| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485486487488489490491492493494495496497498499500501502503504 | using Aitex.Core.RT.Device;using Aitex.Core.RT.Routine;using MECF.Framework.Common.Equipment;using MECF.Framework.Common.Routine;using CyberX8_Core;using CyberX8_RT.Devices.AXIS;using CyberX8_RT.Devices.Loader;using System;using System.Collections.Generic;using System.Linq;using System.Text;using System.Threading.Tasks;using MECF.Framework.Common.Utilities;using Aitex.Core.RT.Log;using MECF.Framework.Common.CommonData.Loader;using CyberX8_RT.Modules.Dryer;using MECF.Framework.Common.Persistent.Temperature;using MECF.Framework.Common.WaferHolder;namespace CyberX8_RT.Modules.Loader{    public class LoaderLoadAllSideRoutine : RoutineBase, IRoutine    {        private enum LoadStep        {            SideALoad,            Delay,            SideBLoad,            SideAllLoadWait,            LeakTest,            LeakTestWait,            RotationGoToTRNPA,            RotationGoToTRNPAWait,            UnclampWaferHolder,            End        }        #region 常量        private const string SIDE_A = "SideA";        private const string SIDE_B = "SideB";        private const int LOTTRACK_TIME = 1000;        #endregion        #region 内部变量        private JetAxisBase _rotationAxis;        private LoaderLoadRoutine _sideALoadRoutine;        private LoaderLoadRoutine _sideBLoadRoutine;        private LoaderCommonDevice _loaderCommonDevice;        private bool _isSideALoaded = false;        private bool _isSideBLoaded = false;        private bool _isSideAStop = false;        private bool _isSideBStop = false;        /// <summary>        /// lotTrack time        /// </summary>        private DateTime _lotTackTime = DateTime.Now;        /// <summary>        /// Loader Common        /// </summary>        private LoaderCommonDevice _loaderCommon;        /// <summary>        /// LoaderSide A        /// </summary>        private LoaderSideDevice _loaderSideA;        /// <summary>        /// LoaderSide B        /// </summary>        private LoaderSideDevice _loaderSideB;        /// <summary>        /// Loader LotTrackData        /// </summary>        private List<LoaderLotTrackData> _datas = new List<LoaderLotTrackData>();        /// <summary>        /// Flow LotTrackData        /// </summary>        private List<LoaderFlowLotTrackData> _flowDatas = new List<LoaderFlowLotTrackData>();        /// <summary>        /// Loader Start and Finish Time        /// </summary>        private List<DateTime> _loadTimeList = new List<DateTime>();        #endregion        #region 属性        /// <summary>        /// UnLoad LotTrackData        /// </summary>        public List<LoaderLotTrackData> LoadLotTrackDatas { get { return _datas; } }        /// <summary>        /// Flow LotTrackData        /// </summary>        public List<LoaderFlowLotTrackData> FlowLotTrackDatas { get { return _flowDatas; } }        /// <summary>        /// LoadTimeList        /// </summary>        public List<DateTime> LoadTimeList { get { return _loadTimeList; } }        #endregion        /// <summary>        /// 构造函数        /// </summary>        /// <param name="module"></param>        public LoaderLoadAllSideRoutine(string module) : base(module)        {        }        /// <summary>        /// 中止        /// </summary>        public void Abort()        {        }        /// <summary>        /// 监控        /// </summary>        /// <returns></returns>        public RState Monitor()        {            //记录Lot track            LottrackRecord();            Runner.Run(LoadStep.SideALoad, () => StartLoadRoutine(_sideALoadRoutine,_isSideALoaded), _delay_1ms)                .Delay(LoadStep.Delay,500)                .Run(LoadStep.SideBLoad, () => StartLoadRoutine(_sideBLoadRoutine,_isSideBLoaded), _delay_1ms)                .WaitWithStopCondition(LoadStep.SideAllLoadWait, CheckLoadAllRoutineEndStatus,CheckLoadAllRoutineStopStatus)                .Run(LoadStep.LeakTest, StartFlowTest, _delay_1ms)                .WaitWithStopCondition(LoadStep.LeakTestWait, CheckFlowTestEndStatus, CheckFlowTestStopStatus)                .Run(LoadStep.RotationGoToTRNPA,RotationGotoTransporterA,_delay_1s)                .WaitWithStopCondition(LoadStep.RotationGoToTRNPAWait,CheckRotationPositionStatus,CheckRotationPositionRunStop)                .Run(LoadStep.UnclampWaferHolder,WaferHolderClampOffAction,_delay_1ms)                .End(LoadStep.End, UpdateWaferHolderUse, _delay_1ms);            return Runner.Status;        }        /// <summary>        /// 检验Rotation移动状态        /// </summary>        /// <returns></returns>        private bool CheckRotationPositionStatus()        {            return _rotationAxis.Status == RState.End;        }        /// <summary>        /// 检验Rotation是否还在运动        /// </summary>        /// <returns></returns>        private bool CheckRotationPositionRunStop()        {            bool result= _rotationAxis.Status == RState.Failed||_rotationAxis.Status==RState.Timeout;            if (result)            {                NotifyError(eEvent.ERR_LOADER, "rotation goto position failed", 2);            }            return result;        }        /// <summary>        /// 启动load routine        /// </summary>        /// <param name="loadRoutine"></param>        /// <returns></returns>        private bool StartLoadRoutine(LoaderLoadRoutine loadRoutine,bool isSideLoaded)        {            if (isSideLoaded)            {                return true;            }            bool result= loadRoutine.Start()==RState.Running;            if (!result)            {                NotifyError(eEvent.ERR_LOADER, loadRoutine.ErrorMsg, 0);            }            return result;        }        /// <summary>        /// 检验LoadAll完成状态        /// </summary>        /// <returns></returns>        private bool CheckLoadAllRoutineEndStatus()        {            bool sideAResult = true;            if (!_isSideALoaded)            {                sideAResult = CheckLoadRoutineEndStatus(_sideALoadRoutine);            }            bool sideBResult = true;            if(!_isSideBLoaded)            {                sideBResult= CheckLoadRoutineEndStatus(_sideBLoadRoutine);            }            if (sideAResult && sideBResult)            {                _loadTimeList.Add(DateTime.Now);            }            return sideAResult && sideBResult;        }        /// <summary>        /// 检验LoadAll停止状态        /// </summary>        /// <returns></returns>        private bool CheckLoadAllRoutineStopStatus()        {            bool sideAComplete = false;            if(!_isSideALoaded&&!_isSideAStop)            {                RState ret = _sideALoadRoutine.Monitor();                _isSideAStop = ret == RState.Failed || ret == RState.Timeout;                sideAComplete = (ret != RState.Running);                if (_isSideAStop)                {                    NotifyError(eEvent.ERR_LOADER, $"load A failed\r\n{_sideALoadRoutine.ErrorMsg}", 0);                }            }            bool sideBComplete = false;            if (!_isSideBLoaded&&!_isSideBStop)            {                RState ret = _sideBLoadRoutine.Monitor();                _isSideBStop = ret == RState.Failed || ret == RState.Timeout;                sideBComplete = (ret != RState.Running);                if (_isSideBStop)                {                    NotifyError(eEvent.ERR_LOADER, $"load B failed\r\n{_sideBLoadRoutine.ErrorMsg}", 0);                }            }            return (_isSideAStop&&sideBComplete)||(_isSideBStop&&sideAComplete);        }        /// <summary>        /// 检验routine完成状态        /// </summary>        /// <param name="loadRoutine"></param>        /// <returns></returns>        private bool CheckLoadRoutineEndStatus(LoaderLoadRoutine loadRoutine)        {            return loadRoutine.Monitor() == RState.End;        }        /// <summary>        /// 启动Flowtest        /// </summary>        /// <returns></returns>        private bool StartFlowTest()        {            bool result= _loaderCommonDevice.StartFlowTestAction();            if (!result)            {                NotifyError(eEvent.ERR_LOADER, "Start Flow Test failed", 1);            }            return result;        }        /// <summary>        /// 检验FlowTest停止状态        /// </summary>        /// <returns></returns>        private bool CheckFlowTestStopStatus()        {            if (_loaderCommonDevice.Status == RState.Failed || _loaderCommonDevice.Status == RState.Timeout)            {                NotifyError(eEvent.ERR_LOADER, "Flow Test failed",1);                return true;            }            return false;        }        /// <summary>        /// 检验FlowTest完成状态        /// </summary>        /// <returns></returns>        private bool CheckFlowTestEndStatus()        {            bool result = _loaderCommonDevice.Status == RState.End;            if (result)            {                _flowDatas = _loaderCommonDevice.FlowLotTrackDatas;            }            return result;        }        /// <summary>        /// Rotation 运动至TRNPA        /// </summary>        /// <returns></returns>        private bool