  255. if (_persistentValue == null)
  256. {
  257. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), "Persistent Value Object is not exist");
  258. }
  259. _metalItem = MetalItemManager.Instance.GetMetalItem(Module.ToString());
  260. _reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  261. _reservoirDevice = DEVICE.GetDevice<StandardHotReservoirDevice>($"{_reservoirName}");
  262. _isCurrentReceipeComplete = false;
  263. _waferShuttleSoakMaxTime = SC.GetValue<int>($"Metal.WaferShuttleSoakMaxTime");
  264. }
  265. /// <summary>
  266. /// 初始化Routine
  267. /// </summary>
  268. private void InitializeRoutine()
  269. {
  270. _compactEmbranceInitializeRoutine = new CompactEmbranceInitializeRoutine(Module.ToString());
  271. _standardHotInitializeRoutine = new StandardHotInitializeRoutine(Module.ToString());
  272. _compactEmbranceRunRecipeRoutine = new CompactEmbranceRunRecipeRoutine(Module.ToString());
  273. _standardHotRunRecipeRoutine = new StandardHotRunRecipeRoutine(Module.ToString());
  274. _currentShortTestRoutine = new CurrentShortTestRoutine(Module.ToString());
  275. }
  276. /// <summary>
  277. /// 初始化操作
  278. /// </summary>
  279. private void InitializeOperation()
  280. {
  281. OP.Subscribe($"{Module}.InitializeAll", (cmd, args) => { return CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Initialize); });
  282. OP.Subscribe($"{Module}.CycleManualProcessRecipe", (cmd, args) =>
  283. {
  284. DepRecipe recipe = RecipeFileManager.Instance.LoadGenericityRecipe<DepRecipe>(args[0].ToString());
  285. if (recipe == null)
  286. {
  287. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{args[0]} recipe is null");
  288. return false;
  289. }
  290. object[] objects = new object[args.Length];
  291. objects[0] = recipe;
  292. for (int i = 1; i < args.Length; i++)
  293. {
  294. objects[i] = args[i];
  295. }
  296. return CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.RunRecipe, objects);
  297. });
  298. OP.Subscribe($"{Module}.CurrentShortTest", (cmd, args) => { return CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.CurrentShortTest); });
  299. OP.Subscribe($"{Module}.UpdateMetalUsage", UpdateMetalUsageAction);
  300. OP.Subscribe($"{Module}.Abort", (cmd, args) => { return CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Abort); });
  301. }
  302. /// <summary>
  303. /// EnterInit
  304. /// </summary>
  305. public void EnterInit()
  306. {
  307. if ((MetalState)fsm.State != MetalState.Idle) return;
  308. else
  309. {
  310. CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Init);
  311. }
  312. }
  313. /// 初始化状态机
  314. /// </summary>
  315. private void InitialFsm()
  316. {
  317. fsm = new StateMachine<MetalEntity>(Module.ToString(), (int)MetalState.Init, 20);
  318. fsm.EnableRepeatedMsg(true);
  319. AnyStateTransition(MetalMsg.Error, EnterError, MetalState.Error);
  320. //Initialize
  321. AnyStateTransition(MetalMsg.Initialize, InitializeAll, MetalState.Initializing);
  322. Transition(MetalState.Initializing, FSM_MSG.TIMER, InitializeAllMonitor, MetalState.Initialized);
  323. //直接进入Idle
  324. Transition(MetalState.Initialized, FSM_MSG.TIMER, NullFunc, MetalState.Idle);
  325. //RunRecipe
  326. Transition(MetalState.Idle, MetalMsg.RunRecipe, RunRecipe, MetalState.RunReciping);
  327. Transition(MetalState.WaitForRunRecipe, MetalMsg.RunRecipe, RunRecipe, MetalState.RunReciping);
  328. Transition(MetalState.RunReciping, FSM_MSG.TIMER, RunRecipeMonitor, MetalState.Idle);
  329. Transition(MetalState.Idle, FSM_MSG.TIMER, MetalCompleteSoakTimeMonitor, MetalState.Idle);
  330. Transition(MetalState.RunReciping, MetalMsg.Abort, AbortRecipe, MetalState.Abort);
  331. //Current Short Test
  332. Transition(MetalState.Idle, MetalMsg.CurrentShortTest, CurrentShortTest, MetalState.CurrentShortTesting);
  333. Transition(MetalState.CurrentShortTesting, FSM_MSG.TIMER, CurrentShortTestMonitor, MetalState.WaitCloseFlow);
  334. Transition(MetalState.WaitCloseFlow, MetalMsg.CloseFlowValve, CloseFlowValve, MetalState.WaitOpenFlow);
  335. Transition(MetalState.WaitOpenFlow, MetalMsg.OpenFlowValve, OpenFlowValve, MetalState.WaitForRunRecipe);
  336. //Enter Init
  337. Transition(MetalState.Idle, MetalMsg.Init, NullFunc, MetalState.Init);
  338. EnumLoop<MetalState>.ForEach((item) => { fsm.MapState((int)item, item.ToString()); });
  339. EnumLoop<MetalMsg>.ForEach((item) => { fsm.MapMessage((int)item, item.ToString()); });
  340. }
  341. /// <summary>
  342. /// 初始化DATA
  343. /// </summary>
  344. private void InitializeDATA()
  345. {
  346. InitializeSVID();
  347. DATA.Subscribe($"{Module}.FsmState", () => ((MetalState)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  348. DATA.Subscribe($"{Module}.WaferHolder", () => WaferHolderInfo, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  349. DATA.Subscribe($"{Module}.AchievedCycle", () => AchievedCycle, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  350. DATA.Subscribe($"{Module}.IsInit", () => IsInit, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  351. DATA.Subscribe($"{Module}.IsIdle", () => IsIdle, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  352. DATA.Subscribe($"{Module}.IsError", () => IsError, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  353. DATA.Subscribe($"{Module}.IsBusy", () => IsBusy, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  354. DATA.Subscribe($"{Module}.IsDisable", () => IsDisable, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  355. DATA.Subscribe($"{Module}.CurrentRecipe", () => _currentRecipe != null ? _currentRecipe.Ppid : "", SubscriptionAttribute.FLAG.IgnoreSaveDB);
