using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading.Tasks;
namespace MECF.Framework.Common.CommonData.SRD
{
public class SRDLotTrackData
{
public DateTime TimeStamp { get; set; }
///
/// 状态机
///
public string StateMachine { get; set; }
///
/// 水压
///
public double WaterPressure { get; set; }
///
/// 水流
///
public double WaterFlow { get; set; }
///
/// Wafer Presence
///
public string WaferPresence { get; set; }
///
/// Rotation速度
///
public double RotationSpeed { get; set; }
///
/// Arm位置
///
public double ArmPosition { get; set; }
///
/// N2 Below On
///
public bool N2BelowOn { get; set; }
///
/// Water Above
///
public bool WaterAbove { get; set; }
///
/// Water Below
///
public bool WaterBelow { get; set; }
///
/// SpinTorque
///
public double SpinTorque {get; set; }
///
/// ArmTorque
///
public double ArmTorque { get; set; }
///
/// Loader DI Enable
///
public bool LoaderDIEnable { get; set; }
///
/// 风扇状态
///
public bool ExhaustOn { get; set; }
///
/// 真空状态
///
public bool ChuckVacuumOn { get; set; }
///
/// 真空压力
///
public double ChuckVacuumPressure { get; set; }
}
}