using System; using System.Collections; using System.Collections.Generic; using System.Linq; using System.Text; using System.Threading.Tasks; using Aitex.Core.RT.Fsm; using Aitex.Core.Common; using Aitex.Core.RT.DataCenter; using Aitex.Core.RT.Event; using Aitex.Core.RT.OperationCenter; using Aitex.Core.RT.SCCore; using Aitex.Core.Util; using MECF.Framework.Common.Jobs; using MECF.Framework.Common.Equipment; using MECF.Framework.Common.SubstrateTrackings; using CyberX8_Core; using Aitex.Core.RT.Log; using SecsGem.Core.Application; using CyberX8_RT.Modules.SRD; using CyberX8_RT.Modules.PUF; using CyberX8_RT.Modules.Dummy; using CyberX8_RT.Modules.Loader; using Aitex.Core.RT.Device; using CyberX8_RT.Modules.Prewet; using CyberX8_RT.Modules.Dryer; using MECF.Framework.Common.ToolLayout; using CyberX8_RT.Modules.Metal; using CyberX8_RT.Modules.Rinse; using MECF.Framework.Common.Routine; using CyberX8_RT.Dispatch; using CyberX8_RT.Modules.Reservoir; using System.IO; using CyberX8_RT.Modules.Buffer; using CyberX8_RT.Modules.Transporter; using CyberX8_RT.Devices.Loader; using CyberX8_RT.Devices.PUF; using CyberX8_RT.Devices.SRD; using MECF.Framework.Common.Alarm; using System.Diagnostics; using MECF.Framework.Common.WaferHolder; namespace CyberX8_RT.Modules { class RouteManager : Entity, IEntity { public enum MSG { MoveWafer, ReturnWafer, HomeUnit, PauseAuto, ResumeAuto, Stop, StartCycle, StopCycle, HOME, RESET, ABORT, ERROR, SetAutoMode, SetManualMode, ResetIdleCleanTime, ResetIdlePurgeTime, CreateJob, PauseJob, PauseAllJobs, ResumeJob, ResumeAllJobs, StartJob, StopJob, AbortJob, JobDone, CassetteLeave, //For unload light control off afer job done Map, ReturnAllWafer, TMCycle, Retry, ConfirmComplete, ResetWafers, FaStartJob, FaStopJob, } #region 属性 public string Name { get; set; } public bool IsAutoMode { get { return fsm.State == (int)RtState.AutoRunning || fsm.State == (int)RtState.AutoIdle||fsm.State==(int)RtState.AutoAborting; } } public bool IsFaAutoMode { get { return fsm.State == (int)RtState.AutoRunning || fsm.State == (int)RtState.AutoIdle; } } public bool IsInit { get { return fsm.State == (int)RtState.Init; } } public bool IsIdle { get { return fsm.State == (int)RtState.Idle || fsm.State == (int)RtState.AutoIdle; } } public bool IsAlarm { get { return fsm.State == (int)RtState.Error; } } public bool IsPaused { get { return _jobCycle.CycleState == RState.Paused; } } public bool IsRunning { get { return !IsInit && !IsAlarm && !IsIdle; } } /// /// 是否AutoRunning /// public bool IsAutoRunning { get { return fsm.State == (int)RtState.AutoRunning||fsm.State==(int)RtState.AutoAborting; } } /// /// 是否 /// public bool IsAutoIdle { get { return fsm.State == (int)RtState.AutoIdle; } } /// /// EFEM实体 /// public EfemEntity EFEM { get; } public WaferSize WaferSize { get; private set; } #endregion #region 内部变量 private string _systemControlIp; private ICycle _jobCycle; private ModuleHomeAllRoutine _homeAllRoutine; private List _reservoirMetalRoutines=new List(); /// /// 模块实体字典 /// private Dictionary _moduleEntitiesDic = new Dictionary(); /// /// 模块类型实体字典 /// private Dictionary> _modultTypeEntitiesDic = new Dictionary>(); /// /// Home stopwatch /// private Stopwatch _homeStopWatch = new Stopwatch(); #endregion /// /// 构造函数 /// public RouteManager() { Name = "System"; WaferSize = (WaferSize)SC.GetValue("System.WaferSize"); if (ModuleHelper.IsInstalled(ModuleName.EFEM)) { EFEM = new EfemEntity(); EFEM.Initialize(); _moduleEntitiesDic[ModuleName.EFEM.ToString()] = EFEM; } InitialModuleList(PufItemManager.Instance.InstalledModules, typeof(PUFEntity),ModuleType.PUF); InitialModuleList(DummyCasseteItemManager.Instance.InstalledModules, typeof(DummyEntity),ModuleType.Dummy); InitialModuleList(LoaderItemManager.Instance.InstalledModules, typeof(LoaderEntity),ModuleType.Loader); InitialModuleList(TransporterItemManager.Instance.InstalledModules, typeof(TransporterEntity),ModuleType.Transporter); InitialModuleList(BufferItemManager.Instance.InstalledModules, typeof(BufferEntity), ModuleType.Buffer); InitialModuleList(PrewetItemManager.Instance.InstalledModules, typeof(PrewetEntity),ModuleType.Prewet); InitialModuleList(DryerItemManager.Instance.InstalledModules, typeof(DryerEntity),ModuleType.Dryer); InitialModuleList(MetalItemManager.Instance.InstalledModules, typeof(MetalEntity),ModuleType.Metal); InitialModuleList(RinseItemManager.Instance.InstalledModules, typeof(RinseEntity),ModuleType.Rinse); InitialModuleList(ReservoirItemManager.Instance.InstalledModules,typeof(ReservoirEntity),ModuleType.Reservoir); InitialModuleList(SrdItemManager.Instance.InstalledModules, typeof(SRDEntity), ModuleType.SRD); fsm = new StateMachine(Name, (int)RtState.Init, 200); SubscribeOperation(); SubscribeDataVariable(); } /// /// 初始化模块集合 /// /// /// private void InitialModuleList(List lst,Type entityType,ModuleType moduleType) { foreach(string item in lst) { InitialModule(item, entityType,moduleType); } } /// /// 初始化模块对象 /// /// /// private void InitialModule(string item,Type entityType,ModuleType moduleType) { ModuleName moduleName = (ModuleName)Enum.Parse(typeof(ModuleName), item); IModuleEntity moduleEntity= (IModuleEntity)System.Activator.CreateInstance(entityType,moduleName); moduleEntity.Initialize(); _moduleEntitiesDic[item] = moduleEntity; List lst = new List(); if(_modultTypeEntitiesDic.ContainsKey(moduleType)) { lst= _modultTypeEntitiesDic[moduleType]; } else { _modultTypeEntitiesDic[moduleType] = lst; } lst.Add(moduleEntity); } public bool Check(int msg, out string reason, params object[] args) { if (!fsm.FindTransition(fsm.State, msg)) { reason = String.Format("{0} is in {1} state,can not do {2}", Name, 0, (MSG)msg); return false; } if (msg == (int)MSG.StartCycle) { if (!IsAutoMode) { reason = String.Format("can not do {0}, isn't auto mode.", msg.ToString()); return false; } } reason = ""; return true; } /// /// 订阅数据 /// void SubscribeDataVariable() { DATA.Subscribe("System.SystemControlIp", ()=>_systemControlIp, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe("Rt.Status", () => ((RtState)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe("System.State", () => ((RtState)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe("System.IsAutoMode", () => IsAutoMode, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe("System.IsAutoRunning", () => IsAutoRunning, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe("System.IsIdle", () => IsIdle || IsInit, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe("System.IsAlarm", () => IsAlarm, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe("System.IsBusy", () => IsRunning, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe("System.IsConnectedWithHost", () => CheckSecsGemOnline(Singleton.Instance.ControlState),SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe("System.IsDisconnectWithHost", () => CheckSecsGemOnline(Singleton.Instance.ControlState),SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe("System.EquipmentMode", () => IsAutoMode ? "Auto":"Manual", SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe("EquipmentStatus", () => { if (IsInit) return 0; if (IsIdle) return 1; if (IsAlarm) return 3; if (IsPaused) return 4; return 2; }, SubscriptionAttribute.FLAG.IgnoreSaveDB); } /// /// 订阅操作 /// void SubscribeOperation() { OP.Subscribe("ApplySystemControl", ApplySystemControl); OP.Subscribe("ReleaseSystemControl", ReleaseSystemControl); OP.Subscribe("CreateWafer", InvokeCreateWafer); OP.Subscribe("DeleteWafer", InvokeDeleteWafer); OP.Subscribe("System.Home", (cmd, args) => CheckToPostMessage((int)MSG.HOME, args)); DATA.Subscribe("SYSTEM.FsmState", () => (((RtState)fsm.State).ToString()), SubscriptionAttribute.FLAG.IgnoreSaveDB); OP.Subscribe("System.ReturnAllWafer", (string cmd, object[] args) => { return CheckToPostMessage((int)MSG.ReturnAllWafer, args[0], args[1], args[2], args[3]); }); OP.Subscribe("System.MoveWafer", (string cmd, object[] args) => { if (!Enum.TryParse((string)args[0], out ModuleName source)) { EV.PostWarningLog(Name, $"Parameter source {(string)args[0]} not valid"); return false; } if (!Enum.TryParse((string)args[2], out ModuleName destination)) { EV.PostWarningLog(Name, $"Parameter destination {(string)args[1]} not valid"); return false; } return CheckToPostMessage((int)MSG.MoveWafer, source, (int)args[1], destination, (int)args[3], args[4], args[5], args[6], args[7], (string)args[8]); }); OP.Subscribe("System.HomeAll", (string cmd, object[] args) => { return CheckToPostMessage((int)MSG.HOME); }); OP.Subscribe("System.Abort", (string cmd, object[] args) => { return CheckToPostMessage((int)MSG.ABORT); }); OP.Subscribe("System.Reset", (string cmd, object[] args) => { return CheckToPostMessage((int)MSG.RESET); }); OP.Subscribe("System.SetAutoMode", (string cmd, object[] args) => { return CheckToPostMessage((int)MSG.SetAutoMode); }); OP.Subscribe("System.SetManualMode", (string cmd, object[] args) => { return CheckToPostMessage((int)MSG.SetManualMode); }); OP.Subscribe("System.CreateJob", (string cmd, object[] args) => { return CheckToPostMessage((int)MSG.CreateJob, args[0]); }); OP.Subscribe("System.StartJob", (string cmd, object[] args) => { return CheckToPostMessage((int)MSG.StartJob, args[0]); }); OP.Subscribe("System.PauseJob", (string cmd, object[] args) => { return CheckToPostMessage((int)MSG.PauseJob, args[0]); }); OP.Subscribe("System.ResumeJob", (string cmd, object[] args) => { return CheckToPostMessage((int)MSG.ResumeJob, args[0]); }); OP.Subscribe("System.PauseAllJob", (cmd, args) => { return CheckToPostMessage((int)MSG.PauseAllJobs); }) ; OP.Subscribe("System.ResumeAllJob", (cmd, args) => { return CheckToPostMessage((int)MSG.ResumeAllJobs); }); OP.Subscribe("System.StopJob", (string cmd, object[] args) => { return CheckToPostMessage((int)MSG.StopJob, args[0]); }); OP.Subscribe("System.AbortJob", (string cmd, object[] args) => { return CheckToPostMessage((int)MSG.AbortJob, args[0]); }); OP.Subscribe(RtOperation.SetConfig.ToString(), (name, args) => { string sc_key = args[0] as string; if (!string.IsNullOrWhiteSpace(sc_key) && args.Length > 1) { SC.SetItemValue(sc_key, args[1]); } return