  356. DATA.Subscribe($"{Module}.MetalUsage", () => MetalUsage, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  357. DATA.Subscribe($"{Module}.SubordinateReservoirName", () => _reservoirName, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  358. }
  359. /// <summary>
  360. /// 初始化SVID
  361. /// </summary>
  362. private void InitializeSVID()
  363. {
  364. DATA.Subscribe($"{Module}.State", () => ((MetalState)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  365. DATA.Subscribe($"{Module}.LotID", () => WaferHolderInfo?.LotId , SubscriptionAttribute.FLAG.IgnoreSaveDB);
  366. DATA.Subscribe($"{Module}.WSID", () => WaferHolderInfo?.Id, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  367. DATA.Subscribe($"{Module}.LSAID", () => WaferHolderInfo?.CrsAId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  368. DATA.Subscribe($"{Module}.LSBID", () => WaferHolderInfo?.CrsBId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  369. DATA.Subscribe($"{Module}.ModuleRecipe", () => _currentRecipe?.Ppid, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  370. DATA.Subscribe($"{Module}.SequenceRecipe", () =>WaferHolderInfo?.SequenceId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  371. DATA.Subscribe($"{Module}.WaferAID", () => WaferHolderInfo?.WaferAId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  372. DATA.Subscribe($"{Module}.WaferBID", () => WaferHolderInfo?.WaferBId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  373. DATA.Subscribe($"{Module}.TotalTime", () => _recipeTime, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  374. DATA.Subscribe($"{Module}.TimeRemain", () => _recipeTime != 0 && _currentRunRecipeRoutine != null ? (_recipeTime - Math.Round((double)_currentRunRecipeRoutine.ElapsedMilliseconds / 1000, 0)) : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  375. DATA.Subscribe($"{Module}.Task", () => WaferHolderInfo?.CurrentControlJobId, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  376. DATA.Subscribe($"{Module}.OperatingMode", () => _persistentValue != null ? _persistentValue.OperatingMode : "None", SubscriptionAttribute.FLAG.IgnoreSaveDB);
  377. DATA.Subscribe($"{Module}.TotalUsage", () => MetalUsage != null ? MetalUsage.TotalUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  378. DATA.Subscribe($"{Module}.TotalUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  379. DATA.Subscribe($"{Module}.TotalUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  380. DATA.Subscribe($"{Module}.AnodeAUsage", () => MetalUsage != null ? MetalUsage.AnodeAUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  381. DATA.Subscribe($"{Module}.AnodeAUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  382. DATA.Subscribe($"{Module}.AnodeAUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  383. DATA.Subscribe($"{Module}.AnodeBUsage", () => MetalUsage != null ? MetalUsage.AnodeBUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  384. DATA.Subscribe($"{Module}.AnodeBUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  385. DATA.Subscribe($"{Module}.AnodeBUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  386. DATA.Subscribe($"{Module}.MembranceAUsage", () => MetalUsage != null ? MetalUsage.MembranceAUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  387. DATA.Subscribe($"{Module}.MembranceAUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  388. DATA.Subscribe($"{Module}.MembranceAUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  389. DATA.Subscribe($"{Module}.MembranceBUsage", () => MetalUsage != null ? MetalUsage.MembranceBUsage : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  390. DATA.Subscribe($"{Module}.MembranceBUsage.WarningLimit", () => SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  391. DATA.Subscribe($"{Module}.MembranceBUsage.FaultLimit", () => SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  392. DATA.Subscribe($"{Module}.TotalWafers", () => MetalUsage != null ? MetalUsage.TotalWafers : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  393. DATA.Subscribe($"{Module}.TotalWafers.WarningLimit", () => SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  394. DATA.Subscribe($"{Module}.TotalWafers.FaultLimit", () => SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  395. DATA.Subscribe($"{Module}.AnodeAWafers", () => MetalUsage != null ? MetalUsage.AnodeAWafers : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  396. DATA.Subscribe($"{Module}.AnodeAWafers.WarningLimit", () => SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  397. DATA.Subscribe($"{Module}.AnodeAWafers.FaultLimit", () => SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  398. DATA.Subscribe($"{Module}.AnodeBWafers", () => MetalUsage != null ? MetalUsage.AnodeBWafers : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  399. DATA.Subscribe($"{Module}.AnodeBWafers.WarningLimit", () => SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  400. DATA.Subscribe($"{Module}.AnodeBWafers.FaultLimit", () => SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  401. }
  402. /// Metal完成recipe后监控wafershuttle浸泡时间
  403. /// </summary>
  404. /// <param name="param"></param>
  405. /// <returns></returns>
  406. private bool MetalCompleteSoakTimeMonitor(object[] param)
  407. {
  408. if (WaferHolderInfo != null)
  409. {
  410. double sockSeconds = (DateTime.Now - _currentWaferShuttleStartSoakTime).TotalSeconds;
  411. if (_isCurrentReceipeComplete && sockSeconds > _waferShuttleSoakMaxTime * 60)
  412. {
  413. if (!AlarmListManager.Instance.IsContainDataWarn(Module.ToString(), "MetalSockTime"))
