| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357 | using Aitex.Core.RT.Routine;using MECF.Framework.Common.Routine;using MECF.Framework.Common.Utilities;using CyberX8_Core;using System;using System.Collections.Generic;using System.Linq;using System.Text;using System.Threading.Tasks;using CyberX8_RT.Devices.Reservoir;using Aitex.Core.RT.Device;using MECF.Framework.Common.RecipeCenter;using Aitex.Core.RT.Log;using CyberX8_RT.Devices.PowerSupplier;using CyberX8_RT.Devices.Temperature;using CyberX8_RT.Devices.Metal;using Aitex.Core.RT.SCCore;using CyberX8_RT.Devices.Facilities;namespace CyberX8_RT.Modules.Reservoir{    public class CompactEmbranceInitializeRoutine : RoutineBase, IRoutine    {        private enum InitializeStep        {            AutoDiReplen,            CAPump,            CAPumpWait,            ANPump,            ANPumpWait,            ManualCellDisableHED,            AutoCellAutoEnableHED,            AutoCellAutoEnableHEDDelay,            AutoCellAutoEnableHEDCheck,            AutoCellAutoCheckPowerSupplier,            AutoCellAutoLinmotReset,            AutoCellAutoLinmotResetCheck,            CellWSUnclamp,            End        }        #region 常量         private const string AUTO = "Auto";        private const string MANUAL = "Manual";        private const int ENABLE = 5;        #endregion        #region 内部变量        CAPumpOnRoutine _caPumpOnRoutine;        ANPumpOnRoutine _anPumpOnRoutine;        CompactMembranReservoirDevice _reservoirDevice;        private ResRecipe _recipe;         private List<CompactMembranMetalDevice> _metalDevices = new List<CompactMembranMetalDevice>();        private TemperatureController _temperatureController;        private double _hedFlowLowLimit;        private int _autoHedDelay = 0;        #endregion        /// <summary>        /// 构造函数        /// </summary>        /// <param name="module"></param>        public CompactEmbranceInitializeRoutine(string module) : base(module)        {        }        /// <summary>        /// 中止        /// </summary>        public void Abort()        {            _caPumpOnRoutine.Abort();            _anPumpOnRoutine.Abort();        }        /// <summary>        /// 监控        /// </summary>        /// <returns></returns>        public RState Monitor()        {            Runner.RunIf(InitializeStep.AutoDiReplen,_recipe.DIReplenEnable||_recipe.ANDIReplenEnable,CheckFacilitiesDiReplenStatus,_delay_1ms)                .Run(InitializeStep.CAPump, () => { return _caPumpOnRoutine.Start() == RState.Running; }, _delay_1s)               .WaitWithStopCondition(InitializeStep.CAPumpWait, () => CommonFunction.CheckRoutineEndState(_caPumpOnRoutine), () => CommonFunction.CheckRoutineStopState(_caPumpOnRoutine))               .Run(InitializeStep.ANPump, () => { return _anPumpOnRoutine.Start() == RState.Running; }, _delay_1ms)               .WaitWithStopCondition(InitializeStep.ANPumpWait, () => CommonFunction.CheckRoutineEndState(_anPumpOnRoutine), () => CommonFunction.CheckRoutineStopState(_anPumpOnRoutine))                //Manual cell Bypass同时Enable HED                .Run(InitializeStep.AutoCellAutoEnableHED, AutoHedOn, _delay_1ms)                .Delay(InitializeStep.AutoCellAutoEnableHEDDelay, _autoHedDelay)                .Run(InitializeStep.AutoCellAutoEnableHEDCheck, AutoHedSuccess, _delay_1ms)                //检验PowerSupplier通信                .Run(InitializeStep.AutoCellAutoCheckPowerSupplier, AutoMetalsPowerSupplierCommuncationStatus, _delay_1ms)                //Cell Linmot Reset                .RunIf(InitializeStep.AutoCellAutoLinmotReset, _reservoirDevice.OperationMode == AUTO, AutoMetalResetLinmot, _delay_1ms)                .WaitWithStopCondition(InitializeStep.AutoCellAutoLinmotResetCheck, CheckAutoMetalResetStatus, CheckAutoMetalResetStopStatus)                //Cell Unclamp                .Run(InitializeStep.CellWSUnclamp, MetalsWHUnclampOn, _delay_1ms)                .End(InitializeStep.End, NullFun, _delay_1ms);            return Runner.Status;        }        /// <summary>        /// 检验总Di有没有开        /// </summary>        /// <returns></returns>        private bool CheckFacilitiesDiReplenStatus()        {            SystemFacilities systemFacilities = DEVICE.GetDevice<SystemFacilities>("System.Facilities");            if (systemFacilities != null)            {                bool result= systemFacilities.DIReplenEnable;                if (!result)                {                    LOG.WriteLog(eEvent.ERR_RESERVOIR, Module, "Facilities DiReplen is disable");                }                return result;            }            return false;        }        /// <summary>        /// 启用HED        /// </summary>        /// <returns></returns>        private bool EnableHED()        {            return _temperatureController.EnableOperation("", null);        }        /// <summary>        /// 检验所有Metal处于Manual        /// </summary>        /// <returns></returns>        private bool CheckAutoAndAllMetalAuto()        {            if (_reservoirDevice.OperationMode != AUTO)            {                return false;            }            for (int i = 0; i < _metalDevices.Count; i++)            {                CompactMembranMetalDevice hotMetalDevice = _metalDevices[i];                if (hotMetalDevice.OperationMode != AUTO)                {                    return false;                }            }            return true;        }        /// <summary>        /// 自动HED On        /// </summary>        /// <returns></returns>        private bool AutoHedOn()        {            double hedFlow = _reservoirDevice.ReservoirData.CAHedFlow;            bool result = hedFlow > _hedFlowLowLimit;            if (!result)            {                LOG.WriteLog(eEvent.ERR_RESERVOIR, Module, $"HED Flow {hedFlow} is less than {_hedFlowLowLimit}");                return false;            }            _autoHedDelay = _delay_2s;            _temperatureController.EnableOperation("", null);            _temperatureController.SetTargetTemperatureOperation("", new object[] { _recipe.TemperatureSetPoint });            return true;        }        /// <summary>        /// 检验Hed是否成功        /// </summary>        /// <returns></returns>        private bool AutoHedSuccess()        {            if (_temperatureController.TemperatureData.ControlOperationModel == 0)            {                LOG.WriteLog(eEvent.ERR_RESERVOIR, Module, "Temperature control is disable");                return false;            }            if (Math.Abs(_recipe.TemperatureSetPoint - _temperatureController.TemperatureData.TargetTemperature) >= 0.1 * _recipe.TemperatureSetPoint)            {                LOG.WriteLog(eEvent.ERR_RESERVOIR, Module, $"recipe temperature {_recipe.TemperatureSetPoint} is not match temperature target point {_temperatureController.TemperatureData.TargetTemperature}");                return false;            }            return true;        }        /// <summary>        /// 检验Metal A/B PowerSupplier通信状态        /// </summary>        /// <returns></returns>        private bool AutoMetalsPowerSupplierCommuncationStatus()        {            for (int i = 0; i < _metalDevices.Count; i++)            {                CompactMembranMetalDevice hotMetalDevice = _metalDevices[i];                if (hotMetalDevice.IsAuto)                {                    if (hotMetalDevice.SideAPowerSupplier == null)                    {                        LOG.WriteLog(eEvent.ERR_RESERVOIR, Module, "Side A PowerSupplier is null");                        return false;                    }                    if (hotMetalDevice.SideBPowerSupplier == null)                    {                        LOG.WriteLog(eEvent.ERR_RESERVOIR, Module, "Side B PowerSupplier is null");                        return false;                    }                    if (!hotMetalDevice.SideAPowerSupplier.IsConnected)                    {                        LOG.WriteLog(eEvent.ERR_RESERVOIR, Module, $"Side A PowerSupplier {hotMetalDevice.SideAPowerSupplier.Name} is not connected");                        return false;                    }                    if (!hotMetalDevice.SideBPowerSupplier.IsConnected)                    {                        LOG.WriteLog(eEvent.ERR_RESERVOIR, Module, $"Side B PowerSupplier {hotMetalDevice.SideBPowerSupplier.Name} is not connected");                        return false;                    }                }            }            return true;        }        /// <summary>        /// Auto Metal reset linmot        /// </summary>        /// <returns></returns>        private bool AutoMetalResetLinmot()        {            for (int i = 0; i < _metalDevices.Count; i++)            {                CompactMembranMetalDevice hotMetalDevice = _metalDevices[i];                if (hotMetalDevice.OperationMode == AUTO)                {                    bool result = hotMetalDevice.ResetLinmot();                    if (!result)                    {                        LOG.WriteLog(eEvent.ERR_RESERVOIR, Module, "Reset linmot error");                        return false;                    }                }            }            return true;        }        /// <summary>        /// Auto Metal reset linmot        /// </summary>        /// <returns></returns>        private bool CheckAutoMetalResetStatus()        {            if (_reservoirDevice.OperationMode == MANUAL)            {                return true;            }            for (int i = 0; i < _metalDevices.Count; i++)            {                CompactMembranMetalDevice metalDevice = _metalDevices[i];                if (metalDevice.OperationMode == AUTO)                {                    bool result = metalDevice.CheckLinmotRoutineEnd();                    if (!result)                    {                        return false;                    }                }            }            return true;        }        /// <summary>        /// Auto Metal reset linmot        /// </summary>        /// <returns></returns>        private bool CheckAutoMetalResetStopStatus()        {            if (_reservoirDevice.OperationMode == MANUAL)            {                return false;            }            for (int i = 0; i < _metalDevices.Count; i++)            {                CompactMembranMetalDevice hotMetalDevice = _metalDevices[i];                if (hotMetalDevice.OperationMode == AUTO)                {                    bool result = hotMetalDevice.CheckLinmotRoutineError();                    if (result)                    {                        return true;                    }                }            }            return false;        }        /// Metal WS Unclamp        /// </summary>        /// <returns></returns>        private bool MetalsWHUnclampOn()        {            for (int i = 0; i < _metalDevices.Count; i++)            {                CompactMembranMetalDevice hotMetalDevice = _metalDevices[i];                if (hotMetalDevice != null && !hotMetalDevice.IsDisable)                {                    bool result = hotMetalDevice.WaferHolderUnclampOn("", null);                    if (!result)                    {                        return false;                    }                }            }            _reservoirDevice.InitializeCrossDose(true);            return true;        }        /// <summary>        /// 启动        /// </summary>        /// <param name="objs"></param>        /// <returns></returns>        public RState Start(params object[] objs)        {            _caPumpOnRoutine = new CAPumpOnRoutine(Module);            _anPumpOnRoutine = new ANPumpOnRoutine(Module);            _reservoirDevice = DEVICE.GetDevice<CompactMembranReservoirDevice>(Module);            List<MetalCellDevice> lstDevice = (List<MetalCellDevice>)objs[0];            _metalDevices.Clear();            for (int i = 0; i < lstDevice.Count; i++)            {                _metalDevices.Add((CompactMembranMetalDevice)lstDevice[i]);            }            _temperatureController = (TemperatureController)objs[1];            _recipe = _reservoirDevice.Recipe;            _autoHedDelay = 0;            _hedFlowLowLimit = SC.GetValue<double>($"Reservoir.{Module}.HEDFlowLowLimit");            if (!CheckPreCondition())            {                return RState.Failed;            }            _reservoirDevice.InitializeCrossDose(false);            return Runner.Start(Module, "Start C&M Initialize");        }        /// <summary>        /// 检验前置条件        /// </summary>        /// <returns></returns>        private bool CheckPreCondition()        {            if (_recipe == null)            {                LOG.WriteLog(eEvent.ERR_RESERVOIR, Module, "recipe is null");                return false;            }            if (!_temperatureController.IsConnected)            {                LOG.WriteLog(eEvent.ERR_RESERVOIR, Module, "Temperature is not connected");                return false;            }            return true;        }    }}
 |