using System; using System.Collections.Generic; using System.Linq; using System.Text; using System.Threading.Tasks; namespace MECF.Framework.Common.CommonData.SRD { public class SRDLotTrackData { public DateTime TimeStamp { get; set; } /// /// 状态机 /// public string StateMachine { get; set; } /// /// 水压 /// public double WaterPressure { get; set; } /// /// 水流 /// public double WaterFlow { get; set; } /// /// Wafer Presence /// public string WaferPresence { get; set; } /// /// Rotation速度 /// public double RotationSpeed { get; set; } /// /// Arm位置 /// public double ArmPosition { get; set; } /// /// N2 Below On /// public bool N2BelowOn { get; set; } /// /// Water Above /// public bool WaterAbove { get; set; } /// /// Water Below /// public bool WaterBelow { get; set; } /// /// SpinTorque /// public double SpinTorque {get; set; } /// /// ArmTorque /// public double ArmTorque { get; set; } /// /// Loader DI Enable /// public bool LoaderDIEnable { get; set; } /// /// 风扇状态 /// public bool ExhaustOn { get; set; } /// /// 真空状态 /// public bool ChuckVacuumOn { get; set; } /// /// 真空压力 /// public double ChuckVacuumPressure { get; set; } } }