  414. {
  415. AlarmListManager.Instance.AddWarn(Module.ToString(),
  416. $"MetalSockTime", $"Current waferShuttle:{WaferHolderInfo.Id} sock time is over waferShuttleSoakMaxTime:{_waferShuttleSoakMaxTime} minutes");
  417. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"Current waferShuttle:{WaferHolderInfo.Id} sock time is over waferShuttleSoakMaxTime:{_waferShuttleSoakMaxTime} minutes");
  418. }
  419. }
  420. }
  421. else
  422. {
  423. _isCurrentReceipeComplete = false; //wafershuttle拿走后重置当前recipe是否完成变量
  424. }
  425. return true;
  426. }
  427. /// <summary>
  428. /// 进入错误状态
  429. /// </summary>
  430. /// <param name="args"></param>
  431. /// <returns></returns>
  432. private bool EnterError(object[] args)
  433. {
  434. if (State == (int)MetalState.RunReciping)
  435. {
  436. if (_metalItem.SubType == STRATUS)
  437. {
  438. _standardHotRunRecipeRoutine.Abort();
  439. }
  440. else
  441. {
  442. _compactEmbranceRunRecipeRoutine.Abort();
  443. }
  444. }
  445. _flowErrorFlag = false;
  446. return true;
  447. }
  448. /// <summary>
  449. /// UpdateMetalUsageAction
  450. /// </summary>
  451. /// <param name="cmd"></param>
  452. /// <param name="param"></param>
  453. /// <returns></returns>
  454. private bool UpdateMetalUsageAction(string cmd, object[] args)
  455. {
  456. if (args.Length > 2)
  457. {
  458. MetalUsageManager.Instance.UpdateMetalUsageByManualOperation(args[0].ToString(), args[1].ToString(), args[2].ToString());
  459. LOG.WriteLog(eEvent.INFO_METAL, Module.ToString(), $"New {args[1].ToString()} value {args[2].ToString()} was input");
  460. }
  461. return true;
  462. }
  463. #region Initialize All
  464. /// <summary>
  465. /// 初始化
  466. /// </summary>
  467. /// <param name="param"></param>
  468. /// <returns></returns>
  469. private bool InitializeAll(object[] param)
  470. {
  471. if (fsm.State == (int)MetalState.Initializing)
  472. {
  473. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), "state is Initializing,cannot do initialize");
  474. return false;
  475. }
  476. if (!CheckReservoirInitialized())
  477. {
  478. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), "Reservoir is not initialized");
  479. return false;
  480. }
  481. if (!MetalUsageMointor(Module.ToString()))
  482. {
  483. return false;
  484. }
  485. if ("Auto".Equals(_persistentValue.OperatingMode))
  486. {
  487. if (!CheckReservoirIsAuto())
  488. {
  489. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), "Reservoir is not in Auto OperationMode");
  490. return false;
  491. }
  492. }
  493. bool result = false;
  494. if (_metalItem.SubType == STRATUS)
  495. {
  496. result= _standardHotInitializeRoutine.Start(_persistentValue) == RState.Running;
  497. }
  498. else
  499. {
  500. result= _compactEmbranceInitializeRoutine.Start(_persistentValue) == RState.Running;
  501. }
  502. if (result)
  503. {
  504. _flowErrorFlag = false;
  505. }
  506. return result;
  507. }
  508. /// <summary>
  509. /// 检验Reservoir是否Initialized
  510. /// </summary>
  511. /// <returns></returns>
  512. private bool CheckReservoirInitialized()
  513. {
  514. string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  515. ReservoirEntity reservoirEntity = Singleton<RouteManager>.Instance.GetModule<ReservoirEntity>(reservoir);
  516. if (reservoirEntity != null)
  517. {
  518. return reservoirEntity.IsInitialized;
  519. }
  520. return false;
  521. }
  522. /// <summary>
  523. /// 检验Reservoir是否Auto
  524. /// </summary>
  525. /// <returns></returns>
  526. private bool CheckReservoirIsAuto()
  527. {
  528. string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  529. ReservoirsPersistentValue reservoirsPersistentValue = ReservoirsPersistentManager.Instance.GetReservoirsPersistentValue(reservoir);
  530. if ("Auto".Equals(reservoirsPersistentValue.OperatingMode))
  531. {
  532. return true;
  533. }
  534. return false;
  535. }
  536. /// <summary>
  537. /// 初始化监控
  538. /// </summary>
  539. /// <param name="param"></param>
  540. /// <returns></returns>
  541. private bool InitializeAllMonitor(object[] param)
  542. {
  543. RState rsstate = RState.Running;
  544. if (_metalItem.SubType == STRATUS)
  545. {
  546. rsstate = _standardHotInitializeRoutine.Monitor();
  547. }
  548. else
  549. {
  550. rsstate = _compactEmbranceInitializeRoutine.Monitor();
  551. }
  552. if (rsstate == RState.End)
  553. {
  554. return true;
  555. }
  556. else if (rsstate == RState.Failed || rsstate == RState.Timeout)
  557. {
  558. PostMsg(MetalMsg.Error);
  559. return false;
  560. }
  561. return false;
  562. }
  563. #endregion
  564. #region RunRecipe
  565. /// <summary>
  566. /// Run Recipe
  567. /// </summary>
  568. /// <param name="param"></param>
  569. /// <returns></returns>
  570. private bool RunRecipe(object[] param)
  571. {
  572. MetalUsageMointor(); //Metal run recipe前检查PMCounter消耗
  573. string reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  574. if (_metalItem.SubType == STRATUS)
  575. {
  576. StandardHotReservoirDevice resDevice = DEVICE.GetDevice<StandardHotReservoirDevice>(reservoirName);
  577. resDevice.ReservoirUsageMonitor();
  578. }
  579. DepRecipe recipe = param[0] as DepRecipe;
  580. _recipeSide = param[1].ToString();
  581. _cycle = (int)param[2];
  582. _runrecipeElapsedTime = 0;
  583. bool result = false;
  584. if (_metalItem.SubType == STRATUS)
  585. {
  586. _currentRunRecipeRoutine = _standardHotRunRecipeRoutine;
  587. result = _standardHotRunRecipeRoutine.Start(recipe, _recipeSide,_cycle) == RState.Running;
