PufOnlyPlaceToLoaderRoutine.cs 8.8 KB

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  1. using Aitex.Core.RT.Device;
  2. using Aitex.Core.RT.Log;
  3. using Aitex.Core.RT.Routine;
  4. using MECF.Framework.Common.Equipment;
  5. using MECF.Framework.Common.Routine;
  6. using MECF.Framework.Common.Utilities;
  7. using CyberX8_Core;
  8. using CyberX8_RT.Devices.AXIS;
  9. using CyberX8_RT.Devices.Loader;
  10. using CyberX8_RT.Devices.PUF;
  11. using System;
  12. using System.Collections.Generic;
  13. using System.Linq;
  14. using System.Text;
  15. using System.Threading.Tasks;
  16. namespace CyberX8_RT.Modules.PUF
  17. {
  18. public class PufOnlyPlaceToLoaderRoutine : RoutineBase, IRoutine
  19. {
  20. private enum PlaceStep
  21. {
  22. LipSealGotoUnlock,
  23. LipSealGotoUnlockWait,
  24. VacuumLevelCheck,
  25. SideConditionRoutine,
  26. SideConditionRoutineWait,
  27. RotationGotoLoaderPlaceDown,
  28. RotationGotoLoaderPlaceDownWait,
  29. ChuckOut,
  30. CheckChuckOut,
  31. VacuumOff,
  32. ChuckIn,
  33. CheckChuckIn,
  34. End
  35. }
  36. #region 常量
  37. private const string SideA = "SideA";
  38. private const string SideB = "SideB";
  39. private const string WAFER_ABSENT = "WaferAbsent";
  40. #endregion
  41. #region 内部变量
  42. private bool _isSecondPlaceVacuumCheck = false;
  43. private string _side;
  44. private JetAxisBase _flipAxis;
  45. private JetAxisBase _rotationAxis;
  46. private PufVacuum _vacuum;
  47. private JetAxisBase _loaderCrsAxis;
  48. private PufWaferPickSubRoutine _pufWaferPickSubRoutine;
  49. private PufChuckRoutine _chuckRoutine;
  50. #endregion
  51. /// <summary>
  52. /// 构造函数
  53. /// </summary>
  54. /// <param name="module"></param>
  55. public PufOnlyPlaceToLoaderRoutine(string module) : base(module)
  56. {
  57. _pufWaferPickSubRoutine = new PufWaferPickSubRoutine(module);
  58. _chuckRoutine = new PufChuckRoutine(module);
  59. }
  60. /// <summary>
  61. /// 中止
  62. /// </summary>
  63. public void Abort()
  64. {
  65. if (_pufWaferPickSubRoutine != null)
  66. {
  67. _pufWaferPickSubRoutine.Abort();
  68. }
  69. _flipAxis.StopPositionOperation();
  70. _rotationAxis.StopPositionOperation();
  71. Runner.Stop("Manual Abort");
  72. }
  73. /// <summary>
  74. /// 监控
  75. /// </summary>
  76. /// <returns></returns>
  77. public RState Monitor()
  78. {
  79. Runner.Run(PlaceStep.LipSealGotoUnlock, LipSealGotoUnlock, _delay_1ms)
  80. .WaitWithStopCondition(PlaceStep.LipSealGotoUnlockWait, CheckLipSealEndStatus, CheckLipSealStopStatus)
  81. .Run(PlaceStep.VacuumLevelCheck, CheckWaferPresent, _delay_1ms)
  82. .RunConditionSubRoutine(PlaceStep.SideConditionRoutine, SideConditionIndex, new IRoutine[] { _pufWaferPickSubRoutine }, new object[] { _side })
  83. .WaitConditionSubRoutine(PlaceStep.SideConditionRoutineWait)
  84. .Run(PlaceStep.RotationGotoLoaderPlaceDown, () => _rotationAxis.PositionStation("LoaderPutDown"), _delay_1ms)
  85. .WaitWithStopCondition(PlaceStep.RotationGotoLoaderPlaceDownWait, CheckRotationPositionStatus, CheckRotationPositionRunStop)
  86. .Run(PlaceStep.ChuckOut, () => { return _chuckRoutine.Start(true) == RState.Running; }, NullFun, 100)
  87. .WaitWithStopCondition(PlaceStep.CheckChuckOut, () => CommonFunction.CheckRoutineEndState(_chuckRoutine), () => CommonFunction.CheckRoutineStopState(_chuckRoutine))
  88. .Run(PlaceStep.VacuumOff, VacuumOff, CheckWaferAbsent,_delay_5s)
  89. .Run(PlaceStep.ChuckIn, () => { return _chuckRoutine.Start(false) == RState.Running; }, NullFun, 100)
  90. .WaitWithStopCondition(PlaceStep.CheckChuckIn, () => CommonFunction.CheckRoutineEndState(_chuckRoutine), () => CommonFunction.CheckRoutineStopState(_chuckRoutine))
  91. .End(PlaceStep.End, NullFun, _delay_1ms);
  92. return Runner.Status;
  93. }
  94. /// <summary>
  95. /// LipSeal Goto Unlock
  96. /// </summary>
  97. /// <returns></returns>