true; }); OP.Subscribe("System.ResetIdleCleanTime", (string cmd, object[] args) => { return CheckToPostMessage((int)MSG.ResetIdleCleanTime, args[0]); }); OP.Subscribe("System.ResetIdlePurgeTime", (string cmd, object[] args) => { return CheckToPostMessage((int)MSG.ResetIdlePurgeTime, args[0]); }); OP.Subscribe("System.SetWaferSize", (string cmd, object[] args) => { string module = (string)args[0]; string size = (string)args[1]; switch (size) { case "3": WaferManager.Instance.UpdateWaferSize(ModuleHelper.Converter(module), 0, WaferSize.WS3); break; case "4": WaferManager.Instance.UpdateWaferSize(ModuleHelper.Converter(module), 0, WaferSize.WS4); break; case "6": WaferManager.Instance.UpdateWaferSize(ModuleHelper.Converter(module), 0, WaferSize.WS6); break; default: EV.PostWarningLog("System", $"wafer size {size} not valid"); break; } return true; }); //OP.Subscribe("System.CassetteLeave", (string cmd, object[] args) => //{ // return CheckToPostMessage((int)MSG.CassetteLeave); //}); OP.Subscribe("System.Retry", (string cmd, object[] args) => { return CheckToPostMessage((int)MSG.Retry, args[0]); }); OP.Subscribe("System.ConfirmComplete", (string cmd, object[] args) => { return CheckToPostMessage((int)MSG.ConfirmComplete, args[0]); }); OP.Subscribe("WaferHolder.ResetLayoutWafers", (string cmd, object[] args) => { return CheckToPostMessage((int)MSG.ResetWafers, args); }); } /// /// 申请系统控制权 /// /// /// /// private bool ApplySystemControl(string cmd, object[] args) { if (args[0].ToString() == "") { LOG.WriteLog(eEvent.WARN_ROUTER, "System", $"Current IP does not allow the application of UI control permissions"); return false; } string applyIp = args[0].ToString(); if (string.IsNullOrEmpty(_systemControlIp)) { _systemControlIp = applyIp; LOG.WriteLog(eEvent.EV_ROUTER, "System", $"{_systemControlIp} apply system control success"); return true; } else if(_systemControlIp!=applyIp) { LOG.WriteLog(eEvent.WARN_ROUTER, "System", $"{_systemControlIp} already has system control permission"); return false; } return false; } /// /// 释放系统控制权 /// /// /// /// private bool ReleaseSystemControl(string cmd, object[] args) { string releaseIp = args[0].ToString(); if (_systemControlIp == releaseIp) { LOG.WriteLog(eEvent.EV_ROUTER, "System", $"{releaseIp} release system control success"); _systemControlIp = ""; } else { LOG.WriteLog(eEvent.ERR_ROUTER, "System", $"{releaseIp} is not SystemControlIp"); } return false; } /// /// 检验Secsgem在线情况 /// /// /// private bool CheckSecsGemOnline(SecsGem.Core.EnumData.ControlState controlState) { if (controlState == SecsGem.Core.EnumData.ControlState.OnlineLocal || controlState == SecsGem.Core.EnumData.ControlState.OnlineRemote) { return true; } return false; } public bool CheckToPostMessage(int msg, params object[] args) { if (!fsm.FindTransition(fsm.State, msg)) { LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"System is in {(RtState)fsm.State} state,can not do {(MSG)msg}"); return false; } Running = true; fsm.PostMsg(msg, args); return true; } private bool InvokeCreateWafer(string arg1, object[] args) { ModuleName chamber = ModuleHelper.Converter(args[0].ToString()); int slot = (int)args[1]; WaferStatus state = WaferStatus.Normal; if (WaferManager.Instance.IsWaferSlotLocationValid(chamber, slot)) { if (WaferManager.Instance.CheckHasWafer(chamber, slot)) { LOG.Write(eEvent.EV_ROUTER, "System", string.Format("{0} slot {1} already has wafer.create