  588. }
  589. else
  590. {
  591. _currentRunRecipeRoutine = _compactEmbranceRunRecipeRoutine;
  592. result = _compactEmbranceRunRecipeRoutine.Start(recipe, _recipeSide, _cycle) == RState.Running;
  593. }
  594. if (result)
  595. {
  596. if (WaferHolderInfo != null)
  597. {
  598. WaferHolderInfo.MetalModuleName = Module;
  599. }
  600. _recipeTime = (recipe.CalculateRecipeTotalTime())*_cycle;
  601. _currentRecipe = recipe;
  602. if (WaferHolderInfo != null && WaferHolderInfo.SchedulerModules != null && WaferHolderInfo.SchedulerModules.Count != 0)
  603. {
  604. LOG.WriteLog(eEvent.INFO_METAL, Module.ToString(), $"{WaferHolderInfo?.Id} {string.Join(",", WaferHolderInfo.SchedulerModules)}");
  605. }
  606. _runRecipeStartTime = DateTime.Now;
  607. if (WaferHolderInfo != null && _currentRecipe != null)
  608. {
  609. FaModuleNotifier.Instance.NotifyWaferShuttleRecipeStart(WaferHolderInfo, _currentRecipe.Ppid);
  610. }
  611. }
  612. return result;
  613. }
  614. /// <summary>
  615. /// RunRecipe监控
  616. /// </summary>
  617. /// <param name="param"></param>
  618. /// <returns></returns>
  619. private bool RunRecipeMonitor(object[] param)
  620. {
  621. RState rsstate = RState.Running;
  622. string reason = "";
  623. if (_metalItem.SubType == STRATUS)
  624. {
  625. rsstate = _standardHotRunRecipeRoutine.Monitor();
  626. reason = _standardHotRunRecipeRoutine.ErrorMsg;
  627. _achievedCycle = _standardHotRunRecipeRoutine.GetCurrentCycle();
  628. }
  629. else
  630. {
  631. rsstate = _compactEmbranceRunRecipeRoutine.Monitor();
  632. reason = _compactEmbranceRunRecipeRoutine.ErrorMsg;
  633. }
  634. if (Singleton<RouteManager>.Instance.IsAutoRunning && _runrecipeElapsedTime != TimeToReady)
  635. {
  636. _runrecipeElapsedTime = TimeToReady;
  637. LOG.WriteLog(eEvent.INFO_METAL, Module.ToString(), $"{WaferHolderInfo?.Id} {Module} RunRecipe TimeToReady {TimeToReady}s.");
  638. }
  639. if (rsstate == RState.End)
  640. {
  641. RecipeCompleteRecord();
  642. if (WaferHolderInfo != null && _currentRecipe != null)
  643. {
  644. int timeLength = (int)(_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds;
  645. FaModuleNotifier.Instance.NotifyWaferShuttleRecipeEnd(WaferHolderInfo, _currentRecipe.Ppid, timeLength);
  646. }
  647. //流量错误标记后Metal变成Error
  648. if (_flowErrorFlag)
  649. {
  650. PostMsg(MetalMsg.Error);
  651. return false;
  652. }
  653. return true;
  654. }
  655. else if (rsstate == RState.Failed || rsstate == RState.Timeout)
  656. {
  657. RecipeCompleteRecord();
  658. PostMsg(MetalMsg.Error);
  659. if (WaferHolderInfo != null)
  660. {
  661. if (_currentRecipe != null)
  662. {
  663. FaModuleNotifier.Instance.NotifyWaferShuttleRecipeFailed(WaferHolderInfo, _currentRecipe.Ppid);
  664. }
  665. if (!string.IsNullOrEmpty(reason))
  666. {
  667. WriteErrorReason(reason);
  668. }
  669. }
  670. return false;
  671. }
  672. return false;
  673. }
  674. /// <summary>
  675. /// Recipe完成后纪录数据
  676. /// </summary>
  677. private void RecipeCompleteRecord()
  678. {
  679. _recipeTime = 0;
  680. if (WaferHolderInfo != null)
  681. {
  682. double anodeAUsage = GetAnodeAUsage();
  683. double anodeBUsage = GetAnodeBUsage();
  684. MetalUsageManager.Instance.UpdateMetalUsage(Module.ToString(), _recipeSide, anodeAUsage, anodeBUsage);
  685. MetalUsageMointor(); //失败了也要检查PMCounter消耗
  686. //CMMUsage
  687. string reservoirName = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  688. if (_metalItem.SubType == STRATUS)
  689. {
  690. StandardHotReservoirDevice resDevice = DEVICE.GetDevice<StandardHotReservoirDevice>(reservoirName);
  691. resDevice.ReservoirUsageMonitor();
  692. resDevice.SetExportCMMUsage();
  693. }
  694. else
  695. {
  696. CompactMembranReservoirDevice resDevice = DEVICE.GetDevice<CompactMembranReservoirDevice>(reservoirName);
  697. resDevice.ReservoirUsageMonitor();
  698. }
  699. WaferHolderInfo.LastMetalRecipeCompleteTime = DateTime.Now;
  700. }
  701. _runrecipeElapsedTime = 0;
  702. _isCurrentReceipeComplete = true;
  703. _currentWaferShuttleStartSoakTime = DateTime.Now;
  704. //记录LotTrack
  705. _runRecipeCompleteTime = DateTime.Now;
  706. if (_metalItem.SubType == STRATUS)
  707. {
  708. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  709. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _standardHotRunRecipeRoutine.MetalLotTrackDatas,
  710. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  711. }
  712. else
  713. {
  714. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  715. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _compactEmbranceRunRecipeRoutine.MetalLotTrackDatas,
  716. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  717. }
  718. }
  719. /// <summary>
  720. /// 写入错误原因
  721. /// </summary>
  722. /// <param name="reason"></param>
  723. public void WriteErrorReason(string reason)
  724. {
  725. if (WaferHolderInfo == null || string.IsNullOrEmpty(reason))
  726. {
  727. return;
  728. }
  729. WaferInfo waferAInfo = WaferManager.Instance.GetWaferByWaferId(WaferHolderInfo.WaferAId);
  730. if (waferAInfo != null && !waferAInfo.IsEmpty)
  731. {
  732. WaferDataRecorder.SetWaferReason(waferAInfo.InnerId.ToString(), reason);
  733. }
  734. WaferInfo waferBInfo = WaferManager.Instance.GetWaferByWaferId(WaferHolderInfo.WaferBId);
  735. if (waferBInfo != null && !waferBInfo.IsEmpty)
  736. {
  737. WaferDataRecorder.SetWaferReason(waferBInfo.InnerId.ToString(), reason);
  738. }
  739. }
  740. /// <summary>
  741. /// 监控 PM Counter Metal用量