RotationGotoTransporterA()        {            bool result = _rotationAxis.PositionStation("TRNPA", false);            if (!result)            {                NotifyError(eEvent.ERR_LOADER, "rotation start goto TRNPA failed", 2);            }            return result;        }        /// <summary>        /// Wafer Holder Clamp Off        /// </summary>        /// <returns></returns>        public bool WaferHolderClampOffAction()        {            bool result = _loaderCommonDevice.WaferHolderClampOffAction();            if (!result)            {                NotifyError(eEvent.ERR_LOADER, "Wafer Shuttle Clamp Off failed", 2);            }            return result;        }        /// <summary>        /// 更新WaferHolder总用量        /// </summary>        /// <returns></returns>        private bool UpdateWaferHolderUse()        {            WaferHolderInfo waferHolderInfo = WaferHolderManager.Instance.GetWaferHolder("Loader");            if(waferHolderInfo != null)            {                waferHolderInfo.TotalUses += 1;                WaferHolderManager.Instance.UpdateWaferHolderInfo(waferHolderInfo);            }            return true;        }        /// <summary>        /// 启动        /// </summary>        /// <param name="objs"></param>        /// <returns></returns>        public RState Start(params object[] objs)        {            InitializeParameters();            _loaderCommon = DEVICE.GetDevice<LoaderCommonDevice>($"{Module}.Common");            _loaderSideA = DEVICE.GetDevice<LoaderSideDevice>($"{Module}.SideA");            _loaderSideB = DEVICE.GetDevice<LoaderSideDevice>($"{Module}.SideB");            //清除lotTrack数据            _datas.Clear();            _flowDatas.Clear();            _loadTimeList.Clear();            _loadTimeList.Add(DateTime.Now);                        return Runner.Start(Module, "Start LoadAll");        }        /// <summary>        /// 初始化参数        /// </summary>        private void InitializeParameters()        {            _isSideALoaded = false;            _isSideBLoaded = false;            _isSideAStop = false;            _isSideBStop = false;            _rotationAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Rotation");            _sideALoadRoutine = new LoaderLoadRoutine(ModuleName.Loader1.ToString(), SIDE_A);            _sideBLoadRoutine = new LoaderLoadRoutine(ModuleName.Loader1.ToString(), SIDE_B);            _loaderCommonDevice = DEVICE.GetDevice<LoaderCommonDevice>($"{ModuleName.Loader1}.Common");        }        /// <summary>        /// 重试        /// </summary>        /// <param name="step"></param>        public RState Retry(int step)        {            InitializeParameters();            List<Enum> preStepIds = new List<Enum>();            _datas.Clear();            if (step == 0 || step == -1)            {                _isSideALoaded = CheckSideLoadCondition("A", step,false);                _isSideBLoaded=CheckSideLoadCondition("B", step,false);                return Runner.Retry(LoadStep.SideALoad, preStepIds, Module, "LoadAll Retry");            }            else if (step == 1)            {                AddPreSteps(LoadStep.LeakTest, preStepIds);                return Runner.Retry(LoadStep.LeakTest, preStepIds, Module, $"LoadAll step {LoadStep.LeakTest} start Retry");            }            else            {                AddPreSteps(LoadStep.RotationGoToTRNPA, preStepIds);                return Runner.Retry(LoadStep.RotationGoToTRNPA, preStepIds, Module, $"LoadAll step {LoadStep.RotationGoToTRNPA} start Retry");            }                   }        /// <summary>        /// 忽略前        /// </summary>        /// <param name="step"></param>        /// <param name="preStepIds"></param>        private void AddPreSteps(LoadStep step, List<Enum> preStepIds)        {            for (int i = 0; i < (int)step; i++)            {                preStepIds.Add((LoadStep)i);            }        }        /// <summary>        /// 检验前面Unload完成状态        /// </summary>        /// <returns></returns>        public bool CheckCompleteCondition(int index)        {            if (!CheckSideLoadCondition("A", index,true))            {                return false;            }            if (!CheckSideLoadCondition("B", index,true))            {                return false;            }            JetAxisBase loaderRotationAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.Rotation");            double loaderRotationPosition = loaderRotationAxis.MotionData.MotorPosition;            if (!loaderRotationAxis.CheckPositionIsInStation(loaderRotationPosition, "TRNPA"))            {                NotifyError(eEvent.ERR_LOADER, $"loader rotation {loaderRotationPosition} not in TRNPA", index);            }            return true;        }        /// <summary>        /// 检验Side Unload情况         /// </summary>        /// <param name="side"></param>        /// <param name="index"></param>        /// <returns></returns>        private bool CheckSideLoadCondition(string side, int index,bool showError)        {            JetAxisBase shuttleAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.Shuttle{side}");            double shuttlePosition = shuttleAxis.MotionData.MotorPosition;            if (!shuttleAxis.CheckPositionIsInStation(shuttlePosition, "CLOSED"))            {                if (showError)                {                    NotifyError(eEvent.ERR_LOADER, $"shuttle{side} {shuttlePosition} is not in closed", index);                }                return false;            }            JetAxisBase tiltAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.Tilt{side}");            double tiltPosition = tiltAxis.MotionData.MotorPosition;            if (tiltAxis.CheckPositionIsInStation(tiltPosition, "VERT"))            {                if (showError)                {                    NotifyError(eEvent.ERR_LOADER, $"tilt{side} {tiltPosition} is not in VERT", index);                }                return false;            }            JetAxisBase crsAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.LS{side}");            double crsPosition = crsAxis.MotionData.MotorPosition;            if (!crsAxis.CheckPositionIsInStation(crsPosition, "Setup"))            {                if (showError)                {                    NotifyError(eEvent.ERR_LOADER, $"LS{side} {crsPosition} is not in Setup", index);                }                return false;            }            LoaderSideDevice loaderSideDevice = DEVICE.GetDevice<LoaderSideDevice>($"{ModuleName.Loader1}.Side{side}");            if (loaderSideDevice.SideData.DoorLowerUnlocked || loaderSideDevice.SideData.DoorUpperUnlocked)            {                if (showError)                {                    NotifyError(eEvent.ERR_LOADER, $"side{side} door unlocked", index);                }            }            return true;        }        /// <summary>        /// 记录Lottrack        /// </summary>        private void LottrackRecord()        {            //记录Lottrack            if (DateTime.Now.Subtract(_lotTackTime).TotalMilliseconds >= LOTTRACK_TIME)            {                AddLotTrackData();                _lotTackTime = DateTime.Now;            }        }        /// <summary>        /// 获取Lot Track数据        /// </summary>        /// <returns></returns>        private void AddLotTrackData()        {            LoadStep step = (LoadStep)Runner.CurrentStep;            if (step <= LoadStep.SideAllLoadWait)            {                LoaderLotTrackData data = new LoaderLotTrackData();                data.TimeStamp = DateTime.Now;                data.LoaderABernoulliBladderEnable = _loaderSideA.SideData.BernoulliBladder;                data.LoaderABernoulliExtended = _loaderSideA.SideData.BernoulliExtended;                data.LoaderABernoulliBladderPressure = _loaderSideA.SideData.BernoulliBladderPressure;                data.LoaderABernoulliN2Pressure = _loaderSideA.SideData.BernoulliPressure;                                data.LoaderACRSVacuum = _loaderSideA.SideData.CRSVacuum;                data.LoaderACRSVacuumAnlg = _loaderSideA.SideData.CRSVacuumValue;                data.LoaderAWHPressure = _loaderSideA.SideData.WHBladderPressure;                data.LoaderATranslatePressure = _loaderSideA.SideData.TransPressure;                data.LoaderBBernoulliBladderEnable = _loaderSideB.SideData.BernoulliBladder;                data.LoaderBBernoulliExtended = _loaderSideB.SideData.BernoulliExtended;                data.LoaderBBernoulliBladderPressure = _loaderSideB.SideData.BernoulliBladderPressure;                data.LoaderBBernoulliN2Pressure = _loaderSideB.SideData.BernoulliPressure;                data.LoaderBCRSVacuum = _loaderSideB.SideData.CRSVacuum;                data.LoaderBCRSVacuumAnlg = _loaderSideB.SideData.CRSVacuumValue;                data.LoaderBWHPressure = _loaderSideB.SideData.WHBladderPressure;                data.LoaderBTranslatePressure = _loaderSideB.SideData.TransPressure;                data.LoaderWHClamped = _loaderCommon.CommonData.WaferHolderClamp;                _datas.Add(data);            }                    }            }}
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