wafer is not valid", chamber, slot)); } else if (WaferManager.Instance.CreateWafer(chamber, slot, state) != null) { LOG.Write(eEvent.EV_WAFER_CREATE, ModuleName.System, chamber.ToString(), (slot + 1).ToString(), state.ToString()); } } else { LOG.Write(eEvent.WARN_ROUTER, "System", string.Format("Invalid position,{0},{1}", chamber.ToString(), slot.ToString())); return false; } return true; } private bool InvokeDeleteWafer(string arg1, object[] args) { ModuleName chamber = ModuleHelper.Converter(args[0].ToString()); int slot = (int)args[1]; if (WaferManager.Instance.IsWaferSlotLocationValid(chamber, slot)) { if (WaferManager.Instance.CheckHasWafer(chamber, slot)) { WaferManager.Instance.DeleteWafer(chamber, slot); EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDelete, chamber.ToString(), slot + 1); } else { LOG.Write(eEvent.EV_ROUTER, "System", string.Format("No wafer at {0} {1}, delete not valid", chamber.ToString(), slot + 1)); } } else { LOG.Write(eEvent.WARN_ROUTER, "System", string.Format("Invalid position,{0},{1}", chamber.ToString(), slot.ToString())); return false; } return true; } private bool InvokeReturnWafer(string arg1, object[] args) { ModuleName target = ModuleHelper.Converter(args[0].ToString()); int slot = (int)args[1]; if (ModuleHelper.IsLoadPort(target)) { LOG.Write(eEvent.WARN_ROUTER, "System", string.Format("Wafer already at LoadPort {0} {1}, return operation is not valid", target.ToString(), slot + 1)); return false; } if (!WaferManager.Instance.IsWaferSlotLocationValid(target, slot)) { LOG.Write(eEvent.WARN_ROUTER, "System", string.Format("Invalid position,{0},{1}", target.ToString(), slot.ToString())); return false; } WaferInfo wafer = WaferManager.Instance.GetWafer(target, slot); if (wafer.IsEmpty) { LOG.Write(eEvent.WARN_ROUTER, "System", string.Format("No wafer at {0} {1}, return operation is not valid", target.ToString(), slot + 1)); return false; } return CheckToPostMessage((int)MSG.MoveWafer, target, slot, (ModuleName)wafer.OriginStation, wafer.OriginSlot, false, 0, false, 0, "Blade1"); } protected override bool Init() { _jobCycle = new JobDispatcher(); Singleton.Instance.JobCycle = _jobCycle; _homeAllRoutine = new ModuleHomeAllRoutine("System"); BuildTransitionTable(); return true; } private void BuildTransitionTable() { //Init sequence Transition(RtState.Init, MSG.HOME, FsmStartHome, RtState.Initializing); Transition(RtState.Idle, MSG.HOME, FsmStartHome, RtState.Initializing); Transition(RtState.Error, MSG.HOME, FsmStartHome, RtState.Initializing); EnterExitTransition(RtState.AutoRunning, FsmEnterAutoRunning, FSM_MSG.NONE, FsmExitAutoTransfer); EnterExitTransition(RtState.Transfer, null, FSM_MSG.NONE, FsmExitTransfer); EnterExitTransition(RtState.ReturnWafer, null, FSM_MSG.NONE, FsmExitReturnWafer); AnyStateTransition(MSG.ERROR, FsmError, RtState.Error); Transition(RtState.Idle, FSM_MSG.TIMER, FsmMonitor, RtState.Idle); Transition(RtState.Init, FSM_MSG.TIMER, FsmMonitor, RtState.Init); Transition(RtState.Init, MSG.ABORT, FsmAbort, RtState.Init); Transition(RtState.Error, MSG.ABORT, FsmAbort, RtState.Init); Transition(RtState.Idle, MSG.ABORT, FsmAbort, RtState.Idle); Transition(RtState.Initializing, MSG.ABORT, FsmAbort, RtState.Init); Transition(RtState.Initializing, FSM_MSG.TIMER, FsmMonitorHome, RtState.Idle); Transition(RtState.Initializing, MSG.ERROR, FsmError, RtState.Error); //Auto/manual