using Aitex.Core.RT.DataCenter; using Aitex.Core.RT.Device; using Aitex.Core.RT.Fsm; using Aitex.Core.RT.Log; using Aitex.Core.RT.OperationCenter; using Aitex.Core.RT.SCCore; using Aitex.Core.Util; using Aitex.Core.Utilities; using MECF.Framework.Common.Device.LinMot; using MECF.Framework.Common.Equipment; using MECF.Framework.Common.ToolLayout; using MECF.Framework.Common.WaferHolder; using CyberX8_Core; using CyberX8_RT.Devices.LinMot; using CyberX8_RT.Devices.Prewet; using System; using System.Collections.Generic; using System.Linq; using System.Text; using System.Threading.Tasks; using System.Xaml.Schema; using MECF.Framework.Common.SubstrateTrackings; using MECF.Framework.Common.Persistent.Prewet; using MECF.Framework.Common.RecipeCenter; using Aitex.Core.RT.RecipeCenter; using System.Timers; using Aitex.Core.RT.Routine; using System.Windows.Markup; using CyberX8_RT.Dispatch; using MECF.Framework.Common.Jobs; namespace CyberX8_RT.Modules.Prewet { public class PrewetEntity : Entity, IEntity, IModuleEntity { #region 常量 private const string AUTO = "Auto"; private const string MANUAL = "Manual"; private const string DISABLED = "Disabled"; private const string ENGINEERING = "Engineering"; private const string PRODUCTION = "Production"; #endregion #region 内部变量 /// /// LintMot Axis /// private LinMotAxis _linmotAxis; /// /// prepare to trans /// private PrepareToTransferRoutine _prepareToTransferRoutine; /// /// Initialize routine /// private PrewetInitializeRoutine _initializeRoutine; /// /// Linmot Wet Scan Routine /// private PrewetLinmotScanWetRoutine _linmotWetScanRoutine; /// /// Manual模式下Cycle run /// private CycleManualProcessRecipeRoutine _cycleManualProcessRoutine; /// /// delay keepwet routine /// private PrewetDelayKeepwetRoutine _delayKeepwetRoutine; /// /// prewet Keepwet routine /// private PrewetKeepWetRoutine _prewetKeepWetRoutine; /// /// 执行前的状态 /// private string _preExecuteState; /// /// Cycle次数 /// private int _cycle = 0; /// /// 已经完成的Cycle次数 /// private int _achievedCycle = 0; /// /// linmot设备数据 /// private LinMotDeviceData _linMotDeviveData = new LinMotDeviceData(); /// /// LinmotName /// private string _linmotName; /// /// PrewetDevice /// private PrewetDevice _prewetDevice; /// /// 工艺当前执行小步骤 /// private string _currentStateMachine = "Init"; /// /// 工艺当前执行大步骤 /// private string _currentStatus = "Init"; /// /// 持久化对象 /// private PrewetPersistentValue _persistentValue; /// /// 当前Recipe /// private PwtRecipe _currentRecipe; /// /// recipe时长 /// private int _recipeTime; /// /// keepwet倒计时 /// private int _keepwetCountDown; /// /// run recipe start time /// private DateTime _runRecipeStartTime; /// /// run recipe complete time /// private DateTime _runRecipeCompleteTime; /// /// 是否Retry /// private bool _isRetry = false; #endregion #region 属性 /// /// 模块名称 /// public ModuleName Module { get; private set; } /// /// 初始化状态 /// public bool IsInit { get { return fsm.State == (int)PrewetState.Init; } } /// /// 空闲状态 /// public bool IsIdle { get { return fsm.State == (int)PrewetState.Idle; } } /// /// 是否发生错误 /// public bool IsError { get { return fsm.State == (int)PrewetState.Error; } } /// /// 是否正在作业 /// public bool IsBusy { get { return fsm.State>(int)PrewetState.Idle; } } /// /// 是否初始化完成 /// public bool IsInitialized { get { return fsm.State >= (int)PrewetState.Initialized; } } /// /// 是否禁用 /// public bool IsDisable { get { return _persistentValue == null || _persistentValue.OperatingMode == DISABLED; } } /// /// 自动模式 /// public bool IsAuto { get { return _persistentValue != null && _persistentValue.OperatingMode == AUTO; } } /// /// 自动模式 /// public bool IsManual { get { return _persistentValue != null && _persistentValue.OperatingMode == MANUAL; } } /// /// 是否为工程模式 /// public