using Aitex.Core.RT.Device;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.Routine;
using Aitex.Core.Util;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.Routine;
using MECF.Framework.Common.Utilities;
using CyberX8_Core;
using CyberX8_RT.Devices.AXIS;
using CyberX8_RT.Devices.AXIS.CANOpen;
using CyberX8_RT.Modules.PUF;
using CyberX8_RT.Modules;
using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading.Tasks;
using MECF.Framework.Common.CommonData.Loader;
using CyberX8_RT.Modules.Transporter;
using Aitex.Core.RT.SCCore;
namespace CyberX8_RT.Devices.Loader
{
public class LoaderUnloadRoutine : RoutineBase, IRoutine
{
private enum UnloadStep
{
CheckPreCondition,
WSClampOn,
LSGotoLock,
LSGotoLockWait,
ShuttleGotoIN,
ShuttleGotoINWait,
BernoulliBladderOn,
BernoulliBladderOnCheck,
BernoulliN2On,
WSBladderOn,
WSBladderOnCheck,
LSVacuumOn,
LSVacuumOnCheck,
LSVacuumLevelCheck,
LSVacuumLevelCheckWait,
ShuttleGotoLS,
ShuttleGotoLSWait,
LSGotoSetup,
LSGotoSetupWait,
LSGotoUnlock,
LSGotoUnlockWait,
ReLSVacuumLevelCheck,
ReLSVacuumLevelCheckWait,
ShuttleGotoOUT,
ShuttleGotoOUTWait,
TiltGotoHori,
TiltGotoHoriCheck,
BernoulliN2Off,
WSBladderOff,
WSBladderOffCheck,
End
}
#region 内部变量
private string _side = "";
private JetAxisBase _lsAxis;
private LoaderSideBernoulliBladderRoutine _bernoulliBladderRoutine;
private LoaderSideVacuumRoutine _vacuumRoutine;
private LoaderSideVacuumLevelCheckRoutine _vacuumLevelCheckRoutine;
private LoaderSideWhBladderRoutine _whBladderRoutine;
private JetAxisBase _shuttleAxis;
private JetAxisBase _tiltAxis;
private JetAxisBase _rotationAxis;
private LoaderSideDevice _sideDevice;
private LoaderCommonDevice _loaderCommonDevice;
///
/// WaferSize
///
private int _waferSize;
#endregion
///
/// 构造函数
///
///
public LoaderUnloadRoutine(string module, string side) : base(module)
{
_side = side;
}
///
/// 中止
///
public void Abort()
{
Runner.Stop("Manual Abort");
}
///
/// 监控
///
///
public RState Monitor()
{
Runner.Run(UnloadStep.CheckPreCondition,CheckPreCondition,_delay_1ms)
//1. WS Clamp on
.Run(UnloadStep.WSClampOn, WSClampOnAction, () => { return _loaderCommonDevice.CommonData.WaferHolderClamp; }, _delay_5s)
//2. LS Goto Lock位
.Run(UnloadStep.LSGotoLock, () => { return AxisPosition(_lsAxis,$"Lock{_waferSize}"); }, NullFun, _delay_1ms)
.WaitWithStopCondition(UnloadStep.LSGotoLockWait, () => { return _lsAxis.Status == RState.End; },
()=>CheckAxisMotionStopStatus(_lsAxis))
//3. Shuttle Goto OPEN
.Run(UnloadStep.ShuttleGotoIN, () => { return AxisPosition(_shuttleAxis, "IN"); }, NullFun, _delay_1ms)
.WaitWithStopCondition(UnloadStep.ShuttleGotoINWait, () => { return _shuttleAxis.Status == RState.End; },
() => CheckAxisMotionStopStatus(_shuttleAxis))
//4. BernoulliBladderOn
.Run(UnloadStep.BernoulliBladderOn, () => { return _bernoulliBladderRoutine.Start(true) == RState.Running; }, _delay_1ms)
.WaitWithStopCondition(UnloadStep.BernoulliBladderOnCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliBladderRoutine); },
() => CheckRoutineStopStatus(_bernoulliBladderRoutine, "BernoulliBladder On failed"))
//5. BernoulliN2 On
.Run(UnloadStep.BernoulliN2On, BernoulliN2On, () => { return _sideDevice.SideData.BernoulliN2; }, _delay_5s)
//6. WS Bladder On
.Run(UnloadStep.WSBladderOn, () => { return _whBladderRoutine.Start(true) == RState.Running; }, _delay_1ms)
.WaitWithStopCondition(UnloadStep.WSBladderOnCheck, () => { return CommonFunction.CheckRoutineEndState(_whBladderRoutine); },