Transition(RtState.Idle, MSG.SetAutoMode, FsmStartAutoTransfer, RtState.AutoIdle); Transition(RtState.AutoAborting, FSM_MSG.TIMER, FsmAutoTransfer, RtState.AutoIdle); Transition(RtState.AutoRunning, FSM_MSG.TIMER, FsmAutoTransfer, RtState.AutoIdle); Transition(RtState.AutoRunning, MSG.ABORT, FsmAbort, RtState.AutoAborting); Transition(RtState.AutoAborting, MSG.SetManualMode, FsmStartAbortingSetManualMode, RtState.Idle); //Transition(RtState.AutoRunning, MSG.SetManualMode, FsmStartSetManualMode, RtState.Idle); Transition(RtState.AutoRunning, MSG.JobDone, FsmJobDone, RtState.AutoIdle); //Transition(RtState.AutoRunning, MSG.CassetteLeave, fCassetteLeave, RtState.AutoRunning); //For unload light control off afer job done Transition(RtState.AutoRunning, MSG.CreateJob, FsmCreateJob, RtState.AutoRunning); Transition(RtState.AutoRunning, MSG.StartJob, FsmStartJob, RtState.AutoRunning); Transition(RtState.AutoRunning, MSG.PauseJob, FsmPauseJob, RtState.AutoRunning); Transition(RtState.AutoRunning, MSG.PauseAllJobs, FsmPauseAllJobs, RtState.AutoRunning); Transition(RtState.AutoRunning, MSG.ResumeJob, FsmResumeJob, RtState.AutoRunning); Transition(RtState.AutoRunning, MSG.ResumeAllJobs, FsmResumeAllJobs, RtState.AutoRunning); Transition(RtState.AutoRunning, MSG.StopJob, FsmStopJob, RtState.AutoRunning); Transition(RtState.AutoRunning, MSG.Retry, FsmRetry, RtState.AutoRunning); Transition(RtState.AutoRunning, MSG.ConfirmComplete, FsmConfirmComplete, RtState.AutoRunning); Transition(RtState.AutoIdle, FSM_MSG.TIMER, FsmMonitorAutoIdle, RtState.AutoIdle); Transition(RtState.AutoIdle, MSG.SetManualMode, FsmStartSetManualMode, RtState.Idle); Transition(RtState.AutoIdle, MSG.CreateJob, FsmCreateJob, RtState.AutoIdle); Transition(RtState.AutoIdle, MSG.StartJob, FsmStartJob, RtState.AutoRunning); Transition(RtState.AutoIdle, MSG.PauseJob, FsmPauseJob, RtState.AutoIdle); Transition(RtState.AutoIdle, MSG.PauseAllJobs, FsmPauseAllJobs, RtState.AutoIdle); Transition(RtState.AutoIdle, MSG.ResumeJob, FsmResumeJob, RtState.AutoIdle); Transition(RtState.AutoIdle, MSG.ResumeAllJobs, FsmResumeAllJobs, RtState.AutoIdle); Transition(RtState.AutoIdle, MSG.StopJob, FsmStopJob, RtState.AutoIdle); Transition(RtState.AutoIdle, MSG.FaStartJob, FsmEnterAutoRunning, RtState.AutoRunning); Transition(RtState.AutoRunning, MSG.FaStartJob, FsmEnterAutoRunning, RtState.AutoRunning); Transition(RtState.AutoIdle, MSG.ResetWafers, ResetWafers, RtState.AutoIdle); Transition(RtState.Idle, MSG.ResetWafers, ResetWafers, RtState.Idle); Transition(RtState.Init, MSG.ResetWafers, ResetWafers, RtState.Init); } private bool FsmMonitor(object[] objs) { return true; } /// /// 检验前置条件 /// /// private bool CheckPreCondition() { if (ModuleHelper.IsInstalled(ModuleName.PUF1)) { PufVacuum pufVacuum = DEVICE.GetDevice($"{ModuleName.PUF1}.Vacuum"); if (!pufVacuum.IsChuckAReleased || !pufVacuum.ISChuckBReleased) { LOG.WriteLog(eEvent.ERR_AXIS, ModuleName.PUF1.ToString(), "Vacuum is on"); return false; } } if (ModuleHelper.IsInstalled(ModuleName.PUF2)) { PufVacuum pufVacuum = DEVICE.GetDevice($"{ModuleName.PUF2}.Vacuum"); if (!pufVacuum.IsChuckAReleased || !pufVacuum.ISChuckBReleased) { LOG.WriteLog(eEvent.ERR_AXIS, ModuleName.PUF2.ToString(), "Vacuum is on"); return false; } } if (ModuleHelper.IsInstalled(ModuleName.Loader1)) { LoaderSideDevice loaderSideADevice = DEVICE.GetDevice($"{ModuleName.Loader1}.SideA"); LoaderSideDevice