  742. /// </summary>
  743. private void MetalUsageMointor()
  744. {
  745. MetalUsage metalUsage = MetalUsageManager.Instance.GetMetalUsage(Module.ToString());
  746. if (metalUsage != null)
  747. {
  748. //TotalAUsage
  749. if (metalUsage.TotalUsage > SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit") != 0)
  750. {
  751. if (metalUsage.TotalUsage > SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit"))
  752. {
  753. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit")}");
  754. PostMsg(MetalMsg.Error);
  755. AlarmListManager.Instance.AddDataError(Module.ToString(),
  756. $"{Module.ToString()}.metalUsage.TotalUsage",
  757. $"{Module.ToString()} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit")}");
  758. }
  759. else
  760. {
  761. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit")}");
  762. AlarmListManager.Instance.AddWarn(Module.ToString(),
  763. $"{Module.ToString()}.metalUsage.TotalUsage",
  764. $"{Module.ToString()} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit")}");
  765. }
  766. }
  767. //AnodeAUsage
  768. if (metalUsage.AnodeAUsage > SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit") != 0)
  769. {
  770. if (metalUsage.AnodeAUsage > SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit"))
  771. {
  772. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit")}");
  773. PostMsg(MetalMsg.Error);
  774. AlarmListManager.Instance.AddDataError(Module.ToString(),
  775. $"{Module.ToString()}.metalUsage.AnodeAUsage",
  776. $"{Module.ToString()} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit")}");
  777. }
  778. else
  779. {
  780. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit")}");
  781. AlarmListManager.Instance.AddWarn(Module.ToString(),
  782. $"{Module.ToString()}.metalUsage.AnodeAUsage",
  783. $"{Module.ToString()} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit")}");
  784. }
  785. }
  786. //AnodeBUsage
  787. if (metalUsage.AnodeBUsage > SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit") != 0)
  788. {
  789. if (metalUsage.AnodeBUsage > SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit"))
  790. {
  791. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit")}");
  792. PostMsg(MetalMsg.Error);
  793. AlarmListManager.Instance.AddDataError(Module.ToString(),
  794. $"{Module.ToString()}.metalUsage.AnodeBUsage",
  795. $"{Module.ToString()} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit")}");
  796. }
  797. else
  798. {
  799. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit")}");
  800. AlarmListManager.Instance.AddWarn(Module.ToString(),
  801. $"{Module.ToString()}.metalUsage.AnodeBUsage",
  802. $"{Module.ToString()} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit")}");
  803. }
  804. }
  805. //MembraneAUsage
  806. if (metalUsage.MembranceAUsage > SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit") != 0)
  807. {
  808. if (metalUsage.MembranceAUsage > SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit"))
  809. {
  810. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit")}");
  811. PostMsg(MetalMsg.Error);
  812. AlarmListManager.Instance.AddDataError(Module.ToString(),
  813. $"{Module.ToString()}.metalUsage.MembraneAUsage",
  814. $"{Module.ToString()} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit")}");
  815. }
  816. else
  817. {
  818. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit")}");
  819. AlarmListManager.Instance.AddWarn(Module.ToString(),
  820. $"{Module.ToString()}.metalUsage.MembraneAUsage",
  821. $"{Module.ToString()} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit")}");
  822. }
  823. }
  824. //MembraneBUsage
  825. if (metalUsage.MembranceBUsage > SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit") != 0)
  826. {
  827. if (metalUsage.MembranceBUsage > SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit"))
  828. {
  829. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit")}");
  830. PostMsg(MetalMsg.Error);
  831. AlarmListManager.Instance.AddDataError(Module.ToString(),
  832. $"{Module.ToString()}.metalUsage.MembraneBUsage",
  833. $"{Module.ToString()} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit")}");
  834. }
  835. else
  836. {
  837. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit")}");
  838. AlarmListManager.Instance.AddWarn(Module.ToString(),
  839. $"{Module.ToString()}.metalUsage.MembraneBUsage",
  840. $"{Module.ToString()} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit")}");
  841. }
  842. }
  843. //TotalWafer
  844. if (metalUsage.TotalWafers > SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit") && SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit") != 0)
  845. {
  846. if (metalUsage.TotalWafers > SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit"))
  847. {
  848. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit")}");
  849. PostMsg(MetalMsg.Error);
  850. AlarmListManager.Instance.AddDataError(Module.ToString(),
  851. $"{Module.ToString()}.metalUsage.TotalWafers",
  852. $"{Module.ToString()} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit")}");
  853. }
  854. else
  855. {
  856. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit")}");
  857. AlarmListManager.Instance.AddWarn(Module.ToString(),
  858. $"{Module.ToString()}.metalUsage.TotalWafers",
  859. $"{Module.ToString()} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit")}");
  860. }
  861. }
  862. //AnodeAWafer
  863. if (metalUsage.AnodeAWafers > SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit") != 0)
  864. {