() => CheckRoutineStopStatus(_whBladderRoutine, "WSBladder On failed"))
//7. LS Vacuum On
.Run(UnloadStep.LSVacuumOn, () => { return _vacuumRoutine.Start(true) == RState.Running; }, _delay_1ms)
.WaitWithStopCondition(UnloadStep.LSVacuumOnCheck, () => { return CommonFunction.CheckRoutineEndState(_vacuumRoutine); },
() => CheckRoutineStopStatus(_vacuumRoutine, "LS Vaccum On failed"))
//8. LS vacuum level check
.Run(UnloadStep.LSVacuumLevelCheck, () => { return _vacuumLevelCheckRoutine.Start(true) == RState.Running; }, _delay_1ms)
.WaitWithStopCondition(UnloadStep.LSVacuumLevelCheckWait, () => { return CommonFunction.CheckRoutineEndState(_vacuumLevelCheckRoutine); },
() => CheckRoutineStopStatus(_vacuumLevelCheckRoutine, "LS Vacuum Level Check failed"))
//9. Shuttle Goto LS
.Run(UnloadStep.ShuttleGotoLS, () => { return AxisPosition(_shuttleAxis, "LS"); }, NullFun, _delay_1ms)
.WaitWithStopCondition(UnloadStep.ShuttleGotoLSWait, () => { return _shuttleAxis.Status == RState.End; },
() => CheckAxisMotionStopStatus(_shuttleAxis))
//10. LS Goto Setup
.Run(UnloadStep.LSGotoSetup, () => { return AxisPosition(_lsAxis, $"Setup{_waferSize}"); }, NullFun, _delay_1ms)
.WaitWithStopCondition(UnloadStep.LSGotoSetupWait, () => { return _lsAxis.Status == RState.End; },
() => CheckAxisMotionStopStatus(_lsAxis))
//11. LS Goto Unlock
.Run(UnloadStep.LSGotoUnlock, () => { return AxisPosition(_lsAxis, $"Unlock{_waferSize}"); }, NullFun, _delay_1ms)
.WaitWithStopCondition(UnloadStep.LSGotoUnlockWait, () => { return _lsAxis.Status == RState.End; },
() => CheckAxisMotionStopStatus(_lsAxis))
//12. Re LS Vacuum level Check
.Run(UnloadStep.ReLSVacuumLevelCheck, () => { return _vacuumLevelCheckRoutine.Start(true) == RState.Running; }, _delay_1ms)
.WaitWithStopCondition(UnloadStep.ReLSVacuumLevelCheckWait, () => { return CommonFunction.CheckRoutineEndState(_vacuumLevelCheckRoutine); },
() => CheckRoutineStopStatus(_vacuumLevelCheckRoutine,"LS Vacuum Level check failed"))
//13. Shuttle Goto OUT
.Run(UnloadStep.ShuttleGotoOUT, () => { return AxisPosition(_shuttleAxis, $"OUT{_waferSize}"); }, NullFun, _delay_1ms)
.WaitWithStopCondition(UnloadStep.ShuttleGotoOUTWait, () => { return _shuttleAxis.Status == RState.End; },
() => CheckAxisMotionStopStatus(_shuttleAxis))
//14. Tilt Goto HORI
.Run(UnloadStep.TiltGotoHori, () => { return AxisPosition(_tiltAxis,"HORI"); }, NullFun, _delay_1ms)
.WaitWithStopCondition(UnloadStep.TiltGotoHoriCheck, () => { return _tiltAxis.Status == RState.End; },
() => CheckAxisMotionStopStatus(_tiltAxis))
//15. Bernoulli N2 Off
.Run(UnloadStep.BernoulliN2Off, BernoulliN2Off, () => { return !_sideDevice.SideData.BernoulliN2; }, _delay_5s)
//16. WS Bladder Off
.Run(UnloadStep.WSBladderOff, () => { return _whBladderRoutine.Start(false) == RState.Running; }, _delay_1ms)
.WaitWithStopCondition(UnloadStep.WSBladderOffCheck, () => { return CommonFunction.CheckRoutineEndState(_whBladderRoutine); },
() => CheckRoutineStopStatus(_whBladderRoutine, "WSBladder Off failed"))
.End(UnloadStep.End, NullFun, 10);
return Runner.Status;
}
///
/// 检验Routine异常状态
///
///
private bool CheckRoutineStopStatus(IRoutine routine,string error)
{
bool result = CommonFunction.CheckRoutineStopState(routine);
if (result)
{
NotifyError(eEvent.ERR_LOADER, $"{error}", 0);
}
return result;
}
///
/// Axis goto position
///
///
///
///
private bool AxisPosition(JetAxisBase axis,string station)
{