loaderSideBDevice = DEVICE.GetDevice($"{ModuleName.Loader1}.SideB"); if (loaderSideADevice.SideData.CRSVacuum || loaderSideBDevice.SideData.CRSVacuum) { LOG.WriteLog(eEvent.ERR_AXIS, ModuleName.Loader1.ToString(), "Vacuum is on"); return false; } } if (ModuleHelper.IsInstalled(ModuleName.SRD1)) { SrdCommonDevice srdCommonDevice = DEVICE.GetDevice($"{ModuleName.SRD1}.Common"); if (!srdCommonDevice.CommonData.ChuckVacuum) { LOG.WriteLog(eEvent.ERR_AXIS, ModuleName.SRD1.ToString(), "Vacuum is on"); return false; } } if (ModuleHelper.IsInstalled(ModuleName.SRD2)) { SrdCommonDevice srdCommonDevice = DEVICE.GetDevice($"{ModuleName.SRD2}.Common"); if (!srdCommonDevice.CommonData.ChuckVacuum) { LOG.WriteLog(eEvent.ERR_AXIS, ModuleName.SRD2.ToString(), "Vacuum is on"); return false; } } return true; } private bool FsmStartHome(object[] objs) { if(!CheckPreCondition()) { return false; } List keys= _moduleEntitiesDic.Keys.ToList(); foreach(string item in keys) { if (!NeedSequenceHome(item)) { IModuleEntity entity = _moduleEntitiesDic[item]; if (!entity.IsDisable) { entity.Invoke("HomeAll"); } } } _homeAllRoutine.Start(); _reservoirMetalRoutines.Clear(); foreach (string item in keys) { if (Enum.TryParse(item, out ModuleName moduleName)) { if (ModuleHelper.IsReservoir(moduleName)) { IModuleEntity moduleEntity = _moduleEntitiesDic[item]; if (!moduleEntity.IsDisable) { ReservoirMetalHomeRoutine reservoirMetalHomeRoutine = new ReservoirMetalHomeRoutine(item); _reservoirMetalRoutines.Add(reservoirMetalHomeRoutine); } } } } foreach (ReservoirMetalHomeRoutine item in _reservoirMetalRoutines) { item.Start(); } _homeStopWatch.Restart(); return true; } /// /// 需要按照顺序Home /// /// private bool NeedSequenceHome(string item) { bool result = item == ModuleName.PUF1.ToString() || item == ModuleName.PUF2.ToString() || item == ModuleName.Loader1.ToString() || item == ModuleName.Transporter2.ToString() || item == ModuleName.Transporter1.ToString(); if (result) { return true; } else { if(Enum.TryParse(item,out ModuleName moduleName)) { if (!ModuleHelper.IsMetal(moduleName)&&!ModuleHelper.IsReservoir(moduleName)) { return false; } } return true; } } private bool FsmMonitorHome(object[] objs) { RState rstate = _homeAllRoutine.Monitor(); if (_homeStopWatch.ElapsedMilliseconds <= 500) { return false; } if(rstate==RState.Failed||rstate==RState.Timeout) { PostMsg(MSG.ERROR); return false; } List keys = LoadInitializeCheckModuleList(); int idleCount = 0; foreach (string item in keys) { IModuleEntity ModuleEntity = _moduleEntitiesDic[item]; if(ModuleEntity.IsError) { LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"{ModuleEntity.Module} home error"); PostMsg(MSG.ERROR); return true; } else if(ModuleEntity.IsIdle) { idleCount++; } } int homeCount = 0; foreach (ReservoirMetalHomeRoutine item in _reservoirMetalRoutines) { RState ret= item.Monitor(); if (ret != RState.Running) { homeCount++; } } if (homeCount != _reservoirMetalRoutines.Count) { return false; } if (idleCount == keys.Count) { return true; } else { return false; } } /// /// 加载初始化检验模块集合 /// /// private List LoadInitializeCheckModuleList() { string checkModuleList = SC.GetStringValue("System.InitializeCheckModuleList"); List moduleList= checkModuleList.Split(',').ToList(); List modules = new List(); foreach (var item in moduleList) { if(Enum.TryParse(item, out ModuleName