bool IsEngineering { get { return _persistentValue != null && _persistentValue.RecipeOperatingMode == ENGINEERING; } } /// /// 是否为产品模式 /// public bool IsProduction { get { return _persistentValue != null && _persistentValue.RecipeOperatingMode == PRODUCTION; } } /// /// WaferHolder信息 /// public WaferHolderInfo WaferHolderInfo { get { return WaferHolderManager.Instance.GetWaferHolder(Module.ToString()); } } /// /// 当前状态机状态 /// public int State { get { return fsm.State; } } /// /// recipe时长 /// public int RecipeTime { get { return _recipeTime; } } #endregion /// /// 构造函数 /// public PrewetEntity(ModuleName moduleName) { this.Module = moduleName; _prewetDevice = DEVICE.GetDevice(Module.ToString()); WaferManager.Instance.SubscribeLocation(Module, 2); InitialFsm(); } /// /// 初始化 /// /// protected override bool Init() { InitializeParameter(); InitialDATA(); InitializeRoutine(); InitialOperation(); //InitialStateMachine(); return true; } /// /// 中止 /// protected override void Term() { } /// 初始化状态机 /// private void InitialFsm() { fsm = new StateMachine(Module.ToString(), (int)PrewetState.Init, 20); fsm.EnableRepeatedMsg(true); AnyStateTransition(PrewetMsg.Error, ErrorSolution, PrewetState.Error); AnyStateTransition(PrewetMsg.ReturnInit, NullFunc, PrewetState.Init); AnyStateTransition(PrewetMsg.ReturnIdle, NullFunc, PrewetState.Idle); Transition(PrewetState.Error, PrewetMsg.ResumeError, (param) => { return true; }, PrewetState.Init); //Initialize AnyStateTransition(PrewetMsg.Initialize, InitializeAll, PrewetState.Initializing); Transition(PrewetState.Initializing, FSM_MSG.TIMER, InitializeAllTimeout, PrewetState.Idle); //LinmotWetScan Transition(PrewetState.Idle, PrewetMsg.LinmotScanWet, LinmotScanWet, PrewetState.Linmot_Scanning); Transition(PrewetState.Linmot_Scanning, FSM_MSG.TIMER, LinmotScanTimeout, PrewetState.Idle); //Kepwet Transition(PrewetState.Idle, PrewetMsg.KeepWet, KeepWet, PrewetState.KeepWeting); Transition(PrewetState.KeepWeting, FSM_MSG.TIMER, KeepWetMonitor, PrewetState.Idle); Transition(PrewetState.Idle, PrewetMsg.DelayKeepwet, DelayKeepwet, PrewetState.DelayKeepweting); Transition(PrewetState.DelayKeepwetComplete, PrewetMsg.DelayKeepwet, DelayKeepwet, PrewetState.DelayKeepweting); Transition(PrewetState.RunRecipeComplete, PrewetMsg.DelayKeepwet, DelayKeepwet, PrewetState.DelayKeepweting); Transition(PrewetState.DelayKeepweting, FSM_MSG.TIMER, DelayKeepwetMonitor, PrewetState.DelayKeepwetComplete); //PrepareToTransfer Transition(PrewetState.Idle, PrewetMsg.PrepareToTransfer, PrepareToTransfer, PrewetState.PrepareToTransfering); Transition(PrewetState.PrepareToTransfering, FSM_MSG.TIMER, PrepareToTransferTimeout, PrewetState.Idle); //PrepareToPlace Transition(PrewetState.Idle, PrewetMsg.PrepareToPlace, PrepareToTransfer, PrewetState.PreparingToPlace); Transition(PrewetState.PreparingToPlace, FSM_MSG.TIMER, PrepareToTransferTimeout, PrewetState.WaitForPlace); //PrepareToPick Transition(PrewetState.DelayKeepweting, PrewetMsg.PrepareToPick, PrepareToTransfer, PrewetState.PreparingToPick); Transition(PrewetState.RunRecipeComplete, PrewetMsg.PrepareToPick, PrepareToTransfer, PrewetState.PreparingToPick); Transition(PrewetState.DelayKeepwetComplete, PrewetMsg.PrepareToPick, PrepareToTransfer, PrewetState.PreparingToPick); Transition(PrewetState.Idle, PrewetMsg.PrepareToPick, PrepareToTransfer, PrewetState.PreparingToPick); Transition(PrewetState.PreparingToPick, FSM_MSG.TIMER, PrepareToTransferTimeout, PrewetState.WaitForPick); Transition(PrewetState.WaitForPick, PrewetMsg.PickComplete, NullFunc, PrewetState.Idle); //RunRecipe Transition(PrewetState.Idle, PrewetMsg.RunRecipe, CycleManualProcess, PrewetState.RunReciping); Transition(PrewetState.WaitForPlace, PrewetMsg.RunRecipe, CycleManualProcess, PrewetState.RunReciping); Transition(PrewetState.RunReciping, FSM_MSG.TIMER, CycleManualMonitor, PrewetState.RunRecipeComplete); //Cycle