bool result = axis.PositionStation(station);
if (!result)
{
NotifyError(eEvent.ERR_LOADER, $"{axis.Module} goto {station} failed", 0);
}
return result;
}
///
/// 检验电机运动异常状态
///
///
///
private bool CheckAxisMotionStopStatus(JetAxisBase axis)
{
bool result = axis.Status == RState.Failed || axis.Status == RState.Timeout;
if (result)
{
NotifyError(eEvent.ERR_LOADER, $"{axis.Module} motion failed", 0);
}
return result;
}
///
/// BerolliN2 On
///
///
private bool BernoulliN2On()
{
bool result= _sideDevice.BernoulliN2OnAction("", null);
if (!result)
{
NotifyError(eEvent.ERR_LOADER, $"BernoulliN2 On failed", 0);
}
return result;
}
///
/// BernoulliN2Off
///
///
private bool BernoulliN2Off()
{
bool result = _sideDevice.BernoulliN2OffAction("", null);
if (!result)
{
NotifyError(eEvent.ERR_LOADER, "BernoulliN2 Off failed", 0);
}
return result;
}
///
/// Wafer Holder Clamp Off
///
///
public bool WSClampOffAction()
{
bool result = _loaderCommonDevice.WaferHolderClampOffAction();
if (!result)
{
NotifyError(eEvent.ERR_LOADER, "Wafer Shuttle Clamp Off failed", 2);
}
return result;
}
///
/// Wafer Holder Clamp On
///
///
public bool WSClampOnAction()
{
bool result = _loaderCommonDevice.WaferHolderClampOnAction();
if (!result)
{
NotifyError(eEvent.ERR_LOADER, "Wafer Shuttle Clamp On failed", 2);
}
return result;
}
///
/// 启动
///
///
///
///
public RState Start(params object[] objs)
{
if (SC.ContainsItem($"Loader1.{_side}WaferSize"))
{
_waferSize = SC.GetValue($"Loader1.{_side}WaferSize");
}
_shuttleAxis = GetShuttleAxis();
_lsAxis = GetCrsAxis();
_tiltAxis = GetTiltAxis();
_loaderCommonDevice = DEVICE.GetDevice($"Loader1.Common");
_rotationAxis = DEVICE.GetDevice($"{ModuleName.Loader1}.Rotation");
_sideDevice = DEVICE.GetDevice($"{Module}.{_side}");
_vacuumRoutine = new LoaderSideVacuumRoutine($"{Module}.{_side}");
_vacuumLevelCheckRoutine = new LoaderSideVacuumLevelCheckRoutine($"{Module}.{_side}");
//_unloadVacuumLevelCheckRoutine = new LoaderSideUnloadVacuumLevelCheckRoutine($"{Module}.{_side}");
_whBladderRoutine = new LoaderSideWhBladderRoutine($"{Module}.{_side}");
_bernoulliBladderRoutine = new LoaderSideBernoulliBladderRoutine($"{Module}.{_side}");
Runner.Start(Module, $"Unload {_side}");
return RState.Running;
}
///
/// 获取Shuttle轴对象
///
///
private JetAxisBase GetShuttleAxis()
{
switch (_side)
{
case "SideA":
return DEVICE.GetDevice($"{Module}.ShuttleA");
default:
return DEVICE.GetDevice($"{Module}.ShuttleB");
}
}
///
/// 获取CRS轴对象
///
///
private JetAxisBase GetCrsAxis()
{
switch (_side)
{
case "SideA":
return DEVICE.GetDevice($"{Module}.LSA");
default:
return DEVICE.GetDevice($"{Module}.LSB");
}
}
///
/// 获取Tilt轴对象
///
///
private JetAxisBase GetTiltAxis()
{
switch (_side)
{
case "SideA":
return DEVICE.GetDevice($"{Module}.TiltA");
default:
return DEVICE.GetDevice($"{Module}.TiltB");
}
}
///
/// 检验前置条件
///
///
private bool CheckPreCondition()
{
if (!CheckHomeCondition())
{
return false;
}
if (!CheckUnloadAxisCondition())
{
return false;
}
if (!UnloadStatusCheck())
{
return false;
}
return true;
}
///
/// 检验Home条件
///
///
private bool CheckHomeCondition()
{
//检验PUF、Loader Transporter,Robot均Homed
//Efem Home
if (ModuleHelper.IsInstalled(ModuleName.EFEM))
{
EfemEntity efemEntity = Singleton.Instance.GetModule(ModuleName.EFEM.ToString());
if (!efemEntity.IsHomed)
{
LOG.WriteLog(eEvent.ERR_EFEM_ROBOT, Module, $"{ModuleName.EFEM.ToString()} is not home, Cannot execute GotoSavedPosition");