  865. if (metalUsage.AnodeAWafers > SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit"))
  866. {
  867. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit")}");
  868. PostMsg(MetalMsg.Error);
  869. AlarmListManager.Instance.AddDataError(Module.ToString(),
  870. $"{Module.ToString()}.metalUsage.AnodeAWafers",
  871. $"{Module.ToString()} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit")}");
  872. }
  873. else
  874. {
  875. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit")}");
  876. AlarmListManager.Instance.AddWarn(Module.ToString(),
  877. $"{Module.ToString()}.metalUsage.AnodeAWafers",
  878. $"{Module.ToString()} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit")}");
  879. }
  880. }
  881. //AnodeBWafer
  882. if (metalUsage.AnodeBWafers > SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit") != 0)
  883. {
  884. if (metalUsage.AnodeBWafers > SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit"))
  885. {
  886. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit")}");
  887. PostMsg(MetalMsg.Error);
  888. AlarmListManager.Instance.AddDataError(Module.ToString(),
  889. $"{Module.ToString()}.metalUsage.AnodeBWafers",
  890. $"{Module.ToString()} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit")}");
  891. }
  892. else
  893. {
  894. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit")}");
  895. AlarmListManager.Instance.AddWarn(Module.ToString(),
  896. $"{Module.ToString()}.metalUsage.AnodeBWafers",
  897. $"{Module.ToString()} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit")}");
  898. }
  899. }
  900. //AnodeAbathUsage
  901. if (metalUsage.AnodeABathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit") != 0)
  902. {
  903. if (metalUsage.AnodeABathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit"))
  904. {
  905. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit")}");
  906. PostMsg(MetalMsg.Error);
  907. AlarmListManager.Instance.AddDataError(Module.ToString(),
  908. $"{Module.ToString()}.metalUsage.AnodeABathUsage",
  909. $"{Module.ToString()} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit")}");
  910. }
  911. else
  912. {
  913. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit")}");
  914. AlarmListManager.Instance.AddWarn(Module.ToString(),
  915. $"{Module.ToString()}.metalUsage.AnodeABathUsage",
  916. $"{Module.ToString()} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit")}");
  917. }
  918. }
  919. //AnodeBbathUsage
  920. if (metalUsage.AnodeBBathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit") != 0)
  921. {
  922. if (metalUsage.AnodeBBathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit"))
  923. {
  924. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit")}");
  925. PostMsg(MetalMsg.Error);
  926. AlarmListManager.Instance.AddDataError(Module.ToString(),
  927. $"{Module.ToString()}.metalUsage.AnodeBBathUsage",
  928. $"{Module.ToString()} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit")}");
  929. }
  930. else
  931. {
  932. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module.ToString()} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit")}");
  933. AlarmListManager.Instance.AddWarn(Module.ToString(),
  934. $"{Module.ToString()}.metalUsage.AnodeBBathUsage",
  935. $"{Module.ToString()} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit")}");
  936. }
  937. }
  938. }
  939. }
  940. /// <summary>
  941. /// 获取A面使用的电量
  942. /// </summary>
  943. /// <returns></returns>
  944. private double GetAnodeAUsage()
  945. {
  946. if (_metalItem.SubType == STRATUS)
  947. {
  948. return Math.Round(_standardHotRunRecipeRoutine.AnodeAUsage, 3);
  949. }
  950. else
  951. {
  952. return Math.Round(_compactEmbranceRunRecipeRoutine.AnodeAUsage, 3);
  953. }
  954. }
  955. /// <summary>
  956. /// 获取B面使用的电量
  957. /// </summary>
  958. /// <returns></returns>
  959. private double GetAnodeBUsage()
  960. {
  961. if (_metalItem.SubType == STRATUS)
  962. {
  963. return Math.Round(_standardHotRunRecipeRoutine.AnodeBUsage, 3);
  964. }
  965. else
  966. {
  967. return Math.Round(_compactEmbranceRunRecipeRoutine.AnodeBUsage, 3);
  968. }
  969. }
  970. /// <summary>
  971. /// Abort Recipe
  972. /// </summary>
  973. /// <param name="param"></param>
  974. /// <returns></returns>
  975. public bool AbortRecipe(object[] param)
  976. {
  977. _runRecipeCompleteTime = DateTime.Now;
  978. if (_metalItem.SubType == STRATUS)
  979. {
  980. _standardHotRunRecipeRoutine.Abort();
  981. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  982. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _standardHotRunRecipeRoutine.MetalLotTrackDatas,
  983. _standardHotRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  984. }
  985. else
  986. {
  987. _compactEmbranceRunRecipeRoutine.Abort();
  988. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2");
  989. MetalLotTrackUtil.ExportMetalLotTrack(Module.ToString(), _compactEmbranceRunRecipeRoutine.MetalLotTrackDatas,
  990. _compactEmbranceRunRecipeRoutine.MetalLotTrackHeaderDatas, IsAuto, _currentRecipe, _metalItem.SubType);
  991. }
  992. return true;
  993. }
  994. #endregion
  995. #region Current Short Test
  996. /// <summary>
  997. /// Current Short Test
  998. /// </summary>
  999. /// <param name="param"></param>
  1000. /// <returns></returns>
  1001. private bool CurrentShortTest(object[] param)
  1002. {
  1003. return _currentShortTestRoutine.Start() == RState.Running;
  1004. }
  1005. /// <summary>
  1006. /// Current Short test监控
  1007. /// </summary>
  1008. /// <param name="param"></param>