moduleName)) { if (ModuleHelper.IsInstalled(moduleName)) { modules.Add(item); } } } return modules; } private bool FsmEnterAutoRunning(object[] objs) { return true; } private bool FsmExitAutoTransfer(object[] objs) { _jobCycle.Clear(); return true; } private bool FsmExitTransfer(object[] objs) { return true; } private bool FsmExitReturnWafer(object[] objs) { return true; } private bool FsmError(object[] objs) { return true; } private bool FsmAbort(object[] objs) { //_manualTransfer.Clear(); //_returnWafer.Clear(); //_jobCycle.Clear(); AlarmListManager.Instance.ClearAllAlarm(); return _jobCycle.SystemAbort(); } private bool FsmStartAutoTransfer(object[] objs) { return _jobCycle.Start(objs) == RState.Running; } private bool FsmAutoTransfer(object[] objs) { if (_jobCycle.CheckJobJustDone(out string jobInfo)) { //EV.PostPopDialogMessage(EventLevel.InformationNoDelay, "Job complete", jobInfo); LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"Job complete,{jobInfo}"); } if (_jobCycle.CheckAllJobDone()) { if (!CheckToPostMessage((int)MSG.JobDone)) return false; } RState ret = _jobCycle.Monitor(); if (ret == RState.Failed) { if (!CheckToPostMessage((int)MSG.ERROR)) return false; } return ret == RState.End; } private bool FsmAbortAutoTransfer(object[] objs) { _jobCycle.Clear(); return true; } private bool FsmJobDone(object[] objs) { return true; } private bool FsmCreateJob(object[] objs) { return _jobCycle.CreateJob((Dictionary)objs[0],out string reason); } private bool FsmStartJob(object[] objs) { return _jobCycle.StartJob((string)objs[0],out string reason); } private bool FsmPauseJob(object[] objs) { return _jobCycle.PauseJob((string)objs[0],out string reason); } private bool FsmResumeJob(object[] objs) { return _jobCycle.ResumeJob((string)objs[0],out string reason); } private bool FsmPauseAllJobs(object[] objs) { return _jobCycle.PauseAllJobs(); } private bool FsmResumeAllJobs(object[] objs) { return _jobCycle.ResumeAllJobs(); } private bool FsmStopJob(object[] objs) { return _jobCycle.StopJob((string)objs[0], out string reason); } /// /// 重试 /// /// /// private bool FsmRetry(object[] objs) { string moduleName = objs[0].ToString(); IModuleEntity moduleEntity = GetModule(moduleName); moduleEntity.Invoke("Retry"); return true; } /// /// 重试 /// /// /// private bool FsmConfirmComplete(object[] objs) { string moduleName = objs[0].ToString(); IModuleEntity moduleEntity = GetModule(moduleName); moduleEntity.Invoke("ConfirmComplete"); return true; } private bool FsmMonitorAutoIdle(object[] objs) { RState ret = _jobCycle.Monitor(); return ret == RState.End; } private bool FsmStartAbortingSetManualMode(object[] objs) { return _jobCycle.RemoveAllJob(); } private bool FsmStartSetManualMode(object[] objs) { if (_jobCycle.HasJobRunning) { LOG.Write(eEvent.WARN_ROUTER, "System", "Can not change to manual mode, abort running job first"); return false; } return true; } /// /// 重置Wafers /// /// /// private bool ResetWafers(object[] objs) { return WaferHolderManager.Instance.ResetLayoutWafers(); } /// /// 获取模块对象 /// /// /// /// public T GetModule(string name) where T : class, IModuleEntity { return _moduleEntitiesDic.ContainsKey(name)?_moduleEntitiesDic[name] as T:default(T); } /// /// 根据模块类型获取模块集合 /// /// /// public List GetModulesByModuleType(ModuleType type) { return _modultTypeEntitiesDic.ContainsKey(type) ? _modultTypeEntitiesDic[type] : new List(); } } }