Manual Process Transition(PrewetState.Idle, PrewetMsg.CycleProcessRecipe, CycleManualProcess, PrewetState.CycleManualProcessing); Transition(PrewetState.CycleManualProcessing, FSM_MSG.TIMER, CycleManualMonitor, PrewetState.Idle); //Abort Transition(PrewetState.CycleManualProcessing, PrewetMsg.Abort, CycleManualAbort, PrewetState.Abort); //Enter Init Transition(PrewetState.Idle, PrewetMsg.Init, NullFunc, PrewetState.Init); EnumLoop.ForEach((item) => { fsm.MapState((int)item, item.ToString()); }); EnumLoop.ForEach((item) => { fsm.MapMessage((int)item, item.ToString()); }); } /// /// 初始化参数 /// private void InitializeParameter() { _persistentValue = PrewetPersistentManager.Instance.GetPrewetPersistentValue(Module.ToString()); if (_persistentValue == null) { LOG.WriteLog(eEvent.ERR_RESERVOIR, Module.ToString(), "Persistent Value Object is not exist"); } _keepwetCountDown = 0; } /// /// 初始化数据 /// private void InitialDATA() { PrewetItem prewetItem = PrewetItemManager.Instance.GetPrewetItem(Module.ToString()); if (prewetItem!=null) { _linmotAxis = DEVICE.GetDevice(prewetItem.LinmotID); string LinmotDeviceName = _linmotName = _linmotAxis.DeviceID; LinMotDevice linMotDevice = LinMotDeviceConfigManager.Instance.GetLinMotDevice(LinmotDeviceName); if (linMotDevice != null) { _linMotDeviveData = linMotDevice.LinMotDeviceData; } } InitializeSvid(); DATA.Subscribe($"{Module}.FsmState", () => ((PrewetState)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.WaferHolder", () => WaferHolderInfo, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.AchievedCycle", () => _achievedCycle, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.GetKeepWetLimit", () => fsm.State==(int)PrewetState.DelayKeepweting?Math.Max(_keepwetCountDown-_delayKeepwetRoutine.ElapsedMilliseconds/1000,0):0 , SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.IsInit", () => IsInit, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.IsIdle", () => IsIdle, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.IsError", () => IsError, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.IsBusy", () => IsBusy, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.IsDisable", () => IsDisable, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.LinmotDeviceData", () => _linMotDeviveData, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.LinmotName", () => _linmotName, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.CurrentStateMachine", () => _currentStateMachine, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.CurrentStatus", () => _currentStatus, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.CurrentRecipe", () => _currentRecipe != null ? _currentRecipe.Ppid : "", SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.Linmot.ID", () => _linmotAxis.Module, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.Linmot.IsMotorOn", () => _linmotAxis.IsMotorOn, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.Linmot.IsError", () => _linmotAxis.IsError, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.Linmot.IsSwitchOn", () => _linmotAxis.IsSwitchOn, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.Linmot.ErrorCode", () => _linmotAxis.ErrorCode, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.Linmot.CurrentPosition", () => _linmotAxis.CurrentPosition, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.Linmot.ScanCount", () => _linmotAxis.ScanCount, SubscriptionAttribute.FLAG.IgnoreSaveDB); } /// /// 初始化SVID /// private void InitializeSvid() { DATA.Subscribe($"{Module}.State", () => ((PrewetState)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.LotID", () => (WaferHolderInfo != null ? WaferHolderInfo.LotId : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.WSID", () => (WaferHolderInfo != null ? WaferHolderInfo.Id : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.LSAID", () => (WaferHolderInfo != null ? WaferHolderInfo.CrsAId : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.LSBID", () => (WaferHolderInfo != null ? WaferHolderInfo.CrsBId : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.ModuleRecipe", () => (_currentRecipe != null ? _currentRecipe.Ppid : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.SequenceRecipe", () => (WaferHolderInfo != null ? WaferHolderInfo.SequenceId : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.WaferAID", () => (WaferHolderInfo != null ? WaferHolderInfo.WaferAId : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.WaferBID", () => (WaferHolderInfo != null ? WaferHolderInfo.WaferBId : ""), SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.TotalTime", () => _recipeTime, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.TimeRemain", () => _recipeTime != 0 ? (_recipeTime - Math.Round((double)_cycleManualProcessRoutine.ElapsedMilliseconds / 1000, 0)) : 0, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.Task", () => WaferHolderInfo != null ? WaferHolderInfo.CurrentControlJobId : "", SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.OperatingMode", () => _persistentValue != null ? _persistentValue.OperatingMode : "None", SubscriptionAttribute.FLAG.IgnoreSaveDB); } /// /// 初始化操作 /// protected void InitialOperation() { OP.Subscribe($"{Module}.InitializeAll", (cmd, args) => { return CheckToPostMessage(eEvent.ERR_PREWET,Module.ToString(),(int)PrewetMsg.Initialize); }); OP.Subscribe($"{Module}.Abort", (cmd, args) => { return CheckToPostMessage(eEvent.ERR_PREWET,Module.ToString(),(int)PrewetMsg.Abort); }); OP.Subscribe($"{Module}.LimotScanWet", (cmd, args) => { return CheckToPostMessage(eEvent.ERR_PREWET, Module.ToString(), (int)PrewetMsg.LinmotScanWet, args); }); OP.Subscribe($"{Module}.KeepWet", (cmd, args) => { return CheckToPostMessage(eEvent.ERR_PREWET, Module.ToString(), (int)PrewetMsg.KeepWet, args); }); OP.Subscribe($"{Module}.PrepareToTransfer", (cmd, args) => { return CheckToPostMessage(eEvent.ERR_PREWET, Module.ToString(), (int)PrewetMsg.PrepareToTransfer); }); OP.Subscribe($"{Module}.ManualProcessRecipe", (cmd, args) => { return CheckToPostMessage(eEvent.ERR_PREWET, Module.ToString(), (int)PrewetMsg.ProcessRecipe,args); }); OP.Subscribe($"{Module}.CycleManualProcessRecipe", (cmd, args) => { PwtRecipe recipe = RecipeFileManager.Instance.LoadGenericityRecipe(args[0].ToString()); if (recipe == null) { LOG.WriteLog(eEvent.ERR_PREWET, Module.ToString(), $"{args[0]} recipe is null"); return false; } object[] objects = new object[args.Length]; objects[0] = recipe; for (int i = 1; i < args.Length; i++) { objects[i] = args[i]; } return CheckToPostMessage(eEvent.ERR_PREWET, Module.ToString(), (int)PrewetMsg.CycleProcessRecipe,objects); }); } /// /// EnterInit /// public void EnterInit() { if ((PrewetState)fsm.State != PrewetState.Idle) return; else { CheckToPostMessage(eEvent.ERR_PREWET, Module.ToString(), (int)PrewetMsg.Init); } } /// /// 初始化Routine /// private void InitializeRoutine() { _prepareToTransferRoutine = new PrepareToTransferRoutine(Module.ToString(), _linmotAxis); _initializeRoutine=new PrewetInitializeRoutine(Module.ToString(), _linmotAxis); _linmotWetScanRoutine=new PrewetLinmotScanWetRoutine(Module.ToString(), _linmotAxis); _cycleManualProcessRoutine = new CycleManualProcessRecipeRoutine(Module.ToString(), _linmotAxis); _delayKeepwetRoutine=new PrewetDelayKeepwetRoutine(Module.ToString(),_linmotAxis); _prewetKeepWetRoutine = new