  1009. /// <returns></returns>
  1010. private bool CurrentShortTestMonitor(object[] param)
  1011. {
  1012. RState rsstate = _currentShortTestRoutine.Monitor();
  1013. if (rsstate == RState.End)
  1014. {
  1015. return true;
  1016. }
  1017. else if (rsstate == RState.Failed || rsstate == RState.Timeout)
  1018. {
  1019. PostMsg(MetalMsg.Error);
  1020. return false;
  1021. }
  1022. return false;
  1023. }
  1024. #endregion
  1025. #region Close Flow Valve
  1026. /// <summary>
  1027. /// 关闭Flow Valve
  1028. /// </summary>
  1029. /// <param name="param"></param>
  1030. /// <returns></returns>
  1031. private bool CloseFlowValve(object[] param)
  1032. {
  1033. if (_metalItem.SubType == STRATUS)
  1034. {
  1035. StandardHotMetalDevice device = DEVICE.GetDevice<StandardHotMetalDevice>(Module.ToString());
  1036. if (device != null)
  1037. {
  1038. return device.SwitchToBypass("", null);
  1039. }
  1040. return false;
  1041. }
  1042. else
  1043. {
  1044. CompactMembranMetalDevice device = DEVICE.GetDevice<CompactMembranMetalDevice>(Module.ToString());
  1045. if (device != null)
  1046. {
  1047. string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  1048. CompactMembranReservoirDevice reservoirDevice = DEVICE.GetDevice<CompactMembranReservoirDevice>(reservoir);
  1049. if (reservoirDevice != null)
  1050. {
  1051. bool result = reservoirDevice.CAByPassOn("", null);
  1052. if (result)
  1053. {
  1054. return device.CellFlowValveOff("", null);
  1055. }
  1056. }
  1057. }
  1058. return false;
  1059. }
  1060. }
  1061. #endregion
  1062. #region Open Flow Valve
  1063. /// <summary>
  1064. /// 打开Flow Valve
  1065. /// </summary>
  1066. /// <param name="param"></param>
  1067. /// <returns></returns>
  1068. private bool OpenFlowValve(object[] param)
  1069. {
  1070. if (_metalItem.SubType == STRATUS)
  1071. {
  1072. StandardHotMetalDevice device = DEVICE.GetDevice<StandardHotMetalDevice>(Module.ToString());
  1073. if (device != null)
  1074. {
  1075. bool result = device.SwitchToFlow("", null);
  1076. if (result)
  1077. {
  1078. return device.OpenPump("", null);
  1079. }
  1080. }
  1081. return false;
  1082. }
  1083. else
  1084. {
  1085. CompactMembranMetalDevice device = DEVICE.GetDevice<CompactMembranMetalDevice>(Module.ToString());
  1086. if (device != null)
  1087. {
  1088. string reservoir = ReservoirItemManager.Instance.GetReservoirByMetal(Module.ToString());
  1089. CompactMembranReservoirDevice reservoirDevice = DEVICE.GetDevice<CompactMembranReservoirDevice>(reservoir);
  1090. if (reservoirDevice != null)
  1091. {
  1092. bool result = reservoirDevice.CAByPassOff("", null);
  1093. if (result)
  1094. {
  1095. return device.CellFlowValveOn("", null);
  1096. }
  1097. }
  1098. }
  1099. return false;
  1100. }
  1101. }
  1102. #endregion
  1103. #region Enter Flow Error
  1104. /// <summary>
  1105. /// 标记
  1106. /// </summary>
  1107. /// <returns></returns>
  1108. public bool SetFlowErrorFlag(string reason)
  1109. {
  1110. bool flowError = SC.GetValue<bool>("Metal.EnableFlowError");
  1111. if (!flowError)
  1112. {
  1113. PostMsg(MetalMsg.Error);
  1114. }
  1115. else
  1116. {
  1117. if (State == (int)MetalState.RunReciping)
  1118. {
  1119. _flowErrorFlag = true;
  1120. }
  1121. else
  1122. {
  1123. PostMsg(MetalMsg.Error);
  1124. }
  1125. }
  1126. WriteErrorReason(reason);
  1127. return true;
  1128. }
  1129. #endregion
  1130. public bool Check(int msg, out string reason, params object[] args)
  1131. {
  1132. reason = "";
  1133. return true;
  1134. }
  1135. public bool CheckAcked(int msg)
  1136. {
  1137. return true;
  1138. }
  1139. public int Invoke(string function, params object[] args)
  1140. {
  1141. switch (function)
  1142. {
  1143. case "HomeAll":
  1144. if (IsIdle)
  1145. {
  1146. return (int)FSM_MSG.NONE;
  1147. }
  1148. if (CheckToPostMessage<MetalState, MetalMsg>(eEvent.ERR_METAL, Module.ToString(), (int)MetalMsg.Initialize))
  1149. {
  1150. return (int)MetalMsg.Initialize;
  1151. }
  1152. else
  1153. {
  1154. return (int)FSM_MSG.NONE;
  1155. }
  1156. }
  1157. return (int)FSM_MSG.NONE;
  1158. }
  1159. /// <summary>
  1160. /// 监控 PM Counter Metal用量
  1161. /// </summary>
  1162. private bool MetalUsageMointor(string Module)
  1163. {
  1164. MetalUsage metalUsage = MetalUsageManager.Instance.GetMetalUsage(Module);
  1165. if (metalUsage != null)
  1166. {
  1167. //TotalAUsage
  1168. if (metalUsage.TotalUsage > SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit") != 0)
  1169. {
  1170. if (metalUsage.TotalUsage > SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit"))
  1171. {
  1172. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursFaultLimit")}");
  1173. return false;
  1174. }
  1175. else
  1176. {
  1177. LOG.WriteLog(eEvent.WARN_METAL, Module.ToString(), $"{Module} usage:{metalUsage.TotalUsage} is exceed MetalTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MetalTotalAmpHoursWarningLimit")}");
  1178. }
  1179. }
  1180. //AnodeAUsage
  1181. if (metalUsage.AnodeAUsage > SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit") != 0)
  1182. {
  1183. if (metalUsage.AnodeAUsage > SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit"))
  1184. {
  1185. LOG.WriteLog(eEvent.ERR_METAL, Module.ToString(), $"{Module} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursFaultLimit")}");
  1186. return false;
  1187. }
  1188. else
  1189. {
  1190. LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.AnodeAUsage} is exceed AnodeATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeATotalAmpHoursWarningLimit")}");
  1191. }
  1192. }
  1193. //AnodeBUsage
  1194. if (metalUsage.AnodeBUsage > SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit") != 0)
  1195. {
  1196. if (metalUsage.AnodeBUsage > SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit"))
  1197. {
  1198. LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursFaultLimit")}");
  1199. return false;
  1200. }
  1201. else
  1202. {
  1203. LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.AnodeBUsage} is exceed AnodeBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.AnodeBTotalAmpHoursWarningLimit")}");
  1204. }
  1205. }
  1206. //MembraneAUsage
  1207. if (metalUsage.MembranceAUsage > SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit") != 0)
  1208. {
  1209. if (metalUsage.MembranceAUsage > SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit"))
  1210. {
  1211. LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursFaultLimit")}");
  1212. return false;
  1213. }
  1214. else
  1215. {
  1216. LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.MembranceAUsage} is exceed MembraneATotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneATotalAmpHoursWarningLimit")}");
  1217. }
  1218. }
  1219. //MembraneBUsage
  1220. if (metalUsage.MembranceBUsage > SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit") && SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit") != 0 && SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit") != 0)
  1221. {
  1222. if (metalUsage.MembranceBUsage > SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit"))
  1223. {
  1224. LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursFaultLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursFaultLimit")}");
  1225. }
  1226. else
  1227. {
  1228. LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.MembranceBUsage} is exceed MembraneBTotalAmpHoursWarningLimit:{SC.GetValue<double>($"Metal.{Module}.MembraneBTotalAmpHoursWarningLimit")}");
  1229. }
  1230. }
  1231. //TotalWafer
  1232. if (metalUsage.TotalWafers > SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit") && SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit") != 0)
  1233. {
  1234. if (metalUsage.TotalWafers > SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit"))
  1235. {
  1236. LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersFaultLimit")}");
  1237. return false;
  1238. }
  1239. else
  1240. {
  1241. LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.TotalWafers} is exceed MetalTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.MetalTotalWafersWarningLimit")}");
  1242. }
  1243. }
  1244. //AnodeAWafer
  1245. if (metalUsage.AnodeAWafers > SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit") != 0)
  1246. {
  1247. if (metalUsage.AnodeAWafers > SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit"))
  1248. {
  1249. LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersFaultLimit")}");
  1250. return false;
  1251. }
  1252. else
  1253. {
  1254. LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.AnodeAWafers} is exceed AnodeATotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeATotalWafersWarningLimit")}");
  1255. }
  1256. }
  1257. //AnodeBWafer
  1258. if (metalUsage.AnodeBWafers > SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit") != 0)
  1259. {
  1260. if (metalUsage.AnodeBWafers > SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit"))
  1261. {
  1262. LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersFaultLimit")}");
  1263. return false;
  1264. }
  1265. else
  1266. {
  1267. LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.AnodeBWafers} is exceed AnodeBTotalWafersWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBTotalWafersWarningLimit")}");
  1268. }
  1269. }
  1270. //AnodeAbathUsage
  1271. if (metalUsage.AnodeABathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit") != 0)
  1272. {
  1273. if (metalUsage.AnodeABathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit"))
  1274. {
  1275. LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysFaultLimit")}");
  1276. return false;
  1277. }
  1278. else
  1279. {
  1280. LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.AnodeABathUsage} is exceed AnodeABathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeABathTotalUsageDaysWarningLimit")}");
  1281. }
  1282. }
  1283. //AnodeBbathUsage
  1284. if (metalUsage.AnodeBBathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit") && SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit") != 0 && SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit") != 0)
  1285. {
  1286. if (metalUsage.AnodeBBathUsage > SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit"))
  1287. {
  1288. LOG.WriteLog(eEvent.ERR_METAL, Module, $"{Module} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysFaultLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysFaultLimit")}");
  1289. return false;
  1290. }
  1291. else
  1292. {
  1293. LOG.WriteLog(eEvent.WARN_METAL, Module, $"{Module} usage:{metalUsage.AnodeBBathUsage} is exceed AnodeBBathTotalUsageDaysWarningLimit:{SC.GetValue<int>($"Metal.{Module}.AnodeBBathTotalUsageDaysWarningLimit")}");
  1294. }
  1295. }
  1296. }
  1297. return true;
  1298. }
  1299. }
  1300. public enum MetalMsg
  1301. {
  1302. NONE,
  1303. Error,
  1304. ResumeError,
  1305. Initialize,
  1306. Manual,
  1307. Auto,
  1308. CurrentShortTest,
  1309. CloseFlowValve,
  1310. OpenFlowValve,
  1311. RunRecipe,
  1312. Abort,
  1313. Init
  1314. }
  1315. }