  98. private bool LipSealGotoUnlock()
  99. {
  100. if (ModuleHelper.IsInstalled(ModuleName.Loader1))
  101. {
  102. return _loaderCrsAxis.PositionStation("Unlock");
  103. }
  104. else
  105. {
  106. return true;
  107. }
  108. }
  109. /// <summary>
  110. /// 检验Lip Seal完成状态
  111. /// </summary>
  112. /// <returns></returns>
  113. private bool CheckLipSealEndStatus()
  114. {
  115. if (ModuleHelper.IsInstalled(ModuleName.Loader1))
  116. {
  117. return _loaderCrsAxis.Status == RState.End;
  118. }
  119. else
  120. {
  121. return true;
  122. }
  123. }
  124. /// <summary>
  125. /// 检验Lip Seal完成状态
  126. /// </summary>
  127. /// <returns></returns>
  128. private bool CheckLipSealStopStatus()
  129. {
  130. if (ModuleHelper.IsInstalled(ModuleName.Loader1))
  131. {
  132. return _loaderCrsAxis.Status == RState.Failed;
  133. }
  134. else
  135. {
  136. return true;
  137. }
  138. }
  139. /// <summary>
  140. /// 检验是否存在Wafer
  141. /// </summary>
  142. /// <returns></returns>
  143. private bool CheckWaferPresent()
  144. {
  145. if (_side == SideA)
  146. {
  147. if (!_vacuum.ChuckAWaferPresent)
  148. {
  149. LOG.WriteLog(eEvent.ERR_PUF, Module, $"{_side} has no Wafer");
  150. return false;
  151. }
  152. }
  153. else
  154. {
  155. if (!_vacuum.ChuckBWaferPresent)
  156. {
  157. LOG.WriteLog(eEvent.ERR_PUF, Module, $"{_side} has no Wafer");
  158. return false;
  159. }
  160. }
  161. return true;
  162. }
  163. /// <summary>
  164. /// Side条件获取SubRoutine索引
  165. /// </summary>
  166. /// <returns></returns>
  167. private int SideConditionIndex()
  168. {
  169. if (_flipAxis.CheckPositionIsInStation(_flipAxis.MotionData.MotorPosition, _side))
  170. {
  171. return 1;
  172. }
  173. else
  174. {
  175. return 0;
  176. }
  177. }
  178. /// <summary>
  179. /// 检验Rotation移动状态
  180. /// </summary>
  181. /// <returns></returns>
  182. private bool CheckRotationPositionStatus()
  183. {
  184. return _rotationAxis.Status == RState.End;
  185. }
  186. /// <summary>
  187. /// 检验Rotation是否还在运动
  188. /// </summary>
  189. /// <returns></returns>
  190. private bool CheckRotationPositionRunStop()
  191. {
  192. return _rotationAxis.Status == RState.Failed;
  193. }
  194. /// <summary>
  195. /// 关闭Vacuum
  196. /// </summary>
  197. /// <returns></returns>
  198. private bool VacuumOff()
  199. {
  200. if (_side == "SideA")
  201. {
  202. return _vacuum.VacuumAOff();
  203. }
  204. else if (_side == "SideB")
  205. {
  206. return _vacuum.VacuumBOff();
  207. }
  208. return false;
  209. }
  210. /// <summary>
  211. /// 检验存在Wafer
  212. /// </summary>
  213. /// <returns></returns>
  214. private bool CheckWaferAbsent()
  215. {
  216. if (_side == SideA)
  217. {
  218. return _vacuum.ChuckAVacuumStatus == WAFER_ABSENT;
  219. }
  220. else if (_side == SideB)
  221. {
  222. return _vacuum.ChuckBVacuumStatus == WAFER_ABSENT;
  223. }
  224. else
  225. {
  226. return false;
  227. }
  228. }
  229. /// <summary>
  230. /// 启动
  231. /// </summary>
  232. /// <param name="objs"></param>
  233. /// <returns></returns>
  234. public RState Start(params object[] objs)
  235. {
  236. _side = objs[0].ToString();
  237. _flipAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Flip");
  238. _rotationAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Rotation");
  239. _vacuum = DEVICE.GetDevice<PufVacuum>($"{Module}.Vacuum");
  240. GetCrsAxis();
  241. _isSecondPlaceVacuumCheck = false;
  242. return Runner.Start(Module, "Start Place To Loader");
  243. }
  244. /// <summary>
  245. /// 获取lipseal Axis
  246. /// </summary>
  247. private void GetCrsAxis()
  248. {
  249. if (_side==SideA)
  250. {
  251. _loaderCrsAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.LSA");
  252. }
  253. else
  254. {
  255. _loaderCrsAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.LSB");
  256. }
  257. }
  258. }
  259. }