return false;
}
}
if (ModuleHelper.IsInstalled(ModuleName.PUF1))
{
PUFEntity puf1Entity = Singleton.Instance.GetModule(ModuleName.PUF1.ToString());
if (!puf1Entity.IsHomed)
{
NotifyError(eEvent.ERR_LOADER, "PUF1 is not homed",-1);
return false;
}
}
if (ModuleHelper.IsInstalled(ModuleName.Transporter2))
{
TransporterEntity loaderTransportEntity = Singleton.Instance.GetModule(ModuleName.Transporter2.ToString());
if (!loaderTransportEntity.IsHomed)
{
NotifyError(eEvent.ERR_LOADER, "Loader Transporter is not homed",-1);
return false;
}
}
return true;
}
///
/// 检验Axis条件
///
///
///
private bool CheckUnloadAxisCondition()
{
if (!_rotationAxis.IsHomed)
{
NotifyError(eEvent.ERR_LOADER, $"Rotation is not homed",-1);
return false;
}
if (!_shuttleAxis.IsHomed)
{
NotifyError(eEvent.ERR_LOADER, $"{_shuttleAxis.Name} is not homed", -1);
return false;
}
if (!_tiltAxis.IsHomed)
{
NotifyError(eEvent.ERR_LOADER, $"{_tiltAxis.Name} is not homed",-1);
return false;
}
if (!_lsAxis.IsHomed)
{
NotifyError(eEvent.ERR_LOADER, $"{_lsAxis.Name} is not homed", -1);
return false;
}
//LS已经运动到 Setup 位
double crsPosition = _lsAxis.MotionData.MotorPosition;
if (!_lsAxis.CheckPositionIsInStation(crsPosition, $"Setup{_waferSize}"))
{
NotifyError(eEvent.ERR_LOADER, $"LS {crsPosition} not in Setup{_waferSize}", -1);
return false;
}
//Rotation已经运动到 loaderA 位(sideA 下片时)或 loaderB 位(sideB 下片时)
double rotationPosition = _rotationAxis.MotionData.MotorPosition;
if(_side == "SideA")
{
if (!_rotationAxis.CheckPositionIsInStation(rotationPosition, $"LOADA{_waferSize}"))
{
NotifyError(eEvent.ERR_LOADER, $"Rotation {rotationPosition} not in LOADA{_waferSize}", -1);
return false;
}
}
else
{
if (!_rotationAxis.CheckPositionIsInStation(rotationPosition, $"LOADB{_waferSize}"))
{
NotifyError(eEvent.ERR_LOADER, $"Rotation {rotationPosition} not in LOADB{_waferSize}", -1);
return false;
}
}
//Shuttle已经运动到 MID 位
double shuttlePosition =_shuttleAxis.MotionData.MotorPosition;
if (!_shuttleAxis.CheckPositionIsInStation(shuttlePosition, "MID"))
{
NotifyError(eEvent.ERR_LOADER, $"Shuttle {shuttlePosition} not in MID", -1);
return false;
}
//Tilt已经运动到 VERT 位
double tiltPosition = _tiltAxis.MotionData.MotorPosition;
if (!_tiltAxis.CheckPositionIsInStation(tiltPosition, "VERT"))
{
NotifyError(eEvent.ERR_LOADER, $"Tilt {tiltPosition} not in VERT", -1);
return false;
}
return true;
}
///
/// 检验状态条件
///
///
///
private bool UnloadStatusCheck()
{
LoaderSideData sideData = _sideDevice.SideData;
LoaderCommonData commonData = _loaderCommonDevice.CommonData;
//Bernoulli Bladder(WS Bladder on)
if (!sideData.BernoulliBladder)
{
NotifyError(eEvent.ERR_LOADER, "Bernoulli Bladder is off", -1);
return false;
}
//Bernoulli N2(BernoulliN2 off)
if (sideData.BernoulliN2)
{
NotifyError(eEvent.ERR_LOADER, "Bernoulli N2 is on",-1);
return false;
}
//LS Vacuum检验(LS Vaccum off)
if (sideData.CRSVacuum)
{
NotifyError(eEvent.ERR_LOADER, "LS Vacuum is on", -1);
return false;
}
//Wafer Shuttle Present(WS present)
if (!commonData.WaferHolderPresent)
{
NotifyError(eEvent.ERR_LOADER, "Wafer Shuttle is absent", -1);
return false;
}
//Wafer Shuttle Clamp(Clamp on/off均可)
//Wafer Shuttle Bladder(Bladder off)
if (sideData.WHBladder)
{
NotifyError(eEvent.ERR_LOADER, "Wafer Shuttle Bladder is on", -1);
return false;
}
//Drip Tray Fluid(Drip Tray Fluid正常)
if (commonData.DripTrayFluid)
{
NotifyError(eEvent.ERR_LOADER, "Drip Tray Fluid is on", -1);
return false;
}
return true;
}
}
}