PrewetKeepWetRoutine(Module.ToString(), _linmotAxis); } /// /// 初始化状态机 /// private void InitialStateMachine() { //_keepwetStateMachine = new PrewetKeepWetStateMachine(Module.ToString(),_linmotAxis); //_keepwetStateMachine.Initialize(); } private bool ErrorSolution(object[] param) { bool result = _prewetDevice.PumpValveClose(); if (!result) { LOG.WriteLog(eEvent.ERR_PREWET,Module.ToString(), "Close Pump Valve error"); } return true; } #region Initialize /// /// Initialize /// /// /// private bool InitializeAll(object[] param) { if (fsm.State == (int)PrewetState.Initializing) { LOG.WriteLog(eEvent.WARN_PREWET, Module.ToString(), "state is Initializing,cannot do initialize"); return false; } return _initializeRoutine.Start() == RState.Running; } /// /// Initialize 监控 /// /// /// private bool InitializeAllTimeout(object[] param) { RState ret = _initializeRoutine.Monitor(); _currentStateMachine = _initializeRoutine.CurrentStateMachine; _currentStatus = "initializing"; if (ret == RState.Failed || ret == RState.Timeout) { PostMsg(PrewetMsg.Error); _currentStateMachine = "Error"; _currentStatus = "Error"; return false; } bool result = ret == RState.End; if (result) { _currentStateMachine = "Idle"; _currentStatus = "Idle"; } return result; } #endregion #region Linmot scan wet /// /// Initialize /// /// /// private bool LinmotScanWet(object[] param) { _preExecuteState = ((PrewetState)fsm.State).ToString(); return _linmotWetScanRoutine.Start(param) == RState.Running; } /// /// LinmotScan 监控 /// /// /// private bool LinmotScanTimeout(object[] param) { RState ret = _linmotWetScanRoutine.Monitor(); if (ret == RState.Failed || ret == RState.Timeout) { PostReturnPreState(); _currentStateMachine = "Error"; _currentStatus = "Error"; return false; } return ret == RState.End; } #endregion #region Keep wet /// /// Keep Wet /// /// /// private bool KeepWet(object[] param) { _preExecuteState = ((PrewetState)fsm.State).ToString(); return _prewetKeepWetRoutine.Start() == RState.Running; } /// /// Keep Wet Monitor /// /// /// private bool KeepWetMonitor(object[] param) { RState ret = _prewetKeepWetRoutine.Monitor(); if(ret==RState.End) { return true; } else if(ret==RState.Failed||ret==RState.Timeout) { PostReturnPreState(); return false; } return false; } /// /// Delay Keepwet /// /// /// private bool DelayKeepwet(object[] param) { _preExecuteState = ((PrewetState)fsm.State).ToString(); _keepwetCountDown = SC.GetValue("Prewet.IdleKeepwetPauseBetweenScanSeconds"); return _delayKeepwetRoutine.Start() == RState.Running; } /// /// Delay Keepwet 监控 /// /// /// private bool DelayKeepwetMonitor(object[] param) { RState ret = _delayKeepwetRoutine.Monitor(); if(ret==RState.End) { return true; } else if(ret==RState.Failed||ret==RState.Timeout) { PostMsg(PrewetMsg.Error); return false; } return false; } #endregion #region PrepareToTransfer /// /// PrepareToTransfer /// /// /// private bool PrepareToTransfer(object[] param) { bool isNeedStopLinmot = true; if (fsm.State == (int)PrewetState.DelayKeepweting) { _delayKeepwetRoutine.Abort(); isNeedStopLinmot = false; } _preExecuteState = ((PrewetState)fsm.State).ToString(); return _prepareToTransferRoutine.Start(isNeedStopLinmot) == RState.Running; } /// /// PrepareToTransfer 监控 /// /// /// private bool PrepareToTransferTimeout(object[] param) { RState ret = _prepareToTransferRoutine.Monitor(); if (ret == RState.Failed || ret == RState.Timeout) { PostReturnPreState(); _currentStateMachine = "Error"; _currentStatus = "Error"; return false; } return ret == RState.End; } #endregion #region Manual Process private bool CycleManualProcess(object[] param) { PwtRecipe recipe = param[0] as PwtRecipe; _cycle = (int)param[1]; bool result = _cycleManualProcessRoutine.Start(param) == RState.Running; if(result) { _isRetry = false; if (CellItemRecipeTimeManager.Instance.ContainRecipe(recipe.Ppid)) { _recipeTime = _cycle * CellItemRecipeTimeManager.Instance.GetRecipeTotalTime(recipe.Ppid); } else { _recipeTime = 0; } _currentRecipe = recipe; _runRecipeStartTime = DateTime.Now; if (WaferHolderInfo != null && _currentRecipe != null) { FaModuleNotifier.Instance.NotifyWaferShuttleRecipeStart(WaferHolderInfo, _currentRecipe.Ppid); } } return result; } private bool CycleManualMonitor(object[] param) { RState state = _cycleManualProcessRoutine.Monitor(); _currentStatus = _cycleManualProcessRoutine.CurrentStatus; _currentStateMachine = _cycleManualProcessRoutine.CurrentStateMachine; if (state == RState.Failed || state == RState.Timeout) { PostMsg(PrewetMsg.Error); _currentStateMachine = "Error"; _currentStatus = "Error"; _runRecipeCompleteTime = DateTime.Now; _cycleManualProcessRoutine.PrewetLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2"); //导出lotTrack数据 PrewetLotTrackUtil.ExportPrewetLotTrack(Module.ToString(), _cycleManualProcessRoutine.PrewetLotTrackDatas, _cycleManualProcessRoutine.PrewetLotTrackHeaderDatas, IsAuto, _isRetry); if (WaferHolderInfo != null && _currentRecipe != null) { FaModuleNotifier.Instance.NotifyWaferShuttleRecipeFailed(WaferHolderInfo, _currentRecipe.Ppid); } return false; } _achievedCycle = _cycleManualProcessRoutine.GetAchievedCycle(); bool result = state == RState.End; if (result) { double elapsedMilliseconds = _cycleManualProcessRoutine.ElapsedMilliseconds; int recipeTime = (int)Math.Floor(elapsedMilliseconds / _cycle/ 1000); CellItemRecipeTimeManager.Instance.UpdateRecipeTime(_currentRecipe.Ppid, recipeTime); _runRecipeCompleteTime = DateTime.Now; _cycleManualProcessRoutine.PrewetLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2"); //导出lotTrack数据 PrewetLotTrackUtil.ExportPrewetLotTrack(Module.ToString(), _cycleManualProcessRoutine.PrewetLotTrackDatas, _cycleManualProcessRoutine.PrewetLotTrackHeaderDatas, IsAuto, _isRetry); if (WaferHolderInfo != null && _currentRecipe != null) { FaModuleNotifier.Instance.NotifyWaferShuttleRecipeEnd(WaferHolderInfo, _currentRecipe.Ppid, recipeTime); } } return result; } private bool CycleManualAbort(object[] param) { _cycleManualProcessRoutine.Abort(); _currentStateMachine = "Abort"; _currentStatus = "Abort"; _runRecipeCompleteTime = DateTime.Now; _cycleManualProcessRoutine.PrewetLotTrackHeaderDatas.ProcessTime = (_runRecipeCompleteTime - _runRecipeStartTime).TotalSeconds.ToString("F2"); //导出lotTrack数据 PrewetLotTrackUtil.ExportPrewetLotTrack(Module.ToString(), _cycleManualProcessRoutine.PrewetLotTrackDatas, _cycleManualProcessRoutine.PrewetLotTrackHeaderDatas, IsAuto, _isRetry); return true; } #endregion /// /// 返回上一状态 /// private void PostReturnPreState() { if (_preExecuteState == PrewetState.Init.ToString()) { PostMsg(PrewetMsg.ReturnInit); } else if (_preExecuteState != PrewetState.Init.ToString()) { PostMsg(PrewetMsg.ReturnIdle); } } #region IEntity接口模块(unused) public bool Check(int msg, out string reason, params object[] args) { throw new NotImplementedException(); } public bool CheckAcked(int msg) { throw new NotImplementedException(); } public int Invoke(string function, params object[] args) { switch (function) { case "HomeAll": if (IsIdle) { return (int)FSM_MSG.NONE; } if (CheckToPostMessage(eEvent.ERR_PREWET, Module.ToString(), (int)PrewetMsg.Initialize)) { return (int)PrewetMsg.Initialize; } else { return (int)FSM_MSG.NONE; } } return (int)FSM_MSG.NONE; } #endregion } public enum PrewetMsg { Error, Abort, ResumeError, Initialize, LinmotScanWet, KeepWet, DelayKeepwet, PrepareToPlace, PrepareToPick, PrepareToTransfer, ReturnInit, ReturnIdle, ProcessRecipe, CycleProcessRecipe, RunRecipe, PickComplete, Init } }